Robert Matthews

Person

Plano, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Glass heating and sealing system
- Patent number 5,653,838
- Issue date Aug 5, 1997
- Texas Instruments Incorporated
- Ming-Jang Hwang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Structure and method for incorporating an inductively coupled plasm...
- Patent number 5,591,493
- Issue date Jan 7, 1997
- Texas Instruments Incorporated
- Ajit P. Paranjpe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for incorporating an inductively coupled plasm...
- Patent number 5,580,385
- Issue date Dec 3, 1996
- Texas Instruments, Incorporated
- Ajit P. Paranjpe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode plasma processing apparatus
- Patent number 5,464,499
- Issue date Nov 7, 1995
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Programmable multizone gas injector for single-wafer semiconductor...
- Patent number 5,453,124
- Issue date Sep 26, 1995
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High performance multi-zone illuminator module for semiconductor wa...
- Patent number 5,446,825
- Issue date Aug 29, 1995
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone illuminator with embedded process control sensors
- Patent number 5,367,606
- Issue date Nov 22, 1994
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer heater with infrared lamp module with light blo...
- Patent number 5,345,534
- Issue date Sep 6, 1994
- Texas Instruments Incorporated
- Habib N. Najm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode plasma processing apparatus
- Patent number 5,286,297
- Issue date Feb 15, 1994
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone illuminator with embeded process control sensors and lig...
- Patent number 5,268,989
- Issue date Dec 7, 1993
- Texas Instruments Incorporated
- Mehrdad M. Moslehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method using both a remotely generated plasma and an in-...
- Patent number 5,248,636
- Issue date Sep 28, 1993
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus having independently controllable energy...
- Patent number 5,138,973
- Issue date Aug 18, 1992
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated circuit processing system
- Patent number 5,044,871
- Issue date Sep 3, 1991
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit processing system
- Patent number 4,966,519
- Issue date Oct 30, 1990
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method
- Patent number 4,949,671
- Issue date Aug 21, 1990
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum slice carrier
- Patent number 4,943,457
- Issue date Jul 24, 1990
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method
- Patent number 4,911,103
- Issue date Mar 27, 1990
- Texas Instruments Incorporated
- Cecil J. Davis
- C30 - CRYSTAL GROWTH
Information Patent Grant
Processing apparatus and method
- Patent number 4,886,570
- Issue date Dec 12, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus
- Patent number 4,875,989
- Issue date Oct 24, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus
- Patent number 4,872,938
- Issue date Oct 10, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and method
- Patent number 4,842,686
- Issue date Jun 27, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 4,836,905
- Issue date Jun 6, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 4,832,779
- Issue date May 23, 1989
- Texas Instruments Incorporated
- Wayne G. Fisher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method
- Patent number 4,832,777
- Issue date May 23, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for wafers
- Patent number 4,832,778
- Issue date May 23, 1989
- Texas Instruments Inc.
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method
- Patent number 4,830,700
- Issue date May 16, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method
- Patent number 4,822,450
- Issue date Apr 18, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleanup processing chamber and vacuum process module
- Patent number 4,820,377
- Issue date Apr 11, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus
- Patent number 4,818,327
- Issue date Apr 4, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer transfer method and arm mechanism
- Patent number 4,816,116
- Issue date Mar 28, 1989
- Texas Instruments Incorporated
- Cecil J. Davis
- H01 - BASIC ELECTRIC ELEMENTS

Robert Matthews

Person

Patents Grantslast 30 patents

Glass heating and sealing system

Structure and method for incorporating an inductively coupled plasm...

Structure and method for incorporating an inductively coupled plasm...

Multi-electrode plasma processing apparatus

Programmable multizone gas injector for single-wafer semiconductor...

High performance multi-zone illuminator module for semiconductor wa...

Multi-zone illuminator with embedded process control sensors

Semiconductor wafer heater with infrared lamp module with light blo...

Multi-electrode plasma processing apparatus

Multi zone illuminator with embeded process control sensors and lig...

Processing method using both a remotely generated plasma and an in-...

Wafer processing apparatus having independently controllable energy...

Integrated circuit processing system

Integrated circuit processing system

Processing apparatus and method

Vacuum slice carrier

Processing apparatus and method

Processing apparatus and method

Wafer processing apparatus

Processing apparatus

Wafer processing apparatus and method

Processing apparatus

Processing apparatus

Processing apparatus and method

Processing apparatus for wafers

Processing apparatus and method

Processing apparatus and method

Method for cleanup processing chamber and vacuum process module

Wafer processing apparatus

Semiconductor wafer transfer method and arm mechanism