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Vacuum processing apparatus
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Patent number 6,662,465
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Issue date Dec 16, 2003
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,634,116
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Issue date Oct 21, 2003
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,625,899
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Issue date Sep 30, 2003
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,588,121
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Issue date Jul 8, 2003
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,505,415
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Issue date Jan 14, 2003
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,499,229
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Issue date Dec 31, 2002
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,490,810
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Issue date Dec 10, 2002
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,487,791
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Issue date Dec 3, 2002
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,484,415
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Issue date Nov 26, 2002
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 6,484,414
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Issue date Nov 26, 2002
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Hitachi, Ltd.
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Shigekazu Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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