Claims
- 1. A processing apparatus, comprising;
a plurality of processing chambers for processing substrates; cassette mount tables for mounting cassettes storing a plurality of substrates to be processed or processed substrates; a transfer device for transferring said substrates being capable of being controlled such that at least one of said substrates to be processed can be taken out of any location in said plurality of cassettes mounted on said plurality of cassette mount tables; and control means (a) for transferring substrates to be processed from any location in said one of the cassettes mounted in the plurality of cassette mount tables to at least one of the processing chambers via said transfer device and (b) for transferring processed substrates in said processing chambers to the original locations of the original cassettes, in which the substrates are stored prior to processing, via said transfer device.
- 2. A processing apparatus, comprising;
a plurality of processing chambers for processing substrates; cassette mount tables for mounting cassettes storing a plurality of substrates to be processed or processed substrates; a transfer device for transferring said substrates being capable of being controlled such that at least one of said substrates to be processed can be taken out of any location in said plurality of cassettes mounted on said plurality of cassette mount tables; and control means (a) for transferring substrates to be processed one by one from any location in said one of the cassettes mounted in the plurality of cassette mount tables to at least one of the processing chambers via said transfer device and (b) for transferring processed substrates in said processing chambers to the original locations of the original cassettes one by one, in which the substrates are stored prior to processing, via said transfer device.
- 3. A processing apparatus, comprising;
a plurality of processing chambers for processing substrates; a plurality of cassette mount tables for mounting at least one cassette storing at least one of substrates and at least one cassette storing at least one of dummy substrates; a transfer device for transferring said substrates and said dummy substrates, being capable of being controlled such that any of said substrates and any of said dummy substrates can be taken out of any location in said cassettes mounted on said plurality of cassette mount tables; and a control means (a) for transferring said substrates and said dummy substrates from any location in any of said cassettes mounted in said plurality of cassette mount tables to the processing chambers via said transfer device, and (b) for transferring said substrates and said dummy substrates in said processing chambers to the original locations of the original cassettes, via said transfer device.
- 4. A processing apparatus, comprising;
a plurality of processing chambers for processing substrates; a plurality of cassette mount tables for mounting at least one cassette storing at least one of substrates and at least one cassette storing at least one of dummy substrates; a transfer device for transferring said substrates and said dummy substrates, being capable of being controlled such that any of said substrates and any of said dummy substrates can be taken out of any location in said cassettes mounted on said plurality of cassette mount tables; and a control means (a) for transferring said substrates and said dummy substrates one by one from any location in any of said cassettes mounted in said plurality of cassette mount tables to the processing chambers via said transfer device, and (b) for transferring said substrates and said dummy substrates in said processing chambers to the original locations of the original cassettes one by one, via said transfer device.
Priority Claims (1)
Number |
Date |
Country |
Kind |
02-225321 |
Aug 1990 |
JP |
|
Parent Case Info
[0001] This application is a Continuation application of Ser. No. 08/882,731, filed Jun. 26, 1997, which is a Divisional application of Ser. No. 08/593,870, filed Jan. 30, 1996, which is a Continuing application of Ser. No. 08/443,039, filed May 17, 1995, which is a Divisional application of Ser. No. 08/302,443, filed Sep. 9, 1994, which is a Continuing application of Ser. No. 08/096,256, filed Jul. 26, 1993, which is a Continuing application of Ser. No. 07/751,951, filed Aug. 29, 1991.
Divisions (3)
|
Number |
Date |
Country |
Parent |
09461432 |
Dec 1999 |
US |
Child |
09766975 |
Jan 2001 |
US |
Parent |
08593870 |
Jan 1996 |
US |
Child |
08882731 |
Jun 1997 |
US |
Parent |
08302443 |
Sep 1994 |
US |
Child |
08443039 |
May 1995 |
US |
Continuations (8)
|
Number |
Date |
Country |
Parent |
10682901 |
Oct 2003 |
US |
Child |
10796207 |
Mar 2004 |
US |
Parent |
09766975 |
Jan 2001 |
US |
Child |
10682901 |
Oct 2003 |
US |
Parent |
09177495 |
Oct 1998 |
US |
Child |
09461432 |
Dec 1999 |
US |
Parent |
09061062 |
Apr 1998 |
US |
Child |
09177495 |
Oct 1998 |
US |
Parent |
08882731 |
Jun 1997 |
US |
Child |
09061062 |
Apr 1998 |
US |
Parent |
08443039 |
May 1995 |
US |
Child |
08593870 |
Jan 1996 |
US |
Parent |
08096256 |
Jul 1993 |
US |
Child |
08302443 |
Sep 1994 |
US |
Parent |
07751951 |
Aug 1991 |
US |
Child |
08096256 |
Jul 1993 |
US |