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Shigeo Moriyama
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor production system
Patent number
7,526,352
Issue date
Apr 28, 2009
Hitachi, Ltd.
Hidemitsu Naya
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Polishing apparatus and method for producing semiconductors using t...
Patent number
7,166,013
Issue date
Jan 23, 2007
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and method for producing semiconductors using t...
Patent number
7,137,866
Issue date
Nov 21, 2006
Hitachi Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing agent and polishing method
Patent number
7,026,245
Issue date
Apr 11, 2006
Renesas Technology Corp.
Yoshio Homma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor production system
Patent number
6,850,854
Issue date
Feb 1, 2005
Hitachi, Ltd.
Hidemitsu Naya
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Semiconductor device fabricating method
Patent number
6,723,144
Issue date
Apr 20, 2004
Hitachi, Ltd.
Souichi Katagiri
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for processing semiconductor wafers
Patent number
6,676,496
Issue date
Jan 13, 2004
Hitachi, Ltd.
Kan Yasui
B24 - GRINDING POLISHING
Information
Patent Grant
Method for fabricating semiconductor device and processing apparatu...
Patent number
6,612,912
Issue date
Sep 2, 2003
Hitachi, Ltd.
Kan Yasui
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor production system
Patent number
6,591,207
Issue date
Jul 8, 2003
Hitachi, Ltd.
Hidemitsu Naya
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Semiconductor device fabricating method
Patent number
6,524,961
Issue date
Feb 25, 2003
Hitachi, Ltd.
Souichi Katagiri
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and apparatus
Patent number
6,478,977
Issue date
Nov 12, 2002
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Rotary machining apparatus
Patent number
6,336,842
Issue date
Jan 8, 2002
Hitachi, Ltd.
Shigeo Ootsuki
B24 - GRINDING POLISHING
Information
Patent Grant
Method for working semiconductor wafer
Patent number
6,221,773
Issue date
Apr 24, 2001
Hitachi, Ltd.
Kan Yasui
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and apparatus
Patent number
6,180,020
Issue date
Jan 30, 2001
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method for semiconductors and apparatus therefor
Patent number
6,099,393
Issue date
Aug 8, 2000
Hitachi, Ltd.
Soichi Katagiri
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor manufacturing apparatus for transferring articles wit...
Patent number
6,077,027
Issue date
Jun 20, 2000
Hitachi, Ltd.
Yoshio Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing agent and polishing method
Patent number
6,043,155
Issue date
Mar 28, 2000
Hitachi, Ltd.
Yoshio Homma
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method and apparatus for fabricating semiconductor devices
Patent number
5,981,399
Issue date
Nov 9, 1999
Hitachi, Ltd.
Yoshio Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus for transferring articles wit...
Patent number
5,971,701
Issue date
Oct 26, 1999
Hitachi, Ltd.
Yoshio Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing agent and polishing method
Patent number
5,772,780
Issue date
Jun 30, 1998
Hitachi, Ltd.
Yoshio Homma
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Transfer apparatus
Patent number
5,658,115
Issue date
Aug 19, 1997
Hitachi, Ltd.
Takashi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and equipment for processing a semiconductor devi...
Patent number
5,628,828
Issue date
May 13, 1997
Hitachi., Ltd.
Yoshio Kawamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing method
Patent number
5,609,511
Issue date
Mar 11, 1997
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Actuator
Patent number
5,563,465
Issue date
Oct 8, 1996
Hitachi, Ltd.
Hitoshi Nakahara
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Scanning optical device and method for making a hybrid scanning len...
Patent number
5,411,430
Issue date
May 2, 1995
Hitachi Ltd.
Takashi Nishimura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Workpiece having alignment marks for positioning a pattern at a dif...
Patent number
5,408,320
Issue date
Apr 18, 1995
Hitachi, Ltd.
Soichi Katagiri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection type X-ray lithography apparatus
Patent number
5,305,364
Issue date
Apr 19, 1994
Hitachi, Ltd.
Kozo Mochiji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflection mask
Patent number
5,272,744
Issue date
Dec 21, 1993
Hitachi, Ltd.
Masaaki Itou
B82 - NANO-TECHNOLOGY
Information
Patent Grant
X-ray pattern masking by a reflective reduction projection optical...
Patent number
5,222,112
Issue date
Jun 22, 1993
Hitachi, Ltd.
Tsuneo Terasawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of position detection and the method and apparatus of printi...
Patent number
5,200,798
Issue date
Apr 6, 1993
Hitachi, Ltd.
Soichi Katagiri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor production system
Publication number
20080125903
Publication date
May 29, 2008
Hidemitsu Naya
G05 - CONTROLLING REGULATING
Information
Patent Application
Semiconductor production system
Publication number
20070027569
Publication date
Feb 1, 2007
Hidemitsu Naya
G05 - CONTROLLING REGULATING
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20060057940
Publication date
Mar 16, 2006
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor production system
Publication number
20050119843
Publication date
Jun 2, 2005
Hidemitsu Naya
G05 - CONTROLLING REGULATING
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20050095960
Publication date
May 5, 2005
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor production system
Publication number
20030220754
Publication date
Nov 27, 2003
Hitachi, Ltd
Hidemitsu Naya
G05 - CONTROLLING REGULATING
Information
Patent Application
Polishing agent and polishing method
Publication number
20030203634
Publication date
Oct 30, 2003
Yoshio Homma
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20030199238
Publication date
Oct 23, 2003
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor device fabricating method
Publication number
20030084998
Publication date
May 8, 2003
Souichi Katagiri
B24 - GRINDING POLISHING
Information
Patent Application
Semi conductor production system
Publication number
20020120417
Publication date
Aug 29, 2002
Hidemitsu Naya
G05 - CONTROLLING REGULATING
Information
Patent Application
SEE ATTACHED LIST (K. YASUI ET AL)
Publication number
20020119733
Publication date
Aug 29, 2002
KAN YASUI
B24 - GRINDING POLISHING
Information
Patent Application
Polishing agent and polishing method
Publication number
20020068452
Publication date
Jun 6, 2002
Yoshio Homma
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Apparatus for processing semicondutor wafers
Publication number
20010022214
Publication date
Sep 20, 2001
Kan Yasui
B24 - GRINDING POLISHING