Shuhei SAIDO

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning member in process container, method of manufactu...
- Patent number 12,053,805
- Issue date Aug 6, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,967,501
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, quartz reaction tube and method of...
- Patent number 11,685,992
- Issue date Jun 27, 2023
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,495,477
- Issue date Nov 8, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and heater device
- Patent number 11,384,434
- Issue date Jul 12, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,261,528
- Issue date Mar 1, 2022
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,222,796
- Issue date Jan 11, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and furnace opening assembly thereof
- Patent number 11,219,096
- Issue date Jan 4, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boat for wafer processing apparatus
- Patent number D939459
- Issue date Dec 28, 2021
- Kokusai Electric Corporation
- Hironori Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Return nozzle
- Patent number D937385
- Issue date Nov 30, 2021
- Kokusai Electric Corporation
- Mitsunori Takeshita
- D23 - Environmental heating and cooling
Information Patent Grant
Supporting column of insulation unit for semiconductor manufacturin...
- Patent number D928106
- Issue date Aug 17, 2021
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Cover of seal cap for reaction chamber for semiconductor
- Patent number D916037
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, reaction tube and method of manufac...
- Patent number 10,961,625
- Issue date Mar 30, 2021
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,923,366
- Issue date Feb 16, 2021
- Kokusai Electric Corporation
- Yusaku Okajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective plate, substrate processing apparatus, and method of man...
- Patent number 10,731,254
- Issue date Aug 4, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,714,362
- Issue date Jul 14, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,615,061
- Issue date Apr 7, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 10,597,780
- Issue date Mar 24, 2020
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,593,572
- Issue date Mar 17, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, lid cover and method of manufacturi...
- Patent number 10,573,535
- Issue date Feb 25, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover of seal cap for reaction chamber for semiconductor manufacturing
- Patent number D872037
- Issue date Jan 7, 2020
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, reaction tube, semiconductor device...
- Patent number 10,453,735
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover of seal cap for reaction chamber of semiconductor
- Patent number D855027
- Issue date Jul 30, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Return nozzle
- Patent number D847301
- Issue date Apr 30, 2019
- Kokusai Electric Corporation
- Hidenari Yoshida
- D23 - Environmental heating and cooling
Information Patent Grant
Reaction tube
- Patent number D843958
- Issue date Mar 26, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Reaction tube
- Patent number D842823
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D826185
- Issue date Aug 21, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Air flow controller for heater of substrate processing apparatus
- Patent number D825501
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for substrate processing apparatus
- Patent number D825502
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
HEATER STRUCTURE, MULTILAYER STRUCTURE, PROCESSING APPARATUS AND ME...
- Publication number 20240379483
- Publication date Nov 14, 2024
- Kokusai Electric Corporation
- Shuhei SAIDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20240359218
- Publication date Oct 31, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...
- Publication number 20240102165
- Publication date Mar 28, 2024
- Kojusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230307267
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Katsuhiko YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Heat Insulator Assembly and Method...
- Publication number 20220325413
- Publication date Oct 13, 2022
- Kokusai Electric Corporation
- Akihiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20220145464
- Publication date May 12, 2022
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...
- Publication number 20220093435
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER
- Publication number 20210043485
- Publication date Feb 11, 2021
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20200407851
- Publication date Dec 31, 2020
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, HEATER APPARATUS, AND SEMICONDUCTOR...
- Publication number 20200216958
- Publication date Jul 9, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Furnace Opening Assembly Thereof
- Publication number 20200187305
- Publication date Jun 11, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20200173025
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20200173024
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE PLATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MAN...
- Publication number 20200165722
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, QUARTZ REACTION TUBE AND METHOD OF...
- Publication number 20200149159
- Publication date May 14, 2020
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20200066551
- Publication date Feb 27, 2020
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Reaction Tube and Method of Manufac...
- Publication number 20190330738
- Publication date Oct 31, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20190287829
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20190284696
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20190287830
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20190255576
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, SEMICONDUCTOR DEVICE...
- Publication number 20190096738
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20190035654
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20180218927
- Publication date Aug 2, 2018
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LID COVER AND METHOD OF MANUFACTURI...
- Publication number 20180033645
- Publication date Feb 1, 2018
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20170335458
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170037512
- Publication date Feb 9, 2017
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20160284517
- Publication date Sep 29, 2016
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
- Publication number 20160244878
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shuhei SAIDO

Person

Patents Grantslast 30 patents

Method of cleaning member in process container, method of manufactu...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, quartz reaction tube and method of...

Substrate processing apparatus

Substrate processing apparatus and heater device

Substrate processing apparatus, heater and method of manufacturing...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus and furnace opening assembly thereof

Boat for wafer processing apparatus

Return nozzle

Supporting column of insulation unit for semiconductor manufacturin...

Cover of seal cap for reaction chamber for semiconductor

Substrate processing apparatus, reaction tube and method of manufac...

Substrate processing apparatus and method of manufacturing semicond...

Protective plate, substrate processing apparatus, and method of man...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus, heater and method of manufacturing...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, lid cover and method of manufacturi...

Cover of seal cap for reaction chamber for semiconductor manufacturing

Substrate processing apparatus, reaction tube, semiconductor device...

Cover of seal cap for reaction chamber of semiconductor

Return nozzle

Reaction tube

Reaction tube

Ceiling heater for substrate processing apparatus

Air flow controller for heater of substrate processing apparatus

Heater for substrate processing apparatus

Patents Applicationslast 30 patents

HEATER STRUCTURE, MULTILAYER STRUCTURE, PROCESSING APPARATUS AND ME...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus, Heat Insulator Assembly and Method...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...

Method of Manufacturing Semiconductor Device, Substrate Processing...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE TREATMENT APPARATUS, HEATER APPARATUS, AND SEMICONDUCTOR...

Substrate Processing Apparatus and Furnace Opening Assembly Thereof

Substrate Processing Apparatus

Substrate Processing Apparatus, Heater and Method of Manufacturing...

PROTECTIVE PLATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MAN...

SUBSTRATE PROCESSING APPARATUS, QUARTZ REACTION TUBE AND METHOD OF...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate Processing Apparatus, Reaction Tube and Method of Manufac...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, SEMICONDUCTOR DEVICE...

Substrate Processing Apparatus

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, LID COVER AND METHOD OF MANUFACTURI...

Substrate Processing Apparatus, Heater and Method of Manufacturing...

Substrate Processing Apparatus

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT