Takatomo Yamaguchi

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning member in process container, method of manufactu...
- Patent number 12,053,805
- Issue date Aug 6, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,990,359
- Issue date May 21, 2024
- Kokusai Electric Corporation
- Takatomo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,495,477
- Issue date Nov 8, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962184
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962183
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,222,796
- Issue date Jan 11, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retainer of ceiling heater for semiconductor fabrication apparatus
- Patent number D918848
- Issue date May 11, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus
- Patent number 10,615,061
- Issue date Apr 7, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 10,597,780
- Issue date Mar 24, 2020
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D826185
- Issue date Aug 21, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Air flow controller for heater of substrate processing apparatus
- Patent number D825501
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for substrate processing apparatus
- Patent number D825502
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device and s...
- Patent number 9,982,347
- Issue date May 29, 2018
- Hitachi Kokusai Electric, Inc.
- Takatomo Yamaguchi
- B08 - CLEANING
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D795209
- Issue date Aug 22, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D793974
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus and semiconductor device manufacturi...
- Patent number 9,530,677
- Issue date Dec 27, 2016
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,502,237
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,222,732
- Issue date Dec 29, 2015
- HITACHI KOKUSAI ELECTRIC INC.
- Kenji Shirako
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube
- Patent number D739832
- Issue date Sep 29, 2015
- Hitachi Kokusai Electric Inc.
- Keishin Yamazaki
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus
- Patent number 9,028,614
- Issue date May 12, 2015
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,882,923
- Issue date Nov 11, 2014
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an insulator disposed in the re...
- Patent number 8,771,416
- Issue date Jul 8, 2014
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate holder, and manufacturing...
- Patent number 7,455,734
- Issue date Nov 25, 2008
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and method for processing substrates
- Patent number 6,737,613
- Issue date May 18, 2004
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230230861
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Takefumi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230012668
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, INNER TUBE AND METHOD OF MANUFACTUR...
- Publication number 20230005760
- Publication date Jan 5, 2023
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220356580
- Publication date Nov 10, 2022
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20220005717
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Takatomo YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20200173024
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20190255576
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20190035654
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20180218927
- Publication date Aug 2, 2018
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND S...
- Publication number 20180044794
- Publication date Feb 15, 2018
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20170335458
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170037512
- Publication date Feb 9, 2017
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160376699
- Publication date Dec 29, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150152551
- Publication date Jun 4, 2015
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20130109193
- Publication date May 2, 2013
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20130042803
- Publication date Feb 21, 2013
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFAC...
- Publication number 20120220107
- Publication date Aug 30, 2012
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE
- Publication number 20120220108
- Publication date Aug 30, 2012
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...
- Publication number 20120214317
- Publication date Aug 23, 2012
- Hitachi Kokusai Electric Inc.
- Masaki Murobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120067869
- Publication date Mar 22, 2012
- Hitachi Kokusai Electric Inc.
- Kenji SHIRAKO
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20110204036
- Publication date Aug 25, 2011
- Hitachi Kokusai Electric Inc.
- Masaki MUROBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20110056434
- Publication date Mar 10, 2011
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...
- Publication number 20110000425
- Publication date Jan 6, 2011
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20100224128
- Publication date Sep 9, 2010
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Semiconductor Device Manufacturi...
- Publication number 20090269933
- Publication date Oct 29, 2009
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treatment apparatus, substrate holding device, and semico...
- Publication number 20070007646
- Publication date Jan 11, 2007
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and method for processing substrates
- Publication number 20030183614
- Publication date Oct 2, 2003
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C30 - CRYSTAL GROWTH

Takatomo Yamaguchi

Person

Patents Grantslast 30 patents

Method of cleaning member in process container, method of manufactu...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus

Retainer plate of top heater for wafer processing furnace

Retainer plate of top heater for wafer processing furnace

Substrate processing apparatus, heater and method of manufacturing...

Substrate processing apparatus

Retainer of ceiling heater for semiconductor fabrication apparatus

Substrate processing apparatus

Substrate processing apparatus, heater and method of manufacturing...

Ceiling heater for substrate processing apparatus

Air flow controller for heater of substrate processing apparatus

Heater for substrate processing apparatus

Cleaning method, method of manufacturing semiconductor device and s...

Heater for semiconductor thermal process

Heater for semiconductor thermal process

Substrate processing apparatus and semiconductor device manufacturi...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method of manufacturing semicond...

Reaction tube

Substrate processing apparatus

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus with an insulator disposed in the re...

Substrate processing apparatus, substrate holder, and manufacturing...

Heat treatment apparatus and method for processing substrates

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, INNER TUBE AND METHOD OF MANUFACTUR...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Substrate Processing Apparatus, Heater and Method of Manufacturing...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

Substrate Processing Apparatus

Substrate Processing Apparatus

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND S...

Substrate Processing Apparatus, Heater and Method of Manufacturing...

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

HEAT TREATMENT APPARATUS

HEAT TREATMENT APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...

SEMICONDUCTOR MANUFACTURING APPARATUS

Substrate Processing Apparatus and Semiconductor Device Manufacturi...

Substrate treatment apparatus, substrate holding device, and semico...

Heat treatment apparatus and method for processing substrates