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Takeo Ishibashi
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Nagoya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Developing method for immersion lithography, solvent used for the d...
Patent number
8,679,727
Issue date
Mar 25, 2014
Renesas Electronics Corporation
Mamoru Terai
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Water repellant composition for substrate to be exposed, method for...
Patent number
8,178,983
Issue date
May 15, 2012
Renesas Electronics Corporation
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
8,092,703
Issue date
Jan 10, 2012
Renesas Electronics Corporation
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
Patent number
8,017,305
Issue date
Sep 13, 2011
Renesas Electronics Corporation
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating semiconductor device
Patent number
7,935,636
Issue date
May 3, 2011
Renesas Electronics Corporation
Takeo Ishibashi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of forming resist pattern and method of manufacturing semico...
Patent number
7,727,709
Issue date
Jun 1, 2010
Renesas Technology Corp.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
Patent number
7,670,756
Issue date
Mar 2, 2010
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating semiconductor device
Patent number
7,544,619
Issue date
Jun 9, 2009
Renesas Technology Corp.
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
Patent number
7,459,265
Issue date
Dec 2, 2008
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Via-filling material and process for fabricating semiconductor inte...
Patent number
7,030,007
Issue date
Apr 18, 2006
Mitsubishi Denki Kabushiki Kaisha
Teruhiko Kumada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming resist pattern, and overlying layer material and...
Patent number
6,815,142
Issue date
Nov 9, 2004
Renesas Technology Corp.
Yoshika Kimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a semiconductor device having an improved f...
Patent number
6,593,063
Issue date
Jul 15, 2003
Mitsubishi Denki Kabushiki Kaisha
Mikihiro Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fine pattern formation method and semiconductor device or liquid cr...
Patent number
6,589,880
Issue date
Jul 8, 2003
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material for forming a fine pattern and method for manufacturing a...
Patent number
6,579,657
Issue date
Jun 17, 2003
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device and semiconductor de...
Patent number
6,566,040
Issue date
May 20, 2003
Mitsubishi Denki Kabushiki Kaisha
Kanji Sugino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device, chemical solution t...
Patent number
6,376,157
Issue date
Apr 23, 2002
Mitsubishi Denki Kabushiki Kaisha
Mikihiro Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lot determination apparatus, lot determination method, and recordin...
Patent number
6,374,397
Issue date
Apr 16, 2002
Mitsubishi Denki Kabushiki Kaisha
Yuki Miyamoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing a semiconductor device using a minute resis...
Patent number
6,319,853
Issue date
Nov 20, 2001
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a semiconductor device having a fine patter...
Patent number
6,180,320
Issue date
Jan 30, 2001
Mitsubishi Denki Kabushiki Kaisha
Takayuki Saito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern forming method utilizing multiple baking and partial...
Patent number
6,171,761
Issue date
Jan 9, 2001
Mitsubishi Denki Kabushiki Kaisha
Ayumi Minamide
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device having multilayer inte...
Patent number
6,133,138
Issue date
Oct 17, 2000
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
5,858,620
Issue date
Jan 12, 1999
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a fine resist pattern using an alkaline film cove...
Patent number
5,554,489
Issue date
Sep 10, 1996
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a pattern of a multilayer type semiconductor device
Patent number
5,451,479
Issue date
Sep 19, 1995
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
WATER REPELLANT COMPOSITION FOR SUBSTRATE TO BE EXPOSED, METHOD FOR...
Publication number
20110221077
Publication date
Sep 15, 2011
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING RESIST PATTERN AND METHOD OF MANUFACTURING SEMICO...
Publication number
20100203456
Publication date
Aug 12, 2010
Renesas Technology Corp.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
Publication number
20100104983
Publication date
Apr 29, 2010
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPING METHOD FOR IMMERSION LITHOGRAPHY, SOLVENT USED FOR THE D...
Publication number
20100021703
Publication date
Jan 28, 2010
Mamoru Terai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20090227046
Publication date
Sep 10, 2009
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
Publication number
20090075187
Publication date
Mar 19, 2009
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE, PHOTOMASK, SEMICONDUCTOR DEVICE PRODUCTION ME...
Publication number
20090039519
Publication date
Feb 12, 2009
RENESAS TECHNOLOGY CORP.
Takayuki Saito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of forming resist pattern and semiconductor device manufactu...
Publication number
20080241489
Publication date
Oct 2, 2008
RENESAS TECHNOLOGY CORP.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of fabricating a semiconductor device
Publication number
20080194109
Publication date
Aug 14, 2008
RENESAS TECHNOLOGY CORP.
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fine Pattern Forming Material, Method Of Forming Fine Resist Patter...
Publication number
20080044759
Publication date
Feb 21, 2008
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20070287298
Publication date
Dec 13, 2007
RENESAS TECHNOLOGY CORP.
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming resist pattern and method of maufacturing semicon...
Publication number
20070224546
Publication date
Sep 27, 2007
RENESAS TECHNOLOGY CORP.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MATERIAL FOR FORMING FINE PATTERN, METHOD OF FORMING FINE PATTERN,...
Publication number
20070128559
Publication date
Jun 7, 2007
Renesas Technology Corp.
Takeo ISHIBASHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20070076203
Publication date
Apr 5, 2007
Renesas Technology Corp.
Takeo Ishibashi
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20070072351
Publication date
Mar 29, 2007
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Micropattern forming material and method for forming micropattern
Publication number
20060246380
Publication date
Nov 2, 2006
Renesas Technology Corp.
Mamoru Terai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern forming method, semiconductor device manufacturing method a...
Publication number
20060088792
Publication date
Apr 27, 2006
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Via-filling material and process for fabricating semiconductor inte...
Publication number
20050101123
Publication date
May 12, 2005
Mitsubishi Denki Kabushiki Kaisha
Teruhiko Kumada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing buried wiring structure
Publication number
20040087138
Publication date
May 6, 2004
Renesas Technology Corp.
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micropattern forming material and fine structure forming method
Publication number
20040072096
Publication date
Apr 15, 2004
Renesas Technology Corp.
Mamoru Terai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for forming fine pattern on substrate by using resist patter...
Publication number
20040048200
Publication date
Mar 11, 2004
Renesas Technology Corp.
Takeo Ishibashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Micropattern forming material, micropattern forming method and meth...
Publication number
20040029047
Publication date
Feb 12, 2004
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist pattern formation method
Publication number
20040018646
Publication date
Jan 29, 2004
Mitsubishi Denki Kabushiki Kaisha
Shinji Tarutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fine pattern formation method and semiconductor device or liquid cr...
Publication number
20020006730
Publication date
Jan 17, 2002
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing a semiconductor devices, embedding material...
Publication number
20010055730
Publication date
Dec 27, 2001
Mitsubishi Denki Kabushiki Kaisha
Takeo Ishibashi
H01 - BASIC ELECTRIC ELEMENTS