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Tian-Hoe Lim
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Post-deposition treatment to enhance properties of Si-O-C low K films
Patent number
8,143,174
Issue date
Mar 27, 2012
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Post-deposition treatment to enhance properties of Si-O-C low k films
Patent number
7,326,657
Issue date
Feb 5, 2008
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of decreasing the k value in sioc layer deposited by chemica...
Patent number
7,074,708
Issue date
Jul 11, 2006
Applied Materials, Inc.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lid cooling mechanism and method for optimized deposition of low-K...
Patent number
6,899,763
Issue date
May 31, 2005
Applied Materials, Inc.
Himansu Pokharna
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Post-deposition treatment to enhance properties of Si-O-C low films
Patent number
6,858,923
Issue date
Feb 22, 2005
Applied Materials Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of decreasing the K value in SIOC layer deposited by chemica...
Patent number
6,784,119
Issue date
Aug 31, 2004
Applied Materials Inc.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus to enhance properties of Si-O-C low K films
Patent number
6,635,575
Issue date
Oct 21, 2003
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for forming a low dielectric constant carbon-containing film
Patent number
6,632,478
Issue date
Oct 14, 2003
Applied Materials, Inc.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of decreasing the K value in SiOC layer deposited by chemica...
Patent number
6,627,532
Issue date
Sep 30, 2003
Applied Materials, Inc.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
UV radiation source for densification of CVD carbon-doped silicon o...
Patent number
6,614,181
Issue date
Sep 2, 2003
Applied Materials, Inc.
Keith R. Harvey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal CVD process for depositing a low dielectric constant carbon...
Patent number
6,602,806
Issue date
Aug 5, 2003
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface treatment of c-doped SiO2 film to enhance film stability du...
Patent number
6,583,497
Issue date
Jun 24, 2003
Applied Materials Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing organosilicate layers
Patent number
6,573,196
Issue date
Jun 3, 2003
Applied Materials Inc.
Frederick Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for densification of CVD carbon-doped silicon oxide films th...
Patent number
6,566,278
Issue date
May 20, 2003
Applied Materials Inc.
Keith R. Harvey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lid cooling mechanism and method for optimized deposition of low-k...
Patent number
6,528,116
Issue date
Mar 4, 2003
Applied Materials, Inc.
Himansu Pokharna
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Post-deposition treatment to enhance properties of Si-O-C low K films
Patent number
6,486,061
Issue date
Nov 26, 2002
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface treatment of C-doped SiO2 film to enhance film stability du...
Patent number
6,465,372
Issue date
Oct 15, 2002
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for using bypass lines to stabilize gas flow and maintain pl...
Patent number
6,258,735
Issue date
Jul 10, 2001
Applied Materials, Inc.
Li-qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for removing residue from substrate processing chamber exhau...
Patent number
6,255,222
Issue date
Jul 3, 2001
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
POST-DEPOSITION TREATMENT TO ENHANCE PROPERTIES OF SI-O-C LOW K FILMS
Publication number
20080132087
Publication date
Jun 5, 2008
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Post-deposition treatment to enhance properties of Si-O-C low K films
Publication number
20050070128
Publication date
Mar 31, 2005
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of decreasing the K value in SIOC layer deposited by chemica...
Publication number
20040166665
Publication date
Aug 26, 2004
APPLIED MATERIALS, INC.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of decreasing the K value in SIOC layer deposited by chemica...
Publication number
20040029400
Publication date
Feb 12, 2004
APPLIED MATERIALS, INC.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Post-deposition treatment to enhance properties of SI-O-C low films
Publication number
20030077857
Publication date
Apr 24, 2003
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Lid cooling mechanism and method for optimized deposition of low-K...
Publication number
20030066482
Publication date
Apr 10, 2003
Applied Materials, Inc.
Himansu Pokharna
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Surface treatment of c-doped SiO2 film to enhance film stability du...
Publication number
20030008528
Publication date
Jan 9, 2003
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods for forming a low dielectric constant carbon-containing fil...
Publication number
20020164429
Publication date
Nov 7, 2002
APPLIED MATERIALS, INC.
Frederic Gaillard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...