Toshiaki Ogawa

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and a method of manufacturing thereof
- Patent number 6,586,329
- Issue date Jul 1, 2003
- Mitsubishi Denki Kabshiki Kaisha
- Yoshinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and a method of manufacturing thereof
- Patent number 6,097,052
- Issue date Aug 1, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Yoshinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor memory device having a capa...
- Patent number 5,633,188
- Issue date May 27, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of sidewall insulating film
- Patent number 5,541,127
- Issue date Jul 30, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Hoshiko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked-type semiconductor device
- Patent number 5,504,376
- Issue date Apr 2, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Kazuyuki Sugahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device having a capacitor
- Patent number 5,481,127
- Issue date Jan 2, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning semiconductor devices
- Patent number 5,474,615
- Issue date Dec 12, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Tomoaki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having sidewall insulating film
- Patent number 5,432,367
- Issue date Jul 11, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Hoshiko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having an interconnection pattern
- Patent number 5,418,397
- Issue date May 23, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked-type semiconductor device
- Patent number 5,355,022
- Issue date Oct 11, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Kazuyuki Sugahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning a substrate with metastable helium
- Patent number 5,318,654
- Issue date Jun 7, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Method of treating semiconductor substrate surface and method of ma...
- Patent number 5,306,671
- Issue date Apr 26, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method with enhanced anisotropic property and appara...
- Patent number 5,223,085
- Issue date Jun 29, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Kawai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming interconnection pattern and semico...
- Patent number 5,213,996
- Issue date May 25, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning a surface
- Patent number 5,147,465
- Issue date Sep 15, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Apparatus for forming interconnection pattern
- Patent number 5,110,394
- Issue date May 5, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning silicon surface
- Patent number 5,100,504
- Issue date Mar 31, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus including an electromagnet with a bird...
- Patent number 5,038,013
- Issue date Aug 6, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Moriaki Akazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer treating apparatus utilizing a plasma
- Patent number 4,877,509
- Issue date Oct 31, 1989
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toshiaki Ogawa

Person

Patents Grantslast 30 patents

Semiconductor device and a method of manufacturing thereof

Semiconductor device and a method of manufacturing thereof

Method of manufacturing a semiconductor memory device having a capa...

Manufacturing method of sidewall insulating film

Stacked-type semiconductor device

Semiconductor memory device having a capacitor

Method for cleaning semiconductor devices

Semiconductor device having sidewall insulating film

Semiconductor device having an interconnection pattern

Stacked-type semiconductor device

Apparatus for cleaning a substrate with metastable helium

Method of treating semiconductor substrate surface and method of ma...

Plasma etching method with enhanced anisotropic property and appara...

Method and apparatus for forming interconnection pattern and semico...

Method of cleaning a surface

Apparatus for forming interconnection pattern

Method of cleaning silicon surface

Plasma processing apparatus including an electromagnet with a bird...

Semiconductor wafer treating apparatus utilizing a plasma