Tsuyoshi Shibata

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and method
- Patent number 8,377,721
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Tsuyoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 8,253,077
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,181,356
- Issue date May 22, 2012
- Tokyo Electron Limited
- Takahisa Otsuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate treatment method, and compute...
- Patent number 8,168,378
- Issue date May 1, 2012
- Tokyo Electron Limited
- Takahisa Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 7,985,516
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, program, computer-readable storage med...
- Patent number 7,884,950
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Heiko Weichert
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,877,895
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Takahisa Otsuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate treatment method, and compute...
- Patent number 7,816,276
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Takahisa Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and computer reada...
- Patent number 7,628,612
- Issue date Dec 8, 2009
- Tokyo Electron Limited
- Takahisa Otsuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20110242513
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20110086514
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Takahisa OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND COMPUTE...
- Publication number 20100323306
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Takahisa OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20090269686
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...
- Publication number 20090181316
- Publication date Jul 16, 2009
- TOKYO ELECTRON LIMITED
- Heiko Weichert
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD
- Publication number 20090014125
- Publication date Jan 15, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20070298188
- Publication date Dec 27, 2007
- TOKYO ELECTRON LIMITED
- Takahisa OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND COMPUTE...
- Publication number 20070190246
- Publication date Aug 16, 2007
- TOKYO ELECTRON LIMITED
- Takahisa OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND COMPUTER READA...
- Publication number 20070181557
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Takahisa OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS

Tsuyoshi Shibata

Person

Patents Grantslast 30 patents

Substrate processing system and method

Substrate processing method, computer-readable storage medium and s...

Substrate processing method

Substrate treatment system, substrate treatment method, and compute...

Substrate processing method, computer-readable storage medium and s...

Substrate processing method, program, computer-readable storage med...

Substrate processing apparatus

Substrate treatment system, substrate treatment method, and compute...

Heat treatment apparatus, heat treatment method, and computer reada...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND COMPUTE...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...

SUBSTRATE PROCESSING SYSTEM AND METHOD

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND COMPUTE...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND COMPUTER READA...