BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a plan view showing the outline of a configuration of a coating and developing treatment system incorporating a heat treatment apparatus according to the present embodiment;
FIG. 2 is a front view of the coating and developing treatment system;
FIG. 3 is a rear view of the coating and developing treatment system;
FIG. 4 is a plan view showing the outline of a configuration of the heat treatment apparatus;
FIG. 5 is a longitudinal sectional view of a base and a heat treatment plate;
FIG. 6 is an explanatory view showing a configuration of a transfer member;
FIG. 7 is a longitudinal sectional view of a base for explaining transfer of a wafer from a first heat treatment plate to a second heat treatment plate;
FIG. 8 is a longitudinal sectional view of the base for explaining transfer of the wafer from the second heat treatment plate to a third heat treatment plate;
FIG. 9 is a longitudinal sectional view of the base for explaining transfer of the wafer from the third heat treatment plate to a fourth heat treatment plate;
FIG. 10 is a plan view of the heat treatment apparatus in the case in which the positions of the transfer members are changed;
FIG. 11 is a plan view of the heat treatment apparatus in which a plurality of grooves are provided;
FIG. 12 is a perspective view of the inside of the heat treatment apparatus in the case using transfer members having wire portions;
FIG. 13 is an explanatory view of a transverse section showing a configuration inside a holding portion of the transfer member;
FIG. 14 is a plan view of the heat treatment apparatus;
FIG. 15 is a longitudinal sectional view of the base and the heat treatment plate for explaining transfer of the wafer from the first heat treatment plate to the second heat treatment plate;
FIG. 16 is a schematic view of the heat treatment apparatus in the case in which the heat treatment plate is divided;
FIG. 17 is a schematic view of the heat treatment apparatus showing division patterns of the heat treatment plates; and
FIG. 18 is a schematic view of the heat treatment apparatus showing division patterns of the heat treatment plates.