Viljami J. Pore

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for filling a recess formed within a substrate...
- Patent number 12,176,243
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 12,138,654
- Issue date Nov 12, 2024
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 12,134,108
- Issue date Nov 5, 2024
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for filling a gap
- Patent number 12,104,244
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and an apparatus for depositing a silicon-contain...
- Patent number 12,107,005
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for filling a gap and related systems and devices
- Patent number 12,094,769
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for filling a gap and related systems and devices
- Patent number 12,027,365
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon precursors for silicon nitride deposition
- Patent number 11,996,286
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of SiOCN thin films
- Patent number 11,996,284
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Toshiya Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for filling a gap
- Patent number 11,990,333
- Issue date May 21, 2024
- ASM IP Holding B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective passivation and selective deposition
- Patent number 11,830,732
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Jan Willem Hub Maes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synthesis and use of precursors for ALD of tellurium and selenium t...
- Patent number 11,814,400
- Issue date Nov 14, 2023
- ASM International N.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective layer formation using deposition and removing
- Patent number 11,804,373
- Issue date Oct 31, 2023
- ASM IP Holding, B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition method and apparatus for filling a recess forme...
- Patent number 11,798,834
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of SiN thin films
- Patent number 11,784,043
- Issue date Oct 10, 2023
- ASM IP Holding, B.V.
- Toshiya Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
- Patent number 11,776,807
- Issue date Oct 3, 2023
- ASM IP Holding, B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective PEALD of oxide on dielectric
- Patent number 11,728,164
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of organic films
- Patent number 11,728,175
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling a gap
- Patent number 11,694,892
- Issue date Jul 4, 2023
- ASM IP Holding B.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 11,654,454
- Issue date May 23, 2023
- ASM IP Holding B.V.
- Viljami J. Pore
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods for forming a layer comprising a condensing and a curing step
- Patent number 11,643,726
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling a recess formed within a substrate...
- Patent number 11,615,980
- Issue date Mar 28, 2023
- ASM IP Holding B.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for filling a gap
- Patent number 11,610,775
- Issue date Mar 21, 2023
- ASM IP Holding B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si precursors for deposition of SiN at low temperatures
- Patent number 11,587,783
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Antti J. Niskanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of SiOC thin films
- Patent number 11,562,900
- Issue date Jan 24, 2023
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of group VA element contain...
- Patent number 11,542,600
- Issue date Jan 3, 2023
- ASM IP Holding B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual selective deposition
- Patent number 11,525,184
- Issue date Dec 13, 2022
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective layer formation using deposition and removing
- Patent number 11,501,966
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Eva E. Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of me...
- Patent number 11,501,965
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Lingyun Jia
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP
- Publication number 20250006489
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240379347
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Mikko Ruoho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20240352576
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR AN AMORPHOUS BORON NITRIDE LAYER AND ASSOCIATED AMORPHOU...
- Publication number 20240327982
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Gaurav Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSORS FOR SILICON NITRIDE DEPOSITION
- Publication number 20240297039
- Publication date Sep 5, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH
- Publication number 20240222110
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING SILICON-BASED MATERIAL AND PRECURSORS FOR THE...
- Publication number 20240203727
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Tao Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gapfill methods and processing assemblies
- Publication number 20240117494
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS COMPRISING BORAZINE AND ITS DERIVATIVES, AND RELATED M...
- Publication number 20240102163
- Publication date Mar 28, 2024
- ASM IP HOLDING, B.V.
- Patricio Romero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION
- Publication number 20240047197
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Jan Willem Hub Maes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLICAL DEPOSITION METHOD AND APPARATUS FOR FILLING A RECESS FORME...
- Publication number 20240047264
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE-BASED SENSOR SYSTEM FOR PRECURSOR LEVEL MEASUREMENT AND ME...
- Publication number 20240044689
- Publication date Feb 8, 2024
- ASM IP HOLDING, B.V.
- Giuseppe Alessio Verni
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING SILICON OXIDE
- Publication number 20230411147
- Publication date Dec 21, 2023
- ASM IP HOLDING, B.V.
- Jihee Jeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20230343601
- Publication date Oct 26, 2023
- ASM IP HOLDING B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FILLING A GAP
- Publication number 20230335397
- Publication date Oct 19, 2023
- ASM IP HOLDING B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM FOR SEMICONDUCTOR WAFERS
- Publication number 20230279552
- Publication date Sep 7, 2023
- ASM IP HOLDING, B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20230249217
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20230243036
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GAP-FILLING FLUIDS AND RELATED SYSTEMS AND D...
- Publication number 20230212744
- Publication date Jul 6, 2023
- ASM IP HOLDING, B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FILLING A GAP
- Publication number 20230207309
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Viljami PORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCH PROCESS AND A PROCESSING ASSEMBLY
- Publication number 20230170221
- Publication date Jun 1, 2023
- ASM IP HOLDING, B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SIOC AND SIOCN LOW-K SPACERS
- Publication number 20230162971
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF SiOC THIN FILMS
- Publication number 20230132743
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Toshiya Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FILLING A RECESS FORMED WITHIN A SUBSTRATE...
- Publication number 20230126231
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20230098575
- Publication date Mar 30, 2023
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE-LAYER METHOD AND SYSTEM FOR FORMING MATERIAL WITHIN A GAP
- Publication number 20230101229
- Publication date Mar 30, 2023
- ASM IP HOLDING B.V.
- Hannu Huotari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20230095086
- Publication date Mar 30, 2023
- ASM IP HOLDING B.V.
- Timothee Blanquart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF GROUP VA ELEMENT CONTAIN...
- Publication number 20230093384
- Publication date Mar 23, 2023
- ASM IP HOLDING B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE LAYER FORMATION USING DEPOSITION AND REMOVING
- Publication number 20230016537
- Publication date Jan 19, 2023
- ASM IP HOLDING B.V.
- Eva E. Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20230011277
- Publication date Jan 12, 2023
- ASM IP HOLDING B.V.
- Eva E. Tois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Viljami J. Pore

Person

Patents Grantslast 30 patents

Method and apparatus for filling a recess formed within a substrate...

Vapor phase deposition of organic films

Vapor phase deposition of organic films

Methods and systems for filling a gap

Deposition method and an apparatus for depositing a silicon-contain...

Methods for filling a gap and related systems and devices

Methods for filling a gap and related systems and devices

Silicon precursors for silicon nitride deposition

Formation of SiOCN thin films

Method and apparatus for filling a gap

Selective deposition of metals, metal oxides, and dielectrics

Selective passivation and selective deposition

Synthesis and use of precursors for ALD of tellurium and selenium t...

Selective layer formation using deposition and removing

Cyclical deposition method and apparatus for filling a recess forme...

Formation of SiN thin films

Plasma enhanced deposition processes for controlled formation of ox...

Selective PEALD of oxide on dielectric

Deposition of organic films

Method and apparatus for filling a gap

Vapor phase deposition of organic films

Methods for forming a layer comprising a condensing and a curing step

Method and apparatus for filling a recess formed within a substrate...

Method and apparatus for filling a gap

Si precursors for deposition of SiN at low temperatures

Formation of SiOC thin films

Synthesis and use of precursors for ALD of group VA element contain...

Dual selective deposition

Selective layer formation using deposition and removing

Plasma enhanced deposition processes for controlled formation of me...

Patents Applicationslast 30 patents

METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP

SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN

METHODS AND SYSTEMS FOR FILLING A GAP

METHOD FOR AN AMORPHOUS BORON NITRIDE LAYER AND ASSOCIATED AMORPHOU...

SILICON PRECURSORS FOR SILICON NITRIDE DEPOSITION

PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH

METHOD OF DEPOSITING SILICON-BASED MATERIAL AND PRECURSORS FOR THE...

Gapfill methods and processing assemblies

COMPOSITIONS COMPRISING BORAZINE AND ITS DERIVATIVES, AND RELATED M...

SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION

CYCLICAL DEPOSITION METHOD AND APPARATUS FOR FILLING A RECESS FORME...

PRESSURE-BASED SENSOR SYSTEM FOR PRECURSOR LEVEL MEASUREMENT AND ME...

METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING SILICON OXIDE

DEPOSITION OF ORGANIC FILMS

METHOD AND APPARATUS FOR FILLING A GAP

PROCESSING SYSTEM FOR SEMICONDUCTOR WAFERS

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

METHODS FOR DEPOSITING GAP-FILLING FLUIDS AND RELATED SYSTEMS AND D...

METHOD AND APPARATUS FOR FILLING A GAP

ETCH PROCESS AND A PROCESSING ASSEMBLY

METHOD OF FORMING SIOC AND SIOCN LOW-K SPACERS

FORMATION OF SiOC THIN FILMS

METHOD AND APPARATUS FOR FILLING A RECESS FORMED WITHIN A SUBSTRATE...

METHODS AND SYSTEMS FOR FILLING A GAP

MULTIPLE-LAYER METHOD AND SYSTEM FOR FORMING MATERIAL WITHIN A GAP

METHODS AND SYSTEMS FOR FILLING A GAP

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF GROUP VA ELEMENT CONTAIN...

SELECTIVE LAYER FORMATION USING DEPOSITION AND REMOVING

DEPOSITION OF ORGANIC FILMS