Wataru Ohkase

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus with a processing vessel, upper and lowe...
- Patent number 6,111,225
- Issue date Aug 29, 2000
- Tokyo Electron Limited
- Wataru Ohkase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and method
- Patent number 5,763,856
- Issue date Jun 9, 1998
- Tokyo Electron Limited
- Wataru Ohkase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling temperature in rapid heat trea...
- Patent number 5,616,264
- Issue date Apr 1, 1997
- Tokyo Electron Limited
- Katsuo Nishi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus utilizing flat heating elements for treati...
- Patent number 5,536,918
- Issue date Jul 16, 1996
- Tokyo Electron Sagami Kabushiki Kaisha
- Wataru Ohkase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus with heat shielding member
- Patent number 5,520,742
- Issue date May 28, 1996
- Tokyo Electron Kabushiki Kaisha
- Wataru Ohkase
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus with a rotary holder turning inde...
- Patent number 5,443,648
- Issue date Aug 22, 1995
- Tokyo Electron Kabushiki Kaisha
- Wataru Ohkase
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor wafer processing apparatus
- Patent number 5,393,349
- Issue date Feb 28, 1995
- Tokyo Electron Sagami Kabushiki Kaisha
- Wataru Ohkase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Instrument for transferring boats for thermal treatment of semicond...
- Patent number D327078
- Issue date Jun 16, 1992
- Tel Sagami Limited
- Ken Nakao
- D15 - Machines not elsewhere specified
Information Patent Grant
Heat insulating cylinder for thermal treatment of semiconductor wafers
- Patent number D326272
- Issue date May 19, 1992
- Tel Sagami Limited
- Ken Nakao
- D15 - Machines not elsewhere specified
Information Patent Grant
Heat insulating cylinder for thermal treatment of semiconductor wafers
- Patent number D326273
- Issue date May 19, 1992
- Tel Sagami Limited
- Ken Nakao
- D15 - Machines not elsewhere specified
Information Patent Grant
Pitch changing device for changing pitches of plate-like objects an...
- Patent number 5,007,788
- Issue date Apr 16, 1991
- Tel Sagami Limited
- Takanobu Asano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer treating apparatus
- Patent number 4,955,775
- Issue date Sep 11, 1990
- Tel Sagami Limited
- Wataru Ohkase
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer support device
- Patent number 4,952,115
- Issue date Aug 28, 1990
- Tel Sagami Limited
- Wataru Ohkase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat-treating apparatus
- Patent number 4,950,870
- Issue date Aug 21, 1990
- Tel Sagami Limited
- Hiroyuki Mitsuhashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus
- Patent number 4,943,235
- Issue date Jul 24, 1990
- Tel Sagami Limited
- Ken Nakao
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus
- Patent number 4,938,691
- Issue date Jul 3, 1990
- Tel Sagami Limited
- Wataru Ohkase
- C30 - CRYSTAL GROWTH

Wataru Ohkase

Person

Patents Grantslast 30 patents

Wafer processing apparatus with a processing vessel, upper and lowe...

Heat treatment apparatus and method

Method and apparatus for controlling temperature in rapid heat trea...

Heat treatment apparatus utilizing flat heating elements for treati...

Thermal processing apparatus with heat shielding member

Vertical heat treatment apparatus with a rotary holder turning inde...

Semiconductor wafer processing apparatus

Instrument for transferring boats for thermal treatment of semicond...

Heat insulating cylinder for thermal treatment of semiconductor wafers

Heat insulating cylinder for thermal treatment of semiconductor wafers

Pitch changing device for changing pitches of plate-like objects an...

Semiconductor wafer treating apparatus

Wafer support device

Heat-treating apparatus

Heat-treating apparatus

Heat-treating apparatus