Yasushi Kawasumi

Person

Fujisawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming a thin film using a gas
- Patent number 6,475,563
- Issue date Nov 5, 2002
- Canon Kabushiki Kaisha
- Yukihiro Hayakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a semiconductor device using processing from both...
- Patent number 6,329,265
- Issue date Dec 11, 2001
- Canon Kabushiki Kaisha
- Mamoru Miyawaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of treating active material
- Patent number 6,156,657
- Issue date Dec 5, 2000
- Canon Kabushiki Kaisha
- Hideshi Kuwabara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a through-hole, silicon substrate having a thro...
- Patent number 6,143,190
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Takayuki Yagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film formation on semiconductor wafer
- Patent number 6,004,885
- Issue date Dec 21, 1999
- Canon Kabushiki Kaisha
- Yukihiro Hayakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device made using processing from both sides of a wor...
- Patent number 5,952,694
- Issue date Sep 14, 1999
- Canon Kabushiki Kaisha
- Mamoru Miyawaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 5,776,255
- Issue date Jul 7, 1998
- Canon Kabushiki Kaisha
- Tetsuo Asaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method
- Patent number 5,580,822
- Issue date Dec 3, 1996
- Canon Kabushiki Kaisha
- Yukihiro Hayakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating active material
- Patent number 5,534,069
- Issue date Jul 9, 1996
- Canon Kabushiki Kaisha
- Hideshi Kuwabara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 5,476,815
- Issue date Dec 19, 1995
- Canon Kabushiki Kaisha
- Yasushi Kawasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition method and apparatus making use of liquid...
- Patent number 5,447,568
- Issue date Sep 5, 1995
- Canon Kabushiki Kaisha
- Yukihiro Hayakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230374647
- Publication date Nov 23, 2023
- Canon Kabushiki Kaisha
- Masumi Itabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20200378002
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Takashi Tsuboi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200340094
- Publication date Oct 29, 2020
- Canon Kabushiki Kaisha
- Masumi Itabashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A THIN FILM USING A GAS
- Publication number 20020076489
- Publication date Jun 20, 2002
- YUKIHIRO HAYAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasushi Kawasumi

Person

Patents Grantslast 30 patents

Method for forming a thin film using a gas

Method of making a semiconductor device using processing from both...

Method of treating active material

Method of producing a through-hole, silicon substrate having a thro...

Thin film formation on semiconductor wafer

Semiconductor device made using processing from both sides of a wor...

Chemical vapor deposition apparatus

Chemical vapor deposition method

Method of treating active material

Manufacturing method of semiconductor device

Chemical vapor deposition method and apparatus making use of liquid...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEPOSITION APPARATUS AND DEPOSITION METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD FOR FORMING A THIN FILM USING A GAS