TREA

Yoshinobu Goto

Follow

Person

  • Nagoya-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma-resistant member
    • Patent number 8,865,291
    • Issue date Oct 21, 2014
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Grant

    Semiconductor manufacturing apparatus member
    • Patent number 8,790,007
    • Issue date Jul 29, 2014
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Ceramic heater
    • Patent number 8,748,782
    • Issue date Jun 10, 2014
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 8,336,891
    • Issue date Dec 25, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Ceramic heater and method for making the same
    • Patent number 8,304,701
    • Issue date Nov 6, 2012
    • NGK Insulators, Ltd.
    • Yuji Akatsuka
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating device for heating a wafer
    • Patent number 8,294,069
    • Issue date Oct 23, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating device
    • Patent number 8,168,926
    • Issue date May 1, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Power-supplying member and heating apparatus using the same
    • Patent number 7,679,034
    • Issue date Mar 16, 2010
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating device
    • Patent number 7,544,916
    • Issue date Jun 9, 2009
    • NGK Insulators, Ltd.
    • Hisakazu Okajima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Power-supplying member and heating apparatus using the same
    • Patent number 7,525,071
    • Issue date Apr 28, 2009
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating device
    • Patent number 7,432,474
    • Issue date Oct 7, 2008
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Method of manufacturing a substrate heating device
    • Patent number 7,401,399
    • Issue date Jul 22, 2008
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating resistances and heaters
    • Patent number 7,332,694
    • Issue date Feb 19, 2008
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heater
    • Patent number 7,274,006
    • Issue date Sep 25, 2007
    • NGK Insulators, Ltd.
    • Hisakazu Okajima
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Substrate heating apparatus
    • Patent number 7,247,819
    • Issue date Jul 24, 2007
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Systems for producing semiconductors and members therefor
    • Patent number 7,220,320
    • Issue date May 22, 2007
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate heating device
    • Patent number 7,189,946
    • Issue date Mar 13, 2007
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating device
    • Patent number 7,173,220
    • Issue date Feb 6, 2007
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Systems for producing semiconductors and members therefor
    • Patent number 7,157,666
    • Issue date Jan 2, 2007
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Heating systems
    • Patent number 7,126,093
    • Issue date Oct 24, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heaters
    • Patent number 7,115,839
    • Issue date Oct 3, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ceramic heater
    • Patent number 7,053,339
    • Issue date May 30, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating systems
    • Patent number 7,044,399
    • Issue date May 16, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Systems for supporting ceramic susceptors
    • Patent number 7,022,947
    • Issue date Apr 4, 2006
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Fixing structures and supporting structures of ceramic susceptors,...
    • Patent number 7,011,712
    • Issue date Mar 14, 2006
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Susceptor supporting construction
    • Patent number 6,997,993
    • Issue date Feb 14, 2006
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Fixing structures and supporting structures of ceramic susceptors,...
    • Patent number 6,979,369
    • Issue date Dec 27, 2005
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating system
    • Patent number 6,875,960
    • Issue date Apr 5, 2005
    • NGK Insulators, Ltd.
    • Shinji Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic shell-and-tube type heat exchanger and method for manufactu...
    • Patent number 5,941,302
    • Issue date Aug 24, 1999
    • NGK Insulators, Ltd.
    • Mitsuru Hattori
    • F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA-RESISTANT MEMBER
    • Publication number 20120301679
    • Publication date Nov 29, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu GOTO
    • C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
    • Publication number 20120211933
    • Publication date Aug 23, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu GOTO
    • G01 - MEASURING TESTING
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20120018416
    • Publication date Jan 26, 2012
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER AND METHOD FOR MAKING THE SAME
    • Publication number 20110062144
    • Publication date Mar 17, 2011
    • NGK Insulators, Ltd.
    • Yuji AKATSUKA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20090230636
    • Publication date Sep 17, 2009
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATING DEVICE
    • Publication number 20080237216
    • Publication date Oct 2, 2008
    • NGK Insulators, Ltd.
    • Yoshinobu GOTO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING DEVICE
    • Publication number 20080237221
    • Publication date Oct 2, 2008
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING DEVICE
    • Publication number 20070221648
    • Publication date Sep 27, 2007
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATING DEVICE AND MANUFACTURING METHOD THEREOF
    • Publication number 20070215597
    • Publication date Sep 20, 2007
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heater
    • Publication number 20070039944
    • Publication date Feb 22, 2007
    • NGK Insulators, Ltd.
    • Hisakazu Okajima
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heating device
    • Publication number 20070033824
    • Publication date Feb 15, 2007
    • NGK Insulators, Ltd.
    • Hisakazu Okajima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Power-supplying member and heating apparatus using the same
    • Publication number 20060237442
    • Publication date Oct 26, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Power-supplying member and heating apparatus using the same
    • Publication number 20060231034
    • Publication date Oct 19, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING SYSTEMS
    • Publication number 20060186109
    • Publication date Aug 24, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating apparatus
    • Publication number 20060011611
    • Publication date Jan 19, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating device
    • Publication number 20050258160
    • Publication date Nov 24, 2005
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate heating device and manufacturing method for the same
    • Publication number 20050210974
    • Publication date Sep 29, 2005
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heating device
    • Publication number 20050211691
    • Publication date Sep 29, 2005
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Systems for heating wafers
    • Publication number 20050173412
    • Publication date Aug 11, 2005
    • NGK Insulators, Ltd.
    • Nobuyuki Kondou
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heating resistances and heaters
    • Publication number 20050173411
    • Publication date Aug 11, 2005
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heaters
    • Publication number 20050173413
    • Publication date Aug 11, 2005
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Systems for supporting ceramic susceptors
    • Publication number 20050006374
    • Publication date Jan 13, 2005
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heating systems
    • Publication number 20040177812
    • Publication date Sep 16, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Systems for producing semiconductors and members therefor
    • Publication number 20040144312
    • Publication date Jul 29, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Systems for producing semiconductors and members therefor
    • Publication number 20040144767
    • Publication date Jul 29, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Fixing structures and supporting structures of ceramic susceptors,...
    • Publication number 20030183340
    • Publication date Oct 2, 2003
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    Ceramic heater
    • Publication number 20030183616
    • Publication date Oct 2, 2003
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Fixing structures and supporting structures of ceramic susceptors,...
    • Publication number 20030183341
    • Publication date Oct 2, 2003
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    Heating system
    • Publication number 20030071032
    • Publication date Apr 17, 2003
    • NGK Insulators, Ltd.
    • Shinji Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Susceptor supporting construction
    • Publication number 20020170679
    • Publication date Nov 21, 2002
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...