Yuichi Wada

Person

Tomisato, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Shutter disk
- Patent number 12,148,629
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High conductance inner shield for process chamber
- Patent number 12,100,577
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preclean chamber upper shield with showerhead
- Patent number 12,080,522
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,913,107
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Yueh Sheng Ow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing defects in preclean chambers
- Patent number 11,881,385
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Yueh Sheng Ow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk
- Patent number 11,862,480
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inline microwave batch degas chamber
- Patent number 11,629,409
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for cleaving of semiconductor substrates
- Patent number 11,610,807
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Felix Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,587,799
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Chien-Kang Hsiung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for cleaving of semiconductor substrates
- Patent number 11,569,122
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Felix Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for prevention of component cracking using st...
- Patent number 11,557,499
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper shield with showerhead for a process chamber
- Patent number D973609
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D971167
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for high voltage electrostatic chuck protection
- Patent number 11,289,357
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk
- Patent number 11,171,017
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D931241
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for cleaving of semiconductor substrates
- Patent number 10,991,617
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Felix Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inner shield for a substrate processing chamber
- Patent number D913979
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for detecting microwave fields in a cavity
- Patent number 10,677,830
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Ananthkrishna Jupudi
- G01 - MEASURING TESTING
Information Patent Grant
Solution to thermal budget
- Patent number 7,101,725
- Issue date Sep 5, 2006
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Embedded waveguide detectors
- Patent number 7,075,165
- Issue date Jul 11, 2006
- Applied Material, Inc.
- Francisco A. Leon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maskless fabrication of waveguide mirrors
- Patent number 7,001,788
- Issue date Feb 21, 2006
- Applied Materials, Inc.
- Francisco A. Leon
- G02 - OPTICS
Information Patent Grant
Film deposition method and apparatus
- Patent number 6,852,626
- Issue date Feb 8, 2005
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method and apparatus
- Patent number 6,593,252
- Issue date Jul 15, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus for semiconductor devices
- Patent number 6,576,567
- Issue date Jun 10, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus for semiconductor devices
- Patent number 6,511,538
- Issue date Jan 28, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus
- Patent number 6,488,984
- Issue date Dec 3, 2002
- Applied Materials Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering reactor and method of using an unbalanced magnetron
- Patent number 6,440,282
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for producing a uniform density plasma above a...
- Patent number 6,210,539
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Yoichiro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPRAY-COATED ELECTROSTATIC CHUCK DESIGN
- Publication number 20240258076
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Tuck Foong KOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20240087913
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PREVENTION OF COMPONENT CRACKING USING ST...
- Publication number 20220122871
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Yuichi WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shutter Disk
- Publication number 20220028702
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD
- Publication number 20210335581
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Sarath BABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS
- Publication number 20210335582
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Yueh Sheng OW
- B08 - CLEANING
Information Patent Application
Methods and Apparatus for Cleaving of Semiconductor Substrates
- Publication number 20210233802
- Publication date Jul 29, 2021
- Applied Materials, Inc.
- FELIX DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEAVING OF SEMICONDUCTOR SUBSTRATES
- Publication number 20210217656
- Publication date Jul 15, 2021
- Applied Materials, Inc.
- FELIX DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210166953
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Chien-Kang HSIUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210140029
- Publication date May 13, 2021
- Applied Materials, Inc.
- YUEH SHENG OW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20210074552
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066050
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066051
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR HIGH VOLTAGE ELECTROSTATIC CHUCK PROTECTION
- Publication number 20200411353
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- YUICHI WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INLINE MICROWAVE BATCH DEGAS CHAMBER
- Publication number 20200378006
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- RIBHU GAUTAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEAVING OF SEMICONDUCTOR SUBSTRATES
- Publication number 20190355616
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- FELIX DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DETECTING MICROWAVE FIELDS IN A CAVITY
- Publication number 20190018053
- Publication date Jan 17, 2019
- Applied Materials, Inc.
- ANANTHKRISHNA JUPUDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBEDDED WAVEGUIDE DETECTORS
- Publication number 20090269878
- Publication date Oct 29, 2009
- Applied Materials, Inc.
- Francisco A. Leon
- G02 - OPTICS
Information Patent Application
Embedded waveguide detectors
- Publication number 20070018270
- Publication date Jan 25, 2007
- Applied Materials, Inc.
- Francisco A. Leon
- G02 - OPTICS
Information Patent Application
Maskless Fabrication of waveguide mirrors
- Publication number 20050054130
- Publication date Mar 10, 2005
- Applied Materials, Inc.
- Francisco A. Leon
- G02 - OPTICS
Information Patent Application
Embedded waveguide detectors
- Publication number 20050051767
- Publication date Mar 10, 2005
- Applied Materials, Inc.
- Francisco A. Leon
- G02 - OPTICS
Information Patent Application
Solution to thermal budget
- Publication number 20050054131
- Publication date Mar 10, 2005
- Applied Materials, Inc.
- Yuichi Wada
- C30 - CRYSTAL GROWTH

Yuichi Wada

Person

Patents Grantslast 30 patents

Shutter disk

High conductance inner shield for process chamber

Preclean chamber upper shield with showerhead

Methods and apparatus for processing a substrate

Methods and apparatus for reducing defects in preclean chambers

Shutter disk

Inline microwave batch degas chamber

Methods and apparatus for cleaving of semiconductor substrates

Methods and apparatus for processing a substrate

Methods and apparatus for cleaving of semiconductor substrates

Methods and apparatus for prevention of component cracking using st...

Upper shield with showerhead for a process chamber

Lower shield for a substrate processing chamber

Methods and apparatus for high voltage electrostatic chuck protection

Shutter disk

Lower shield for a substrate processing chamber

Methods and apparatus for cleaving of semiconductor substrates

Inner shield for a substrate processing chamber

Methods and apparatus for detecting microwave fields in a cavity

Solution to thermal budget

Embedded waveguide detectors

Maskless fabrication of waveguide mirrors

Film deposition method and apparatus

Film deposition method and apparatus

Film deposition method and apparatus for semiconductor devices

Film deposition method and apparatus for semiconductor devices

Film deposition method and apparatus

Sputtering reactor and method of using an unbalanced magnetron

Method and apparatus for producing a uniform density plasma above a...

Patents Applicationslast 30 patents

SPRAY-COATED ELECTROSTATIC CHUCK DESIGN

Shutter Disk

METHODS AND APPARATUS FOR PREVENTION OF COMPONENT CRACKING USING ST...

Shutter Disk

PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD

METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS

Methods and Apparatus for Cleaving of Semiconductor Substrates

METHODS AND APPARATUS FOR CLEAVING OF SEMICONDUCTOR SUBSTRATES

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Shutter Disk

HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER

HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER

METHODS AND APPARATUS FOR HIGH VOLTAGE ELECTROSTATIC CHUCK PROTECTION

INLINE MICROWAVE BATCH DEGAS CHAMBER

METHODS AND APPARATUS FOR CLEAVING OF SEMICONDUCTOR SUBSTRATES

METHODS AND APPARATUS FOR DETECTING MICROWAVE FIELDS IN A CAVITY

EMBEDDED WAVEGUIDE DETECTORS

Embedded waveguide detectors

Maskless Fabrication of waveguide mirrors

Embedded waveguide detectors

Solution to thermal budget