 
                 Lincoln, MA, US
 Lincoln, MA, US
                     Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Jizhong  Li
                                    Jizhong  Li
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Peide  Ye
                                    Peide  Ye
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Jizhong  Li
                                    Jizhong  Li
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Peide  Ye
                                    Peide  Ye
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J.  Lochtefeld
                                    Anthony J.  Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 James  Fiorenza
                                    James  Fiorenza
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Matthew T.  Currie
                                    Matthew T.  Currie
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Massachusetts Institute of Technology
                                    Massachusetts Institute of Technology
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Peide  Ye
                                    Peide  Ye
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Jizhong  Li
                                    Jizhong  Li
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company,
                                    Taiwan Semiconductor Manufacturing Company,
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Co., LTD
                                    Taiwan Semiconductor Manufacturing Co., LTD
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Anthony J. Lochtefeld
                                    Anthony J. Lochtefeld
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Peide  Ye
                                    Peide  Ye
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Jennifer  Hydrick
                                    Jennifer  Hydrick
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 Anthony J.  Lochtefeld
                                    Anthony J.  Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 James  Fiorenza
                                    James  Fiorenza
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Peide  Ye
                                    Peide  Ye
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Jizhong  Li
                                    Jizhong  Li
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Zhiyuan  Cheng
                                    Zhiyuan  Cheng
                                 G06 - COMPUTING CALCULATING COUNTING
                                    G06 - COMPUTING CALCULATING COUNTING
                                 AmberWave Systems Corporation
                                    AmberWave Systems Corporation
                                 Anthony J.  Lochtefeld
                                    Anthony J.  Lochtefeld
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...