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B81C2203/051

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

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B81C2203/051Active alignment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sound producing cell and manufacturing method thereof
- Patent number 11,943,595
- Issue date Mar 26, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical (MEM) power relay
- Patent number 11,584,643
- Issue date Feb 21, 2023
- Massachusetts Institute of Technology
- Prashant Patil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing MEMS transducer, MEMS transducer, ultrasound p...
- Patent number 11,369,345
- Issue date Jun 28, 2022
- Konica Minolta, Inc.
- Yuta Nakayama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and methods for microfabrication
- Patent number 11,305,987
- Issue date Apr 19, 2022
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-transfer-printed compound sensor device
- Patent number 11,230,471
- Issue date Jan 25, 2022
- X-CELEPRINT LIMITED
- Ronald S. Cok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a semiconductor device, and a semiconductor...
- Patent number 10,607,843
- Issue date Mar 31, 2020
- TOSHIBA MEMORY CORPORATION
- Shinya Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro devices formed by flex circuit substrates
- Patent number 10,512,164
- Issue date Dec 17, 2019
- Encite LLC
- Stephen A. Marsh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Externally induced charge patterning using rectifying devices
- Patent number 10,141,285
- Issue date Nov 27, 2018
- Palo Alto Research Center Incorporated
- JengPing Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an electromechanical device and correspond...
- Patent number 9,944,512
- Issue date Apr 17, 2018
- TRONICS MICROSYSTEMS
- Joël Collet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device, electronic apparatus, and method of manufacturin...
- Patent number 9,520,812
- Issue date Dec 13, 2016
- Seiko Epson Corporation
- Yoshio Maeda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Joining method and joint for microfluidic components
- Patent number 9,333,707
- Issue date May 10, 2016
- Boehringer Ingelheim microParts GmbH
- Christian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Alignment methods in fluid-filled MEMS displays
- Patent number 9,274,333
- Issue date Mar 1, 2016
- Pixtronix, Inc.
- Nesbitt W. Hagood
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Eutectic bonding of thin chips on a carrier substrate
- Patent number 9,266,721
- Issue date Feb 23, 2016
- Robert Bosch GmbH
- Andreas Pruemm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Alignment methods in fluid-filled MEMS displays
- Patent number 9,229,222
- Issue date Jan 5, 2016
- Pixtronix, Inc.
- Nesbitt W. Hagood
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone and method to position a membrane between two backplates
- Patent number 9,197,967
- Issue date Nov 24, 2015
- EPCOS AG
- Dennis Mortensen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for self-aligning and affixing of a microchannel plate in a...
- Patent number 9,007,784
- Issue date Apr 14, 2015
- Bayer Intellectual Property GmbH
- Jan-Peter Hauschild
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for grasping and active release of micro and nano objects
- Patent number 8,979,149
- Issue date Mar 17, 2015
- Yu Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing multi-level, silicon, micromechanical parts...
- Patent number 8,501,584
- Issue date Aug 6, 2013
- Eta Sa Manufacture Horlogère Suisse
- Philippe Marmy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing vibrating micromechanical structures
- Patent number 8,453,312
- Issue date Jun 4, 2013
- Honeywell International Inc.
- Ijaz H. Jafri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer arrangement and a method for manufacturing the wafer arrangement
- Patent number 8,319,302
- Issue date Nov 27, 2012
- Agency for Science, Technology and Research
- Qingxin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor and method of manufacturing acceleration sensor
- Patent number 8,276,449
- Issue date Oct 2, 2012
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for measuring alignment of adjoining structures
- Patent number 8,195,420
- Issue date Jun 5, 2012
- Comissariat a l'Energie
- Francois De Crecy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembling substrates that can form 3-D structures
- Patent number 7,993,968
- Issue date Aug 9, 2011
- Metamems Corp.
- Thaddeus John Gabara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonded wafer assembly system and method
- Patent number 7,943,489
- Issue date May 17, 2011
- Texas Instruments Incorporated
- Daryl Ross Koehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Alignment method of two substrates by microcoils
- Patent number 7,902,837
- Issue date Mar 8, 2011
- Commissariat a l'Energie Atomique
- Maxime Rousseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Re-assembly process for MEMS structures
- Patent number 7,897,435
- Issue date Mar 1, 2011
- FormFactor, Inc.
- Benjamin N. Eldridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for packaging semiconductor device and package structure the...
- Patent number 7,855,424
- Issue date Dec 21, 2010
- Advanced Semiconductor Engineering, Inc.
- Chain-Hau Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing vibrating micromechanical structures
- Patent number 7,836,574
- Issue date Nov 23, 2010
- Honeywell International Inc.
- Ijaz H. Jafri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of assembling micro electromechanical syst...
- Patent number 7,833,829
- Issue date Nov 16, 2010
- Honeywell International Inc.
- Mark Eskridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Placing a MEMS part on an application platform using a guide mask
- Patent number 7,811,849
- Issue date Oct 12, 2010
- WinMEMS Technologies Co., Ltd.
- Tseng-Yang Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SOUND PRODUCING CELL
- Publication number 20240031740
- Publication date Jan 25, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
- Publication number 20240022859
- Publication date Jan 18, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
- Publication number 20220340416
- Publication date Oct 27, 2022
- TOP TECHNOLOGY LTD
- Youngho LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE S...
- Publication number 20220324703
- Publication date Oct 13, 2022
- Federico RIBET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR MONITORING SURFACE CONDITION OF CONTACT SURFA...
- Publication number 20220002148
- Publication date Jan 6, 2022
- National Taiwan University
- Wei-Chang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-electromechanical (MEM) Power Relay
- Publication number 20210139322
- Publication date May 13, 2021
- Massachusetts Institute of Technology
- Prashant Patil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro Devices Formed by Flex Circuit Substrates
- Publication number 20200084892
- Publication date Mar 12, 2020
- ENCITE LLC
- Stephen A. Marsh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND A SEMICONDUCTOR...
- Publication number 20190088493
- Publication date Mar 21, 2019
- Toshiba Memory Corporation
- Shinya WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPOND...
- Publication number 20170305739
- Publication date Oct 26, 2017
- TRONIC'S MICROSYSTEMS
- Joël COLLET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microphone and Method to Position a Membrane Between Two Backplates
- Publication number 20140037121
- Publication date Feb 6, 2014
- EPCOS AG
- Dennis Mortensen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURIN...
- Publication number 20130320803
- Publication date Dec 5, 2013
- SEIKO EPSON CORPORATION
- Yoshio MAEDA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EUTECTIC BONDING OF THIN CHIPS ON A CARRIER SUBSTRATE
- Publication number 20130241012
- Publication date Sep 19, 2013
- ROBERT BOSCH GmbH
- Andreas Pruemm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALIGNMENT METHODS IN FLUID-FILLED MEMS DISPLAYS
- Publication number 20130010341
- Publication date Jan 10, 2013
- Pixtronix, Inc.
- Nesbitt W. Hagood
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES
- Publication number 20120273455
- Publication date Nov 1, 2012
- CLEAN ENERGY LABS, LLC
- William Martin Lackowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
JOINING METHOD AND JOINT FOR MICROFLUIDIC COMPONENTS
- Publication number 20120275972
- Publication date Nov 1, 2012
- Boehringer Ingelheim microParts GmbH
- Christian Schoen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CONTAINERS ASSEMBLED IN FLUID AND CORRESPONDING PRODUCTION
- Publication number 20120145572
- Publication date Jun 14, 2012
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Juergen Brugger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR GRASPING AND ACTIVE RELEASE OF MICRO AND NANO OBJECTS
- Publication number 20110299969
- Publication date Dec 8, 2011
- Yu Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO FIXTURE
- Publication number 20110002109
- Publication date Jan 6, 2011
- Bayer Technology Services GmbH
- Jan-Peter Hauschild
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ASSEMBLING SUBSTRATES THAT CAN FORM 3-D STRUCTURES
- Publication number 20100258951
- Publication date Oct 14, 2010
- METAMEMS Corp.
- Thaddeus Gabara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER ARRANGEMENT AND A METHOD FOR MANUFACTURING THE WAFER ARRANGEMENT
- Publication number 20100219496
- Publication date Sep 2, 2010
- Agency for Science ,Technology and Research
- Qingxin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF ASSEMBLING MICRO ELECTROMECHANICAL SYST...
- Publication number 20100105167
- Publication date Apr 29, 2010
- Honeywell International Inc.
- Mark Eskridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Assembling Stacked Substrates That Can Form 3-D Structures
- Publication number 20100097776
- Publication date Apr 22, 2010
- LCtank LLC
- Thaddeus Gabara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bonded Wafer Assembly System and Method
- Publication number 20100075482
- Publication date Mar 25, 2010
- Daryl Ross Koehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Acceleration sensor and method of manufacturing acceleration sensor
- Publication number 20100064808
- Publication date Mar 18, 2010
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MULTI-LEVEL, SILICON, MICROMECHANICAL PARTS...
- Publication number 20100054092
- Publication date Mar 4, 2010
- ETA SA Manufacture Horlogere Suisse
- Philippe Marmy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device for Measuring Alignment of Adjoining Structures
- Publication number 20100049467
- Publication date Feb 25, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François De Crecy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS BUMP PATTERN DIE ALIGNMENT SYSTEMS AND METHODS
- Publication number 20100020517
- Publication date Jan 28, 2010
- Honeywell International Inc.
- Bryan Seppala
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PACKAGING A DISPLAY DEVICE AND THE DEVICE OBTAINED THEREOF
- Publication number 20090323165
- Publication date Dec 31, 2009
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Alignment method of two substrates by microcoils
- Publication number 20090215207
- Publication date Aug 27, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Maxime Rousseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLACING A MEMS PART ON AN APPLICATION PLATFORM USING A GUIDE MASK
- Publication number 20090191661
- Publication date Jul 30, 2009
- Tseng-Yang Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Active alignment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sound producing cell and manufacturing method thereof

Micro-electromechanical (MEM) power relay

Method for producing MEMS transducer, MEMS transducer, ultrasound p...

System and methods for microfabrication

Micro-transfer-printed compound sensor device

Method of manufacturing a semiconductor device, and a semiconductor...

Micro devices formed by flex circuit substrates

Externally induced charge patterning using rectifying devices

Method for manufacturing an electromechanical device and correspond...

Electronic device, electronic apparatus, and method of manufacturin...

Joining method and joint for microfluidic components

Alignment methods in fluid-filled MEMS displays

Eutectic bonding of thin chips on a carrier substrate

Alignment methods in fluid-filled MEMS displays

Microphone and method to position a membrane between two backplates

Device for self-aligning and affixing of a microchannel plate in a...

Device for grasping and active release of micro and nano objects

Method of manufacturing multi-level, silicon, micromechanical parts...

Method of manufacturing vibrating micromechanical structures

Wafer arrangement and a method for manufacturing the wafer arrangement

Acceleration sensor and method of manufacturing acceleration sensor

Device for measuring alignment of adjoining structures

Assembling substrates that can form 3-D structures

Bonded wafer assembly system and method

Alignment method of two substrates by microcoils

Re-assembly process for MEMS structures

Method for packaging semiconductor device and package structure the...

Method of manufacturing vibrating micromechanical structures

MEMS devices and methods of assembling micro electromechanical syst...

Placing a MEMS part on an application platform using a guide mask

Patents Applicationslast 30 patents

SOUND PRODUCING CELL

PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF

A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE S...

DEVICE AND METHOD FOR MONITORING SURFACE CONDITION OF CONTACT SURFA...

Micro-electromechanical (MEM) Power Relay

Micro Devices Formed by Flex Circuit Substrates

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND A SEMICONDUCTOR...

METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPOND...

Microphone and Method to Position a Membrane Between Two Backplates

ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURIN...

EUTECTIC BONDING OF THIN CHIPS ON A CARRIER SUBSTRATE

ALIGNMENT METHODS IN FLUID-FILLED MEMS DISPLAYS

METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES

JOINING METHOD AND JOINT FOR MICROFLUIDIC COMPONENTS

CONTAINERS ASSEMBLED IN FLUID AND CORRESPONDING PRODUCTION

DEVICE FOR GRASPING AND ACTIVE RELEASE OF MICRO AND NANO OBJECTS

MICRO FIXTURE

ASSEMBLING SUBSTRATES THAT CAN FORM 3-D STRUCTURES

WAFER ARRANGEMENT AND A METHOD FOR MANUFACTURING THE WAFER ARRANGEMENT

MEMS DEVICES AND METHODS OF ASSEMBLING MICRO ELECTROMECHANICAL SYST...

Assembling Stacked Substrates That Can Form 3-D Structures

Bonded Wafer Assembly System and Method

Acceleration sensor and method of manufacturing acceleration sensor

METHOD OF MANUFACTURING MULTI-LEVEL, SILICON, MICROMECHANICAL PARTS...

Device for Measuring Alignment of Adjoining Structures

MEMS BUMP PATTERN DIE ALIGNMENT SYSTEMS AND METHODS

METHOD FOR PACKAGING A DISPLAY DEVICE AND THE DEVICE OBTAINED THEREOF

Alignment method of two substrates by microcoils

PLACING A MEMS PART ON AN APPLICATION PLATFORM USING A GUIDE MASK