Membership
Tour
Register
Log in
Air gaps
Follow
Industry
CPC
H01L21/764
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/764
Air gaps
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,972,984
Issue date
Apr 30, 2024
United Microelectronics Corp.
Ching-Ling Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing thereof
Patent number
11,961,899
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and manufacturing method of semiconduct...
Patent number
11,963,351
Issue date
Apr 16, 2024
SK hynix Inc.
Nam Jae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bottom implant and airgap isolation for nanosheet semiconductor dev...
Patent number
11,948,832
Issue date
Apr 2, 2024
Applied Materials, Inc.
Yan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, air-gap dielectric layer, and dynamic random-access...
Patent number
11,948,805
Issue date
Apr 2, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xin Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device cavity formation using directional deposition
Patent number
11,942,361
Issue date
Mar 26, 2024
Applied Materials, Inc.
Armin Saeedi Vahdat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,935,920
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Memory device including voids between control gates
Patent number
11,923,407
Issue date
Mar 5, 2024
Micron Technology, Inc.
Chris M. Carlson
G11 - INFORMATION STORAGE
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,923,242
Issue date
Mar 5, 2024
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device and semiconductor device
Patent number
11,915,967
Issue date
Feb 27, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Kui Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device having a bit line and a main insulating s...
Patent number
11,908,797
Issue date
Feb 20, 2024
Samsung Electronics Co., Ltd.
Jiyoung Ahn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatuses comprising vertical transistors having gate electrodes...
Patent number
11,908,932
Issue date
Feb 20, 2024
Micron Technology, Inc.
Fatma Arzum Simsek-Ege
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing same
Patent number
11,910,608
Issue date
Feb 20, 2024
Kioxia Corporation
Shinya Arai
G11 - INFORMATION STORAGE
Information
Patent Grant
Method of manufacturing a FinFET by implanting a dielectric with a...
Patent number
11,901,455
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Su-Hao Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned contact air gap formation
Patent number
11,901,408
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kai-Hsuan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,901,424
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with air gap below landing pad and method for...
Patent number
11,894,304
Issue date
Feb 6, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Tsung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replacement material for backside gate cut feature
Patent number
11,894,260
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wang-Chun Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure with air gap
Patent number
11,895,826
Issue date
Feb 6, 2024
NANYA TECHNOLOGY CORPORATION
Chin-Te Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
11,871,559
Issue date
Jan 9, 2024
Samsung Electronics Co., Ltd.
Hyeoung-won Seo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of cooling semiconductor devices
Patent number
11,869,804
Issue date
Jan 9, 2024
Micron Technology, Inc.
David H. Wells
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three-dimensional memory device including low-k drain-select-level...
Patent number
11,871,580
Issue date
Jan 9, 2024
SanDisk Technologies LLC
Peng Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFET device and method of forming same
Patent number
11,862,508
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo-Cyuan Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electronic device and method for fabricating the same
Patent number
11,854,981
Issue date
Dec 26, 2023
SK Hynix Inc.
Seong-Hyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices having air-gap
Patent number
11,855,178
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Hsiung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device for recessed fin structure having rounded corners
Patent number
11,855,222
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Yen Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,842,933
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Yu Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation of hybrid isolation regions through recess and re-deposition
Patent number
11,837,505
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layered insulating film stack
Patent number
11,823,955
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chieh-Ping Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor structure having air gap
Patent number
11,823,951
Issue date
Nov 21, 2023
NANYA TECHNOLOGY CORPORATION
Yao-Hsiung Kung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20240136418
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WALL THAT INCLUDES A GAS BETWEEN METAL GATES OF A SEMICONDUCTOR DEVICE
Publication number
20240113108
Publication date
Apr 4, 2024
Intel Corporation
Sukru YEMENICIOGLU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A SEMICONDUCTOR DEVICE FOR RECESSED FIN STRUCTURE HAVING ROUNDED CO...
Publication number
20240088297
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Yen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of Forming One or More Covered Voids in a Semiconductor Sub...
Publication number
20240087948
Publication date
Mar 14, 2024
Micron Technology, Inc.
David H. Wells
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR PREPARING THE SAME
Publication number
20240087895
Publication date
Mar 14, 2024
NANYA TECHNOLOGY CORPORATION
Cheng-Hsiang FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20240079451
Publication date
Mar 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ta-Chun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240063053
Publication date
Feb 22, 2024
ASM IP HOLDING B.V.
SangHeon Yong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEEP TRENCH CAPACITOR AND METHODS OF FORMING THE SAME
Publication number
20240047513
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shu-Hui SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF A SEMICONDUCTOR DE...
Publication number
20240038583
Publication date
Feb 1, 2024
SK HYNIX INC.
In Ku KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of Hybrid Isolation Regions Through Recess and Re-Deposition
Publication number
20240021482
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE HAVING EPITAXIAL STRUCTURE
Publication number
20240021465
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Sai-Hooi YEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH THROUGH VIA STRUCTURE AND METHOD FOR M...
Publication number
20240021497
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Bo LIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFET WITH SOURCE/DRAIN REGIONS COMPRISING AN INSULATOR LAYER
Publication number
20240021466
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH GATE STACK AND METHOD FOR FORMI...
Publication number
20240014041
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Huan-Chieh SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD FOR MAXIMIZING AIR GAP IN BACK END OF THE LINE...
Publication number
20240014133
Publication date
Jan 11, 2024
International Business Machines Corporation
Benjamin D. Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH AIR GAP BELOW LANDING PAD AND METHOD FOR...
Publication number
20240006321
Publication date
Jan 4, 2024
NANYA TECHNOLOGY CORPORATION
CHIH-TSUNG WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE
Publication number
20240008258
Publication date
Jan 4, 2024
WINBOND ELECTRONICS CORP.
Chang-Hung LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE INCLUDING DISCRETE DIELECTRIC MEMBER FOR PROTECTING FIRST...
Publication number
20230402317
Publication date
Dec 14, 2023
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
CURTIS CHUN-I HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH LEAKAGE CURRENT SUPPRESSION AND METHOD FO...
Publication number
20230395434
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-Yu Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE/DRAIN SILICIDE FOR MULTIGATE DEVICE PERFORMANCE AND METHOD O...
Publication number
20230387240
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ching Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFET STRUCTURE WITH CONTROLLED AIR GAPS
Publication number
20230386904
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Wen-Che Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-LAYERED INSULATING FILM STACK
Publication number
20230386931
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh-Ping Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR PREPARING THE SAME
Publication number
20230386842
Publication date
Nov 30, 2023
NANYA TECHNOLOGY CORPORATION
Cheng-Hsiang FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH AIR GAP AND METHOD FOR FORMING...
Publication number
20230387117
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Ruei JHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH CAPACITOR PROFILE TO DECREASE SUBSTRATE WARPAGE
Publication number
20230378251
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsin-Li Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD
Publication number
20230378001
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Yu Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device With Air Gaps Between Metal Gates And Method O...
Publication number
20230369128
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Wei-Lun Min
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIN FIELD EFFECT TRANSISTOR HAVING AIRGAP AND METHOD FOR MANUFACTUR...
Publication number
20230369120
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Sai-Hooi Yeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low Warpage High Density Trench Capacitor
Publication number
20230361166
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co. Ltd.
Jyun-Ying Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FETS and Methods of Forming FETS
Publication number
20230343635
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Ru Lee
H01 - BASIC ELECTRIC ELEMENTS