Anchors

Industry

CPC
B81C1/00039

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00039Anchors

Industries

Patents Grantslast 30 patents

Information Patent Grant
Micro-device structures with etch holes
- Patent number 11,952,266
- Issue date Apr 9, 2024
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 11,422,151
- Issue date Aug 23, 2022
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor module
- Patent number 11,293,821
- Issue date Apr 5, 2022
- Sciosense B.V.
- Roel Daamen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 11,259,105
- Issue date Feb 22, 2022
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices with an element having varying widths
- Patent number 11,130,670
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone, method of manufacturing the same and MEMS micropho...
- Patent number 10,848,876
- Issue date Nov 24, 2020
- DB HITEK CO., LTD.
- Min Hyun Jung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,841,711
- Issue date Nov 17, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,681,472
- Issue date Jun 9, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device arrangement
- Patent number 10,669,152
- Issue date Jun 2, 2020
- Agency for Science, Technology and Research
- Navab Singh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming micro-electro-mechanical devices including a con...
- Patent number 10,266,390
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device anchoring
- Patent number 9,708,177
- Issue date Jul 18, 2017
- Cavendish Kinetics, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-faced component-based electromechanical device
- Patent number 9,701,532
- Issue date Jul 11, 2017
- International Business Machines Corporation
- Qing Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual layer microelectromechanical systems device and method of manu...
- Patent number 9,617,147
- Issue date Apr 11, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for anchoring components in MEMS semiconductor...
- Patent number 9,458,010
- Issue date Oct 4, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical system and corresponding manufacturing method
- Patent number 9,309,107
- Issue date Apr 12, 2016
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS anchor and spacer structure
- Patent number 9,213,181
- Issue date Dec 15, 2015
- Pixtronix, Inc.
- Timothy J. Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming the same
- Patent number 9,181,083
- Issue date Nov 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a device comprising cavities formed between a...
- Patent number 9,029,178
- Issue date May 12, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Larrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for MEMS device fabrication and device formed
- Patent number 8,921,953
- Issue date Dec 30, 2014
- Cavendish Kinetics, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer deposition strengthening members and method of manufac...
- Patent number 8,900,906
- Issue date Dec 2, 2014
- Robert Bosch GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming the same
- Patent number 8,853,801
- Issue date Oct 7, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-posts having improved uniformity and a method of manufacture...
- Patent number 8,828,520
- Issue date Sep 9, 2014
- Alcatel Lucent
- Cristian A. Bolle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS coupler and method to form the same
- Patent number 8,716,815
- Issue date May 6, 2014
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device etch stop
- Patent number 8,633,554
- Issue date Jan 21, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for MEMS device fabrication and device formed
- Patent number 8,513,043
- Issue date Aug 20, 2013
- Cavendish Kinetics Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reduced stress anchors
- Patent number 8,383,442
- Issue date Feb 26, 2013
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device etch stop
- Patent number 8,368,152
- Issue date Feb 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for reduced stress anchors
- Patent number 8,039,912
- Issue date Oct 18, 2011
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS/NEMS structure comprising a partially monocrystalline anchor a...
- Patent number 7,981,715
- Issue date Jul 19, 2011
- Commissariat a l'Energie Atomique
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing micro electro mechanical systems device
- Patent number 7,972,886
- Issue date Jul 5, 2011
- Hitachi, Ltd.
- Heewon Jeong
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20240199413
- Publication date Jun 20, 2024
- X-Celprint Limited
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
- Publication number 20220326275
- Publication date Oct 13, 2022
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220324698
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20220112078
- Publication date Apr 14, 2022
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Pressure Sensor Module
- Publication number 20210055177
- Publication date Feb 25, 2021
- ams AG
- Roel DAAMEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200021920
- Publication date Jan 16, 2020
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200014994
- Publication date Jan 9, 2020
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE, METHOD OF MANUFACTURING THE SAME AND MEMS MICROPHO...
- Publication number 20190342670
- Publication date Nov 7, 2019
- DB HITEK CO., LTD.
- Min Hyun Jung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming the Same
- Publication number 20190248646
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190082269
- Publication date Mar 14, 2019
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-FACED COMPONENT-BASED ELECTROMECHANICAL DEVICE
- Publication number 20170081172
- Publication date Mar 23, 2017
- International Business Machines Corporation
- Qing Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...
- Publication number 20140322918
- Publication date Oct 30, 2014
- Cristian A. Bolle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE ANCHORING
- Publication number 20140300249
- Publication date Oct 9, 2014
- CAVENDISH KINETICS, INC.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A...
- Publication number 20140295606
- Publication date Oct 2, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Vincent Larrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED ELEVATED APERTURE LAYER AND DISPLAY APPARATUS
- Publication number 20140268273
- Publication date Sep 18, 2014
- Pixtronix, Inc.
- Timothy Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual Layer Microelectromechanical Systems Device and Method of Manu...
- Publication number 20140206123
- Publication date Jul 24, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR, OSCILLATOR, AND METHOD FOR FABRICATING OSCILLATOR
- Publication number 20140203883
- Publication date Jul 24, 2014
- NIHON DEMPA KOGYO CO., LTD.
- TAKAHIRO OHTSUKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED
- Publication number 20130299926
- Publication date Nov 14, 2013
- Mickael RENAULT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming the Same
- Publication number 20130277770
- Publication date Oct 24, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Atomic Layer Deposition Strengthening Members and Method of Manufac...
- Publication number 20130234270
- Publication date Sep 12, 2013
- ROBERT BOSCH GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE ETCH STOP
- Publication number 20130140653
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ANCHOR AND SPACER STRUCTURE
- Publication number 20120295058
- Publication date Nov 22, 2012
- Pixtronix, Inc.
- Timothy J. Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE ETCH STOP
- Publication number 20120261830
- Publication date Oct 18, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical system and corresponding manufacturing method
- Publication number 20120251799
- Publication date Oct 4, 2012
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED
- Publication number 20120181638
- Publication date Jul 19, 2012
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR REDUCED STRESS ANCHORS
- Publication number 20120070931
- Publication date Mar 22, 2012
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SYSTEM
- Publication number 20110068419
- Publication date Mar 24, 2011
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mems coupler and method to form the same
- Publication number 20110068422
- Publication date Mar 24, 2011
- Silicon Labs SC. Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PERFORMANCE-ENHANCING TWO-SIDED MEMS ANCHOR DESIGN FOR VERTICALLY I...
- Publication number 20100252897
- Publication date Oct 7, 2010
- INVENSENSE, INC.
- Joseph SEEGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS/NEMS STRUCTURE COMPRISING A PARTIALLY MONOCRYSTALLINE ANCHOR A...
- Publication number 20100006840
- Publication date Jan 14, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Philippe ROBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-device structures with etch holes

Capacitive microelectromechanical device and method for forming a c...

Pressure sensor module

MEMS microphone and method of manufacturing the same

MEMS devices with an element having varying widths

MEMS microphone, method of manufacturing the same and MEMS micropho...

MEMS microphone and method of manufacturing the same

MEMS microphone and method of manufacturing the same

Device arrangement

Methods of forming micro-electro-mechanical devices including a con...

MEMS device anchoring

Multi-faced component-based electromechanical device

Dual layer microelectromechanical systems device and method of manu...

Systems and methods for anchoring components in MEMS semiconductor...

Micromechanical system and corresponding manufacturing method

MEMS anchor and spacer structure

MEMS devices and methods of forming the same

Method for producing a device comprising cavities formed between a...

Method for MEMS device fabrication and device formed

Atomic layer deposition strengthening members and method of manufac...

MEMS devices and methods of forming the same

Micro-posts having improved uniformity and a method of manufacture...

MEMS coupler and method to form the same

MEMS device etch stop

Method for MEMS device fabrication and device formed

Methods for reduced stress anchors

MEMS device etch stop

Systems and methods for reduced stress anchors

MEMS/NEMS structure comprising a partially monocrystalline anchor a...

Method of manufacturing micro electro mechanical systems device

Patents Applicationslast 30 patents

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

Pressure Sensor Module

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS MICROPHONE, METHOD OF MANUFACTURING THE SAME AND MEMS MICROPHO...

MEMS Devices and Methods of Forming the Same

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MULTI-FACED COMPONENT-BASED ELECTROMECHANICAL DEVICE

MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...

MEMS DEVICE ANCHORING

METHOD FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A...

INTEGRATED ELEVATED APERTURE LAYER AND DISPLAY APPARATUS

Dual Layer Microelectromechanical Systems Device and Method of Manu...

RESONATOR, OSCILLATOR, AND METHOD FOR FABRICATING OSCILLATOR

METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED

MEMS Devices and Methods of Forming the Same

Atomic Layer Deposition Strengthening Members and Method of Manufac...

MEMS DEVICE ETCH STOP

MEMS ANCHOR AND SPACER STRUCTURE

MEMS DEVICE ETCH STOP

Micromechanical system and corresponding manufacturing method

METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED

METHODS FOR REDUCED STRESS ANCHORS

MICROMECHANICAL SYSTEM

Mems coupler and method to form the same

PERFORMANCE-ENHANCING TWO-SIDED MEMS ANCHOR DESIGN FOR VERTICALLY I...

MEMS/NEMS STRUCTURE COMPRISING A PARTIALLY MONOCRYSTALLINE ANCHOR A...