Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups B81B3/0005 - B81B3/0013

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B81B3/0016

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0016Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups B81B3/0005 - B81B3/0013

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sound producing cell and manufacturing method thereof
- Patent number 11,943,595
- Issue date Mar 26, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,305,988
- Issue date Apr 19, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drive component of a micro-needle system and method for driving the...
- Patent number 11,230,469
- Issue date Jan 25, 2022
- BOE Technology Group Co., Ltd.
- Zhidong Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
- Patent number 10,840,026
- Issue date Nov 17, 2020
- Wispry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS MEMS integrated device with increased shield vertical gap
- Patent number 10,773,947
- Issue date Sep 15, 2020
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for maintaining a smoothed and anti-stiction surf...
- Patent number 10,501,314
- Issue date Dec 10, 2019
- Robert Bosch GmbH
- Jochen Stehle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator and switch
- Patent number 10,457,543
- Issue date Oct 29, 2019
- Sony Corporation
- Shinya Morita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
- Patent number 10,354,804
- Issue date Jul 16, 2019
- Wispry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional element, electronic apparatus, and moving object
- Patent number 10,317,425
- Issue date Jun 11, 2019
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging for MEMS device
- Patent number 10,301,171
- Issue date May 28, 2019
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Siddharth Chakravarty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
- Patent number 10,062,517
- Issue date Aug 28, 2018
- Wispry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Translating Z axis accelerometer
- Patent number 9,840,409
- Issue date Dec 12, 2017
- Invensense, Inc.
- Matthew Julian Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active lateral force stiction self-recovery for microelectromechani...
- Patent number 9,213,045
- Issue date Dec 15, 2015
- FREESCALE SEMICONDUCTOR, INC.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Display device and method for manufacturing the same
- Patent number 9,134,531
- Issue date Sep 15, 2015
- Pixtronix, Inc.
- Masataka Okamoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Display device and method for manufacturing the same
- Patent number 8,743,446
- Issue date Jun 3, 2014
- Pixtronix, Inc.
- Masataka Okamoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with impacting structure for enhanced resistance to sti...
- Patent number 8,596,123
- Issue date Dec 3, 2013
- FREESCALE SEMICONDUCTOR, INC.
- Peter S. Schultz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable microstructure with contactless stops
- Patent number 6,909,530
- Issue date Jun 21, 2005
- PTS Corporation
- Lilac Muller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for overcoming stiction using a lever
- Patent number 6,859,580
- Issue date Feb 22, 2005
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical switch having a conductive compressible ele...
- Patent number 6,836,029
- Issue date Dec 28, 2004
- International Business Machines Corporation
- David R. Greenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bistable micromirror with contactless stops
- Patent number 6,778,304
- Issue date Aug 17, 2004
- PTS Corporation
- Lilac Muller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bistable micromirror with contactless stops
- Patent number 6,657,759
- Issue date Dec 2, 2003
- PTS Corporation
- Lilac Muller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Article comprising a casimir force modulator and methods therefor
- Patent number 6,650,527
- Issue date Nov 18, 2003
- Fabrizio Pinto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for overcoming stiction using a lever
- Patent number 6,625,342
- Issue date Sep 23, 2003
- Network Photonics, Inc.
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device including time-release passivant
- Patent number 5,939,785
- Issue date Aug 17, 1999
- Texas Instruments Incorporated
- Homer B. Klonis
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
- Publication number 20210134532
- Publication date May 6, 2021
- wiSpry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DRIVE COMPONENT OF A MICRO-NEEDLE SYSTEM AND METHOD FOR DRIVING THE...
- Publication number 20200071156
- Publication date Mar 5, 2020
- Boe Technology Group Co., Ltd.
- Zhidong WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
- Publication number 20190362899
- Publication date Nov 28, 2019
- wiSpry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PACKAGING FOR MEMS DEVICE
- Publication number 20190144265
- Publication date May 16, 2019
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Siddharth CHAKRAVARTY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method for Maintaining a Smoothed and Anti-Stiction Surf...
- Publication number 20190016592
- Publication date Jan 17, 2019
- ROBERT BOSCH GmbH
- Jochen Stehle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILANE MODIFIED FLUID FOR MEMS STICTION REDUCTION
- Publication number 20170003499
- Publication date Jan 5, 2017
- Pixtronix, Inc.
- Ji Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSLATING Z AXIS ACCELEROMETER
- Publication number 20160214853
- Publication date Jul 28, 2016
- InvenSense, Inc.
- Matthew Julian THOMPSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME
- Publication number 20160018636
- Publication date Jan 21, 2016
- PIXTRONIX INC.
- Hiroshi Kawanakago
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20150138617
- Publication date May 21, 2015
- Pixtronix, Inc.
- Masataka OKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGING METHOD FOR MEMS DEVICES
- Publication number 20140374847
- Publication date Dec 25, 2014
- Albert Hrovat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE LATERAL FORCE STICTION SELF-RECOVERY FOR MICROELECTROMECHANI...
- Publication number 20140345380
- Publication date Nov 27, 2014
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120307331
- Publication date Dec 6, 2012
- Hitachi Displays, Ltd.,
- Masataka OKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPACTING STRUCTURE FOR ENHANCED RESISTANCE TO STI...
- Publication number 20120280591
- Publication date Nov 8, 2012
- FREESCALE SEMICONDUCTOR, INC.
- Peter S. Schultz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Functional material for micro-mechanical systems
- Publication number 20060006484
- Publication date Jan 12, 2006
- Dilan Seneviratne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Movable microstructure with contactless stops
- Publication number 20040240021
- Publication date Dec 2, 2004
- PTS Corporation
- Lilac Muller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and methods for overcoming stiction using a lever
- Publication number 20040022483
- Publication date Feb 5, 2004
- Network Photonics, Inc.
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-electromechanical switch having a conductive compressible ele...
- Publication number 20030098618
- Publication date May 29, 2003
- International Business Machines Corporation
- David R. Greenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bistable micromirror with contactless stops
- Publication number 20030011863
- Publication date Jan 16, 2003
- Lilac Muller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and methods for overcoming stiction using a lever
- Publication number 20030007720
- Publication date Jan 9, 2003
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups B81B3/0005 - B81B3/0013

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sound producing cell and manufacturing method thereof

Method for preparing silicon wafer with rough surface and silicon w...

Drive component of a micro-needle system and method for driving the...

Method for preparing silicon wafer with rough surface and silicon w...

Micro-electro-mechanical system (MEMS) variable capacitor apparatus...

CMOS MEMS integrated device with increased shield vertical gap

System and method for maintaining a smoothed and anti-stiction surf...

Electrostatic actuator and switch

Micro-electro-mechanical system (MEMS) variable capacitor apparatus...

Functional element, electronic apparatus, and moving object

Wafer level packaging for MEMS device

Micro-electro-mechanical system (MEMS) variable capacitor apparatus...

MEMS and method for forming the same

Translating Z axis accelerometer

Active lateral force stiction self-recovery for microelectromechani...

Display device and method for manufacturing the same

Display device and method for manufacturing the same

MEMS device with impacting structure for enhanced resistance to sti...

Movable microstructure with contactless stops

Systems and methods for overcoming stiction using a lever

Micro-electromechanical switch having a conductive compressible ele...

Bistable micromirror with contactless stops

Bistable micromirror with contactless stops

Article comprising a casimir force modulator and methods therefor

Systems and methods for overcoming stiction using a lever

Micromechanical device including time-release passivant

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...

DRIVE COMPONENT OF A MICRO-NEEDLE SYSTEM AND METHOD FOR DRIVING THE...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...

WAFER LEVEL PACKAGING FOR MEMS DEVICE

System and Method for Maintaining a Smoothed and Anti-Stiction Surf...

SILANE MODIFIED FLUID FOR MEMS STICTION REDUCTION

TRANSLATING Z AXIS ACCELEROMETER

DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME

DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

PACKAGING METHOD FOR MEMS DEVICES

ACTIVE LATERAL FORCE STICTION SELF-RECOVERY FOR MICROELECTROMECHANI...

DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

MEMS DEVICE WITH IMPACTING STRUCTURE FOR ENHANCED RESISTANCE TO STI...

Functional material for micro-mechanical systems

Movable microstructure with contactless stops

Systems and methods for overcoming stiction using a lever

Micro-electromechanical switch having a conductive compressible ele...

Bistable micromirror with contactless stops

Systems and methods for overcoming stiction using a lever