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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0125
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Patents Grants
last 30 patents
Information
Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
Patent number
11,883,845
Issue date
Jan 30, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Chip package and manufacturing method thereof
Patent number
11,873,212
Issue date
Jan 16, 2024
Xintec Inc.
Wei-Luen Suen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,806,747
Issue date
Nov 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a membrane component and a membrane component
Patent number
11,708,265
Issue date
Jul 25, 2023
X-FAB Global Services GmbH
Steffen Leopold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure for integrated microphone
Patent number
11,678,133
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package comprising multi-depth trenches
Patent number
11,667,522
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for sensors on glass
Patent number
11,608,265
Issue date
Mar 21, 2023
Infineon Technologies AG
Stephan Pindl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
Patent number
11,583,894
Issue date
Feb 21, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
Patent number
11,571,711
Issue date
Feb 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,484,911
Issue date
Nov 1, 2022
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plurality of filters
Patent number
11,440,009
Issue date
Sep 13, 2022
Hewlett-Packard Development Company, L.P.
Chien-Hua Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer (CMUT) devices and m...
Patent number
11,440,051
Issue date
Sep 13, 2022
General Electric Company
Yizhen Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
Patent number
11,420,866
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
11,167,980
Issue date
Nov 9, 2021
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS structure and method of forming the same
Patent number
11,148,936
Issue date
Oct 19, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated package structure for MEMS element and ASIC chip and met...
Patent number
11,130,674
Issue date
Sep 28, 2021
J-METRICS TECHNOLOGY CO., LTD.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical sensor
Patent number
11,111,137
Issue date
Sep 7, 2021
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar electrode arrays and fabrication methods thereof
Patent number
10,969,359
Issue date
Apr 6, 2021
National Technology & Engineering Solutions of Sandia, LLC
Eric John Schindelholz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
Patent number
10,961,118
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
Patent number
10,899,608
Issue date
Jan 26, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-depth MEMS package
Patent number
10,865,102
Issue date
Dec 15, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a microphone
Patent number
10,779,100
Issue date
Sep 15, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming multi-depth MEMS package
Patent number
10,752,495
Issue date
Aug 25, 2020
Taiwan Semiconductor Maufacturing Co., LTD
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,589,991
Issue date
Mar 17, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,589,992
Issue date
Mar 17, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
Patent number
10,556,792
Issue date
Feb 11, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming multi-depth MEMS package
Patent number
10,556,790
Issue date
Feb 11, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,549,987
Issue date
Feb 4, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS structure and method of forming the same
Patent number
10,508,027
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS structure and method of forming the same
Patent number
10,046,965
Issue date
Aug 14, 2018
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20240100566
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND FORMATION METHOD THEREFOR
Publication number
20240027488
Publication date
Jan 25, 2024
SEMICONDUCTOR MANUFACTURING ELECTRONICS (SHAOXING) CORPORATION
Zhaolin ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20230149976
Publication date
May 18, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20230149977
Publication date
May 18, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...
Publication number
20230045432
Publication date
Feb 9, 2023
Industrial Technology Research Institute
Chin-Jou KUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20230017034
Publication date
Jan 19, 2023
BFLY Operations, Inc
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20220306454
Publication date
Sep 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for Sensors on Glass
Publication number
20220009771
Publication date
Jan 13, 2022
INFINEON TECHNOLOGIES AG
Stephan Pindl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20210292157
Publication date
Sep 23, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20210269303
Publication date
Sep 2, 2021
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DEVICES AND M...
Publication number
20210260622
Publication date
Aug 26, 2021
GENERAL ELECTRIC COMPANY
Yizhen Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MEMBRANE COMPONENT AND A MEMBRANE COMPONENT
Publication number
20210206629
Publication date
Jul 8, 2021
X-FAB Global Services GmbH
Steffen Leopold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
Publication number
20210139321
Publication date
May 13, 2021
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE
Publication number
20210078858
Publication date
Mar 18, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE
Publication number
20200346923
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20200324319
Publication date
Oct 15, 2020
Butterfly Network, Inc.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20200269279
Publication date
Aug 27, 2020
Butterfly Network, Inc.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED PACKAGE STRUCTURE FOR MEMS ELEMENT AND ASIC CHIP AND MET...
Publication number
20200262700
Publication date
Aug 20, 2020
J-METRICS TECHNOLOGY Co., Ltd.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...
Publication number
20200216307
Publication date
Jul 9, 2020
CSMC TECHNOLOGIES FAB2 CO., LTD.
Dan Dai
B60 - VEHICLES IN GENERAL
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20200156110
Publication date
May 21, 2020
Butterfly Network, Inc.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...
Publication number
20200156111
Publication date
May 21, 2020
VERMON S.A.
Dominique GROSS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20200140266
Publication date
May 7, 2020
Taiwan Semiconductor Manufacturing company Ltd.
JUNG-HUEI PENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE
Publication number
20200109046
Publication date
Apr 9, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
Publication number
20200024136
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
Publication number
20200024137
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
Publication number
20190233280
Publication date
Aug 1, 2019
Shenyang Silicon Technology Co., Ltd.
Xiang LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
Publication number
20190161346
Publication date
May 30, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Yi-Chia Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY