Bonding or gluing multiple substrate layers

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CPC
B81C2201/019

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/019Bonding or gluing multiple substrate layers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a micro-fluid probe
- Patent number 12,286,344
- Issue date Apr 29, 2025
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level microelectromechanical system structure with non-photod...
- Patent number 12,252,396
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Christopher Murray Beard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing cavities using membranes
- Patent number 12,234,144
- Issue date Feb 25, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Thierry Salvetat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterned structured transfer tape
- Patent number 12,172,417
- Issue date Dec 24, 2024
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated analysis devices and related fabrication methods and ana...
- Patent number 12,071,340
- Issue date Aug 27, 2024
- BioNano Genomics, Inc.
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multilayer fluidic devices and methods for their fabrication
- Patent number 12,017,214
- Issue date Jun 25, 2024
- Illumina, Inc.
- Jeffrey S. Fisher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-pump fluidic strategy for fabricating perovskite microwire ar...
- Patent number 12,005,445
- Issue date Jun 11, 2024
- King Abdullah University of Science and Technology
- Bin Xin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electrode and preparation method thereof
- Patent number 11,970,391
- Issue date Apr 30, 2024
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
- Patent number 11,945,712
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Implantable microneedle and manufacturing method therefor
- Patent number 11,938,308
- Issue date Mar 26, 2024
- SNVIA CO., LTD.
- Seung Yun Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,915,924
- Issue date Feb 27, 2024
- Denso Corporation
- Megumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chip package and manufacturing method thereof
- Patent number 11,873,212
- Issue date Jan 16, 2024
- Xintec Inc.
- Wei-Luen Suen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing at least one membrane system, membrane sys...
- Patent number 11,866,323
- Issue date Jan 9, 2024
- Robert Bosch GmbH
- Renate Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
- Patent number 11,845,653
- Issue date Dec 19, 2023
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
- Patent number 11,828,729
- Issue date Nov 28, 2023
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone device with single crystal piezoelectric film and method...
- Patent number 11,785,852
- Issue date Oct 10, 2023
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of room temperature covalent bonding
- Patent number 11,760,059
- Issue date Sep 19, 2023
- ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- Qin-Yi Tong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaging method and associated packaging structure
- Patent number 11,713,241
- Issue date Aug 1, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Ming Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOUND SENSOR AND MANUFACTURING METHOD
- Publication number 20250091860
- Publication date Mar 20, 2025
- Panasonic Intellectual Property Management Co., Ltd.
- Hiroki SAKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERNED STRUCTURED TRANSFER TAPE
- Publication number 20250058543
- Publication date Feb 20, 2025
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
- Publication number 20250019226
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240418510
- Publication date Dec 19, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
- Publication number 20240409397
- Publication date Dec 12, 2024
- Menlo Microsystems, Inc.
- Christopher F. Keimel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
- Publication number 20240400377
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20240383743
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION
- Publication number 20240375099
- Publication date Nov 14, 2024
- Illumina, Inc.
- Jeffrey S. FISHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
- Publication number 20240375942
- Publication date Nov 14, 2024
- Calient Technologies, Inc.
- Paul WALDROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
- Publication number 20240300808
- Publication date Sep 12, 2024
- Analog Devices, Inc.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
- Publication number 20240262682
- Publication date Aug 8, 2024
- ROBERT BOSCH GmbH
- Raphael Schuler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
- Publication number 20240230521
- Publication date Jul 11, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim BITTNER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20240199408
- Publication date Jun 20, 2024
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
- Publication number 20240182298
- Publication date Jun 6, 2024
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
- Publication number 20240133802
- Publication date Apr 25, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim BITTNER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
- Publication number 20240109769
- Publication date Apr 4, 2024
- XINTEC INC.
- Wei-Luen SUEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240108817
- Publication date Apr 4, 2024
- SNVIA CO., LTD.
- Seung Yun YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Bonding or gluing multiple substrate layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing a micro-fluid probe

Method and system for fabricating a MEMS device

Multi-level microelectromechanical system structure with non-photod...

Method for sealing cavities using membranes

Optical device production method

Method and system for fabricating a MEMS device

Patterned structured transfer tape

Microfluidic chip and fabrication method

MEMS device having an improved stress distribution and manufacturin...

Integrated analysis devices and related fabrication methods and ana...

On-chip integrated silicon carbide pressure and temperature sensors

Multilayer fluidic devices and methods for their fabrication

Micro-pump fluidic strategy for fabricating perovskite microwire ar...

Flexible electrode and preparation method thereof

Optical device production method

Capacitive micromachined ultrasonic transducer and method of fabric...

Process for manufacturing a micro-electro-mechanical device, and ME...

Implantable microneedle and manufacturing method therefor

MEMS device, manufacturing method of the same, and integrated MEMS...

Semiconductor device and method for manufacturing the same

Optical device production method

Chip package and manufacturing method thereof

Method for manufacturing at least one membrane system, membrane sys...

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Heterogenous integration of complementary metal-oxide-semiconductor...

Microfabricated ultrasonic transducers and related apparatus and me...

Microphone device with single crystal piezoelectric film and method...

Method of room temperature covalent bonding

Packaging method and associated packaging structure

Method for coating microstructured components

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

Membrane Device Fabrication

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

COMPOUND SENSOR AND MANUFACTURING METHOD

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

PATTERNED STRUCTURED TRANSFER TAPE

MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

INERTIAL SENSOR AND METHOD FOR FORMING THE SAME

MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME

MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...

METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

OPTICAL DEVICE PRODUCTION METHOD

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS

CHIP PACKAGE AND MANUFACTURING METHOD THEREOF

IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR