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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Manufacture or treatment of micro-structural devices or systems
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Bonding or gluing multiple substrate layers
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last 30 patents
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Patent Grant
Method of manufacturing a micro-fluid probe
Patent number
12,286,344
Issue date
Apr 29, 2025
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,258,266
Issue date
Mar 25, 2025
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Multi-level microelectromechanical system structure with non-photod...
Patent number
12,252,396
Issue date
Mar 18, 2025
Texas Instruments Incorporated
Christopher Murray Beard
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for sealing cavities using membranes
Patent number
12,234,144
Issue date
Feb 25, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Thierry Salvetat
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Optical device production method
Patent number
12,189,114
Issue date
Jan 7, 2025
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,180,069
Issue date
Dec 31, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Patterned structured transfer tape
Patent number
12,172,417
Issue date
Dec 24, 2024
3M Innovative Properties Company
Martin B. Wolk
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Microfluidic chip and fabrication method
Patent number
12,134,097
Issue date
Nov 5, 2024
Shanghai Tianma Micro-Electronics Co., Ltd.
Wei Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
MEMS device having an improved stress distribution and manufacturin...
Patent number
12,084,341
Issue date
Sep 10, 2024
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Integrated analysis devices and related fabrication methods and ana...
Patent number
12,071,340
Issue date
Aug 27, 2024
BioNano Genomics, Inc.
Han Cao
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
Patent number
12,044,585
Issue date
Jul 23, 2024
United States Government Administrator of NASA
Robert S. Okojie
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Multilayer fluidic devices and methods for their fabrication
Patent number
12,017,214
Issue date
Jun 25, 2024
Illumina, Inc.
Jeffrey S. Fisher
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micro-pump fluidic strategy for fabricating perovskite microwire ar...
Patent number
12,005,445
Issue date
Jun 11, 2024
King Abdullah University of Science and Technology
Bin Xin
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Flexible electrode and preparation method thereof
Patent number
11,970,391
Issue date
Apr 30, 2024
SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
Tianzhun Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
Patent number
11,944,998
Issue date
Apr 2, 2024
Korea Institute of Science and Technology
Byung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Implantable microneedle and manufacturing method therefor
Patent number
11,938,308
Issue date
Mar 26, 2024
SNVIA CO., LTD.
Seung Yun Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
Patent number
11,939,212
Issue date
Mar 26, 2024
Industrial Technology Research Institute
Heng-chung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor device and method for manufacturing the same
Patent number
11,915,924
Issue date
Feb 27, 2024
Denso Corporation
Megumi Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Optical device production method
Patent number
11,906,727
Issue date
Feb 20, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Chip package and manufacturing method thereof
Patent number
11,873,212
Issue date
Jan 16, 2024
Xintec Inc.
Wei-Luen Suen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for manufacturing at least one membrane system, membrane sys...
Patent number
11,866,323
Issue date
Jan 9, 2024
Robert Bosch GmbH
Renate Mueller
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Patent number
11,851,320
Issue date
Dec 26, 2023
The Johns Hopkins University
Gi-Dong Sim
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
Patent number
11,845,653
Issue date
Dec 19, 2023
MERIDIAN INNOVATION PTE LTD
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
Patent number
11,828,729
Issue date
Nov 28, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Microphone device with single crystal piezoelectric film and method...
Patent number
11,785,852
Issue date
Oct 10, 2023
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of room temperature covalent bonding
Patent number
11,760,059
Issue date
Sep 19, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Qin-Yi Tong
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Packaging method and associated packaging structure
Patent number
11,713,241
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for coating microstructured components
Patent number
11,701,478
Issue date
Jul 18, 2023
Boehringer Ingelheim International GmbH
Daniel Frache
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
Publication number
20250100869
Publication date
Mar 27, 2025
Qisda Corporation
Fu-Sheng Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
COMPOUND SENSOR AND MANUFACTURING METHOD
Publication number
20250091860
Publication date
Mar 20, 2025
Panasonic Intellectual Property Management Co., Ltd.
Hiroki SAKAMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20250074766
Publication date
Mar 6, 2025
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20250074764
Publication date
Mar 6, 2025
Beijing BOE Technology Development Co., Ltd.
Wenbo LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
PATTERNED STRUCTURED TRANSFER TAPE
Publication number
20250058543
Publication date
Feb 20, 2025
3M Innovative Properties Company
Martin B. Wolk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
Publication number
20250019226
Publication date
Jan 16, 2025
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
Publication number
20250011157
Publication date
Jan 9, 2025
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Frank Senger
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
Publication number
20240425359
Publication date
Dec 26, 2024
STMicroelectronics S.r.l
Nicolo' BONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
Publication number
20240417240
Publication date
Dec 19, 2024
CENTER FOR ADVANCED SOFT ELECTRONICS
Kilwon CHO
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240418510
Publication date
Dec 19, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
Publication number
20240409397
Publication date
Dec 12, 2024
Menlo Microsystems, Inc.
Christopher F. Keimel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
Publication number
20240400377
Publication date
Dec 5, 2024
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
Publication number
20240383743
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yu LIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION
Publication number
20240375099
Publication date
Nov 14, 2024
Illumina, Inc.
Jeffrey S. FISHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20240375940
Publication date
Nov 14, 2024
Murata Manufacturing Co., Ltd.
Masakazu FUKUMITSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
Publication number
20240375942
Publication date
Nov 14, 2024
Calient Technologies, Inc.
Paul WALDROP
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
Publication number
20240317577
Publication date
Sep 26, 2024
Mitsubishi Electric Corporation
Yusuke SHIRAYANAGI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
Publication number
20240300808
Publication date
Sep 12, 2024
Analog Devices, Inc.
Kemiao Jia
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20240280513
Publication date
Aug 22, 2024
Samsung Electronics Co., Ltd.
Jae Hong LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
Publication number
20240262682
Publication date
Aug 8, 2024
ROBERT BOSCH GmbH
Raphael Schuler
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
Publication number
20240246812
Publication date
Jul 25, 2024
University of Washington
Bo Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
Publication number
20240230521
Publication date
Jul 11, 2024
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim BITTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
Publication number
20240199408
Publication date
Jun 20, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
OPTICAL DEVICE PRODUCTION METHOD
Publication number
20240192483
Publication date
Jun 13, 2024
HAMAMATSU PHOTONICS K. K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
Publication number
20240182298
Publication date
Jun 6, 2024
ROBERT BOSCH GmbH
Johannes CLASSEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
Publication number
20240133802
Publication date
Apr 25, 2024
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim BITTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
Publication number
20240108817
Publication date
Apr 4, 2024
SNVIA CO., LTD.
Seung Yun YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
Publication number
20240044846
Publication date
Feb 8, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Publication number
20240034617
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing company Ltd.
JHENG-HONG JIANG
B81 - MICRO-STRUCTURAL TECHNOLOGY