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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

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Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 12,209,009
- Issue date Jan 28, 2025
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multistage micromechanical timepiece and method for making same
- Patent number 11,809,136
- Issue date Nov 7, 2023
- Csem Centre Suisse d'Electronique et de Microtechnique SA-Recherche et Develo...
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 11,780,725
- Issue date Oct 10, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detection of force applied by pick-up tool for transferring semicon...
- Patent number 11,756,810
- Issue date Sep 12, 2023
- Meta Platforms Technologies, LLC
- Oscar Torrents Abad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system package having movable platform
- Patent number 11,643,325
- Issue date May 9, 2023
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 11,465,901
- Issue date Oct 11, 2022
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device built using the BEOL metal layers of a solid state semi...
- Patent number 11,312,617
- Issue date Apr 26, 2022
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device built using the BEOL metal layers of a solid state semi...
- Patent number 11,267,692
- Issue date Mar 8, 2022
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
- Patent number 11,174,159
- Issue date Nov 16, 2021
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device having a first electrode formed on a movable susp...
- Patent number 10,948,513
- Issue date Mar 16, 2021
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contact in RF-switch
- Patent number 10,896,787
- Issue date Jan 19, 2021
- Cavendish Kinetics, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contact in RF-switch
- Patent number 10,867,756
- Issue date Dec 15, 2020
- Cavendish Kinetics, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,858,238
- Issue date Dec 8, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure gauge sensor and manufacturing method
- Patent number 10,768,064
- Issue date Sep 8, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Kevin Chau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS devices and nano devices with varying...
- Patent number 10,599,034
- Issue date Mar 24, 2020
- Funai Electric Co., Ltd.
- David L. Bernard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,589,982
- Issue date Mar 17, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid and m...
- Patent number 10,457,544
- Issue date Oct 29, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of sensor package
- Patent number 10,384,928
- Issue date Aug 20, 2019
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method for fabricating the same
- Patent number 10,081,533
- Issue date Sep 25, 2018
- Infineon Technologies AG
- Ulrich Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit comprising multi-layer micromechanical structure...
- Patent number 10,065,855
- Issue date Sep 4, 2018
- UNIVERISTAT POLITECNICA DE CATALUNYA
- Piotr Jozef Michalik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing thin-film support beam
- Patent number 9,862,595
- Issue date Jan 9, 2018
- CSMC Technologies FAB1 Co., Ltd.
- Errong Jing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration device including support portion
- Patent number 9,650,238
- Issue date May 16, 2017
- Electronics and Telecommunications Research Institute
- In Bok Baek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical devices and methods for fabrication of the same
- Patent number 9,624,098
- Issue date Apr 18, 2017
- The Trustees of Columbia University In the City of New York
- Sami Rosenblatt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a transducer apparatus
- Patent number 9,376,312
- Issue date Jun 28, 2016
- MCube Inc.
- Daniel N. Koury
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanisms for forming micro-electro mechanical system device
- Patent number 9,352,953
- Issue date May 31, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ren Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for adding mass with stress isolation to MEMS...
- Patent number 9,321,629
- Issue date Apr 26, 2016
- MCube Inc.
- Daniel N. Koury
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
- Publication number 20240359973
- Publication date Oct 31, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
- Publication number 20240279050
- Publication date Aug 22, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Zibo CAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
- Publication number 20240092634
- Publication date Mar 21, 2024
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20230406693
- Publication date Dec 21, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICRO MIRROR WITH CORRUGATED ACTUATOR AND SUSPENSION...
- Publication number 20230375825
- Publication date Nov 23, 2023
- INFINEON TECHNOLOGIES AG
- Christian BRETTHAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM
- Publication number 20230002214
- Publication date Jan 5, 2023
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20220259038
- Publication date Aug 18, 2022
- Vibrant Composites Inc.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL DEVICE HAVING A SOFT MAGNETIC MATERIAL ELEC...
- Publication number 20210395080
- Publication date Dec 23, 2021
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20210206624
- Publication date Jul 8, 2021
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20210053817
- Publication date Feb 25, 2021
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20200172391
- Publication date Jun 4, 2020
- PIXART IMAGING Inc.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20190308872
- Publication date Oct 10, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20190256353
- Publication date Aug 22, 2019
- VIBRANT COMPOSITES, INC.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OR SENSOR PACKAGE
- Publication number 20190241426
- Publication date Aug 8, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DEVICES USING MULTIPLE PHOTOACID GENE...
- Publication number 20190056659
- Publication date Feb 21, 2019
- Funai Electric Co., Ltd.
- Christopher A. CRAFT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DEVICES AND NANO DEVICES WITH VARYING...
- Publication number 20190056660
- Publication date Feb 21, 2019
- Funai Electric Co., Ltd.
- David L. BERNARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SENSOR USING 3D PRINTING AND 3D PRINTER THE...
- Publication number 20180312398
- Publication date Nov 1, 2018
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Woo Sug JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMPROVED CONTACT IN RF-SWITCH
- Publication number 20180308645
- Publication date Oct 25, 2018
- CAVENDISH KINETICS, INC.
- Robertus Petrus VAN KAMPEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE GAUGE SENSOR AND MANUFACTURING METHOD
- Publication number 20180275000
- Publication date Sep 27, 2018
- Institute of Geolgy and Geophysics, Chinese Academy of Sciences
- Kevin CHAU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...
- Publication number 20180179048
- Publication date Jun 28, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...
- Publication number 20180148329
- Publication date May 31, 2018
- UNIVERSITAT POLITECNICA DE CATALUNYA
- Piotr Jozef MICHALIK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM
- Publication number 20160229691
- Publication date Aug 11, 2016
- CSMC TECHNOLOGIES FABI CO., LTD.
- Errong JING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical Structure and Method for Fabricating the Same
- Publication number 20160031701
- Publication date Feb 4, 2016
- INFINEON TECHNOLOGIES AG
- Ulrich Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS
- Publication number 20140273283
- Publication date Sep 18, 2014
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS
- Publication number 20140264676
- Publication date Sep 18, 2014
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND STRUCTURE FOR ADDING MASS WITH STRESS ISOLATION TO MEMS...
- Publication number 20140199799
- Publication date Jul 17, 2014
- MCube Inc.
- DANIEL N. KOURY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nanoelectromechanical Logic Devices
- Publication number 20140113449
- Publication date Apr 24, 2014
- The University of Utah
- Massood Tabib-Azar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR AND FABRICATION METHOD THEREOF
- Publication number 20140077897
- Publication date Mar 20, 2014
- KOREA UNIVERSITY Industrial & Academic Collaboration Foundation
- Yun-kwon PARK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR DESIGN AND METHOD FOR MEMS TRANSDUCER APPARATUSES
- Publication number 20140024162
- Publication date Jan 23, 2014
- MCube Inc.
- DANIEL N. KOURY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOELECTROMECHANICAL LOGIC DEVICES
- Publication number 20140021982
- Publication date Jan 23, 2014
- University of Utah
- Massood Tabib-Azar
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device built using the BEOL metal layers of a solid state semi...

Multistage micromechanical timepiece and method for making same

MEMS device built using the BEOL metal layers of a solid state semi...

Detection of force applied by pick-up tool for transferring semicon...

Micro-electromechanical system package having movable platform

Sensor package having a movable sensor

High-volume millimeter scale manufacturing

Mems device built using the BEOL metal layers of a solid state semi...

Mems device built using the BEOL metal layers of a solid state semi...

Fence structure to prevent stiction in a MEMS motion sensor

Micro-electromechanical device having a soft magnetic material elec...

Electronic device having a first electrode formed on a movable susp...

Contact in RF-switch

Contact in RF-switch

Sensor package having a movable sensor

MEMS pressure gauge sensor and manufacturing method

Method for manufacturing MEMS devices and nano devices with varying...

Sensor package having a movable sensor

Fence structure to prevent stiction in a MEMS motion sensor

MEMS transducer for interacting with a volume flow of a fluid and m...

Manufacturing method of sensor package

Micromechanical structure and method for fabricating the same

Integrated circuit comprising multi-layer micromechanical structure...

MEMS and method for forming the same

Method for manufacturing thin-film support beam

Vibration device including support portion

Electromechanical devices and methods for fabrication of the same

Method for fabricating a transducer apparatus

Mechanisms for forming micro-electro mechanical system device

Method and structure for adding mass with stress isolation to MEMS...

Patents Applicationslast 30 patents

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS

METHOD FOR MANUFACTURING MIRROR DEVICE

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

PIEZOELECTRIC MICRO MIRROR WITH CORRUGATED ACTUATOR AND SUSPENSION...

MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

MICRO-ELECTROMECHANICAL DEVICE HAVING A SOFT MAGNETIC MATERIAL ELEC...

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

SENSOR PACKAGE HAVING A MOVABLE SENSOR

SENSOR PACKAGE HAVING A MOVABLE SENSOR

SENSOR PACKAGE HAVING A MOVABLE SENSOR

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

MANUFACTURING METHOD OR SENSOR PACKAGE

METHOD FOR MANUFACTURING MEMS DEVICES USING MULTIPLE PHOTOACID GENE...

METHOD FOR MANUFACTURING MEMS DEVICES AND NANO DEVICES WITH VARYING...

MANUFACTURING METHOD OF SENSOR USING 3D PRINTING AND 3D PRINTER THE...

IMPROVED CONTACT IN RF-SWITCH

MEMS PRESSURE GAUGE SENSOR AND MANUFACTURING METHOD

MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...

INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...

METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM

Micromechanical Structure and Method for Fabricating the Same

FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS

FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS

METHOD AND STRUCTURE FOR ADDING MASS WITH STRESS ISOLATION TO MEMS...

Nanoelectromechanical Logic Devices

RESONATOR AND FABRICATION METHOD THEREOF

ANCHOR DESIGN AND METHOD FOR MEMS TRANSDUCER APPARATUSES

NANOELECTROMECHANICAL LOGIC DEVICES