Bulk micromachining

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CPC
B81C2201/0111

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0111Bulk micromachining

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-nano channel structure, sensor and manufacturing method there...
- Patent number 11,905,163
- Issue date Feb 20, 2024
- BOE Technology Group Co., Ltd.
- Xiaochen Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS acoustic transducer with combfingered electrodes and correspon...
- Patent number 10,433,068
- Issue date Oct 1, 2019
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor devices with moving members and methods for making th...
- Patent number 10,087,069
- Issue date Oct 2, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical tuning of resonant scanning
- Patent number 9,869,858
- Issue date Jan 16, 2018
- Apple Inc.
- Yuval Gerson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS torsional electrostatic actuator
- Patent number 9,834,437
- Issue date Dec 5, 2017
- CSMC Technologies Fabi Co., Ltd.
- Errong Jing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of creating MEMS device cavities by a non-etching process
- Patent number 8,394,656
- Issue date Mar 12, 2013
- QUALCOMM MEMS Technologies, Inc.
- Chun-Ming Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-axis accelerometers and fabrication methods
- Patent number 8,372,677
- Issue date Feb 12, 2013
- Qualtre, Inc.
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-axis accelerometers and fabrication methods
- Patent number 8,173,470
- Issue date May 8, 2012
- Qualtre, Inc.
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-axis accelerometers and fabrication methods
- Patent number 7,892,876
- Issue date Feb 22, 2011
- Qualtre, Inc.
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of creating MEMS device cavities by a non-etching process
- Patent number 7,795,061
- Issue date Sep 14, 2010
- QUALCOMM MEMS Technologies, Inc.
- Chun-Ming Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-axis accelerometers
- Patent number 7,578,189
- Issue date Aug 25, 2009
- Qualtre, Inc.
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
- Publication number 20240300808
- Publication date Sep 12, 2024
- Analog Devices, Inc.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
- Publication number 20240092628
- Publication date Mar 21, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaochen MA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
- Publication number 20210229977
- Publication date Jul 29, 2021
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaochen MA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACOUSTIC TRANSDUCER WITH COMBFINGERED ELECTRODES AND CORRESPON...
- Publication number 20170339494
- Publication date Nov 23, 2017
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS TORSIONAL ELECTROSTATIC ACTUATOR
- Publication number 20170174508
- Publication date Jun 22, 2017
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Errong JING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Devices with Moving Members and Methods for Making th...
- Publication number 20170166435
- Publication date Jun 15, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrical tuning of resonant scanning
- Publication number 20170153445
- Publication date Jun 1, 2017
- Apple Inc.
- Yuval Gerson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
- Publication number 20170044010
- Publication date Feb 16, 2017
- MITSUBISHI ELECTRIC CORPORATION
- Tomoya HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICES WITH THINNED WAFER
- Publication number 20160332873
- Publication date Nov 17, 2016
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-Axis Accelerometers and Fabrication Methods
- Publication number 20120276674
- Publication date Nov 1, 2012
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS
- Publication number 20110209343
- Publication date Sep 1, 2011
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CREATING MEMS DEVICE CAVITIES BY A NON-ETCHING PROCESS
- Publication number 20100271688
- Publication date Oct 28, 2010
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chun-Ming Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS
- Publication number 20090280594
- Publication date Nov 12, 2009
- Qualtre, Inc.
- Mehran Mehregany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method of suspended microstructure
- Publication number 20070224720
- Publication date Sep 27, 2007
- DELTA ELECTRONICS, INC.
- Cheng-Chang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of creating MEMS device cavities by a non-etching process
- Publication number 20070155051
- Publication date Jul 5, 2007
- Chun-Ming Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Bulk micromachining

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-nano channel structure, sensor and manufacturing method there...

Field emission devices and methods of making thereof

MEMS acoustic transducer with combfingered electrodes and correspon...

Semiconductor devices with moving members and methods for making th...

Electrical tuning of resonant scanning

Method for manufacturing MEMS torsional electrostatic actuator

Method of creating MEMS device cavities by a non-etching process

Three-axis accelerometers and fabrication methods

Three-axis accelerometers and fabrication methods

Three-axis accelerometers and fabrication methods

Method of creating MEMS device cavities by a non-etching process

Three-axis accelerometers

Patents Applicationslast 30 patents

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...

MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...

MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...

MEMS ACOUSTIC TRANSDUCER WITH COMBFINGERED ELECTRODES AND CORRESPON...

METHOD FOR MANUFACTURING MEMS TORSIONAL ELECTROSTATIC ACTUATOR

Semiconductor Devices with Moving Members and Methods for Making th...

Electrical tuning of resonant scanning

SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...

DEVICES WITH THINNED WAFER

Three-Axis Accelerometers and Fabrication Methods

THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS

METHOD OF CREATING MEMS DEVICE CAVITIES BY A NON-ETCHING PROCESS

THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS

Manufacturing method of suspended microstructure

Method of creating MEMS device cavities by a non-etching process