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B81C2201/0111
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Current Industry
B81C2201/0111
Bulk micromachining
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Patents Grants
last 30 patents
Information
Patent Grant
Micro-nano channel structure, sensor and manufacturing method there...
Patent number
11,905,163
Issue date
Feb 20, 2024
BOE Technology Group Co., Ltd.
Xiaochen Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Field emission devices and methods of making thereof
Patent number
10,504,772
Issue date
Dec 10, 2019
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS acoustic transducer with combfingered electrodes and correspon...
Patent number
10,433,068
Issue date
Oct 1, 2019
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor devices with moving members and methods for making th...
Patent number
10,087,069
Issue date
Oct 2, 2018
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical tuning of resonant scanning
Patent number
9,869,858
Issue date
Jan 16, 2018
Apple Inc.
Yuval Gerson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing MEMS torsional electrostatic actuator
Patent number
9,834,437
Issue date
Dec 5, 2017
CSMC Technologies Fabi Co., Ltd.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of creating MEMS device cavities by a non-etching process
Patent number
8,394,656
Issue date
Mar 12, 2013
QUALCOMM MEMS Technologies, Inc.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-axis accelerometers and fabrication methods
Patent number
8,372,677
Issue date
Feb 12, 2013
Qualtre, Inc.
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-axis accelerometers and fabrication methods
Patent number
8,173,470
Issue date
May 8, 2012
Qualtre, Inc.
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-axis accelerometers and fabrication methods
Patent number
7,892,876
Issue date
Feb 22, 2011
Qualtre, Inc.
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of creating MEMS device cavities by a non-etching process
Patent number
7,795,061
Issue date
Sep 14, 2010
QUALCOMM MEMS Technologies, Inc.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-axis accelerometers
Patent number
7,578,189
Issue date
Aug 25, 2009
Qualtre, Inc.
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
Publication number
20240092628
Publication date
Mar 21, 2024
BOE TECHNOLOGY GROUP CO., LTD.
Xiaochen MA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
Publication number
20210229977
Publication date
Jul 29, 2021
BOE TECHNOLOGY GROUP CO., LTD.
Xiaochen MA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACOUSTIC TRANSDUCER WITH COMBFINGERED ELECTRODES AND CORRESPON...
Publication number
20170339494
Publication date
Nov 23, 2017
STMicroelectronics S.r.l.
Matteo PERLETTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS TORSIONAL ELECTROSTATIC ACTUATOR
Publication number
20170174508
Publication date
Jun 22, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Devices with Moving Members and Methods for Making th...
Publication number
20170166435
Publication date
Jun 15, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrical tuning of resonant scanning
Publication number
20170153445
Publication date
Jun 1, 2017
Apple Inc.
Yuval Gerson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
Publication number
20170044010
Publication date
Feb 16, 2017
MITSUBISHI ELECTRIC CORPORATION
Tomoya HIRATA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICES WITH THINNED WAFER
Publication number
20160332873
Publication date
Nov 17, 2016
INFINEON TECHNOLOGIES AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three-Axis Accelerometers and Fabrication Methods
Publication number
20120276674
Publication date
Nov 1, 2012
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS
Publication number
20110209343
Publication date
Sep 1, 2011
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF CREATING MEMS DEVICE CAVITIES BY A NON-ETCHING PROCESS
Publication number
20100271688
Publication date
Oct 28, 2010
QUALCOMM MEMS TECHNOLOGIES, INC.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-AXIS ACCELEROMETERS AND FABRICATION METHODS
Publication number
20090280594
Publication date
Nov 12, 2009
Qualtre, Inc.
Mehran Mehregany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method of suspended microstructure
Publication number
20070224720
Publication date
Sep 27, 2007
DELTA ELECTRONICS, INC.
Cheng-Chang Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of creating MEMS device cavities by a non-etching process
Publication number
20070155051
Publication date
Jul 5, 2007
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY