by doping limited material regions

Industry

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B81C2201/0136

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0136by doping limited material regions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,756,793
- Issue date Sep 12, 2023
- HITACHI HIGH-TECH CORPORATION
- Yohei Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone having improved sensitivity and method for the prod...
- Patent number 10,484,797
- Issue date Nov 19, 2019
- Epcos AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure processing method and microstructure processing appa...
- Patent number 10,336,609
- Issue date Jul 2, 2019
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for creating patterns
- Patent number 10,336,023
- Issue date Jul 2, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Nicolas Posseme
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,221,066
- Issue date Mar 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,196,262
- Issue date Feb 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching trenches in a substrate
- Patent number 8,993,451
- Issue date Mar 31, 2015
- FREESCALE SEMICONDUCTOR, INC.
- Srivatsa G. Kundalgurki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystal silicon membrane with a suspension layer, method for...
- Patent number 8,895,448
- Issue date Nov 25, 2014
- National Kaohsiung University of Applied Sciences
- Chung-Nan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for creating a micromechanical membrane structure and MEMS c...
- Patent number 8,691,611
- Issue date Apr 8, 2014
- Robert Bosch GmbH
- Arnim Hoechst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical diaphragm structure havi...
- Patent number 8,519,494
- Issue date Aug 27, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing micromechanical patterns having a relief-like...
- Patent number 8,501,516
- Issue date Aug 6, 2013
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an undercut microstructure
- Patent number 8,377,320
- Issue date Feb 19, 2013
- National Taipei University of Technology
- Tzyy-Jiann Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single SOI wafer accelerometer fabrication process
- Patent number 7,976,714
- Issue date Jul 12, 2011
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS/NEMS electromechanical component
- Patent number 7,906,439
- Issue date Mar 15, 2011
- Commissarit a l'Energie Atomique
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etching process
- Patent number 7,892,440
- Issue date Feb 22, 2011
- University of South Florida
- Shekhar Bhansali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing floating structure of microelectromechanic...
- Patent number 7,879,629
- Issue date Feb 1, 2011
- Electronics and Telecommunications Research Institute
- Sang-Choon Ko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical semiconductor sensor
- Patent number 7,843,025
- Issue date Nov 30, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to form a MEMS structure having a suspended portion
- Patent number 7,816,166
- Issue date Oct 19, 2010
- Silicon Labs SC, Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical components and production thereof
- Patent number 7,794,610
- Issue date Sep 14, 2010
- Commissariat a l'Energie Atomique
- Claire Divoux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing the same
- Patent number 7,701,022
- Issue date Apr 20, 2010
- Rohm Co., Ltd.
- Noriyuki Shimoji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a semiconductor component and a semiconduc...
- Patent number 7,679,154
- Issue date Mar 16, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Boron doped shell for MEMS device
- Patent number 7,563,720
- Issue date Jul 21, 2009
- Honeywell International Inc.
- James F. Detry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device and methods therefor
- Patent number 7,534,640
- Issue date May 19, 2009
- QUALCOMM MEMS Technologies, Inc.
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a membrane sensor
- Patent number 7,494,839
- Issue date Feb 24, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing semiconductor device
- Patent number 7,354,864
- Issue date Apr 8, 2008
- Rohm Co., Ltd.
- Noriyuki Shimoji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 7,306,966
- Issue date Dec 11, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etching process
- Patent number 7,255,800
- Issue date Aug 14, 2007
- University of South Florida
- Shekhar Bhansali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a micro machine
- Patent number 6,946,398
- Issue date Sep 20, 2005
- Fujitsu Limited
- Shoji Okuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a fluid injection device
- Patent number 6,824,960
- Issue date Nov 30, 2004
- Benq Corporation
- In-Yao Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with different doping types so that one t...
- Patent number 6,803,637
- Issue date Oct 12, 2004
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROSTRUCTURE PROCESSING METHOD AND MICROSTRUCTURE PROCESSING APPA...
- Publication number 20170362082
- Publication date Dec 21, 2017
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone Having Improved Sensitivity and Method for the Prod...
- Publication number 20170150277
- Publication date May 25, 2017
- EPCOS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICES WITH THINNED WAFER
- Publication number 20160332873
- Publication date Nov 17, 2016
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...
- Publication number 20160332871
- Publication date Nov 17, 2016
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Single Crystal Silicon Membrane with a Suspension Layer, Method for...
- Publication number 20130062738
- Publication date Mar 14, 2013
- Chung-Nan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING TRENCHES IN A SUBSTRATE
- Publication number 20120264307
- Publication date Oct 18, 2012
- FREESCALE SEMICONDUCTOR, INC.
- Srivatsa G. Kundalgurki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CREATING A MICROMECHANICAL MEMBRANE STRUCTURE AND MEMS C...
- Publication number 20120126346
- Publication date May 24, 2012
- Arnim Hoechst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MICROMECHANICAL PATTERNS HAVING A RELIEF-LIKE...
- Publication number 20120018779
- Publication date Jan 26, 2012
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING AN UNDERCUT MICROSTRUCTURE
- Publication number 20110250397
- Publication date Oct 13, 2011
- NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY
- Tzyy-Jiann WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micromechanical diaphragm structure havi...
- Publication number 20110147864
- Publication date Jun 23, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT
- Publication number 20100029031
- Publication date Feb 4, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SINGLE SOI WAFER ACCELEROMETER FABRICATION PROCESS
- Publication number 20090176370
- Publication date Jul 9, 2009
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
- Publication number 20090127640
- Publication date May 21, 2009
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BORON DOPED SHELL FOR MEMS DEVICE
- Publication number 20090026559
- Publication date Jan 29, 2009
- Honeywell International Inc.
- James F. Detry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING FLOATING STRUCTURE OF MICROELECTROMECHANIC...
- Publication number 20080233752
- Publication date Sep 25, 2008
- Sang-Choon KO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...
- Publication number 20080164576
- Publication date Jul 10, 2008
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semcoductor component and a semiconducto...
- Publication number 20080093694
- Publication date Apr 24, 2008
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Optical components and production therof
- Publication number 20070137989
- Publication date Jun 21, 2007
- Claire Divoux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Support structure for MEMS device and methods therefor
- Publication number 20070019922
- Publication date Jan 25, 2007
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of producing semiconductor device
- Publication number 20060141398
- Publication date Jun 29, 2006
- ROHM CO., LTD.
- Noriyuki Shimoji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semiconductor component, as well as a se...
- Publication number 20050181529
- Publication date Aug 18, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and method of producing the same
- Publication number 20050098855
- Publication date May 12, 2005
- Rohm Co., Ltd.
- Noriyuki Shimoji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20040266050
- Publication date Dec 30, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for fabricating a micro machine
- Publication number 20040053507
- Publication date Mar 18, 2004
- FUJITSU LIMITED
- Shoji Okuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing a fluid injection device
- Publication number 20030160023
- Publication date Aug 28, 2003
- BENO Corporation
- In-Yao Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a diaphragm sensor unit and diaphragm sensor unit
- Publication number 20030127699
- Publication date Jul 10, 2003
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponing production method
- Publication number 20030116813
- Publication date Jun 26, 2003
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing diaphragm sensor unit and diaphragm sensor unit
- Publication number 20030110867
- Publication date Jun 19, 2003
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Defined sacrifical region via ion implantation for micro-opto-elect...
- Publication number 20020110948
- Publication date Aug 15, 2002
- INTPAX, Inc.
- Liji Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spring structure with self-aligned release material
- Publication number 20020016095
- Publication date Feb 7, 2002
- Xerox Corporation.
- David K. Fork
- B81 - MICRO-STRUCTURAL TECHNOLOGY

by doping limited material regions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device manufacturing method

MEMS microphone having improved sensitivity and method for the prod...

Microstructure processing method and microstructure processing appa...

Method for creating patterns

Process for manufacturing a microelectromechanical interaction syst...

Process for manufacturing a microelectromechanical interaction syst...

Etching trenches in a substrate

Single crystal silicon membrane with a suspension layer, method for...

Method for creating a micromechanical membrane structure and MEMS c...

Method for manufacturing a micromechanical diaphragm structure havi...

Method for producing micromechanical patterns having a relief-like...

Method of forming an undercut microstructure

Single SOI wafer accelerometer fabrication process

Method of fabricating a MEMS/NEMS electromechanical component

Wet etching process

Method for manufacturing floating structure of microelectromechanic...

Micromechanical semiconductor sensor

Method to form a MEMS structure having a suspended portion

Optical components and production thereof

Semiconductor device and method of producing the same

Method for manufacturing a semiconductor component and a semiconduc...

Boron doped shell for MEMS device

Support structure for MEMS device and methods therefor

Method for manufacturing a membrane sensor

Method of producing semiconductor device

Method for producing a semiconductor component and a semiconductor...

Wet etching process

Method for fabricating a micro machine

Method of manufacturing a fluid injection device

Micromechanical component with different doping types so that one t...

Patents Applicationslast 30 patents

MICROSTRUCTURE PROCESSING METHOD AND MICROSTRUCTURE PROCESSING APPA...

MEMS Microphone Having Improved Sensitivity and Method for the Prod...

DEVICES WITH THINNED WAFER

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...

Single Crystal Silicon Membrane with a Suspension Layer, Method for...

ETCHING TRENCHES IN A SUBSTRATE

METHOD FOR CREATING A MICROMECHANICAL MEMBRANE STRUCTURE AND MEMS C...

METHOD FOR PRODUCING MICROMECHANICAL PATTERNS HAVING A RELIEF-LIKE...

METHOD OF FORMING AN UNDERCUT MICROSTRUCTURE

Method for manufacturing a micromechanical diaphragm structure havi...

METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT

SINGLE SOI WAFER ACCELEROMETER FABRICATION PROCESS

METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...

BORON DOPED SHELL FOR MEMS DEVICE

METHOD FOR MANUFACTURING FLOATING STRUCTURE OF MICROELECTROMECHANIC...

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...

Method for manufacturing a semcoductor component and a semiconducto...

Optical components and production therof

Support structure for MEMS device and methods therefor

Method of producing semiconductor device

Method for manufacturing a semiconductor component, as well as a se...

Semiconductor device and method of producing the same

Method for producing a semiconductor component and a semiconductor...

Method for fabricating a micro machine

Method of manufacturing a fluid injection device

Method for producing a diaphragm sensor unit and diaphragm sensor unit

Micromechanical component and corresponing production method

Method for producing diaphragm sensor unit and diaphragm sensor unit

Defined sacrifical region via ion implantation for micro-opto-elect...

Spring structure with self-aligned release material