by doping the layer

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B81C2201/0164

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0164by doping the layer

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Patents Grantslast 30 patents

Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, liquid discharge head, liquid discharge device, and liqui...
- Patent number 10,596,581
- Issue date Mar 24, 2020
- Ricoh Company, Ltd.
- Satoshi Mizukami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing resonant transducer
- Patent number 9,084,067
- Issue date Jul 14, 2015
- Yokogawa Electric Corporation
- Ryuichiro Noda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device including N-type doping for providing temper...
- Patent number 8,558,643
- Issue date Oct 15, 2013
- Teknologian Tutkimuskeskus VTT
- Mika Prunnila
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polysilicon deposition and anneal process enabling thick polysilico...
- Patent number 7,754,617
- Issue date Jul 13, 2010
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film structure and method for manufacturing the same, and acce...
- Patent number 7,371,600
- Issue date May 13, 2008
- Mitsubishi Denki Kabushiki Kaisha
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for depositing polycrystalline SiGe suitable for micromachin...
- Patent number 7,176,111
- Issue date Feb 13, 2007
- Interuniversitair Microelektronica Centrum (IMEC)
- Kris Baert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of advanced silicon-based MEMS devices
- Patent number 7,160,752
- Issue date Jan 9, 2007
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tensile-stressed microelectromechanical apparatus and micromirrors...
- Patent number 7,046,411
- Issue date May 16, 2006
- Sandia Corporation
- James G. Fleming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reducing the curvature in boron-doped silicon micromach...
- Patent number 6,969,425
- Issue date Nov 29, 2005
- Honeywell International Inc.
- Cleopatra Cabuz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reducing the curvature in boron-doped silicon micromach...
- Patent number 6,946,200
- Issue date Sep 20, 2005
- Honeywell International Inc.
- Cleopatra Cabuz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature plasma Si or SiGe for MEMS applications
- Patent number 6,770,569
- Issue date Aug 3, 2004
- Freescale Semiconductor, Inc.
- Juergen A. Foerstner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical and microoptomechanical structures with single crys...
- Patent number 6,661,070
- Issue date Dec 9, 2003
- Microscan Systems, Inc.
- Andrew J. Zosel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reducing the curvature in boron-doped silicon micromach...
- Patent number 6,544,655
- Issue date Apr 8, 2003
- Honeywell International Inc.
- Cleopatra Cabuz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-optical mechanical device having an implanted dopant...
- Patent number 6,522,801
- Issue date Feb 18, 2003
- Agere Systems Inc.
- Vladimir A. Aksyuk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method of a micromachine
- Patent number 6,503,775
- Issue date Jan 7, 2003
- Aisin Seiki Kabushiki Kaisha
- Satoru Nomoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing micromechanical and microoptomechanical s...
- Patent number 6,479,315
- Issue date Nov 12, 2002
- Microscan Systems, Inc.
- Andrew J. Zosel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for reducing variations in arrays of micro-machined cantilev...
- Patent number 6,410,912
- Issue date Jun 25, 2002
- Sarnoff Corporation
- Thomas Stephen Villani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating micromechanical components
- Patent number 6,251,699
- Issue date Jun 26, 2001
- Robert Bosch GmbH
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor sensor having suspended thin-film structure and metho...
- Patent number 5,922,212
- Issue date Jul 13, 1999
- Nippondenso Co., Ltd.
- Kazuhiko Kano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon membrane with controlled stress
- Patent number 5,110,373
- Issue date May 5, 1992
- Nanostructures, Inc.
- Philip E. Mauger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a silicon membrane with controlled stress
- Patent number 4,966,663
- Issue date Oct 30, 1990
- Nanostructures, Inc.
- Philip E. Mauger
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING RESONANT TRANSDUCER
- Publication number 20130139377
- Publication date Jun 6, 2013
- YOKOGAWA ELECTRIC CORPORATION
- Ryuichiro NODA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device and method of designing thereof
- Publication number 20120286903
- Publication date Nov 15, 2012
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Mika Prunnila
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...
- Publication number 20090042372
- Publication date Feb 12, 2009
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20060166403
- Publication date Jul 27, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method to fabricate a highly perforated silicon diaphragm with cont...
- Publication number 20040253760
- Publication date Dec 16, 2004
- Agency For Science, Technology and Research
- Qingxin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20040157426
- Publication date Aug 12, 2004
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low temperature plasma Si or SiGe for MEMS applications
- Publication number 20040023429
- Publication date Feb 5, 2004
- MOTOROLA INC.
- Juergen A. Foerstner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin-film structure and method for manufacturing the same, and acce...
- Publication number 20030180981
- Publication date Sep 25, 2003
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for reducing the curvature in boron-doped silicon micromach...
- Publication number 20030138588
- Publication date Jul 24, 2003
- Cleopatra Cabuz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for reducing the curvature in boron-doped silicon micromach...
- Publication number 20030129845
- Publication date Jul 10, 2003
- Cleopatra Cabuz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for depositing polycrystalline sige suitable for micromachin...
- Publication number 20030124761
- Publication date Jul 3, 2003
- Kris Baert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical and microoptomechanical structures with single crys...
- Publication number 20020197762
- Publication date Dec 26, 2002
- Microscan systems Incorporated
- Andrew J. Zosel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Application of a strain-compensated heavily doped etch stop for sil...
- Publication number 20020179563
- Publication date Dec 5, 2002
- Robert D. Horning
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Production method of a micromachine
- Publication number 20020037601
- Publication date Mar 28, 2002
- Aisin Seiki Kabushiki Kaisha
- Satoru Nomoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

by doping the layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS resonator with colocated temperature sensor

Actuator, liquid discharge head, liquid discharge device, and liqui...

Method of manufacturing resonant transducer

Micromechanical device including N-type doping for providing temper...

Polysilicon deposition and anneal process enabling thick polysilico...

Thin-film structure and method for manufacturing the same, and acce...

Method for depositing polycrystalline SiGe suitable for micromachin...

Fabrication of advanced silicon-based MEMS devices

Tensile-stressed microelectromechanical apparatus and micromirrors...

Methods for reducing the curvature in boron-doped silicon micromach...

Methods for reducing the curvature in boron-doped silicon micromach...

Low temperature plasma Si or SiGe for MEMS applications

Micromechanical and microoptomechanical structures with single crys...

Methods for reducing the curvature in boron-doped silicon micromach...

Micro-electro-optical mechanical device having an implanted dopant...

Production method of a micromachine

Process for manufacturing micromechanical and microoptomechanical s...

Method for reducing variations in arrays of micro-machined cantilev...

Method for fabricating micromechanical components

Semiconductor sensor having suspended thin-film structure and metho...

Silicon membrane with controlled stress

Method for forming a silicon membrane with controlled stress

Patents Applicationslast 30 patents

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

METHOD OF MANUFACTURING RESONANT TRANSDUCER

Micromechanical device and method of designing thereof

Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...

Fabrication of advanced silicon-based MEMS devices

Method to fabricate a highly perforated silicon diaphragm with cont...

Fabrication of advanced silicon-based MEMS devices

Low temperature plasma Si or SiGe for MEMS applications

Thin-film structure and method for manufacturing the same, and acce...

Methods for reducing the curvature in boron-doped silicon micromach...

Methods for reducing the curvature in boron-doped silicon micromach...

Method for depositing polycrystalline sige suitable for micromachin...

Micromechanical and microoptomechanical structures with single crys...

Application of a strain-compensated heavily doped etch stop for sil...

Production method of a micromachine