by heating

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CPC
C23C16/0209

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0209by heating

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for coating a metal workpiece with graphene
- Patent number 12,359,310
- Issue date Jul 15, 2025
- Ultra Conductive Copper Company, Inc.
- Horst Jakob Adams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,351,905
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aligned carbon nanotubes
- Patent number 12,240,760
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Suvi Haukka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Film forming method and tungsten film
- Patent number 12,227,843
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,222
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,216
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Film production method and electrode foil production method for pro...
- Patent number 12,112,896
- Issue date Oct 8, 2024
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Naomi Kurihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,060,370
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for suppressing material warpage by increasing gas density
- Patent number 12,040,239
- Issue date Jul 16, 2024
- ABLEPRINT TECHNOLOGY CO., LTD.
- Chih-Horng Horng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively depositing a metallic film on a substrate
- Patent number 12,033,861
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon monoxide composite material, method for preparing same, and...
- Patent number 11,996,549
- Issue date May 28, 2024
- Hong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide thin films and vapor deposition methods thereof
- Patent number 11,987,882
- Issue date May 21, 2024
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming RuSi film and substrate processing system
- Patent number 11,981,992
- Issue date May 14, 2024
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and device structure based upon directional seeding and...
- Patent number 11,956,978
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for fabricating high quality superconducting tapes
- Patent number 11,923,105
- Issue date Mar 5, 2024
- University of Houston System
- Goran Majkic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for high yield and high throughput production o...
- Patent number 11,866,333
- Issue date Jan 9, 2024
- GENERAL GRAPHENE CORPORATION
- Vig Sherrill
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods for high yield and high throughput production o...
- Patent number 11,866,334
- Issue date Jan 9, 2024
- GENERAL GRAPHENE CORPORATION
- Vig Sherrill
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods for high yield and high throughput production o...
- Patent number 11,858,813
- Issue date Jan 2, 2024
- GENERAL GRAPHENE CORPORATION
- Vig Sherrill
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods for high yield and high throughput production o...
- Patent number 11,827,519
- Issue date Nov 28, 2023
- GENERAL GRAPHENE CORPORATION
- Vig Sherrill
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 11,788,187
- Issue date Oct 17, 2023
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 11,788,189
- Issue date Oct 17, 2023
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group III nitride single crystal substrate
- Patent number 11,767,612
- Issue date Sep 26, 2023
- Tokuyama Corporation
- Masayuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molybdenum(0) precursors for deposition of molybdenum films
- Patent number 11,760,768
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Multilayer encapsulation stacks by atomic layer deposition
- Patent number 11,732,356
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 11,732,360
- Issue date Aug 22, 2023
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Takahiro Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preventing deposition on pedestal in semiconductor substrate proces...
- Patent number 11,725,285
- Issue date Aug 15, 2023
- Lam Research Corporation
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Assembly for the deposition of silicon nanostructures
- Patent number 11,718,909
- Issue date Aug 8, 2023
- UNIVERSITA' DEGLI STUDI DI ROMA “LA SAPIENZA”
- Fabrizio Palma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition on two sides of a web
- Patent number 11,695,125
- Issue date Jul 4, 2023
- AMPRIUS TECHNOLOGIES, INC.
- Ronald J. Mosso
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME
- Publication number 20250155069
- Publication date May 15, 2025
- Metal Industries Research & Development Centre
- Jia-Hao Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD FOR PREPARATION OF POROUS HARD-CARBON NANOSTRUCTURES AND A...
- Publication number 20250066904
- Publication date Feb 27, 2025
- INDIAN INSTITUTE OF TECHNOLOGY BOMBAY
- Subramaniam CHANDRAMOULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES
- Publication number 20250027198
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM PRODUCTION METHOD AND ELECTRODE FOIL PRODUCTION METHOD FOR PRO...
- Publication number 20240428997
- Publication date Dec 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- NAOMI KURIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION
- Publication number 20240379398
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yan-Chun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES
- Publication number 20240355688
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Molybdenum (0) Precursors For Deposition Of Molybdenum Films
- Publication number 20240343748
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287672
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE THIN FILMS AND VAPOR DEPOSITION METHODS THEREOF
- Publication number 20240271279
- Publication date Aug 15, 2024
- Gelest, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240234133
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMERIC FILMS AS AN ADHESIVE PROMOTION/BUFFER LAYER AT GLASS-DIEL...
- Publication number 20240186136
- Publication date Jun 6, 2024
- Intel Corporation
- Mahdi Mohammadighaleni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
- Publication number 20240071786
- Publication date Feb 29, 2024
- Viatron Co., Ltd.
- Hyoung June Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...
- Publication number 20240035150
- Publication date Feb 1, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...
- Publication number 20240035158
- Publication date Feb 1, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A CHAMBER COMPONENT
- Publication number 20240026530
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Kirk Allen FISHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE VAPOR DEPOSITION SYSTEM AND PROCESS
- Publication number 20230416908
- Publication date Dec 28, 2023
- Richard Tracy McDaniel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP III NITRIDE SINGLE CRYSTAL SUBSTRATE
- Publication number 20230407521
- Publication date Dec 21, 2023
- Tokuyama Corporation
- Masayuki FUKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20230382933
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD OF SELECTIVELY FORMING COBALT METAL LAYER BY USING COBALT CO...
- Publication number 20230257409
- Publication date Aug 17, 2023
- Samsung Electronics Co., Ltd.
- Soyoung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND TUNGSTEN FILM
- Publication number 20230227976
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR HIGH YIELD AND HIGH THROUGHPUT PRODUCTION O...
- Publication number 20230212737
- Publication date Jul 6, 2023
- General Graphene Corporation
- Vig Sherrill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL SYSTEMS AND METHODS FOR HIGH YIELD AND HIGH THROUGHPUT PRODUC...
- Publication number 20230193456
- Publication date Jun 22, 2023
- General Graphene Corporation
- Vig Sherrill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
- Publication number 20230167581
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Kartik Bhupendra SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SELECTIVELY DEPOSITING AN AMORPHOUS SILICON FILM ON A S...
- Publication number 20230160060
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION
- Publication number 20230143537
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Chun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION UTILIZING N-TYPE DOPANTS AND/OR AL...
- Publication number 20230145240
- Publication date May 11, 2023
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for coating a metal workpiece with graphene

Film forming method and film forming apparatus

Aligned carbon nanotubes

Film forming method and tungsten film

Depositing coatings on and within housings, apparatus, or tools uti...

Depositing coatings on and within housings, apparatus, or tools uti...

Integrated epitaxy and preclean system

Film production method and electrode foil production method for pro...

Substrate processing method and substrate processing apparatus

Molybdenum (0) precursors for deposition of molybdenum films

Method for suppressing material warpage by increasing gas density

Method for selectively depositing a metallic film on a substrate

Silicon monoxide composite material, method for preparing same, and...

Silicon carbide thin films and vapor deposition methods thereof

Method for forming RuSi film and substrate processing system

Techniques and device structure based upon directional seeding and...

Methods and systems for fabricating high quality superconducting tapes

Systems and methods for high yield and high throughput production o...

Systems and methods for high yield and high throughput production o...

Systems and methods for high yield and high throughput production o...

Systems and methods for high yield and high throughput production o...

Depositing coatings on and within housings, apparatus, or tools uti...

Depositing coatings on and within housings, apparatus, or tools uti...

Group III nitride single crystal substrate

Molybdenum(0) precursors for deposition of molybdenum films

Multilayer encapsulation stacks by atomic layer deposition

Film forming apparatus

Preventing deposition on pedestal in semiconductor substrate proces...

Assembly for the deposition of silicon nanostructures

Deposition on two sides of a web

Patents Applicationslast 30 patents

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

A METHOD FOR PREPARATION OF POROUS HARD-CARBON NANOSTRUCTURES AND A...

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES

FILM PRODUCTION METHOD AND ELECTRODE FOIL PRODUCTION METHOD FOR PRO...

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION

SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES

Molybdenum (0) Precursors For Deposition Of Molybdenum Films

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SILICON CARBIDE THIN FILMS AND VAPOR DEPOSITION METHODS THEREOF

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

POLYMERIC FILMS AS AN ADHESIVE PROMOTION/BUFFER LAYER AT GLASS-DIEL...

SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE

DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...

DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...

METHOD OF COATING A CHAMBER COMPONENT

GRAPHENE VAPOR DEPOSITION SYSTEM AND PROCESS

GROUP III NITRIDE SINGLE CRYSTAL SUBSTRATE

MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

METHOD OF SELECTIVELY FORMING COBALT METAL LAYER BY USING COBALT CO...

FILM FORMING METHOD AND TUNGSTEN FILM

SYSTEMS AND METHODS FOR HIGH YIELD AND HIGH THROUGHPUT PRODUCTION O...

NOVEL SYSTEMS AND METHODS FOR HIGH YIELD AND HIGH THROUGHPUT PRODUC...

WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER

METHODS FOR SELECTIVELY DEPOSITING AN AMORPHOUS SILICON FILM ON A S...

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION

METHODS FOR SELECTIVE DEPOSITION UTILIZING N-TYPE DOPANTS AND/OR AL...