by heating

Industry

CPC
B81B7/0096

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/0096by heating

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS sensor as well as method for operating a mems sensor
- Patent number 12,145,840
- Issue date Nov 19, 2024
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS humidity sensor
- Patent number 12,000,792
- Issue date Jun 4, 2024
- HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
- Han Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ovenized MEMS
- Patent number 11,909,354
- Issue date Feb 20, 2024
- SiTime Corporation
- Carl Arft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for detecting contamination of a MEMS sensor element
- Patent number 11,629,047
- Issue date Apr 18, 2023
- Robert Bosch GmbH
- Robert Kuells
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas detector and gas detection method
- Patent number 11,385,195
- Issue date Jul 12, 2022
- Figaro Engineering Inc.
- Kenichi Yoshioka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System with oven control and compensation for detecting motion and/...
- Patent number 11,125,772
- Issue date Sep 21, 2021
- BLILEY TECHNOLOGIES, INC.
- Jay Mitchell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,961,115
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system apparatus with heater
- Patent number 10,843,919
- Issue date Nov 24, 2020
- Industrial Technology Research Institute
- Peng-Jen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for sensor calibration
- Patent number 10,794,728
- Issue date Oct 6, 2020
- Invensense, Inc.
- Wesley James Emmanouel Teskey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stabilized MEMS device
- Patent number 10,676,345
- Issue date Jun 9, 2020
- Y-SENSORS LTD.
- Yishay Netzer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical apparatus for thermal energy control
- Patent number 10,393,718
- Issue date Aug 27, 2019
- Industrial Technology Research Institute
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System with oven control and compensation for detecting motion and/...
- Patent number 10,386,385
- Issue date Aug 20, 2019
- EPACK, INC.
- Jay Mitchell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas detector with a thermally uniform MEMS die
- Patent number 10,273,149
- Issue date Apr 30, 2019
- Carrier Corporation
- David P. Potasek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 9,567,209
- Issue date Feb 14, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with integrated temperature stabilization
- Patent number 9,409,768
- Issue date Aug 9, 2016
- Teledyne Scientific & Imaging, LLC
- Jeffrey F. DeNatale
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stabilitized MEMS
- Patent number 8,569,808
- Issue date Oct 29, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Tsun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isolated active temperature regulator for vacuum packaging of a dis...
- Patent number 8,327,526
- Issue date Dec 11, 2012
- The Boeing Company
- Howard H. Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device having integrated heating
- Patent number 7,564,338
- Issue date Jul 21, 2009
- Robert Bosch GmbH
- Richard Muehlheim
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Ovenized MEMS
- Publication number 20250007455
- Publication date Jan 2, 2025
- SiTime Corporation
- Carl Arft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Temperature Distribution of Microheater
- Publication number 20240336476
- Publication date Oct 10, 2024
- Saudi Arabian Oil Company
- Nadeem Qaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUIDIC SENSING ASSEMBLY WITH THERMAL PLATFORM
- Publication number 20240189814
- Publication date Jun 13, 2024
- Analog Devices, Inc.
- David Frank Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUIDIC SENSING ASSEMBLY WITH FLEXIBLE SUBSTRATE
- Publication number 20240189815
- Publication date Jun 13, 2024
- Analog Devices, Inc.
- David Frank Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HEATING DEVICE AND MICROFLUIDIC APPARATUS COMPRISING THE SAME
- Publication number 20230191406
- Publication date Jun 22, 2023
- CYTESI, INC.
- Tung-Yu WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230159322
- Publication date May 25, 2023
- Hyundai Motor Company
- Dae Sung Kwon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL HEATING DEVICE
- Publication number 20220267143
- Publication date Aug 25, 2022
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Ming-Fa CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS HUMIDITY SENSOR
- Publication number 20220244207
- Publication date Aug 4, 2022
- HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
- Han XIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AS WELL AS METHOD FOR OPERATING A MEMS SENSOR
- Publication number 20220009769
- Publication date Jan 13, 2022
- ROBERT BOSCH GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR ELEMENT
- Publication number 20210300751
- Publication date Sep 30, 2021
- ROBERT BOSCH GmbH
- Robert Kuells
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20200223688
- Publication date Jul 16, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- KUEI-SUNG CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM WITH OVEN CONTROL AND COMPENSATION FOR DETECTING MOTION AND/...
- Publication number 20200025795
- Publication date Jan 23, 2020
- EPACK, INC.
- Jay MITCHELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gas Detector and Gas Detection Method
- Publication number 20190302046
- Publication date Oct 3, 2019
- FIGARO ENGINEERING INC.
- Kenichi Yoshioka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE STABILIZED MEMS DEVICE
- Publication number 20180044173
- Publication date Feb 15, 2018
- Y-SENSORS LTD.
- Yishay NETZER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20170066646
- Publication date Mar 9, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GAS DETECTOR WITH A THERMALLY UNIFORM MEMS DIE
- Publication number 20170029270
- Publication date Feb 2, 2017
- Carrier Corporation
- David P. Potasek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH INTEGRATED TEMPERATURE STABILIZATION
- Publication number 20150115377
- Publication date Apr 30, 2015
- TELEDYNE SCIENTIFIC & IMAGING, LLC
- Jeffrey F. DeNatale
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE STABILITIZED MEMS
- Publication number 20130264610
- Publication date Oct 10, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Tung-Tsun CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ISOLATED ACTIVE TEMPERATURE REGULATOR FOR VACUUM PACKAGING OF A DIS...
- Publication number 20100300201
- Publication date Dec 2, 2010
- The Boeing Company
- Howard H. Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device having integrated heating
- Publication number 20060289415
- Publication date Dec 28, 2006
- Richard Muehlheim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device for homogeneous heating of an object
- Publication number 20050077285
- Publication date Apr 14, 2005
- Obducat Aktiebolag
- Babak Heidari
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Device for homogeneous heating of an object
- Publication number 20030141291
- Publication date Jul 31, 2003
- Babak Heidari
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS sensor as well as method for operating a mems sensor

CMOS-MEMS humidity sensor

Ovenized MEMS

Method for detecting contamination of a MEMS sensor element

Gas detector and gas detection method

System with oven control and compensation for detecting motion and/...

Semiconductor structure and manufacturing method thereof

Microelectromechanical system apparatus with heater

Device and method for sensor calibration

Temperature stabilized MEMS device

Micro-electromechanical apparatus for thermal energy control

System with oven control and compensation for detecting motion and/...

Gas detector with a thermally uniform MEMS die

Semiconductor structure and manufacturing method thereof

MEMS device with integrated temperature stabilization

Temperature stabilitized MEMS

Isolated active temperature regulator for vacuum packaging of a dis...

Micromechanical device having integrated heating

Patents Applicationslast 30 patents

Ovenized MEMS

Temperature Distribution of Microheater

FLUIDIC SENSING ASSEMBLY WITH THERMAL PLATFORM

FLUIDIC SENSING ASSEMBLY WITH FLEXIBLE SUBSTRATE

HEATING DEVICE AND MICROFLUIDIC APPARATUS COMPRISING THE SAME

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MICROELECTROMECHANICAL HEATING DEVICE

CMOS-MEMS HUMIDITY SENSOR

MEMS SENSOR AS WELL AS METHOD FOR OPERATING A MEMS SENSOR

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR ELEMENT

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

SYSTEM WITH OVEN CONTROL AND COMPENSATION FOR DETECTING MOTION AND/...

Gas Detector and Gas Detection Method

TEMPERATURE STABILIZED MEMS DEVICE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

GAS DETECTOR WITH A THERMALLY UNIFORM MEMS DIE

MEMS DEVICE WITH INTEGRATED TEMPERATURE STABILIZATION

TEMPERATURE STABILITIZED MEMS

ISOLATED ACTIVE TEMPERATURE REGULATOR FOR VACUUM PACKAGING OF A DIS...

Micromechanical device having integrated heating

Device for homogeneous heating of an object

Device for homogeneous heating of an object