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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70033
by plasma EUV sources
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Patents Grants
last 30 patents
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Patent Grant
Laser interference fringe control for higher EUV light source and E...
Patent number
11,960,210
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target material control in an EUV light source
Patent number
11,963,285
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Abhiram Lakshmi Ganesh Govindaraju
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Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method, substrate and system for estimating stress in a substrate
Patent number
11,953,837
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source apparatus and method for using the same
Patent number
11,948,702
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chung Tu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Guiding device
Patent number
11,947,264
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Patrick Willem Paul Limpens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor devices and pattern formation...
Patent number
11,942,322
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
Patent number
11,940,736
Issue date
Mar 26, 2024
Gigaphoton Inc.
Gota Niimi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Droplet splash control for extreme ultra violet photolithography
Patent number
11,940,738
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Po-Ming Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical system with variable focal distance and optical assembly co...
Patent number
11,921,432
Issue date
Mar 5, 2024
Thales
Luca Peverini
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,924,955
Issue date
Mar 5, 2024
Gigaphoton Inc.
Yoshiyuki Honda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
Patent number
11,914,302
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for determining a condition associated with a...
Patent number
11,906,907
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Derk Servatius Gertruda Brouns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,906,902
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tai-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithography system and operation method thereof
Patent number
11,899,378
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
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Information
Patent Grant
Apparatus and method for removing a single particulate from a subst...
Patent number
11,886,126
Issue date
Jan 30, 2024
Carl Zeiss SMT GmbH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Apparatus for and method of reducing contamination from source mate...
Patent number
11,874,608
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Yue Ma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
Patent number
11,860,544
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Ya Cheng
G02 - OPTICS
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,854,846
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Target delivery system
Patent number
11,856,681
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Georgiy Olegovich Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
Patent number
11,852,984
Issue date
Dec 26, 2023
Samsung Electronics Co., Ltd.
Sunghyup Kim
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,846,887
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device and method to remove debris from an extreme ultraviolet (EUV...
Patent number
11,841,625
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Han Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate with multilayer reflection film for EUV mask blank, manuf...
Patent number
11,835,851
Issue date
Dec 5, 2023
Shin-Etsu Chemical Co., Ltd.
Yukio Inazuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Enhancing lithography operation for manufacturing semiconductor dev...
Patent number
11,829,076
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chen Su
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for lithography process
Patent number
11,829,082
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Ying Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lighting device using multilayer reflection zone plate and manu...
Patent number
11,829,064
Issue date
Nov 28, 2023
ESOL Inc.
Dong Gun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV light source and apparatus for lithography
Patent number
11,832,372
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Chieh Chien
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20240126185
Publication date
Apr 18, 2024
Gigaphoton Inc.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR P...
Publication number
20240118627
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jeongjin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Publication number
20240121877
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Injae LEE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
Publication number
20240103386
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Derk Servatius Gertruda BROUNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
Publication number
20240103387
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for In-Situ Dry Development
Publication number
20240096622
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Steven Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
Publication number
20240094646
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Katsunobu NISHIHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALL...
Publication number
20240085793
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
Publication number
20240085797
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Ya CHENG
G02 - OPTICS
Information
Patent Application
TARGET DELIVERY SYSTEM
Publication number
20240090109
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Georgiy Olegovich Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20240085796
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20240049378
Publication date
Feb 8, 2024
Gigaphoton Inc.
Masaki NAKANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240036476
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240027920
Publication date
Jan 25, 2024
Gigaphoton Inc.
Yusuke HOSHINO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240023223
Publication date
Jan 18, 2024
Gigaphoton Inc.
Yuichi NISHIMURA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
Publication number
20240019786
Publication date
Jan 18, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Yung-Yao Lee
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20240019787
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ru-Gun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240019789
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM FOR A LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20240012333
Publication date
Jan 11, 2024
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH-PERFORMANCE EUV MICROSCOPE WITH FREE FORM ILLUMINATION SYSTEM
Publication number
20240011922
Publication date
Jan 11, 2024
ESOL, Inc.
Dong Gun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION COLLECTOR
Publication number
20240004304
Publication date
Jan 4, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng Hung TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE
Publication number
20240004317
Publication date
Jan 4, 2024
Ushio Denki Kabushiki Kaisha
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV SOURCE STABILIZATION APPARATUS AND METHOD
Publication number
20240004318
Publication date
Jan 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu Jeng HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS
Publication number
20230418167
Publication date
Dec 28, 2023
Yun Xie
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FOIL TRAP COVER DEVICE AND DEBRIS REDUCTION APPARATUS
Publication number
20230418171
Publication date
Dec 28, 2023
Ushio Denki Kabushiki Kaisha
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DEBRIS MITIGATION DEVICE AND LIGHT SOURCE APPARATUS INCLUDING THE SAME
Publication number
20230418170
Publication date
Dec 28, 2023
Ushio Denki Kabushiki Kaisha
Noritaka Ashizawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE
Publication number
20230408906
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Pei-Cheng Hsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TOOL MISMATCH REDUCTION USING ABERRATION MAP OF THE TOOLS
Publication number
20230408930
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Chuan HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230413411
Publication date
Dec 21, 2023
Gigaphoton Inc.
Shogo KITASAKA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LIGHT SOURCE APPARATUS
Publication number
20230400786
Publication date
Dec 14, 2023
Ushio Denki Kabushiki Kaisha
Yusuke Teramoto
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR