Patent Application
20250164875
The present invention relates to a resist composition, a resist pattern forming method, a compound, and an acid generator.
Priority is claimed on Japanese Patent Application No. 2022-040827, filed Mar. 15, 2022, the content of which is incorporated herein by reference.
In recent years, in the manufacture of semiconductor elements and liquid crystal display elements, advances in lithography technologies have led to rapid progress in the field of pattern miniaturization. These pattern miniaturization techniques typically involve shortening the wavelength (increasing the energy) of the exposure light source.
Resist materials are required to have lithography characteristics such as sensitivity to these kinds of exposure light sources and resolution that enables reproduction of patterns with minute dimensions.
As a resist material that satisfies these requirements, a chemically amplified resist composition containing a base material component whose solubility in a developing solution is changed by an action of an acid and an acid generator component that generates an acid upon light exposure has been used in the related art.
For example, Patent Document 1 discloses a resist composition that contains a resin component having specific three constitutional units and a known onium salt-based acid generator. Patent Document 1 discloses that this resist composition is capable of controlling diffusion of an acid, improving the affinity for a developing solution, and improving the sensitivity, the roughness reducing property, and the resolution.
Japanese Unexamined Patent Application, First Publication No. 2020-085916
With further advances in lithography technologies, rapid progress in the field of pattern fining is being achieved together with the expansion of application fields. In association with this, in a case of manufacturing a semiconductor element or the like, there is a demand for a technology that enables formation of a fine pattern in a satisfactory shape.
However, in response to such a requirement, both the in-plane uniformity (CDU) of the pattern dimension and the resolution are not necessarily sufficient in the resist composition of the related art described in Patent Document 1, and thus it is necessary to achieve both the in-plane uniformity and the resolution at higher levels.
In addition, from the viewpoint of further improving the in-plane uniformity (CDU) of the pattern dimension and the resolution, there is still room for further examination of the acid generator component.
The present invention has been made in consideration of the above-described circumstances, and an object thereof is to provide a resist composition capable of forming a resist pattern with satisfactory CDU and satisfactory resolution, a resist pattern forming method using the resist composition, a novel compound useful as an acid generator of the resist composition, and an acid generator using the compound.
In order to achieve the above-described object, the present invention employs the following configurations.
That is, according to a first aspect of the present invention, there is provided a resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by an action of the acid, the resist composition including: a base material component (A) whose solubility in a developing solution is changed by an action of an acid; and an acid generator component (B) which generates an acid upon light exposure, in which the acid generator component (B) contains a compound (B0) represented by General Formula (b0).
[In the formula, Rpg represents an acid decomposable group. Rl0 represents a cyclic organic group which may have a substituent. L02 represents a divalent linking group. L01 represents a divalent linking group or a single bond. Rm1 represents a substituent other than an iodine atom. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, nb2 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. Mm+ represents an m-valent organic cation. m represents an integer of 1 or greater.]
According to a second aspect of the present invention, there is provided a method for forming a resist pattern, including: a step of forming a resist film on a support using the resist composition according to the first aspect; a step of exposing the resist film to light; and a step of developing the resist film exposed to light to form a resist pattern.
According to a third aspect of the present invention, there is provided a compound represented by General Formula (b0).
According to a fourth aspect of the present invention, there is provided an acid generator including the compound according to the third aspect of the present invention.
According to the present invention, it is possible to provide a resist composition capable of forming a resist pattern with satisfactory CDU and satisfactory resolution, a resist pattern forming method using the resist composition, a novel compound useful as an acid generator of the resist composition, and an acid generator using the compound.
In the present specification and the present claims, the term “aliphatic” is a relative concept used in relation to the term “aromatic”, and defines a group or compound that has no aromaticity.
The term “alkyl group” includes a linear, branched, or cyclic monovalent saturated hydrocarbon group unless otherwise specified. The same applies to the alkyl group in an alkoxy group.
The term “alkylene group” includes a linear, branched, or cyclic divalent saturated hydrocarbon group unless otherwise specified.
Examples of “halogen atom” include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The term “constitutional unit” indicates a monomer unit constituting a polymer compound (a resin, a polymer, or a copolymer).
The expression “may have a substituent” includes both a case where a hydrogen atom (—H) is substituted with a monovalent group and a case where a methylene (—CH2—) group is substituted with a divalent group.
The term “light exposure” is a general concept for irradiation with radiation.
The term “acid decomposable group” indicates a group having acid decomposability in which at least some bonds in the structure of the acid decomposable group can be cleaved by the action of an acid.
Examples of the acid decomposable group whose polarity is increased by the action of an acid include groups which are decomposed by the action of an acid to generate a polar group.
Examples of the polar group include a carboxy group, a hydroxyl group, an amino group, and a sulfo group (—SO3H).
More specific examples of the acid decomposable group include a group in which the above-described polar group has been protected by an acid dissociable group (such as a group in which a hydrogen atom of the OH-containing polar group has been protected by an acid dissociable group).
Here, the term “acid dissociable group” indicates both a group (i) having an acid dissociation property in which a bond between the acid dissociable group and an atom adjacent to the acid dissociable group can be cleaved by the action of an acid and a group (ii) in which some bonds are cleaved by the action of an acid, a decarboxylation reaction further occurs, and thus the bond between the acid dissociable group and the atom adjacent to the acid dissociable group can be cleaved.
It is necessary that the acid dissociable group that constitutes the acid decomposable group is a group which exhibits a lower polarity than that of the polar group generated by the dissociation of the acid dissociable group. In this manner, in a case where the acid dissociable group is dissociated by the action of an acid, a polar group exhibiting a higher polarity than that of the acid dissociable group is generated so that the polarity is increased. As a result, the polarity of an entire component (A1) is increased. Due to the increase in polarity, relatively, the solubility in a developing solution is changed such that the solubility is increased in a case where the developing solution is an alkali developing solution and the solubility is decreased in a case where the developing solution is an organic developing solution.
The term “base material component” denotes an organic compound having a film-forming ability. Organic compounds used as the base material component are classified into non-polymers and polymers. As the non-polymers, those having a molecular weight of 500 or greater and less than 4000 are typically used. Hereinafter, the term “low-molecular-weight compound” denotes a non-polymer having a molecular weight of 500 or greater and less than 4000. As the polymer, those having a molecular weight of 1000 or greater are typically used. Hereinafter, “resin”, “polymer compound”, or “polymer” indicates a polymer having a molecular weight of 1000 or greater. As the molecular weight of the polymer, the weight-average molecular weight in terms of polystyrene according to gel permeation chromatography (GPC) is used.
The expression “constitutional unit to be derived” denotes a constitutional unit formed by cleavage of a multiple bond between carbon atoms, for example, an ethylenic double bond.
In “acrylic acid ester”, the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent. The substituent (Rαx) that substitutes the hydrogen atom bonded to the carbon atom at the α-position is an atom other than the hydrogen atom or a group. Further, the acrylic acid ester includes itaconic acid diester in which the substituent (Rαx) has been substituted with a substituent having an ester bond and α-hydroxyacryl ester in which the substituent (Rαx) has been substituted with a hydroxyalkyl group or a group obtained by modifying a hydroxyl group thereof. Further, the carbon atom at the α-position of acrylic acid ester indicates the carbon atom to which the carbonyl group of acrylic acid is bonded, unless otherwise specified.
Hereinafter, acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position has been substituted with a substituent is also referred to as α-substituted acrylic acid ester.
The concept “derivative” includes those obtained by substituting a hydrogen atom at the α-position of a target compound with another substituent such as an alkyl group or a halogenated alkyl group, and derivatives thereof. Examples of the derivatives thereof include those obtained by substituting a hydrogen atom of a hydroxyl group of a target compound, in which the hydrogen atom at the α-position may be substituted with a substituent, with an organic group, and those obtained by bonding a substituent other than a hydroxyl group to a target compound in which the hydrogen atom at the α-position may be substituted with a substituent. Further, the α-position denotes the first carbon atom adjacent to a functional group unless otherwise specified.
Examples of the substituent that substitutes the hydrogen atom at the α-position of hydroxystyrene include the same substituents as those provided for Rαx.
In the present specification and the scope of the present claims, asymmetric carbons may be present and enantiomers or diastereomers may be present depending on the structures of the chemical formulae. In this case, these isomers are represented by one chemical formula. These isomers may be used alone or in the form of a mixture.
The resist composition according to the present embodiment is a resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid.
Such a resist composition contains a base material component (A) (hereinafter, also referred to as “component (A)”) whose solubility in a developing solution is changed by the action of the acid and an acid generator component (B) which generates an acid upon light exposure.
In a case where a resist film is formed using the resist composition of the present embodiment and the formed resist film is subjected to selective light exposure, an acid is generated from the component (B) at an exposed portion of the resist film, and the solubility of the component (A) in a developing solution is not changed at an unexposed portion of the resist film while the solubility of the component (A) in a developing solution is changed by the action of the acid, and thus a difference in solubility in a developing solution occurs between the exposed portion and the unexposed portion. Therefore, in a case where the resist film is developed, the exposed portion of the resist film is dissolved and removed to form a positive-tone resist pattern in a case where the resist composition is of a positive tone, whereas the unexposed portion of the resist film is dissolved and removed to form a negative tone resist pattern in a case where the resist composition is of a negative tone.
The resist composition of the present embodiment may be a positive-tone resist composition or a negative-tone resist composition. Further, the resist composition of the present embodiment may be used in an alkali developing process using an alkali developing solution in the developing treatment in a case of forming a resist pattern or may be used in a solvent developing process using a developing solution containing an organic solvent (organic developing solution) in the developing treatment.
In the resist composition of the present embodiment, it is preferable that the component (A) has a resin component (A1) whose solubility in a developing solution is changed by the action of an acid (hereinafter, also referred to as “component (A1)”).
Since the polarity of the base material component before and after the light exposure is changed by using the component (A1), a satisfactory development contrast can be obtained not only in an alkali developing process but also in a solvent developing process.
As the component (A), another polymer compound and/or a low-molecular-weight compound may be used in combination with the component (A1).
The component (A) may be “base material component which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid”. In a case where the component (A) is a base material component which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid, it is preferable that the component (A1) is a resin which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid. As such a resin, a polymer compound having a constitutional unit that generates an acid upon light exposure can be used. As the constitutional unit that generates an acid upon light exposure, those which have been known can be used.
In the resist composition according to the present embodiment, the component (A) may be used alone or a combination of two or more kinds thereof may be used.
In regard to component (A1)
The component (A1) is a resin component whose solubility in a developing solution is changed by the action of an acid.
As the component (A1), those having a constitutional unit (a1) containing an acid decomposable group whose polarity is increased by the action of an acid are preferable.
Further, the component (A1) may have other constitutional units as necessary in addition to the constitutional unit (a1).
<<Constitutional Unit (a1)>>
The constitutional unit (a1) is a constitutional unit that contains an acid decomposable group whose polarity is increased by the action of an acid.
Examples of the acid dissociable group include the same groups as those which have been suggested as the acid dissociable groups of the base resin for a chemically amplified resist composition.
Specific examples of the acid dissociable group of the base resin for a chemically amplified resist composition include “acetal type acid dissociable group”, “tertiary alkyl ester type acid dissociable group”, and “tertiary alkyloxycarbonyl acid dissociable group” described below.
Acetal type acid dissociable group:
Examples of the acid dissociable group that protects a carboxy group or a hydroxyl group in the polar groups include an acid dissociable group represented by General Formula (a1-r-1) (hereinafter, also referred to as “acetal type acid dissociable group”).
[In the formula, Ra′1 and Ra′2 represent a hydrogen atom or an alkyl group. Ra′3 represents a hydrocarbon group, and Ra′3 may be bonded to any of Ra′1 and Ra′2 to form a ring.]
In Formula (a1-r-1), it is preferable that at least one of Ra′1 or Ra′2 represents a hydrogen atom and more preferable that both Ra′1 and Ra′2 represent a hydrogen atom.
In a case where Ra′1 or Ra′2 represents an alkyl group, examples of the alkyl group include the same alkyl groups described as the substituent which may be bonded to the carbon atom at the α-position in the description of the α-substituted acrylic acid ester. Among these, an alkyl group having 1 to 5 carbon atoms is preferable. Specific preferred examples thereof include linear or branched alkyl groups. More specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Among these, a methyl group or an ethyl group is more preferable, and a methyl group is particularly preferable.
In Formula (a1-r-1), examples of the hydrocarbon group as Ra′3 include a linear or branched alkyl group and a cyclic hydrocarbon group.
The linear alkyl group has preferably 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group has preferably 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group. Among these, an isopropyl group is preferable.
In a case where Ra′3 represents a cyclic hydrocarbon group, the hydrocarbon group may be an alicyclic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In a case where the cyclic hydrocarbon group as Ra′3 is an aromatic hydrocarbon group, the aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2)π electrons and may be monocyclic or polycyclic. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms.
Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and aromatic heterocyclic rings in which some carbon atoms constituting the above-described aromatic hydrocarbon rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the aromatic hydrocarbon group as Ra′3 include a group in which one hydrogen atom has been removed from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (such as an aryl group or a heteroaryl group); a group in which one hydrogen atom has been removed from an aromatic compound having two or more aromatic rings (such as biphenyl or fluorene); and a group in which one hydrogen atom of the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, or a 2-naphthylethyl group). The number of carbon atoms in the alkylene group bonded to the aromatic hydrocarbon ring or aromatic heterocyclic ring is preferably in a range of 1 to 4, more preferably 1 or 2, and particularly preferably 1.
The cyclic hydrocarbon group as Ra′3 may include a substituent. Examples of the substituent include —RP1, —RP2—O—RP1, —RP2—CO—RP1, —RP2—CO—ORP1, —RP2—O—CO—RP1, —RP2—OH, —RP2—CN, and —RP2—COOH (hereinafter, these substituents will also be collectively referred to as “Rax5”.
Here, RP1 represents a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms. Further, RP2 represents a single bond, a chain-like divalent saturated hydrocarbon group having 1 to 10 carbon atoms, a divalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a divalent aromatic hydrocarbon group having 6 to 30 carbon atoms. Here, some or all hydrogen atoms in the chain-like saturated hydrocarbon group, the aliphatic cyclic saturated hydrocarbon group, and the aromatic hydrocarbon group as RP1 and RP2 may be substituted with fluorine atoms. The aliphatic cyclic hydrocarbon group may have one or more of a single kind of substituents or one or more of each of plural kinds of the substituents.
Examples of the chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms include a monocyclic aliphatic saturated hydrocarbon group such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, or a cyclododecyl group; and a polycyclic aliphatic saturated hydrocarbon group such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo[3.3.1.13,7]decanyl group, a tetracyclo[6.2.1.13,6.02,7]dodecanyl group, or an adamantyl group.
Examples of the monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms include a group formed by removing one hydrogen atom from an aromatic hydrocarbon ring such as benzene, biphenyl, fluorene, naphthalene, anthracene, or phenanthrene.
In a case where Ra′3 is bonded to any of Ra′1 and Ra′2 to form a ring, the cyclic group is preferably a 4- to 7-membered ring and more preferably a 4- to 6-membered ring. Specific examples of the cyclic group include a tetrahydropyranyl group and a tetrahydrofuranyl group.
Tertiary alkyl ester type acid dissociable group:
Examples of the acid dissociable group that protects a carboxy group among the polar groups include an acid dissociable group represented by General Formula (a1-r-2).
Among examples of the acid dissociable group represented by Formula (a1-r-2), a group formed of an alkyl group is referred to as “tertiary alkyl ester type acid dissociable group” for convenience.
[In the formula, Ra′4 to Ra′6 each represent a hydrocarbon group, and Ra′5 and Ra′6 may be bonded to each other to form a ring.]
Examples of the hydrocarbon group as Ra′4 include a linear or branched alkyl group, a chain-like or cyclic alkenyl group, a chain-like alkynyl group, and a cyclic hydrocarbon group.
Examples of the linear or branched alkyl group and the cyclic hydrocarbon group (an alicyclic hydrocarbon group which is a monocyclic group, an alicyclic hydrocarbon group which is a polycyclic group, or an aromatic hydrocarbon group) as Ra′4 include the same groups as those provided for Ra′3.
As the chain-like or cyclic alkenyl group as Ra′4, an alkenyl group having 2 to 10 carbon atoms is preferable.
Examples of the hydrocarbon group as Ra′5 or Ra′6 include the same groups as those provided for Ra′3.
In a case where Ra′5 and Ra′6 are bonded to each other to form a ring, suitable examples thereof include a group represented by General Formula (a1-r2-1), a group represented by General Formula (a1-r2-2), and a group represented by General Formula (a1-r2-3).
Meanwhile, in a case where Ra′4 to Ra′6 independently represent a hydrocarbon group without being bonded to each other, suitable examples thereof include a group represented by General Formula (a1-r2-4).
[In Formula (a1-r2-1), Ra′10 represents a linear or branched alkyl group having 1 to 12 carbon atoms, in which a part thereof may be substituted with a halogen atom or a heteroatom-containing group. Ra′11 represents a group that forms an aliphatic cyclic group together with the carbon atom to which Ra′10 has been bonded. In Formula (a1-r2-2), Ya represents a carbon atom. Xa represents a group that forms a cyclic hydrocarbon group with Ya. Some or all of the hydrogen atoms in this cyclic hydrocarbon group may be substituted. Ra101 to Ra103 each independently represent a hydrogen atom, a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms. Some or all of the hydrogen atoms in the chain-like saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group may be substituted. Two or more of Ra101 to Ra303 may be bonded to each other to form a cyclic structure. In Formula (a1-r2-3), Yaa represents a carbon atom. Xaa represents a group that forms an aliphatic cyclic group with Yaa. Ra104 represents an aromatic hydrocarbon group which may have a substituent. In Formula (a1-r2-4), Ra′12 and Ra′13 each independently represent a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms. Some or all hydrogen atoms in this chain-like saturated hydrocarbon group may be substituted. Ra′14 represents a hydrocarbon group which may have a substituent. * represents a bonding site (the same applies hereinafter).]
In Formula (a1-r2-1), Ra′10 represents a linear or branched alkyl group having 1 to 12 carbon atoms, in which a part thereof may be substituted with a halogen atom or a heteroatom-containing group.
The linear alkyl group as Ra′10 has 1 to 12 carbon atoms, preferably 1 to 10 carbon atoms, and particularly preferably 1 to 5 carbon atoms.
Examples of the branched alkyl group as Ra′10 include those provided as examples for Ra′3 described above.
The alkyl group in Ra′10 may be partially substituted with a halogen atom or a heteroatom-containing group. For example, some hydrogen atoms constituting the alkyl group may be substituted with a halogen atom or a heteroatom-containing group. Further, some carbon atoms (methylene group or the like) constituting the alkyl group may be substituted with a heteroatom-containing group.
Examples of the heteroatoms here include an oxygen atom, a nitrogen atom, and a sulfur atom. Examples of the heteroatom-containing group include (—O—), —C(═O)—O—, —O—C(═O)—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —S—, —S(═O)2—, and —S(═O)2—O—.
In Formula (a1-r2-1), preferred examples of Ra′11 (an aliphatic cyclic group that is formed together with a carbon atom to which Ra′10 is bonded) include the groups described as the alicyclic hydrocarbon group (alicyclic hydrocarbon group) which is a monocyclic group or a polycyclic group as Ra′3 in Formula (a1-r-1). Among them, it is preferably a monocyclic alicyclic hydrocarbon group, and specifically, it is more preferably a cyclopentyl group or a cyclohexyl group.
In Formula (a1-r2-2), examples of the cyclic hydrocarbon group that is formed by Xa together with Ya include a group in which one or more hydrogen atoms have been further removed from the cyclic monovalent hydrocarbon group (alicyclic hydrocarbon group) as Ra′3 in Formula (a1-r-1).
The cyclic hydrocarbon group that is formed by Xa together with Ya may have a substituent. Examples of the substituent include those described as the substituents that the cyclic hydrocarbon group as Ra′3 may have.
In Formula (a1-r2-2), examples of the chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra101 to Ra103 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms as Ra101 to Ra13 include a monocyclic aliphatic saturated hydrocarbon group such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, or a cyclododecyl group; and a polycyclic aliphatic saturated hydrocarbon group such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo[3.3.1.13,7]decanyl group, a tetracyclo[6.2.1.13,6.02,7]dodecanyl group, or an adamantyl group.
From the viewpoint of ease of synthesis, Ra101 to Ra103 (represent preferably a hydrogen atom or a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and particularly preferably a hydrogen atom.
Examples of the substituent included in the chain-like saturated hydrocarbon group or the aliphatic cyclic saturated hydrocarbon group represented by Ra101 to Ra103 include the same substituents as those provided for Rax5.
Examples of the group having a carbon-carbon double bond generated by two or more of Ra101 to Ra103 being bonded to each other to form a cyclic structure include a cyclopentenyl group, a cyclohexenyl group, a methylcyclopentenyl group, a methylcyclohexenyl group, a cyclopentylidenethenyl group, and a cyclohexylidenethenyl group. Among these, from the viewpoint of ease of synthesis, a cyclopentenyl group, a cyclohexenyl group, or a cyclopentylidenethenyl group is preferable.
In Formula (a1-r2-3), as the aliphatic cyclic group that is formed by Xaa together with Yaa, the group described as the alicyclic hydrocarbon group which is a monocyclic group or a polycyclic group as Ra′3 in Formula (a1-r-1) is preferable.
In Formula (a1-r2-3), examples of the aromatic hydrocarbon group as Ra104 include a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 5 to 30 carbon atoms. Among the examples, Ra104 preferably represents a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene, particularly preferably a group in which one or more hydrogen atoms have been removed from benzene or naphthalene, and most preferably a group in which one or more hydrogen atoms have been removed from benzene.
Examples of the substituent that Rat (44 in Formula (a1-r2-3) may have include a methyl group, an ethyl group, a propyl group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group (such as a methoxy group, an ethoxy group, a propoxy group, or a butoxy group), and an alkyloxycarbonyl group.
In Formula (a1-r2-4). Ra′12 and Ra′13 each independently represent a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms. Examples of the chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra′12 and Ra′13 include those described as the chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra101 to Ra103. Some or all of the hydrogen atoms in this chain-like saturated hydrocarbon group may be substituted.
Ra′12 and Ra′13 represent, among the examples, preferably an alkyl group having 1 to 5 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group.
In a case where the chain-like saturated hydrocarbon group represented by Ra′12 and Ra′13 is substituted, examples of the substituent thereof include the same substituents as those provided as examples for Rax5.
In Formula (a1-r2-4), Ra′14 represents a hydrocarbon group which may have a substituent. Examples of the hydrocarbon group as Ra′14 include a linear or branched alkyl group and a cyclic hydrocarbon group.
The linear alkyl group as Ra′14 has preferably 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group as Ra′14 has preferably 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2.2-dimethylbutyl group. Among these, an isopropyl group is preferable.
In a case where Ra′14 represents a cyclic hydrocarbon group, the hydrocarbon group may be an alicyclic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Examples of the aromatic hydrocarbon group as Ra′14 include the same groups as those provided as examples for the aromatic hydrocarbon group as Ra104. Among these, Ra′14 represents preferably a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene, particularly preferably a group in which one or more hydrogen atoms have been removed from naphthalene or anthracene, and most preferably a group in which one or more hydrogen atoms have been removed from naphthalene.
Examples of the substituent that Ra′14 may have include the same groups as those provided as examples for the substituent that Ra104 may have.
In a case where Ra′14 in Formula (a1-r2-4) represents a naphthyl group, the position bonded to the tertiary carbon atom in Formula (a1-r2-4) may be the 1-position or the 2-position of the naphthyl group.
In a case where Ra′14 in Formula (a1-r2-4) represents an anthryl group, the position bonded to the tertiary carbon atom in Formula (a1-r2-4) may be the 1-position, the 2-position, or the 9-position of the anthryl group.
Specific examples of the group represented by Formula (a1-r2-D) are shown below.
Specific examples of the group represented by Formula (a1-r2-2) are shown below.
Specific examples of the group represented by Formula (a1-(2-3) are shown below.
Specific examples of the group represented by Formula (a1-r2-4) are shown below.
Tertiary alkyloxycarbonyl acid dissociable group:
Examples of the acid dissociable group that protects a hydroxyl group among the polar groups include an acid dissociable group (hereinafter, also referred to as “tertiary alkyloxycarbonyl acid dissociable group” for convenience) represented by General Formula (a1-r-3).
[In the formula, Ra′7 to Ra′9 each represent an alkyl group.]
In Formula (a1-r-3), Ra′7 to Ra′9 each represent preferably an alkyl group having 1 to 5 carbon atoms and more preferably an alkyl group having 1 to 3 carbon atoms.
Further, the total number of carbon atoms in each alkyl group is preferably in a range of 3 to 7, more preferably in a range of 3 to 5, and most preferably 3 or 4.
Secondary alkyl ester type acid dissociable group:
Examples of the acid dissociable group that protects a carboxy group among the polar groups include an acid dissociable group represented by General Formula (a1-r-4).
[In the formula, Ra′10 represents a hydrocarbon group. Ra′11a and Ra′11b each independently represent a hydrogen atom, a halogen atom, or an alkyl group. Ra′12 represents a hydrogen atom or a hydrocarbon group. Ra′10 and Ra′11a or Ra′11b may be bonded to each other to form a ring. Ra′11a or Ra′11b and Ra′12 may be bonded to each other to form a ring.]
Examples of the hydrocarbon group as Ra′10 or Ra′12 in the formula include the same groups as those provided for Ra′3.
Examples of the alkyl group as Ra′11a and Ra′11b in the formula include the same groups as those provided as examples for the alkyl group as Ra′1.
In the formula, the hydrocarbon group as Ra′10 or Ra′12 and the alkyl group as Ra′11a and Ra′11b may have a substituent. Examples of the substituent include Rax5 described above.
Ra′10 and Ra′11a or Ra′11b may be bonded to each other to form a ring. The ring may be a polycyclic ring or a monocyclic ring, and may be an alicyclic ring or an aromatic ring.
The alicyclic ring and the aromatic ring may have a heteroatom.
Among the examples described above, as the ring formed by Ra′10 and Ra′11a or Ra′11b being bonded to each other, monocycloalkene, a ring in which some carbon atoms of monocycloalkene have been substituted with heteroatoms (such as an oxygen atom and a sulfur atom), or monocycloalkadiene is preferable, cycloalkene having 3 to 6 carbon atoms is preferable, and cyclopentene or cyclohexene is preferable.
The ring formed by Ra′10 and Ra′11a or Ra′11b being bonded to each other may be a condensed ring. Specific examples of the condensed ring include indane.
The ring formed by Ra′10 and Ra′11a or Ra′11b being bonded to each other may have a substituent. Examples of the substituent include Rax5 described above.
Ra′11a or Ra′11b and Ra′12 may be bonded to each other to form a ring, and examples of the ring include the rings formed by Ra′10 and Ra′11a or Ra′11b being bonded to each other.
Specific examples of the group represented by Formula (a1-r-4) are shown below.
Examples of the constitutional unit (a1) include a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent; a constitutional unit derived from acrylamide; a constitutional unit in which at least some hydrogen atoms in a hydroxyl group of a constitutional unit derived from hydroxystyrene or a hydroxystyrene derivative are protected by a substituent containing the acid decomposable group; and a constitutional unit in which at least some hydrogen atoms in —C(═O)—OH of a constitutional unit derived from vinylbenzoic acid or a vinylbenzoic acid derivative are protected by a substituent containing the acid decomposable group.
Specific examples of the constitutional unit (a1) are shown below. In each of the formulae shown below, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
The constitutional unit (a1) included in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
Since the lithography characteristics (the sensitivity, the shape, and the like) are easily improved using electron beams or EUV, a constitutional unit represented by Formula (a1-1) is preferable as the constitutional unit (a1).
Among the examples, as the constitutional unit (a1), those having a constitutional unit represented by General Formula (a1-1-1) are particularly preferable.
[In the formulae, Ra1″ represents an acid dissociable group represented by General Formula (a1-r2-1), (a1-r2-3), or (a1-r2-4). * represents a bonding site.]
R, Va1, and na1 in Formula (a1-1-1) each have the same definition as that provided for R, Va1, and na1 in Formula (a1-1).
The description of the acid dissociable group represented by General Formula (a1-r2-1), (a1-r2-3), or (a1-r2-4) is the same as described above. Among these, from the viewpoint of suitably increasing the reactivity in the application for EB or EUV, an acid dissociable group which is a cyclic group is preferably selected, and an acid dissociable group represented by General Formula (a1-r2-1) is more preferable.
The proportion of the constitutional unit (a1) in the component (A1) is preferably in a range of 5% to 95% by mole, more preferably in a range of 10% to 90% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a1) is set to be greater than or equal to the lower limits of the above-described preferable ranges, lithography characteristics such as the sensitivity, CDU, the resolution, and roughness improvement are improved. Further, in a case where the proportion of the constitutional unit (a1) is less than or equal to the upper limits of the above-described preferable ranges, the constitutional unit (a1) and other constitutional units can be balanced, and the lithography characteristics are improved.
The component (A1) may have other constitutional units as necessary in addition to the constitutional unit (a1) described above.
Examples of the other constitutional units include a constitutional unit (a10) represented by General Formula (a10-1) described later; a constitutional unit (a2) containing a lactone-containing cyclic group; and a constitutional unit (a8) derived from a compound represented by General Formula (a8-1) described later.
In regard to constitutional unit (a10):
The constitutional unit (a10) is a constitutional unit represented by General Formula (a10-1) (here, a constitutional unit corresponding to the constitutional unit (a1) is excluded).
[In the formulae, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Yax1 represents a single bond or a divalent linking group. Wax1 represents an aromatic hydrocarbon group which may have a substituent. nax1 represents an integer of 1 or greater.]
In the Formula (a10-1), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms.
R represents preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and from the viewpoint of industrial availability, more preferably a hydrogen atom, a methyl group, or trifluoromethyl group, still more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.
In Formula (a10-1), Yax1 represents a single bond or a divalent linking group.
In the chemical formula, the divalent linking group as Yax1 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
Yax1 represents preferably a single bond, an ester bond [—C(═O)—O— or —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof and more preferably a single bond or an ester bond [—C(═O)—O— or —O—C(═O)—].
In Formula (a10-1), Wax1 represents an aromatic hydrocarbon group which may have a substituent.
Examples of the aromatic hydrocarbon group as Wax1 include a group in which (nax1+1) hydrogen atoms have been removed from an aromatic ring which may have a substituent. The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2)π electrons. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some carbon atoms constituting the above-described aromatic hydrocarbon ring have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Further, examples of the aromatic hydrocarbon group as Wax1 also include a group in which (nax1+1) hydrogen atoms have been removed from an aromatic compound having an aromatic ring (for example, biphenyl or fluorene) which may have two or more substituents.
Among the examples, Wax1 represents preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene, naphthalene, anthracene, or biphenyl, more preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene or naphthalene, and still more preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene.
The aromatic hydrocarbon group as Wax1 may or may not have a substituent. Examples of substituents include an alkyl group, an alkoxy group, a halogen atom, and a halogenated alkyl group. Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituent include the same groups as those provided as examples for the substituent of the cyclic alicyclic hydrocarbon group as Yax1. The substituent is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, more preferably a linear or branched alkyl group having 1 to 3 carbon atoms, still more preferably an ethyl group or a methyl group, and particularly preferably a methyl group. It is preferable that the aromatic hydrocarbon group as Wax1 has no substituent.
In Formula (a10-1), taxi represents an integer of 1 or greater, preferably an integer of 1 to 10, more preferably an integer of 1 to 5, still more preferably 1, 2, or 3, and particularly preferably 1 or 2.
Specific examples of the constitutional unit (a10) represented by Formula (a10-1) are described below.
In each of the formulae shown below, R″ represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
The constitutional unit (a10) included in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the component (A1) has the constitutional unit (a10), the proportion of the constitutional unit (a10) in the component (A1) is preferably in a range of 20% to 80% by mole, more preferably in a range of 30% to 70% by mole, and still more preferably in a range of 30% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a10) is set to be greater 10 than or equal to the above-described lower limits, the sensitivity is likely to be enhanced. Meanwhile, in a case where the proportion thereof is set to be less than or equal to the above-described upper limits, the constitutional unit (a10) and other constitutional units are likely to be balanced.
In regard to constitutional unit (a2):
The component (A1) may further have a constitutional unit (a2) (here, a constitutional unit corresponding to the constitutional unit (a1) is excluded) containing a lactone-containing cyclic group.
In a case where the component (A1) is used to form a resist film, the lactone-containing cyclic group of the constitutional unit (a2) is effective for increasing the adhesiveness of the resist film to the substrate. Further, in a case where the component (A1) contains the constitutional unit (a2), the lithography characteristics and the like are improved due to the effects of appropriately adjusting the acid diffusion length, increasing the adhesiveness of the resist film to the substrate, appropriately adjusting the solubility during the development, and the like.
The term “lactone-containing cyclic group” indicates a cyclic group that has a ring (lactone ring) containing —O—C(═O)— in the ring skeleton. In a case where the lactone ring is counted as the first ring and the group contains only the lactone ring, the group is referred to as a monocyclic group. Further, in a case where the group has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The lactone-containing cyclic group may be a monocyclic group or a polycyclic group.
The lactone-containing cyclic group in the constitutional unit (a2) is not particularly limited, and an optional lactone-containing cyclic group can be used. Specific examples thereof include groups each represented by General Formulae (a2-r-1) to (a2-r-7).
[In the formulae, Ra′21's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group, R″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group, A″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom (—O—) or a sulfur atom (—S—), an oxygen atom, or a sulfur atom, n′ represents an integer of 0 to 2, and m′ is 0 or 1. * represents a bonding site (the same applies hereinafter).]
In General Formulae (a2-r-1) to (a2-r-7), it is preferable that the alkyl group as Ra′21 is an alkyl group having 1 to 6 carbon atom. Further, it is preferable that the alkyl group is linear or branched. Specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group, and a hexyl group. Among these, a methyl group or ethyl group is preferable, and a methyl group is particularly preferable.
It is preferable that the alkoxy group as Ra′21 is an alkoxy group having 1 to 6 carbon atoms. Further, it is preferable that the alkoxy group is linear or branched. Specific examples of the alkoxy groups include a group formed by linking the above-described alkyl group described as the alkyl group represented by Ra′21 to an oxygen atom (—O—).
As the halogen atom as Ra′21, a fluorine atom is preferable.
Examples of the halogenated alkyl group as Ra′21 include groups in which some or all hydrogen atoms in the alkyl group as Ra′21 have been substituted with the halogen atoms. As the halogenated alkyl group, a fluorinated alkyl group is preferable, and a perfluoroalkyl group is particularly preferable.
In —COOR″ and —OC(═O)R″ as Ra′21, any R″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group.
The alkyl group as R″ may be linear, branched, or cyclic, and it preferably has 1 to 15 carbon atoms.
In a case where R″ represents a linear or branched alkyl group, an alkyl group having 1 to 10 carbon atoms is preferable, an alkyl group having 1 to 5 carbon atoms is more preferable, and a methyl group or an ethyl group is particularly preferable.
In a case where R″ represents a cyclic alkyl group, the number of carbon atoms thereof is preferably in a range of 3 to 15, more preferably in a range of 4 to 12, and most preferably in a range of 5 to 10. Specific examples thereof include groups in which one or more hydrogen atoms have been removed from a monocycloalkane, which may or may not be substituted with a fluorine atom or a fluorinated alkyl group; and groups in which one or more hydrogen atoms have been removed from a polycycloalkane such as bicycloalkane, tricycloalkane, or tetracycloalkane. More specific examples thereof include groups in which one or more hydrogen atoms have been removed from a monocycloalkane such as cyclopentane or cyclohexane; and groups in which one or more hydrogen atoms have been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane.
Examples of the lactone-containing cyclic group as R″ include the same groups as those provided as examples for the groups each represented by General Formulae (a2-r-1) to (a2-r-7).
As the hydroxyalkyl group as Ra′21, a hydroxyalkyl group having 1 to 6 carbon atoms is preferable, and specific examples thereof include a group in which at least one hydrogen atom in the alkyl group as Ra′21 has been substituted with a hydroxyl group.
Among the examples, it is preferable that Ra′21's each independently represent a hydrogen atom or a cyano group.
In General Formulae (a2-r-2), (a2-r-3) and (a2-r-5), as the alkylene group having 1 to 5 carbon atoms as A″, a linear or branched alkylene group is preferable, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. In a case where the alkylene group has an oxygen atom or a sulfur atom, specific examples thereof include groups in which —O— or —S— is interposed in the terminal of the alkylene group or between the carbon atoms of the alkylene group. Further, examples thereof include —O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. A″ represents preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and most preferably a methylene group.
Specific examples of the groups each represented by General Formulae (a2-r-1) to (a2-r 7) are shown below.
As the constitutional unit (a2), a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent is preferable.
It is preferable that such a constitutional unit (a2) is a constitutional unit represented by General Formula (a2-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ya21 represents a single bond or a divalent linking group. La21 represents —O—, —COO—, —CON(R′)—, —OCO—, —CONHCO—, or —CONHCS—, and R′ represents a hydrogen atom or a methyl group. In a case where La21 represents —O—, Ya21 does not represent —CO—. Ra21 represents a lactone-containing cyclic group.]
In Formula (a2-1), R has the same definition as described above. R represents preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms and particularly preferably a hydrogen atom or a methyl group from the viewpoint of the industrial availability.
In Formula (a2-1), the divalent linking group as Ya21 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
It is preferable that Ya21 represents a single bond, an ester bond [—C(═O)—O—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof.
In Formula (a2-1), it is preferable that Ya21 represents a single bond and La21 represents —COO— or —OCO—.
In Formula (a2-1), Ra21 represents a lactone-containing cyclic group.
Suitable examples of the lactone-containing cyclic group as Ra21 include groups each represented by General Formulae (a2-r-1) to (a2-r-7).
The constitutional unit (a2) included in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the component (A1) has the constitutional unit (a2), the proportion of the constitutional unit (a2) is preferably in a range of 1% to 20% by mole, more preferably in a range of 1% to 15% by mole, and still more preferably in a range of 1% to 10% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a2) is set to be greater than or equal to the lower limits of the above-described preferable ranges, the effect to be obtained by allowing the component (A1) to have the constitutional unit (a2) is sufficiently obtained by the above-described effects. Further, in a case where the proportion thereof is set to be less than or equal to the upper limits of the above-described preferable ranges, the constitutional unit (a2) and other constitutional units can be balanced, and the lithography characteristics are enhanced.
In regard to constitutional unit (a8):
The constitutional unit (a8) is a constitutional unit derived from a compound represented by General Formula (a8-1).
Here, constitutional units corresponding to the constitutional unit (a0) are excluded.
[In the formula, W2 represents a polymerizable group-containing group. Yax2 represents a single bond or an (nax2+1)-valent linking group. Yax2 and W2 may form a condensed ring. R′ represents a fluorinated alkyl group having 1 to 12 carbon atoms. R2 represents an organic group having 1 to 12 carbon atoms which may have a fluorine atom or a hydrogen atom. R2 and Yax2 may be bonded to each other to form a ring structure. nax2represents an integer of 1 to 3.]
The term “polymerizable group” in the polymerizable group-containing group as W2 denotes a group that enables a compound containing a polymerizable group to be polymerized by radical polymerization or the like, which is, for example, a group having a multiple bond between carbon atoms, such as an ethylenic double bond.
The polymerizable group-containing group may be a group formed of only a polymerizable group or a group formed of a polymerizable group and a group other than the polymerizable group. Examples of the group other than the polymerizable group include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
Suitable examples of the polymerizable group-containing group include a group represented by Chemical Formula: C(RX11)(RX12)═C(RX13)—Yax0.
In the chemical formula, RX11, RX12, and RX13 each represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Ya30 represents a single bond or a divalent linking group.
Examples of the condensed ring formed by Yax2 and W2 include a condensed ring formed by a polymerizable group of the W2 moiety with Yax2 and a condensed ring formed by a group other than the polymerizable group of the W2 moiety with Yax2. The condensed ring formed by Yax2 and W2 may have a substituent.
Specific examples of the constitutional unit (a8) are shown below.
In the following formulae, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
Among the examples, the constitutional unit (a8) is preferably at least one selected from the group consisting of constitutional units each represented by Chemical Formulae (a8-1-01) to (a8-1-04), (a8-1-06), (a8-1-08), (a8-1-09), and (a8-1-10) and more preferably at least one selected from the group consisting of constitutional units each represented by Chemical Formulae (a8-1-01) to (a8-1-04) and (a8-1-09).
The constitutional unit (a8) contained in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the constitutional unit (a8) in the component (A1) is preferably 50% by mole or less and more preferably in a range of 0% to 30% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
The component (A1) contained in the resist composition may be used alone or a combination of two or more kinds thereof may be used.
In the resist composition of the present embodiment, a polymer compound having a repeating structure of the constitutional unit (a1) is an exemplary example of the component (A1).
Among the examples, suitable examples of the component (A1) include a polymer compound having a repeating structure of the constitutional unit (a1) and the constitutional unit (a10).
In the polymer compound having a repeating structure of the constitutional unit (a1) and the constitutional unit (a10), the proportion of the constitutional unit (a1) is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a10) in each of the polymer compounds described above is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
Such a component (A1) can be produced by dissolving a monomer, from which each constitutional unit is derived, in a polymerization solvent and adding a radical polymerization initiator such as azobisisobutylonitrile (AIBN) or dimethyl azobisisobutyrate (for example, V-601) to the solution so that the polymerization is carried out.
Alternatively, the component (A1) can be produced by dissolving, in a polymerization solvent, a monomer from which the constitutional unit (a1) is derived and, as necessary, a monomer from which a constitutional unit (for example, the constitutional unit (a10)) other than the constitutional unit (a1) is derived, adding thereto a radical polymerization initiator as described above to carry out polymerization, and then carrying out a deprotection reaction.
Further, a —C(CF3)2—OH group may be introduced to the terminal during the polymerization using a combination of chain transfer agents such as HS—CH2—CH2—CH2—C(CF3)2—OH. As described above, a copolymer into which a hydroxyalkyl group, formed by substitution of some hydrogen atoms in the alkyl group with fluorine atoms, has been introduced is effective for reducing development defects and reducing line edge roughness (LER: uneven irregularities of a line side wall).
The weight-average molecular weight (Mw) (in terms of polystyrene according to gel permeation chromatography (GPC)) of the component (A1) is not particularly limited, but is preferably in a range of 1000 to 50000, more preferably in a range of 2000 to 30000, and still more preferably in a range of 3000 to 20000.
In a case where the Mw of the component (A1) is less than or equal to the upper limits of the above-described preferable ranges, satisfactory solubility in a resist solvent enough to be used as a resist is exhibited. Meanwhile, in a case where the Mw of the component (A1) is greater than or equal to the lower limits of the above-described preferable ranges, the dry etching resistance and the cross-sectional shape of the resist pattern are satisfactory.
Further, the dispersity (Mw/Mn) of the component (A1) is not particularly limited, but is preferably in a range of 1.0 to 4.0, more preferably in a range of 1.0 to 3.0, and particularly preferably in a range of 1.0 to 2.0. Further, Mn represents the number average molecular weight.
In regard to component (A2)
In the resist composition of the present embodiment, a base material component (hereinafter, also referred to as “component (A2)”) which does not correspond to the component (A1) and whose solubility in a developing solution is changed by the action of an acid may be used in combination as the component (A).
The component (A2) is not particularly limited and may be optionally selected from a plurality of components of the related art which have been known as base material components for a chemically amplified resist composition and used.
As the component (A2), a polymer compound or a low-molecular-weight compound may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the component (A1) in the component (A) is preferably 25% by mass or greater, more preferably 50% by mass or greater, and still more preferably 75% by mass or greater, and may be 100% by mass with respect to the total mass of the component (A). In a case where the proportion thereof is 25% by mass or greater, a resist pattern having excellent various lithography characteristics such as high sensitivity, high resolution, and improved roughness is likely to be formed.
In the resist composition of the present embodiment, the amount of the component (A) may be adjusted according to the thickness of the resist film intended to be formed.
The component (B) in the resist composition according to the present embodiment contains a compound (B0) represented by General Formula (b0) (hereinafter, also referred to as “component (B0)”).
The component (B0) is a compound represented by General Formula (b0).
[In the formula, Rpg represents an acid decomposable group. Rl0 represents a cyclic organic group which may have a substituent. L02 represents a divalent linking group. L01 represents a divalent linking group or a single bond. Rm1 represents a substituent other than an iodine atom. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, nb2 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. Mm+ represents an m-valent organic cation. m represents an integer of 1 or greater.]
In General Formula (b0), Rpg represents an acid decomposable group. The acid decomposable group is a group which is decomposed by the action of an acid to generate a polar group. Examples of the polar group include a carboxy group, a hydroxyl group, an amino group, and a sulfo group (—SO3H).
It is preferable that Rpg represents an acid decomposable group represented by any of General Formulae (r-pg-1) to (r-pg-4).
<<Acid Decomposable Group Represented by General Formula (r-Pg-1)>>
The acid decomposable group represented by General Formula (r-pg-1) is a group in which a hydroxyl group is protected by “acetal type acid dissociable group” described in the section of the constitutional unit (a1) of the component (A) described above.
[In the formula, Rp01 and Rp02 each independently represent a hydrogen atom or an alkyl group. Rp03 represents a hydrocarbon group, and Rp03 may be bonded to any of Rp01 or Rp02 to form a ring. * represents a bonding site.]
<<Acid Decomposable Group Represented by General Formula (r-pg-2)>>
The acid decomposable group represented by General Formula (r-pg-2) is a group in which a carboxy group is protected by “acetal type acid dissociable group” described in the section of the constitutional unit (a1) of the component (A) described above.
[In the formula, Rp04 and Rp05 each independently represent a hydrogen atom or an alkyl group. Rp06 represents a hydrocarbon group, and Rp06 may be bonded to any of Rp04 or Rp05 to form a ring. * represents a bonding site.]
<<Acid Decomposable Group Represented by General Formula (r-pg-3)>
The acid decomposable group represented by General Formula (r-pg-3) is a group in which a carboxy group is protected by “tertiary alkyl ester type acid dissociable group” described in the section of the constitutional unit (a1) of the component (A) described above.
[In the formula, Rp07 to Rp09 each independently represent a hydrocarbon group, and Rp08 and Rp09 may be bonded to each other to form a ring. * represents a bonding site.]
<<Acid Decomposable Group Represented by General Formula (r-pg-4)>>
The acid decomposable group represented by General Formula (r-pg-4) is a group in which a carboxy group is protected by “secondary alkyl ester type acid dissociable group” described in the section of the constitutional unit (a1) of the component (A) described above.
[In the formula, Rp10 represents a hydrocarbon group. Rp11a and Rp11b each independently represent a hydrogen atom, a halogen atom, or an alkyl group. Rp12 represents a hydrogen atom or a hydrocarbon group. Rp10 and Rp11a or Rp11b may be bonded to each other to form a ring. Rp11a or Rp11b and Rp12 may be bonded to each other to form a ring. * represents a bonding site.]
In Formula (b0), Rpg represents preferably an acid decomposable group represented by General Formula (r-pg-3) and more preferably an acid decomposable group represented by any of General Formula (r-pg-3-01) to General Formula (r-pg-3-04).
[In Formula (r-pg-3-01), Rb001 represents a linear or branched alkyl group having 1 to 12 carbon atoms, in which a part thereof may be substituted with a halogen atom or a heteroatom-containing group. Rb002 represents a group which forms an aliphatic cyclic group together with the carbon atom to which Rb001 is bonded.
In Formula (r-pg-3-02), Yb represents a carbon atom. Xb represents a group which forms a cyclic organic group together with Yb. Some or all hydrogen atoms in the cyclic organic group may be substituted. Rb003 to Rb005 each independently represent a hydrogen atom, a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms. Some or all hydrogen atoms in the chain-like saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group may be substituted. Two or more of Rb003 to Rb005 may be bonded to each other to form a cyclic structure.
In Formula (r-pg-3-03), Ybb represents a carbon atom. Xbb represents a group which forms an aliphatic cyclic group together with Ybb. Rb60% represents an aromatic hydrocarbon group which may have a substituent.
In Formula (r-pg-3-04), Rb007 and Rb008 each independently represent a chain-like monovalent hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Some or all hydrogen atoms in this chain-like hydrocarbon group may be substituted. Rb009 represents a hydrocarbon group which may have a substituent. * represents a bonding site (the same applies hereinafter).]
Acid Decomposable Group Represented by General Formula (r-pg-3-01)
In Formula (r-pg-3-01), Rb007 represents a linear or branched alkyl group having 1 to 12 carbon atoms, in which a part thereof may be substituted with a halogen atom or a heteroatom-containing group.
The linear alkyl group as Rb001 has 1 to 12 carbon atoms, preferably 1 to 10 carbon atoms, and particularly preferably 1 to 5 carbon atoms.
Examples of the branched alkyl group as Rb001 include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group.
A part of the alkyl group as Rb001 may be substituted with a halogen atom or a heteroatom-containing group. For example, some hydrogen atoms constituting the alkyl group may be substituted with a halogen atom or a heteroatom-containing group. Further, some carbon atoms (methylene group or the like) constituting the alkyl group may be substituted with a heteroatom-containing group.
Examples of the heteroatoms here include an oxygen atom, a nitrogen atom, and a sulfur atom. Examples of the heteroatom-containing group include (—O—), —C(═O)—O—, —O—C(═O)—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —S—, —S(═O)2—, and —S(═O)2—O—.
In Formula (r-pg-3-01), Rb001 represents, among the examples, preferably a linear or branched alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 5 carbon atoms, and still more preferably a methyl group or an ethyl group.
In Formula (r-pg-3-01), examples of Rb002 (aliphatic cyclic group which is formed with the carbon atom to which Rb001 is bonded) include an alicyclic hydrocarbon group which is a monocyclic group and a polycyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In Formula (r-pg-3-01), Rb002 (aliphatic cyclic group formed with the carbon atom to which Rb001 is bonded) represents, among the examples, preferably a cyclopentyl group, a cyclohexyl group, an adamantyl group, or a norbornyl group and more preferably a cyclopentyl group or an adamantyl group.
Specific preferred examples of the acid decomposable group represented by General Formula (r-pg-3-01) are shown below.
Acid Decomposable Group Represented by General Formula (r-pg-3-02)
In Formula (r-pg-3-02), examples of the cyclic organic group formed by Xb together with Yb include an alicyclic hydrocarbon group which is a monocyclic group or a polycyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In addition, the cyclic organic group formed by Xb together with Yb may include a heteroatom such as a heterocyclic ring. Examples of the heteroatoms include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the heterocyclic ring include aliphatic heterocyclic rings such as tetrahydrofuran, tetrahydropyran, and tetrahydrothiophene.
The cyclic organic group formed by Xb and Yb may have a substituent. Examples of the substituent include Rax5 described above.
In Formula (r-pg-3-02), as the cyclic organic group formed by Xb together with Yb, an alicyclic hydrocarbon group which is a monocyclic group or an aliphatic heterocyclic hydrocarbon group which is a monocyclic group is preferable, and a cyclopentyl group, a cyclohexyl group, or a tetrahydrofuranyl group is more preferable.
In Formula (r-pg-3-02), examples of the chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Rb003 to Rb005 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms as Rb003 to Rb005 include a monocyclic aliphatic saturated hydrocarbon group such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, or a cyclododecyl group; and a polycyclic aliphatic saturated hydrocarbon group such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo[3.3.1.13,7]decanyl group, a tetracyclo[6.2.1.13,6.02.7]dodecanyl group, or an adamantyl group.
Examples of the substituent included in the chain-like saturated hydrocarbon group or the aliphatic cyclic saturated hydrocarbon group represented by Rb003 to Rb005 include the same groups as those provided for Rax5 described above.
Examples of the group having a carbon-carbon double bond generated by two or more of Rb003 to Rb005 being bonded to each other to form a cyclic structure include a cyclopentenyl group, a cyclohexenyl group, a methylcyclopentenyl group, a methylcyclohexenyl group, a cyclopentylidenethenyl group, and a cyclohexylidenethenyl group. Among these, from the viewpoint of ease of synthesis, a cyclopentenyl group, a cyclohexenyl group, or a cyclopentylidenethenyl group is preferable.
In Formula (r-pg-3-02), from the viewpoint of ease of synthesis, Rb003 to Rb005 represent, among the examples, preferably a hydrogen atom or a chain-like monovalent saturated hydrocarbon group having 1 to 10 carbon atoms and more preferably a hydrogen atom, a methyl group, or an ethyl group.
More specifically, it is preferable that all of Rb003 to Rb005 represent a hydrogen atom, or Rb003 and Rb004 represent a hydrogen atom and Rb005 represents a methyl group or an ethyl group.
Specific preferred examples of the acid decomposable group represented by General Formula (r-pg-3-02) are shown below.
Acid Decomposable Group Represented by General Formula (r-pg-3-03)
In Formula (r-pg-3-03), the aliphatic cyclic group formed by Xbb together with Ybb may be a monocyclic group or a polycyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In addition, the aliphatic cyclic group formed by Xbb together with Ybb may include a heteroatom such as a heterocyclic ring. Examples of the heteroatoms include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the heterocyclic ring include aliphatic heterocyclic rings such as tetrahydrofuran, tetrahydropyran, and tetrahydrothiophene.
The cyclic hydrocarbon group formed by Xbb together with Ybb may have a substituent. Examples of the substituent include Rax5 described above.
In Formula (r-pg-3-03), as the aliphatic cyclic group formed by Xbb together with Ybb, an alicyclic hydrocarbon group which is a monocyclic group or an aliphatic heterocyclic hydrocarbon group which is a monocyclic group is preferable, and a cyclopentyl group, a cyclohexyl group, or a tetrahydrofuranyl group is more preferable.
In Formula (r-pg-3-03), examples of the aromatic hydrocarbon group as Rb006 include a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 5 to 30 carbon atoms. Among the examples, Rb006 represents preferably a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene, particularly preferably a group in which one or more hydrogen atoms have been removed from benzene or naphthalene, and most preferably a group in which one or more hydrogen atoms have been removed from benzene.
In addition, the aromatic hydrocarbon ring may include a heteroatom such as a heterocyclic ring. Examples of the heteroatoms include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the heterocyclic ring include a pyridine ring and a thiophene ring.
Examples of the substituent that Rb006 may have include a methyl group, an ethyl group, a propyl group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group (such as a methoxy group, an ethoxy group, a propoxy group, or a butoxy group), and an alkyloxycarbonyl group.
In Formula (r-pg-3-03), among the examples, a phenyl group or a thiophenyl group is preferable as the aromatic hydrocarbon group as Rb006.
Specific preferred examples of the acid decomposable group represented by General Formula (r-pg-3-03) are shown below.
Acid Decomposable Group Represented by General Formula (r-pg-3-04)
In Formula (r-pg-3-04), Rb007 and Rb008 each independently represent a chain-like monovalent hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Some or all hydrogen atoms of the chain-like monovalent hydrocarbon group may be substituted with a substituent. Examples of the substituent include Rax5 described above.
Examples of the chain-like monovalent hydrocarbon group include a linear or branched saturated hydrocarbon group (alkyl group) and a linear or branched unsaturated hydrocarbon group.
Specific examples of the linear or branched alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group.
More specific examples of the linear or branched unsaturated hydrocarbon group include an unsaturated hydrocarbon group having a double bond, such as an alkenyl group, an alkadienyl group, or an alkatrienyl group; and an unsaturated hydrocarbon group having a triple bond, such as an alkynyl group, a group obtained by removing one hydrogen atom from a dialkyne, or a group obtained by removing one hydrogen atom from a trialkyne.
Specific examples of the linear or branched alkenyl group include a linear alkenyl group such as a vinyl group, a propenyl group (an allyl group), or a 2-butenyl group; and a branched alkenyl group such as a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, or 2-methylpropenyl group.
Specific examples of the alkadienyl group include a propadienyl group and a butadienyl group.
Specific examples of the alkatrienyl group include a butatrienyl group.
Specific examples of the linear or branched alkynyl group include a linear alkynyl group such as an ethynyl group, a propargyl group, a 3-pentynyl group, or a methylethynyl group (—C═C—CH3), and a branched alkynyl group such as a 1-methylpropargyl group.
Specific examples of the group obtained by removing one hydrogen atom from the dialkyne include a group obtained by removing one hydrogen atom from diacetylene.
Specific examples of the group obtained by removing one hydrogen atom from the trialkyne include a group obtained by removing one hydrogen atom from hexa-1,3,5-triyne.
In Formula (r-pg-3-04), Rb007 and Rb008 each independently represent preferably a linear saturated hydrocarbon group having 1 to 10 carbon atoms or a linear unsaturated hydrocarbon group and more preferably a linear saturated hydrocarbon group having 1 to 5 carbon atoms or a linear unsaturated hydrocarbon group.
In Formula (r-pg-3-04), Rb009 represents a hydrocarbon group which may have a substituent. Examples of the hydrocarbon group as Rb009 include a linear or branched saturated hydrocarbon group (alkyl group), a linear or branched unsaturated hydrocarbon group, and a cyclic hydrocarbon group.
In a case where Rb009 represents a cyclic hydrocarbon group, the hydrocarbon group may be an alicyclic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Examples of the aromatic hydrocarbon group as Rb009 include the same groups as those provided as examples for the aromatic hydrocarbon group as Rb006. Among these, Rb009 represents preferably a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene, particularly preferably a group in which one or more hydrogen atoms have been removed from naphthalene or anthracene, and most preferably a group in which one or more hydrogen atoms have been removed from naphthalene.
Examples of the substituent that Rb009 may have include the same groups as those provided as examples for the substituent that Rb006 may have.
In Formula (r-pg-3-04), Rb009 represents, among the examples, preferably a linear saturated hydrocarbon group having 1 to 10 carbon atoms or a linear unsaturated hydrocarbon group and more preferably a linear saturated hydrocarbon group having 1 to 5 carbon atoms or a linear unsaturated hydrocarbon group.
Specific preferred examples of the acid decomposable group represented by General Formula (r-pg-3-04) are shown below.
In Formula (b0), Rpg represents, among the examples, preferably an acid decomposable group represented by General Formula (r-pg-3-01) or (r-pg-3-04) and more preferably an acid decomposable group represented by General Formula (r-pg-3-01)
In General Formula (b0), Rl0 represents a cyclic organic group which may have a substituent.
The hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group, and may be a polycyclic group or a monocyclic group.
The monocyclic alicyclic group is preferably a group in which two or more hydrogen atoms have been removed from a monocycloalkane or a monocycloalkene.
The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. The monocycloalkene preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentene and cyclohexene.
As the polycyclic alicyclic group, a group in which two or more hydrogen atoms have been removed from a polycycloalkane or a polycycloalkane is preferable. A polycycloalkane having 7 to 12 carbon atoms is preferable as the polycycloalkane, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. In addition, the polycycloalkene is preferably a group having 7 to 12 carbon atoms. Specific examples thereof include adamantene, norbornene, isobornene, tricyclodecene, and tetracyclododecene.
As the aromatic hydrocarbon group, a group in which two or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene is preferable, a group in which two or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene is more preferable, and a group in which two or more hydrogen atoms have been removed from benzene is still more preferable.
Examples of the substituent that the cyclic organic group may have include the same groups as those provided as examples for Rax5 described above.
Further, in the organic group, some carbon atoms (methylene group and the like) constituting the organic group may be substituted with a heteroatom-containing group.
Examples of the heteroatoms here include an oxygen atom, a nitrogen atom, and a sulfur atom. Examples of the heteroatom-containing group include (—O—), —C(═O)—O—, —O—C(═O)—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —S—, —S(═O)2—, and —S(═O)2—O—.
That is, the cyclic organic group which may have a substituent as Rl0 may be a group in which two or more hydrogen atoms have been removed from an aromatic heterocyclic ring such as a pyridine ring or a thiophene ring; or a group in which two or more hydrogen atoms have been removed from an aliphatic heterocyclic ring such as tetrahydrofuran, tetrahydropyran, or tetrahydrothiophene.
The cyclic organic group which may have a substituent as Rl0 may be a lactone-containing cyclic group such as a group represented by any of General Formulae (L-r-1) to (L-r-7).
[In the formulae, Ra′021's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR0″, —OC(═O)R0″, a hydroxyalkyl group, or a cyano group, R0″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group, A0″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom (—O—) or a sulfur atom (—S—), an oxygen atom, or a sulfur atom, n0′ represents an integer of 0 to 2, and m0′ represents 0 or 1.]
In General Formulae (L-r-1) to (L-r-7), it is preferable that the alkyl group as Ra′021 is an alkyl group having 1 to 6 carbon atoms. Further, it is preferable that the alkyl group is linear or branched.
It is preferable that the alkoxy group as Ra′021 is an alkoxy group having 1 to 6 carbon atoms. Further, it is preferable that the alkoxy group is linear or branched. Specific examples of the alkoxy groups include a group formed by linking the above-described alkyl group described as the alkyl group represented by Ra′021 to an oxygen atom (—O—).
As the halogen atom as Ra′021, a fluorine atom is preferable.
Examples of the halogenated alkyl group as Ra′021 include groups in which some or all hydrogen atoms in the alkyl group as Ra′021 have been substituted with the halogen atoms. As the halogenated alkyl group, a fluorinated alkyl group is preferable, and a perfluoroalkyl group is particularly preferable.
In —COOR0″ and —OC(═O)R0″ as Ra′021, each R0″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group.
The alkyl group as R0″ may be linear, branched, or cyclic and has preferably 1 to 15 carbon atoms.
In a case where R0″ represents a linear or branched alkyl group, an alkyl group having 1 to 10 carbon atoms is preferable, an alkyl group having 1 to 5 carbon atoms is more preferable, and a methyl group or an ethyl group is particularly preferable.
In a case where R0″ represents a cyclic alkyl group, the number of carbon atoms thereof is preferably in a range of 3 to 15, more preferably in a range of 4 to 12, and most preferably in a range of 5 to 10.
Examples of the lactone-containing cyclic group as R0″ include the same groups as the groups each represented by General Formulae (L-r-1) to (L-f-7).
As the hydroxyalkyl group as Ra′021, a hydroxyalkyl group having 1 to 6 carbon atoms is preferable, and specific examples thereof include a group in which at least one hydrogen atom in the alkyl group as Ra′021 has been substituted with a hydroxyl group.
In General Formulae (L-r-2), (L-r-3), and (L-r-5), as the alkylene group having 1 to 5 carbon atoms as A0″, a linear or branched alkylene group is preferable, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. In a case where the alkylene group has an oxygen atom or a sulfur atom, specific examples thereof include groups in which —O— or —S— is interposed in the terminal of the alkylene group or between the carbon atoms of the alkylene group. Further, examples thereof include —O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. It is preferable that A0″ represents an alkylene group having 1 to 5 carbon atoms or —O—.
The cyclic organic group as Rl0 may be a condensed cyclic group having a condensed ring in which an aliphatic hydrocarbon ring and an aromatic ring are condensed. Examples of the condensed rings include those obtained by condensing one or more aromatic rings with a polycycloalkane having a crosslinked ring polycyclic skeleton. Specific examples of the crosslinked ring-based polycycloalkane include a bicycloalkane such as bicyclo[2.2.1]heptane (norbornane) and bicyclo[2.2.2]octane. As the condensed cyclic group, a group having a condensed ring in which two or three aromatic rings are condensed to bicycloalkane is preferable.
In General Formula (b0), from the viewpoint of improving uniformity in the resist film, Rl0 represents, among the examples, preferably an aromatic hydrocarbon group which may have a substituent or a polycyclic alicyclic hydrocarbon group which may have a substituent and more preferably an aromatic hydrocarbon group, a group in which two hydrogen atoms have been removed from a polycycloalkane or a polycycloalkene, a lactone-containing cyclic group represented by General Formula (L-r-3), or a condensed cyclic group having a condensed ring in which an aliphatic hydrocarbon ring and an aromatic ring are condensed.
Specifically, Rl0 represents preferably a group represented by any of Chemical Formulae (R10-1) to (R10-5), more preferably a group represented by Chemical Formula (R10-1), (R10-2), or (R10-5), and still more preferably a group represented by Chemical Formula (R10-2) or (R10-5).
In addition, the hydrogen atoms of the groups represented by Chemical Formulae (R10-1) to (R10-5) may be each independently substituted with a substituent. Examples of the substituent include the same substituents as those provided as examples for Rax5 described above.
In General Formula (b0), L01 represents a divalent linking group or a single bond, and L02 represents a divalent linking group.
Suitable examples of the divalent linking group as L01 and L02 include a divalent linking group having an oxygen atom.
In a case where L01 and L02 represent a divalent linking group having an oxygen atom, L01 and L02 may have an atom other than the oxygen atom. Examples of the atom other than the oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of the divalent linking group having an oxygen atom include a non-hydrocarbon oxygen atom-containing linking group such as an oxygen atom (an ether bond: —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), or a carbonate bond (—O—C(═O)—O—); and combinations of the above-described non-hydrocarbon oxygen atom-containing linking groups with an alkylene group. Further, a sulfonyl group (—SO2—) may be further linked to the combination.
More specific examples of the divalent linking group as L01 and L02 include —O—, —CO—, —OCO—, —COO—, —SO2—, —N(Ra)—C(═O)—, —N(Ra)—, —C(Ra)(Ra)—N(Ra)—, —C(Ra)(N(Ra)(Ra))—, and —C(═O)—N(Ra)—. Ra's each independently represent a hydrogen atom or an alkyl group.
In General Formula (b0), L01 represents, among the examples, preferably a divalent linking group, more preferably a divalent linking group having an oxygen atom, still more preferably —OCO—, —COO—, or —C(═O)—N(Ra)—, and particularly preferably —OCO— or —COO—.
In General Formula (b0), L02 represents, among the examples, preferably a divalent linking group, more preferably a divalent linking group having an oxygen atom, still more preferably —OCO—, —COO—, or —C(═O)—N(R3)—, and particularly preferably —OCO— or —COO—.
In General Formula (b0), Rm1 represents a substituent other than an iodine atom. Examples of the substituent include a hydroxy group, an alkyl group, a fluorinated alkyl group, a fluorine atom, and a chlorine atom.
As the alkyl group in the alkyl group and the fluorinated alkyl group, an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group or an ethyl group is more preferable.
In General Formula (b), Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group.
The alkylene group and the fluorinated alkylene group as Vb0 each have preferably 1 to 4 carbon atoms and more preferably 1 to 3 carbon atoms. Examples of the fluorinated alkylene group as Vb0 include a group obtained by substituting some or all hydrogen atoms in an alkylene group with fluorine atoms.
In General Formula (b0), Vb0 represents, among the examples, preferably an alkylene group or a fluorinated alkylene group, more preferably an alkylene group having 1 to 4 carbon atoms or a fluorinated alkylene group having 1 to 4 carbon atoms, and still more preferably a methylene group, —CH (CF3)—, —CH2CH2CF2, or —CH2CH2CHF—.
In General Formula (b0), R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom.
R0 represents preferably a fluorine atom or a perfluoroalkyl group having 1 to 5 carbon atoms and more preferably a fluorine atom.
In General Formula (b0), nb1 represents the number of iodine atoms (I).
nb1 represents an integer of 1 to 4, preferably an integer of 1 to 3, and more preferably 2 or 3.
In General Formula (b0), nb2 represents an integer of 1 to 4, preferably 1 or 2, and more preferably 1.
In General Formula (b0), nb3 represents an integer of 0 to 3, preferably 0 or 1, and more preferably 0.
Specific preferred examples of the anion moiety of the component (B0) are shown below.
As the anion moiety of the component (B0), among the examples described above, an anion represented by any of Chemical Formulae (b0-an-001) to (b0-an-003), (b0-an-009), (b0-an-013), (b0-an-025) to (b0-an-027), (b0-an-078) to (b0-an-080), (b0-an-084), and (b0-an-097) to (b0-an-107) is preferable, an anion represented by any of Chemical Formulae (b0-an-025) to (b0-an-027), (b0-an-078) to (b0-an-080), (b0-an-084), and (b0-an-102) to (b0-an-107) is more preferable, and an anion represented by any of Chemical Formulae (b0-an-084), (b0-an-103), (b0-an-104), and (b0-an-107) is still more preferable.
In General Formula (b0), M+ represents an m-valent organic cation. Among these, a sulfonium cation and an iodonium cation are preferable.
m represents an integer of 1 or greater.
Preferred examples of the cation moiety ((Mm+)l/m) include organic cations each represented by General Formulae (ca-1) to (ca-3).
[In the formulae, R201 to R207 each independently represent an aryl group, an alkyl group, or an alkenyl group, which may have a substituent. R201 to R203, and R206 and R207 may be bonded to each other to form a ring together with the sulfur atoms in the formulae. R208 and R209 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a —SO2-containing cyclic group which may have a substituent. L201 represents —C(═O)— or —C(═O)—O—.]
In General Formulae (ca-1) to (ca-3), examples of the aryl group as R201 to R207 include an unsubstituted aryl group having 6 to 20 carbon atoms. Among these, a phenyl group or a naphthyl group is preferable.
As the alkyl group as R201 to R207, a chain-like or cyclic alkyl group having 1 to 30 carbon atoms is preferable.
It is preferable that the alkenyl group as R201 to R207 has 2 to 10 carbon atoms. Examples of the substituent that R201 to R207 and R210 may have include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and groups each represented by General Formulae (ca-r-1) to (ca-r-7).
[In the formulae, R′201's each independently represent a hydrogen atom, a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent.]
Cyclic group which may have substituent:
The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. Further, the aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group is saturated.
The aromatic hydrocarbon group as R′201 is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group has preferably 3 to 30 carbon atoms, more preferably 5 to 30 carbon atoms, still more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring contained in the aromatic hydrocarbon group as R′201 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, or an aromatic heterocyclic ring in which some carbon atoms constituting any of these aromatic rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group as R′201 include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group), and a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group). The alkylene group (alkyl chain in the arylalkyl group) has preferably 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
Examples of the cyclic aliphatic hydrocarbon group as R′201 include an aliphatic hydrocarbon group having a ring in the structure thereof.
Examples of the aliphatic hydrocarbon group having a ring in the structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom has been removed from an aliphatic hydrocarbon ring), a group in which the alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the alicyclic hydrocarbon group is interposed in the middle of a linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is preferable, and the number of carbon atoms of the polycycloalkane is preferably in a range of 7 to 30. Among these, a polycycloalkane having a crosslinked ring polycyclic skeleton such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; and a polycyeloalkane having a condensed ring polycyclic skeleton such as a cyclic group having a steroid skeleton are preferable as the polycycloalkane.
Among these examples, as the cyclic aliphatic hydrocarbon group as R′201, a group in which one or more hydrogen atoms have been removed from a monocycloalkane or a polycycloalkane is preferable, a group in which one hydrogen atom has been removed from a polycycloalkane is more preferable, an adamantyl group or a norbornyl group is particularly preferable, and an adamantyl group is most preferable.
The linear or branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and particularly preferably 1 to 3 carbon atoms.
As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH)CH3)—, —C(CH3)2—, —C(CH3)(CH)CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
Further, the cyclic hydrocarbon group as R′201 may have a heteroatom such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2-containing cyclic groups each represented by General Formulae (b5-r-1) to (b5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16).
Examples of the substituent for the cyclic group as R′201 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
As the alkyl group as the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferable.
As the alkoxy group as the substituent, an alkoxy group having 1 to 5 carbon atoms is preferable, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group is more preferable, and a methoxy group or an ethoxy group is most preferable.
As the halogen atom as a substituent, a fluorine atom is preferable.
Example of the above-described halogenated alkyl group as the substituent includes a group in which some or all hydrogen atoms in an alkyl group having 1 to 5 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group have been substituted with the above-described halogen atoms.
The carbonyl group as the substituent is a group that substitutes a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
Chain-like alkyl group which may have substituent:
The chain-like alkyl group as R′201 may be linear or branched.
The linear alkyl group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most preferably 1 to 10 carbon atoms.
The branched alkyl group has preferably 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and most preferably 3 to 10 carbon atoms. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain-like alkenyl group which may have substituent:
The chain-like alkenyl group as R′201 may be linear or branched, and the number of carbon atoms thereof is preferably in a range of 2 to 10, more preferably in a range of 2 to 5, still more preferably in a range of 2 to 4, and particularly preferably 3. Examples of the linear alkenyl group include a vinyl group, a propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group.
Among the examples, as the chain-like alkenyl group, a linear alkenyl group is preferable, a vinyl group or a propenyl group is more preferable, and a vinyl group is particularly preferable.
Examples of the substituent for the chain-like alkyl group or alkenyl group as R′201 include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, and a cyclic group as R′201.
Examples of the cyclic group which may have a substituent, the chain-like alkyl group which may have a substituent, and the chain-like alkenyl group which may have a substituent as R′201 include those for the acid dissociable group represented by Formula (a1-r-2) which are the exemplary examples of the cyclic group which may have a substituent and the chain-like alkyl group which may have a substituent, in addition to those described above.
Among the examples, R′201 represents preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. More specific preferred examples thereof include a phenyl group, a naphthyl group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane, a lactone-containing cyclic group represented by any of General Formulae (a2-1-1) to (a2-r-7), and a —SO2-containing cyclic group represented by any of General Formulae (b5-r-1) to (b5-r-4).
In General Formulae (ca-1) to (ca-3), in a case where R201 to R203 and R206 and R207 are bonded to each other to form a ring together with a sulfur atom in the formula, these groups may be bonded to each other via a heteroatom such as a sulfur atom, an oxygen atom, or a nitrogen atom, or a functional group such as a carbonyl group, —SO—, —SO2—, —SO3—, —COO—, —CONH— or —N(RN)— (RN represents an alkyl group having 1 to 5 carbon atoms). As a ring to be formed, a ring containing the sulfur atom in the formula in the ring skeleton thereof is preferably a 3- to 10-membered ring and particularly preferably a 5- to 7-membered ring containing the sulfur atom. Specific examples of the ring to be formed include a thiophene ring, a thiazole ring, a benzothiophene ring, a dibenzothiophene ring, a 9H-thioxanthene ring, a thioxanthone ring, a thianthrene ring, a phenoxathiin ring, a tetrahydrothiophenium ring, and a tetrahydrothiopyranium ring.
R208 and R209 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms and preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. In a case where R208 and R209 represent an alkyl group, R208 and R209 may be bonded to each other to form a ring.
R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a —SO2-containing cyclic group which may have a substituent.
Examples of the aryl group as R210 include an unsubstituted aryl group having 6 to 20 carbon atoms. Among these, a phenyl group or a naphthyl group is preferable.
As the alkyl group as R210, a chain-like or cyclic alkyl group having 1 to 30 carbon atoms is preferable.
It is preferable that the alkenyl group as R210 has 2 to 10 carbon atoms.
The —SO2-containing cyclic group which may have a substituent as R210 is preferably “—SO3-containing polycyclic group” and more preferably a group represented by General Formula (b5-r-1).
Specific examples of suitable cations represented by Formula (ca-1) include cations each represented by Chemical Formulae (ca-1-1) to (ca-1-70).
[In the formulae, g1, g2, and g3 represent a repeating number, g1 represents an integer of 1 to 5, g2 represents an integer of 0 to 20, and g3 represents an integer of 0 to 20.]
[In the formulae, R″201 represents a hydrogen atom or a substituent, and examples of the substituent include the same groups as those provided as examples for the substituents that R201 to R207 and R210 to R212 may have.]
Specific examples of suitable cations represented by Formula (ca-2) include a diphenyliodonium cation and a bis(4-ter-butylphenyl)iodonium cation.
Specific examples of suitable cations represented by Formula (ca-3) include cations each represented by Formulae (ca-3-1) to (ca-3-6).
As the cation moiety in the component (B01), among the examples described above, a cation represented by General Formula (ca-1) is preferable.
Among these, it is preferable that any of R201 to R203 in General Formula (ca-1) represents an aryl group having a fluorine atom.
As the cation moiety in the component (B01), specifically, a cation represented by any of Chemical Formulae (ca-1-44), (ca-1-55) to (ca-1-57), and (ca-1-71) to (ca-1-83) is preferable.
Specific preferred examples of the component (B0) are shown below.
Among the examples described above, the component (B0) is preferably a compound represented by any of Chemical Formulae (B0-14) to (B0-30) and more preferably a compound represented by any of Chemical Formulae (B0-18), (B0-19), and (B0-28) to (B0-30).
In the resist composition according to the present embodiment, the component (B0) may be used alone or a combination of two or more kinds thereof may be used.
In the resist composition according to the present embodiment, the component (B0) may be used alone or may be used in a combination of two or more kinds thereof.
The amount of the component (B0) in the resist composition according to the present embodiment is preferably in a range of 15 to 40 parts by mass, more preferably in a range of 20 to 40 parts by mass, and still more preferably in a range of 20 to 35 parts by mass with respect to 100 parts by mass of the component (A).
In a case where the amount of the component (B0) is greater than or equal to the lower limits of the above-described preferable ranges, the lithography characteristics such as the sensitivity. CDU, and resolution in the resist pattern formation are further improved. Meanwhile, in a case where the content thereof is less than or equal to the upper limits of the above-described preferable ranges, a uniform solution is easily obtained, and the storage stability of the resist composition is further improved in a case of dissolving each component of the resist composition in an organic solvent.
The proportion of the component (B0) in the total component (B) contained in the resist composition according to the present embodiment is, for example, 50% by mass or greater, preferably 70% by mass or greater, and more preferably 95% by mass or greater. In addition, the proportion thereof may be 100% by mass.
The component (B) in the resist composition according to the present embodiment may contain an acid generator component (B1) other than the above, described component (B0) (hereinafter, also referred to as “component (B1)”).
Examples of the component (B1) are numerous and include onium salt-based acid generators such as iodonium salts and sulfonium salts; oxime sulfonate-based acid generators; diazomethane-based acid generators such as bisalkyl or bisaryl sulfonyl diazomethanes and poly(bis-sulfonyl)diazomethanes; nitrobenzyl sulfonate-based acid generators; iminosulfonate-based acid generators; and disulfone-based acid generators.
Examples of the onium salt-based acid generators include a compound represented by General Formula (b-1) (hereinafter, also referred to as “component (b-1)”), a compound represented by General Formula (b-2) (hereinafter, also referred to as “component (b-2)”), and a compound represented by General Formula (b-3) (hereinafter, also referred to as “component (b-3)”).
Examples of the onium salt-based acid generators include a compound represented by General Formula (b-1) (hereinafter, also referred to as “component (b-1)”), a compound represented by General Formula (b-2) (hereinafter, also referred to as “component (b-2)”), and a compound represented by General Formula (b-3) (hereinafter, also referred to as “component (b-3)”).
[In the formulae, R101 and R104 to R108 each independently represent a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. R104 and R105 may be bonded to each other to form a ring structure. R102 represents a fluorinated alkyl group having 1 to 5 carbon atoms or a fluorine atom. Y101 represents a divalent linking group having an oxygen atom or a single bond. V101 to V103 each independently represent a single bond, an alkylene group, or a fluorinated alkylene group. L101 and L102 each independently represent a single bond or an oxygen atom. L103 to L105 each independently represent a single bond, —CO—, or —SO2—. m represents an integer of 1 or greater, and M′m+ represents an m-valent onium cation.]
{Anion moiety}
Anions in component (b-1)
In Formula (b-1), R101 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent.
Cyclic group which may have substituent:
The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. Further, the aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group is saturated.
The aromatic hydrocarbon group as R101 is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group has preferably 3 to 30 carbon atoms, more preferably 5 to 30 carbon atoms, still more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring of the aromatic hydrocarbon group as R101 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, and an aromatic heterocyclic ring in which some carbon atoms constituting any of these aromatic rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group as R10 include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group) and a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, I-naphthylethyl group, or a 2-naphthylethyl group). The alkylene group (alkyl chain in the arylalkyl group) has preferably 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
Examples of the cyclic aliphatic hydrocarbon group as R101 include an aliphatic hydrocarbon group having a ring in the structure thereof.
Examples of the aliphatic hydrocarbon group having a ring in the structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom has been removed from an aliphatic hydrocarbon ring), a group in which the alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the alicyclic hydrocarbon group is interposed in the middle of a linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is preferable, and the number of carbon atoms of the polycycloalkane is preferably in a range of 7 to 30. Among these, a polycycloalkane having a crosslinked ring polycyclic skeleton such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; and a polycycloalkane having a condensed ring polycyclic skeleton such as a cyclic group having a steroid skeleton are preferable as the polycycloalkane.
Among these examples, as the cyclic aliphatic hydrocarbon group as R101, a group in which one or more hydrogen atoms have been removed from a monocycloalkane or a polycycloalkane is preferable, a group in which one hydrogen atom has been removed from a polycycloalkane is more preferable, an adamantyl group or a norbornyl group is still more preferable, and an adamantyl group is particularly preferable.
The linear aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms. As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2) s-].
The branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 2 to 10 carbon atoms, more preferably 3 to 6 carbon atoms, still more preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms. As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH)CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
Further, the cyclic hydrocarbon group as R101 may have a heteroatom such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2-containing cyclic groups each represented by General Formulae (b5-r-1) to (b5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16). In the formulae, * represents a bonding site with respect to Y101 in Formula (b-1).
[In the formulae, Rb′51's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group, R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, or a —SO2-containing cyclic group, B″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom or a sulfur atom, an oxygen atom, or a sulfur atom, and n′ represents an integer of 0 to 2. * represents a bonding site.]
In General Formulae (b5-r-1) and (b5-r-2), B″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom or a sulfur atom, an oxygen atom, or a sulfur atom.
B″ represents preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and still more preferably a methylene group.
In General Formulae (b5-r-1) to (b5-r-4), Rb′51's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group. Among these, it is preferable that Rb′51's each independently represent a hydrogen atom or a cyano group.
Specific examples of the groups each represented by General Formulae (b5-r-1) to (b5-r-4) are shown below. In the formulae shown below, “Ac” represents an acetyl group.
Examples of the substituent for the cyclic group as R101 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
As the alkyl group as the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferable.
As the alkoxy group as the substituent, an alkoxy group having 1 to 5 carbon atoms is preferable, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group is more preferable, and a methoxy group or an ethoxy group is most preferable.
Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Among these, a fluorine atom is preferable.
Example of the above-described halogenated alkyl group as the substituent include a group in which some or all hydrogen atoms in an alkyl group having 1 to 5 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group have been substituted with the above-described halogen atoms. The carbonyl group as the substituent is a group that substitutes a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
The cyclic hydrocarbon group as R101 may be a condensed cyclic group having a condensed ring in which an aliphatic hydrocarbon ring and an aromatic ring are condensed. Examples of the condensed rings include those obtained by condensing one or more aromatic rings with a polycycloalkane having a crosslinked ring polycyclic skeleton. Specific examples of the crosslinked ring-based polycycloalkane include a bicycloalkane such as bicyclo[2.2.1]heptane (norbornane) and bicyclo[2.2.2]octane. As the condensed cyclic group, a group having a condensed ring in which two or three aromatic rings are condensed with a bicycloalkane is preferable, and a group having a condensed ring in which two or three aromatic rings are condensed with bicyclo[2.2.2]octane is more preferable. Specific examples of the condensed cyclic group as R101 include those represented by Formulae (r-br-1) and (r-br-2). In the formulae, * represents a bonding site with respect to Y101 in Formula (b-1).
Examples of the substituents that the condensed cyclic group as R101 may have include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an aromatic hydrocarbon group, and an alicyclic hydrocarbon group.
Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituent of the condensed cyclic group include those described as the substituent of the cyclic group as R101.
Examples of the aromatic hydrocarbon group as the substituent of the condensed cyclic group include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group), a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, I-naphthylethyl group, or a 2-naphthylethyl group), and a heterocyclic group represented by any of Formulae (r-hr-1) to (r-hr-6).
Examples of the alicyclic hydrocarbon group as the substituent of the condensed cyclic group include a group in which one hydrogen atom has been removed from a monocycloalkane such as cyclopentane or cyclohexane, a group in which one hydrogen atom has been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane, a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7), a-SO2-containing cyclic group represented by any of General Formulae (b5-r-1) to (b5-r-4), and a heterocyclic group represented by any of Formulae (r-hr-7) to (r-hr-16).
Chain-like alkyl group which may have substituent:
The chain-like alkyl group as R101 may be linear or branched.
The linear alkyl group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most preferably 1 to 10 carbon atoms.
The branched alkyl group has preferably 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and most preferably 3 to 10 carbon atoms. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain-like alkenyl group which may have substituent:
The chain-like alkenyl group as R101 may be linear or branched, and the number of carbon atoms thereof is preferably in a range of 2 to 10, more preferably in a range of 2 to 5, still more preferably in a range of 2 to 4, and particularly preferably 3. Examples of the linear alkenyl group include a vinyl group, a propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group.
Among the examples, as the chain-like alkenyl group, a linear alkenyl group is preferable, a vinyl group or a propenyl group is more preferable, and a vinyl group is particularly preferable.
Examples of the substituent for the chain-like alkyl group or alkenyl group as R101 include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, and a cyclic group as R101.
Among the examples, R101 represents preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent.
More specifically, as the cyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a phenyl group, a naphthyl group, or a polycycloalkane; a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7); or a —SO2-containing cyclic group represented by any of General Formulae (b5-r-1) to (b5-r-4) is preferable, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is more preferable, and an adamantyl group is still more preferable.
In Formula (b-1), Y101 represents a single bond or a divalent linking group having an oxygen atom.
In a case where Y101 represents a divalent linking group containing an oxygen atom, Y101 may contain an atom other than the oxygen atom. Examples of atoms other than an oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of the divalent linking group having an oxygen atom include a non-hydrocarbon oxygen atom-containing linking group such as an oxygen atom (an ether bond: —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), or a carbonate bond (—O—C(═O)—O—); and combinations of the above-described non-hydrocarbon oxygen atom-containing linking groups with an alkylene group. Further, a sulfonyl group (—SO2—) may be further linked to the combination. Examples of the divalent linking group having an oxygen atom include linking groups each represented by General Formulae (y-a1-1) to (y-a1-7). Further, in General Formulae (y-a1-1) to (y-a1-7), V′101 in General Formulae (y-a1-1) to (y-a1-7) is bonded to R101 in Formula (b-1).
[In the formulae, v′101 represents a single bond or an alkylene group having 1 to 5 carbon atoms, and V′102 represents a divalent saturated hydrocarbon group having 1 to 30 carbon atoms.]
As the divalent saturated hydrocarbon group as V′102, an alkylene group having 1 to 30 carbon atoms is preferable, an alkylene group having 1 to 10 carbon atoms is more preferable, and an alkylene group having 1 to 5 carbon atoms is still more preferable.
The alkylene group as V′101 and V′102 may be a linear alkylene group or a branched alkylene group, and a linear alkylene group is preferable.
Specific examples of the alkylene group as V′101 and V′102 include a methylene group [—CH2—]; an alkylmethylene group such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, or —C(CH2CH3)2—; an ethylene group [—CH2CH2—]; an alkylethylene group such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, or —CH(CH2CH3)CH2—; a trimethylene group (n-propylene group) [—CH2CH2CH2—]; an alkyltrimethylene group such as —CH(CH3)CH2CH2— or —CH2CH(CH3)CH2—; a tetramethylene group [—CH2CH2CH2CH2—]; an alkyltetramethylene group such as —CH(CH3)CH2CH2CH2— or —CH2CH(CH3)CH2CH2—; and a pentamethylene group [—CH2CH2CH2CH2CH2—].
Further, a part of methylene group in the alkylene group as V′101 and V′102 may be substituted with a divalent aliphatic cyclic group having 5 to 10 carbon atoms. As the aliphatic cyclic group, a divalent group in which one hydrogen atom has been further removed from the cyclic aliphatic hydrocarbon group (a monocyclic aliphatic hydrocarbon group or a polycyclic aliphatic hydrocarbon group) as Ra′3 in Formula (a1-r-1) is preferable, and a cyclohexylene group, a 1,5-adamantylene group, or a 2,6-adamantylene group is more preferable.
Y101 represents preferably a divalent linking group having an ester bond or a divalent linking group having an ether bond and more preferably a linking group represented by any of Formulae (y-a1-1) to (y-a1-5).
In Formula (b-1), V101 represents a single bond, an alkylene group, or a fluorinated alkylene group. It is preferable that the alkylene group and the fluorinated alkylene group as V101 have 1 to 4 carbon atoms. Examples of the fluorinated alkylene group as V101 include a group in which some or all hydrogen atoms in the alkylene group as V101 have been substituted with fluorine atoms. Among the examples, Viol represents preferably a single bond or a fluorinated alkylene group having 1 to 4 carbon atoms and more preferably a single bond or a linear fluorinated alkylene group having 1 to 4 carbon atoms.
In Formula (b-1), R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. R102 represents preferably a fluorine atom or a perfluoroalkyl group having 1 to 5 carbon atoms and more preferably a fluorine atom.
In a case where Y101 represents a single bond, specific example of the anion moiety represented by Formula (b-1) include a fluorinated alkylsulfonate anion such as a trifluoromethanesulfonate anion or a perfluorobutanesulfonate anion. Further, in a case where Y101 represents a divalent linking group having an oxygen atom, specific examples thereof include an anion represented by any of Formulae (an-1) to (an-3).
[In the formulae, R″101 represents an aliphatic cyclic group which may have a substituent, a monovalent heterocyclic group represented by any of Chemical Formulae (r-hr-1) to (r-hr-6), a condensed cyclic group represented by Formula (r-br-1) or (r-br-2), or a chain-like alkyl group which may have a substituent. R″102 represents an aliphatic cyclic group which may have a substituent, a condensed cyclic group represented by Formula (r-br-1) or (r-br-2), a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) and (a2-r-3) to (a2-r-7), or a —SO2-containing cyclic group represented by any of General Formulae (b5-r-1) to (b5-r-4). R″103 represents an aromatic cyclic group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain-like alkenyl group which may have a substituent. V″101 represents a single bond, an alkylene group having 1 to 4 carbon atoms, or a fluorinated alkylene group having 1 to 4 carbon atoms. R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. Each v″ independently represents an integer of 0 to 3, each q″ independently represents an integer of 0 to 20, and n″ represents 0 or 1.]
As the aliphatic cyclic group as R″101, R″102, and R″103 which may have a substituent, the same groups as those provided as examples for the cyclic aliphatic hydrocarbon group as R101 in Formula (b-1) are preferable. Examples of the substituent include the same groups as those provided as examples for the substituent which may substitute the cyclic aliphatic hydrocarbon group as R101 in Formula (b-1).
As the aromatic cyclic group as R″103 which may have a substituent, the same groups as those provided as examples for the aromatic hydrocarbon group in the cyclic hydrocarbon group as R101 in Formula (b-1) are preferable. Examples of the substituent include the same groups as those provided as examples for the substituent which may substitute the aromatic hydrocarbon group as R101 in Formula (b-1).
As the chain-like alkyl group as R″101 which may have a substituent, the same groups as those provided as examples for the chain-like alkyl group as R101 in Formula (b-1) are preferable.
As the chain-like alkenyl group as R″103 which may have a substituent, the same groups as those provided as examples for the chain-like alkenyl group as R101 in Formula (b-1) are preferable.
Anions in Component (b-2)
In Formula (b-2), R104 and R105 each independently represent a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R101 in Formula (b-1). Here, R104 and R105 may be bonded to each other to form a ring.
R104 and R105 represent preferably a chain-like alkyl group which may have a substituent and more preferably a linear or branched alkyl group or a linear or branched fluorinated alkyl group.
The chain-like alkyl group has preferably 1 to 10 carbon atoms, more preferably 1 to 7 carbon atoms, and still more preferably 1 to 3 carbon atoms. It is preferable that the number of carbon atoms in the chain-like alkyl group as R104 and R105 decreases within the range of the number of carbon atoms from the viewpoint that the solubility in a solvent for a resist is also satisfactory. Further, in the chain-like alkyl group as R104 and R105, it is preferable that the number of hydrogen atoms substituted with fluorine atoms is as large as possible from the viewpoint that the acid strength increases and the transparency to high energy light or electron beams having a wavelength of 250 nm or less is improved. The proportion of fluorine atoms in the chain-like alkyl group, that is, the fluorination ratio is preferably in a range of 70% to 100% and more preferably in a range of 90% to 100%, and it is most preferable that the chain-like alkyl group is a perfluoroalkyl group in which all hydrogen atoms are substituted with fluorine atoms. In Formula (b-2), V102 and V103 each independently represent a single bond, an alkylene group, or a fluorinated alkylene group, and examples thereof include the same groups as those provided as examples for V101 in Formula (b-1).
In Formula (b-2), 1,101 and 1.102 each independently represent a single bond or an oxygen atom.
Anions in Component (b-3)
In Formula (b-3), R106 to R18 each independently represent a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R101 in Formula (b-1).
In Formula (b-3), L103 to L105 each independently represent a single bond, —CO—, or —SO2—.
In Formulae (b-1), (b-2), and (b-3), M′m+ represents an m-valent onium cation. Among these, a sulfonium cation and an iodonium cation are preferable.
m represents an integer of 1 or greater.
Preferred examples of the cation moiety ((M′m+)1/m) include organic cations each represented by General Formulae (ca-1) to (ca-3).
In the resist composition according to the present embodiment, the component (B1) may be used alone or a combination of two or more kinds thereof may be used.
The amount of the component (B1) is preferably 20 parts by mass or less, more preferably 10 parts by mass or less, and still more preferably 5 parts by mass or less with respect to 100 parts by mass of the component (A).
It is preferable that the resist composition according to the present embodiment contains only the component (B0) as the acid generator.
The resist composition according to the present embodiment may further contain other components in addition to the component (A) and the component (B) described above. Examples of other components include a component (D), a component (E), a component (F), and a component(S) described below.
It is preferable that the resist composition according to the present embodiment further contains a base component (hereinafter, also referred to as “component (D)”) that traps an acid (that is, controls diffusion of an acid) generated upon light exposure. The component (D) acts as a quencher (an acid diffusion control agent) which traps the acid generated in the resist composition upon light exposure.
Examples of the component (D) include a photodecomposable base (D1) having acid diffusion controllability (hereinafter, referred to as “component (D1)”) which is lost by the decomposition upon light exposure and a nitrogen-containing organic compound (D2) (hereinafter, referred to as “component (D2)”) which does not correspond to the component (D1). Among these, the photodecomposable base (the component (D1) is preferable since it is easy to enhance the roughness reducing property. Further, in a case where the component (D1) is contained, both the characteristics of increasing the sensitivity and suppressing the occurrence of coating defects are likely to be enhanced.
In regard to component (D1)
In a case where a resist composition containing the component (D1) is obtained, the contrast between an exposed portion and an unexposed portion of the resist film can be further improved in a case of forming a resist pattern.
The component (D1) is not particularly limited as long as the component is decomposed upon light exposure and loses an acid diffusion controllability, and one or more kinds of compounds selected from the group consisting of a compound represented by General Formula (d1-1) (hereinafter, referred to as “component (d1-1)”), a compound represented by General Formula (d1-2) (hereinafter, referred to as “component (d1-2)”), and a compound represented by General Formula (d1-3) (hereinafter, referred to as “component (d1-3)”) are preferable.
Since the components (d1-1) to (d1-3) are decomposed and lose the acid diffusion controllability (basicity), the components (d1-1) to (d1-3) do not act as a quencher at the exposed portion of the resist film, but act as a quencher at the unexposed portion of the resist film.
[In the formulae, Rd1 to Rd4 represent a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. Here, no fluorine atom is bonded to the carbon atom adjacent to the S atom in Rd2 of Formula (d1-2). Yd1 represents a single bond or a divalent linking group. m represents an integer of 1 or greater, and Mm4's each independently represent an m-valent organic cation.]
{Component (d1-1)}
In Formula (d1-1), Rd1 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R′201.
Among these, it is preferable that Rd′ represents an aromatic hydrocarbon group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain-like alkyl group which may have a substituent. Examples of the substituent that may be included in these groups include a hydroxyl group, an oxo group, an alkyl group, an aryl group, a fluorine atom, a fluorinated alkyl group, a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7), an ether bond, an ester bond, and a combination thereof. In a case where an ether bond or an ester bond is included as the substituent, the substituent may be bonded through an alkylene group, and a linking group represented by any of Formulae (y-a1-1) to (y-a1-5) is preferable as the substituent. Further, in a case where the aromatic hydrocarbon group, the aliphatic cyclic group, or the chain-like alkyl group as Rd′ contains a linking group represented by any of General Formulae (y-a1-1) to (y-a1-7) as a substituent, V′101 in General Formulae (y-a1-1) to (y-a1-7) is bonded to the carbon atom constituting the aromatic hydrocarbon group, the aliphatic cyclic group, or the chain-like alkyl group as Rd1 in Formula (d3-1), in General Formulae (y-a1-1) to (y-a1-7).
Suitable examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, and a polycyclic structure having a bicyclooctane skeleton (for example, a polycyclic structure formed of a bicyclooctane skeleton and a ring structure other than the bicyclooctane skeleton).
As the aliphatic cyclic group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane is more preferable.
It is preferable that the chain-like alkyl group has 1 to 10 carbon atoms, and specific examples thereof include a linear alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, or a decyl group; and a branched alkyl group such as a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, or a 4-methylpentyl group.
In a case where the chain-like alkyl group is a fluorinated alkyl group having a fluorine atom or a fluorinated alkyl group as a substituent, the fluorinated alkyl group has preferably 1 to 11 carbon atoms, more preferably 1 to 8 carbon atoms, and still more preferably 1 to 4 carbon atoms. The fluorinated alkyl group may have an atom other than a fluorine atom. Examples of the atom other than a fluorine atom include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific preferred examples of the anion moiety in the component (d1-1) are described below.
In Formula (d1-1). Mm+ represents an m-valent organic cation.
Suitable examples of the organic cation as Mm+ include the same cations as those provided as examples for the cations each represented by General Formulae (ca-1) to (ca-3). Among these, a cation represented by General Formula (ca-1) is more preferable, and a cation represented by any of Formulae (ca-1-1) to (ca-1-113) is still more preferable.
The component (d1-1) may be used alone or a combination of two or more kinds thereof may be used.
{Component (d1-2)}
In Formula (d1-2), Rd2 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R′201.
Here, no fluorine atom is bonded to the carbon atom adjacent to the S atom in Rd2 (the carbon atom is not substituted with fluorine). In this manner, the anion of the component (d1-2) is an appropriately weak acid anion, thereby improving the quenching ability of the component (D).
Rd2 represents preferably a chain-like alkyl group which may have a substituent or an aliphatic cyclic group which may have a substituent and more preferably an aliphatic cyclic group which may have a substituent.
The chain-like alkyl group preferably has 1 to 10 carbon atoms and more preferably 3 to 10 carbon atoms.
The aliphatic cyclic group is more preferably a group (which may have a substituent) obtained by removing one or more hydrogen atoms from adamantane, norbornane, isobornane, tricyclodecane, tetracyclododecane, or the like; and a group obtained by removing one or more hydrogen atoms from camphor.
The hydrocarbon group as Rd2 may have a substituent, and examples of the substituent include the same groups as those provided as examples for the substituent that the hydrocarbon group (such as an aromatic hydrocarbon group, an aliphatic cyclic group, or a chain-like alkyl group) as Rd1 in Formula (d1-1) may have.
Specific preferred examples of the anion moiety in the component (d1-2) are described below.
In Formula (d1-2), Mm+ represents an m-valent organic cation and has the same definition as that for Mm+ in Formula (d1-1).
The component (d1-2) may be used alone or a combination of two or more kinds thereof may be used.
{Component (d1-3)}
In Formula (d1-3), Rd3 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R′201. Among these, a cyclic group having a fluorine atom, a chain-like alkyl group, or a chain-like alkenyl group is preferable. Among these, a fluorinated alkyl group is preferable, and the same groups as those provided as examples for the fluorinated alkyl group represented by Rd1 are more preferable.
In Formula (d1-3), Rd4 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof include the same groups as those provided for R′201.
Among these, an alkyl group which may have a substituent, an alkoxy group which may have a substituent, an alkenyl group which may have a substituent, or a cyclic group which may have a substituent is preferable.
It is preferable that the alkyl group as Rd4 is a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Some hydrogen atoms in the alkyl group as Rd4 may be substituted with a hydroxyl group, a cyano group, or the like.
It is preferable that the alkoxy group as Rd4 is an alkoxy group having 1 to 5 carbon atoms, and specific examples of the alkoxy group having 1 to 5 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, and a tert-butoxy group. Among these, a methoxy group and an ethoxy group are preferable.
Examples of the alkenyl group as Rd4 include the same groups as those provided as examples for the alkenyl group as R′201. Among these, a vinyl group, a propenyl group (an allyl group), a 1-methylpropenyl group, and a 2-methylpropenyl group are preferable. These groups may have an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms as a substituent.
Examples of the cyclic group as Rd4 include the same groups as those provided as examples for the cyclic group as R′201. Among these, an alicyclic group in which one or more hydrogen atoms have been removed from a cycloalkane such as cyclopentane, cyclohexane, adamantane, norbornane, isobomane, tricyclodecane or tetracyclododecane or an aromatic group such as a phenyl group or a naphthyl group is preferable. In a case where Rd4 represents an alicyclic group, the resist composition is satisfactorily dissolved in an organic solvent so that the lithography characteristics are enhanced. Further, in a case where Rd4 represents an aromatic group, the resist composition has excellent light absorption efficiency in lithography using EUV or the like as an exposure light source, and thus the sensitivity and lithography characteristics are enhanced.
In Formula (d1-3), Yd1 represents a single bond or a divalent linking group. The divalent linking group as Yd1 is not particularly limited, and examples thereof include a divalent hydrocarbon group (an aliphatic hydrocarbon group or an aromatic hydrocarbon group) which may have a substituent and a divalent linking group having a heteroatom. Examples of the divalent linking groups are the same as those provided as examples for the divalent hydrocarbon group which may have a substituent and the divalent linking group having a heteroatom described in the section of the divalent linking group as Ya21 in Formula (a2-1).
It is preferable that Yd1 represents a carbonyl group, an ester bond, an amide bond, an alkylene group, or a combination thereof. As the alkylene group, a linear or branched alkylene group is more preferable, and a methylene group or an ethylene group is still more preferable.
Specific preferred examples of the anion moiety in the component (d1-3) are described below.
In Formula (d1-3), Mm+ represents an m-valent organic cation and has the same definition as that for Mm+ in Formula (d1-1).
The component (d1-3) may be used alone or a combination of two or more kinds thereof may be used.
As the component (D1), only one of the above-described components (d1-1) to (d1-3) or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (D1), the amount of the component (D1) in the resist composition is preferably in a range of 0.5 to 15 parts by mass, more preferably in a range of 1 to 10 parts by mass, and still more preferably in a range of 2 to 8 parts by mass with respect to 100 parts by mass of the component (A).
In a case where the amount of the component (D1) is greater than or equal to the lower limits of the above-described preferable ranges, satisfactory lithography characteristics and a satisfactory resist pattern shape are likely to be obtained. Meanwhile, in a case where the content is less than or equal to the upper limits of the above-described ranges, the sensitivity can be satisfactorily maintained and the throughput is also excellent.
In the resist composition according to the present embodiment, it is preferable that the component (D1) contains the component (d1-1).
The amount of the component (d1-1) in the total component (D) contained in the resist composition according to the present embodiment is preferably 50% by mass or greater, preferably 70% by mass or greater, and still more preferably 90% by mass or greater, and the component (D) may consist of only the component (d1-1).
Method of producing component (D1):
The methods of producing the component (d1-1) and the component (d1-2) are not particularly limited, and these components can be produced by known methods.
Further, the method of producing the component (d1-3) is not particularly limited, and the component is produced by the same method as disclosed in United States Patent Application, Publication No. 2012-0149916.
In regard to component (D2)
The component (D) may contain a nitrogen-containing organic compound component (hereinafter, referred to as “component (D2)”) that does not correspond to the component (D1) described above.
The component (D2) is not particularly limited as long as the component acts as an acid diffusion control agent and does not correspond to the component (D1), and an optional component may be selected from known components and then used. Among the examples, an aliphatic amine is preferable, and particularly a secondary aliphatic amine and a tertiary aliphatic amine are more preferable.
The aliphatic amine is an amine containing one or more aliphatic groups, and the number of carbon atoms in the aliphatic group is preferably in a range of 1 to 12.
Examples of the aliphatic amine include amines in which at least one hydrogen atom of ammonia NH; has been substituted with an alkyl group or hydroxyalkyl group having 12 or less carbon atoms (alkylamines or alkylalcoholamines), and cyclic amines. Specific examples of the alkylamines and the alkylalcoholamines include monoalkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, and n-decylamine; dialkylamines such as diethylamine, di-n-propylamine, di-n-heptylamine, di-n-octylamine, and dicyclohexylamine; trialkylamines such as trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine, and tri-n-dodecylamine; and alkylalcoholamines such as diethanolamine, triethanolamine, diisopropanolamine, triisopropanolamine, di-n-octanolamine, and tri-n-octanolamine. Among these, a trialkylamine having 6 to 30 carbon atoms is still more preferable, and tri-n-pentylamine or tri-n-octylamine is particularly preferable.
Examples of the cyclic amine include a heterocyclic compound having a nitrogen atom as a heteroatom. The heterocyclic compound may be a monocyclic compound (aliphatic monocyclic amine) or a polycyclic compound (aliphatic polycyclic amine).
Specific examples of the aliphatic monocyclic amine include piperidine and piperazine.
The aliphatic polycyclic amine preferably has 6 to 10 carbon atoms, and specific examples thereof include 1,5-diazabicyclo[4.3.0]-5-nonene, 1,8-diazabicyclo[5.4.0]-7-undecene, hexamethylenetetramine, and 1,4-diazabicyclo[2.2.2]octane.
Examples of other aliphatic amines include tris(2-methoxymethoxyethyl)amine, tris{2-(2-methoxyethoxy)ethyl}amine, tris{2-(2-methoxyethoxymethoxy)ethyl}amine, tris{2-(1-methoxyethoxy)ethyl}amine, tris{2-(1-ethoxyethoxy)ethyl}amine, tris{2-(1-ethoxypropoxy)ethyl}amine, tris[2-{2-(2-hydroxyethoxy) ethoxy]ethyl}amine, and triethanolamine triacetate. Among these, triethanolamine triacetate is preferable.
As the component (D2), an aromatic amine may be used.
Examples of aromatic amines include 4-dimethylaminopyridine, pyrrole, indole, pyrazole, imidazole, and derivatives thereof, tribenzylamine, 2,6-diisopropylaniline, N-tert-butoxycarbonylpyrrolidine, and 2,6-d1-tert-butylpyridine.
Among the examples, the component (D2) is preferably an alkylamine and more preferably a trialkylamine having 6 to 30 carbon atoms.
The component (D2) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (D2), the amount of the component (D2) in the resist composition is preferably in a range of 0.01 to 5 parts by mass, more preferably in a range of 0.1 to 5 parts by mass, and still more preferably in a range of 0.5 to 5 parts by mass with respect to 100 parts by mass of the component (A).
In a case where the amount of the component (D2) is greater than or equal to the lower limits of the above-described preferable ranges, satisfactory lithography characteristics and a satisfactory resist pattern shape are likely to be obtained. Meanwhile, in a case where the content is less than or equal to the upper limits of the above-described ranges, the sensitivity can be satisfactorily maintained and the throughput is also excellent.
<<At Least One Compound (E) Selected from Group Consisting of Organic Carboxylic Acids, Phosphorus Oxo Acids, and Derivatives Thereof>>
For the purpose of preventing any deterioration in sensitivity and improving the resist pattern shape and the post-exposure temporal stability, the resist composition according to the present embodiment may contain, as an optional component, at least one compound (E) (hereinafter referred to as “component (E)”) selected from the group consisting of an organic carboxylic acid, and a phosphorus oxo acid and a derivative thereof.
Specific examples of the organic carboxylic acid include acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, and salicylic acid. Among these, salicylic acid is preferable.
Examples of the phosphorus oxo acid include phosphoric acid, phosphonic acid, and phosphinic acid. Among these, phosphonic acid is particularly preferable.
In the resist composition of the present embodiment, the component (E) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (E), the amount of the component (E) is preferably in a range of 0.01 to 5 parts by mass and more preferably in a range of 0.05 to 3 parts by mass with respect to 100 parts by mass of the component (A). In a case where the content thereof is in the above-described ranges, the lithography characteristics are further improved.
The resist composition according to the present embodiment may further contain a fluorine additive component (hereinafter, referred to as “component (F)”) as a hydrophobic resin. The component (F) is used to impart water repellency to the resist film and used as a resin different from the component (A), whereby the lithography characteristics can be improved.
As the component (F), for example, the fluorine-containing polymer compounds described in Japanese Unexamined Patent Application, First Publication Nos. 2010-002870, 2010-032994, 2010-277043, 2011-13569, and 2011-128226 can be used. Specific examples of the component (F) include a polymer having a constitutional unit (f1) represented by General Formula (f1-1). As the polymer, a polymer (homopolymer) formed of only the constitutional unit (f1) represented by Formula (f1-1); a copolymer of the constitutional unit (f1) and the constitutional unit (a1); or a copolymer of the constitutional unit (f1), a constitutional unit derived from acrylic acid or methacrylic acid, and the constitutional unit (a1) is preferable, and a copolymer of the constitutional unit (f1) and the constitutional unit (a1) is more preferable. Here, as the constitutional unit (a1) copolymerized with the constitutional unit (f1), a constitutional unit derived from 1-ethyl-1-cyclooctyl(meth)acrylate or a constitutional unit derived from 1-methyl-1-adamantyl (meth)acrylate is preferable, and a constitutional unit derived from 1-ethyl-1-cyclooctyl(meth)acrylate is more preferable.
[In the formula, R has the same definition as described above, Rf102 and Rf103 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Rf102 and Rf103 may be the same as or different from each other. nf1 represents an integer of 0 to 5, and Rf101 represents an organic group having a fluorine atom.]
In Formula (f1-1), R bonded to the carbon atom at the α-position has the same definition as described above. It is preferable that R represents a hydrogen atom or a methyl group.
In Formula (f1-1), a fluorine atom is preferable as the halogen atom as Rf102 and Rf103. Examples of the alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include the same groups as those provided as examples for the alkyl group having 1 to 5 carbon atoms as R. Among the examples, a methyl group or an ethyl group is preferable. Specific examples of the halogenated alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include groups in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms have been substituted with halogen atoms. Among these, a fluorine atom is preferable as the halogen atom. Among these, Rf102 and Rf103 represent preferably a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms, more preferably a hydrogen atom, a fluorine atom, a methyl group, or an ethyl group, and still more preferably a hydrogen atom.
In Formula (f1-1), nf1 represents an integer of 0 to 5, preferably an integer of 0 to 3, and more preferably 1 or 2.
In Formula (f1-1), Rf101 represents an organic group having a fluorine atom and preferably a hydrocarbon group having a fluorine atom.
The hydrocarbon group having a fluorine atom may be linear, branched, or cyclic, and the number of carbon atoms thereof is preferably in a range of 1 to 20, more preferably in a range of 1 to 15, and particularly preferably in a range of 1 to 10.
In the hydrocarbon group having a fluorine atom, preferably 25% or more of the hydrogen atoms in the hydrocarbon group are fluorinated, more preferably 50% or more thereof are fluorinated, and particularly preferably 60% or more thereof are fluorinated from the viewpoint of increasing the hydrophobicity of the resist film during immersion light exposure.
Among the examples, Rf101 represents more preferably a fluorinated hydrocarbon group having 1 to 6 carbon atoms and particularly preferably a trifluoromethyl group, —CH2—CF3, —CH2—CF2—CF3, —CH (CF3)2, —CH2—CH2—CF3, or —CH2—CH2—CF2—CF2—CF2—CF3.
The weight-average molecular weight (Mw) (in terms of polystyrene according to gel permeation chromatography) of the component (F) is preferably in a range of 1000 to 50000, more preferably in a range of 5000 to 40000, and most preferably in a range of 10000 to 30000. In a case where the weight-average molecular weight thereof is less than or equal to the upper limits of the above-described ranges, the component (F) exhibits a sufficient solubility in a solvent for a resist to be used as a resist. Meanwhile, in a case where the weight-average molecular weight thereof is greater than or equal to the lower limits of the above-described ranges, water repellency of the resist film is improved.
Further, the dispersity (Mw/Mn) of the component (F) is preferably in a range of 1.0 to 5.0, more preferably in a range of 1.0 to 3.0, and most preferably in a range of 1.0 to 2.5.
In the resist composition according to the present embodiment, the component (F) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (F), the amount of the component (F) is preferably in a range of 0.5 to 10 parts by mass and more preferably in a range of 1 to 10 parts by mass with respect to 100 parts by mass of the component (A).
The resist composition of the present embodiment can be produced by dissolving the resist materials in an organic solvent component (hereinafter, referred to as “component(S)”).
The component(S) may be any component which can dissolve each component to be used to obtain a uniform solution, and an optional component can be appropriately selected from those which have been known as solvents of a chemically amplified resist composition and then used.
Examples of the component(S) include lactones such as γ-butyrolactone; ketones such as acetone, methyl ethyl ketone, cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; polyhydric alcohols such as ethylene glycol, diethylene glycol, propylene glycol, and dipropylene glycol; compounds having an ester bond, such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate, and dipropylene glycol monoacetate; polyhydric alcohol derivatives of compounds having an ether bond such as monoalkyl ether or monophenyl ether, such as monomethylether, monoethylether, monopropylether, or monobutylether of polyhydric alcohols or compounds having an ester bond [among these, propylene glycol monomethyl ether acetate (PGMEA) and propylene glycol monomethyl ether (PGME) are preferable]; cyclic ethers such as dioxane; esters such as methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, and ethyl ethoxypropionate; aromatic organic solvents such as anisole, ethylbenzylether, cresylmethylether, diphenylether, dibenzylether, phenetole, butylphenylether, ethylbenzene, diethylbenzene, pentylbenzene, isopropylbenzene, toluene, xylene, cymene, and mesitylene; and dimethylsulfoxide (DMSO).
In the resist composition of the present embodiment, the component(S) may be used alone or in the form of a mixed solvent of two or more kinds thereof. Among these, PGMEA, PGME, y-butyrolactone, EL, or cyclohexanone is preferable.
Further, a mixed solvent obtained by mixing PGMEA with a polar solvent is also preferable as the component(S). The blending ratio (mass ratio) of the mixed solvent can be appropriately determined in consideration of the compatibility between PGMEA and the polar solvent and the like, but is preferably in the range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2.
More specifically, in a case where EL or cyclohexanone is blended as the polar solvent, the mass ratio of PGMEA to EL or cyclohexanone is preferably in a range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2. Further, in a case where PGME is blended as the polar solvent, the mass ratio of PGMEA to PGME is preferably in a range of 1:9 to 9:1, more preferably in a range of 2:8 to 8:2, and still more preferably in a range of 3:7 to 7:3. Further, a mixed solvent of PGMEA, PGME, and cyclohexanone is also preferable.
Further, a mixed solvent of y-butyrolactone and at least one selected from PGMEA and EL is also preferable as the component(S). In this case, as the mixing ratio, the mass ratio between the former and the latter is preferably in a range of 70:30 to 95:5.
The amount of the component(S) to be used is not particularly limited and is appropriately set to have a concentration which enables coating a substrate or the like depending on the thickness of the coated film. The component(S) is typically used in an amount such that the solid content concentration of the resist composition is set to be in a range of 0.1% to 20% by mass and preferably in a range of 0.2% to 15% by mass.
After the resist material is dissolved in the component(S), impurities and the like may be removed from the resist composition of the present embodiment using a porous polyimide film, a porous polyamideimide film, or the like. For example, the resist composition may be filtered using a filter formed of a porous polyimide film, a filter formed of a porous polyamideimide film, a filter formed of a porous polyimide film and a porous polyamideimide film, or the like. Examples of the porous polyimide film and the porous polyamideimide film include those described in Japanese Unexamined Patent Application, First Publication No. 2016-155121.
The resist composition of the present embodiment described above contains the base material component (A) and the acid generator component (B), and the acid generator component (B) contains the compound (B0) represented by General Formula (b0).
Since the compound (B0) has a plurality of iodine atoms, the absorption efficiency of extreme ultraviolet rays (EUV) and electron beams (EB) is high. Meanwhile, in a case where the compound (B0) has an iodine atom, the solubility in a developing solution tends to decrease. However, since the compound (B0) contains an acid decomposable group (Rpg), the acid dissociable group of the acid decomposable group is dissociated and thus the acid decomposable group is a polar group in the exposed portion of the resist film, and accordingly, the solubility in a developing solution can be improved. That is, since the compound (B0) has an iodine atom and an acid decomposable group, adjustment is made such that the exposed portion of the resist film is likely to be dissolved in a developing solution and the unexposed portion of the resist film is unlikely to be dissolved in a developing solution.
In addition, since the compound (B0) contains a cyclic organic group (Rl0) having an acid decomposable group, which has a relatively bulky structure, the diffusion length of the acid is appropriately suppressed.
Therefore, it is assumed that the resist composition according to the present embodiment, which contains the compound (B0), can form a resist pattern with satisfactory CDU and resolution by controlling the acid diffusion length and improving the balance of hydrophilicity and hydrophobicity.
A method for forming a resist pattern according to the second aspect according to the present invention is a method including a step of forming a resist film on a support using the resist composition according to the first aspect of the present invention described above, a step of exposing the resist film to light, and a step of developing the resist film exposed to light to form a resist pattern.
According to the embodiment of the method for forming a resist pattern, a method for forming a resist pattern by performing processes as described below is an exemplary example.
First, a support is coated with the resist composition of the present embodiment using a spinner or the like, and a bake (post applied bake (PAB)) treatment is performed under a temperature condition of 80° C. to 150° C. for 40 to 120 seconds and preferably 60 to 90 seconds to form a resist film.
Following the selective light exposure carried out on the resist film by, for example, light exposure through a mask (mask pattern) having a predetermined pattern formed on the mask by using a light exposure apparatus such as an electron beam lithography apparatus or an ArF exposure apparatus, or direct irradiation of the resist film for drawing with an electron beam without using a mask pattern, a bake treatment (post exposure bake (PEB)) is carried out, for example, under a temperature condition in a range of 80° C. to 150° C. for 40 to 120 seconds and preferably 60 to 90 seconds.
Next, the resist film is subjected to a developing treatment. The developing treatment is conducted using an alkali developing solution in a case of an alkali developing process and using a developing solution containing an organic solvent (organic developing solution) in a case of a solvent developing process.
After the developing treatment, it is preferable to conduct a rinse treatment. As the rinse treatment, water rinsing using pure water is preferable in a case of the alkali developing process, and water rinsing using a rinse solution containing an organic solvent is preferable in a case of the solvent developing process.
In a case of the solvent developing process, after the developing treatment or the rinse treatment, the developing solution or the rinse solution attached onto the pattern may be removed by a treatment using a supercritical fluid.
After the developing treatment or the rinse treatment, drying is conducted. As desired, a bake treatment (post bake) may be conducted after the developing treatment.
In this manner, a resist pattern can be formed.
The support is not particularly limited and a known support of the related art can be used, and examples thereof include a substrate for an electronic component and a substrate on which a predetermined wiring pattern has been formed. Specific examples thereof include a metal substrate such as a silicon wafer, copper, chromium, iron, or aluminum; and a glass substrate. As the materials of the wiring pattern, copper, aluminum, nickel, or gold can be used.
The wavelength used for light exposure is not particularly limited and the exposure can be conducted using radiation such as an ArF excimer laser, a KrF excimer laser, an F2 excimer laser, extreme ultraviolet rays (EUV), vacuum ultraviolet rays (VUV), electron beams (EB), X-rays, and soft X-rays. The resist composition is useful for a KrF excimer laser, an ArF excimer laser, EB, and EUV, more useful for an ArF excimer laser, EB, and EUV, and particularly useful for EB and EUV. That is, the method for forming a resist pattern according to the present embodiment is a method particularly useful in a case where the step of exposing the resist film to light includes a process of exposing the resist film to extreme ultraviolet (EUV) rays or electron beams (EB).
The method for exposing the resist film to light can be a general light exposure (dry exposure) conducted in air or an inert gas such as nitrogen, or liquid immersion lithography.
The liquid immersion light exposure is a light exposure method in which the region between the resist film and the lens at the lowermost position of the light exposure apparatus is filled with a solvent (liquid immersion medium) in advance that has a larger refractive index than the refractive index of air, and the light exposure (immersion light exposure) is conducted in this state.
As the liquid immersion medium, a solvent having a refractive index greater than the refractive index of air but smaller than the refractive index of the resist film to be exposed to light is preferable, and examples thereof include water, a fluorine-based inert liquid, a silicon-based solvent, and a hydrocarbon-based solvent.
As the liquid immersion medium, water is preferably used.
As the alkali developing solution used for the developing treatment in the alkali developing process, a 0.1 to 10 mass % tetramethylammonium hydroxide (TMAH) aqueous solution is an exemplary example.
The organic solvent contained in the organic developing solution used for the developing treatment in the solvent developing process may be any solvent that is capable of dissolving the component (A) (the component (A) before light exposure) and can be appropriately selected from known organic solvents. Specific examples thereof include polar solvents such as a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, a nitrile-based solvent, an amide-based solvent, and an ether-based solvent, and a hydrocarbon-based solvent.
Examples of the ester-based solvent include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, pentyl acetate, isopentyl acetate, amyl acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, propyl lactate, butyl butanoate, methyl 2-hydroxyisobutyrate, isoamyl acetate, isobutyl isobutyrate, and butyl propionate.
Examples of the nitrile-based solvent include acetonitrile, propionitrile, valeronitrile, and butyronitrile.
Known additives can be blended into the organic developing solution as necessary. Examples of the additive include a surfactant. The surfactant is not particularly limited, and for example, an ionic or non-ionic fluorine-based and/or silicon-based surfactant can be used. As the surfactant, a non-ionic surfactant is preferable, and a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant is more preferable.
In a case where a surfactant is blended into the solution, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the organic developing solution.
The developing treatment can be performed according to a known developing method, and examples thereof include a method of immersing a support in a developing solution for a certain time (a dip method), a method of raising a developing solution on the surface of a support using the surface tension and maintaining the state for a certain time (a puddle method), a method of spraying a developing solution to the surface of a support (spray method), and a method of continuously ejecting a developing solution onto a support rotating at a certain rate while scanning a developing solution ejection nozzle at a certain rate (dynamic dispense method).
As the organic solvent contained in the rinse solution used for the rinse treatment after the developing treatment in the solvent developing process, a solvent that is unlikely to dissolve a resist pattern can be appropriately selected from the organic solvents described as the organic solvent used in the organic developing solution and then used. Typically, at least one solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent is used. Among these, at least one solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, and an amide-based solvent is preferable, at least one solvent selected from an alcohol-based solvent and an ester-based solvent is more preferable, and an alcohol-based solvent is particularly preferable.
As the alcohol-based solvent used in the rinse solution, a monohydric alcohol having 6 to 8 carbon atoms is preferable, and the monohydric alcohol may be linear, branched, or cyclic. Specific examples thereof include 1-hexanol, 1-heptanol, 1-octanol, 2-hexanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, 4-octanol, and benzyl alcohol. Among these, 1-hexanol, 2-heptanol, and 2-hexanol are preferable, and 1-hexanol and 2-hexanol are more preferable.
These organic solvents may be used alone or a combination of two or more kinds thereof may be used. Further, an organic solvent other than the above-described solvents and water may be mixed and used. However, in consideration of the development characteristics, the amount of water to be blended into the rinse solution is preferably 30% by mass or less, more preferably 10% by mass or less, still more preferably 5% by mass or less, and particularly preferably 3% by mass or less with respect to the total amount of the rinse solution.
A known additive can be blended into the rinse solution as necessary. Examples of the additive include a surfactant. As the surfactant, the same surfactants as those described above are exemplary examples. Among these, a non-ionic surfactant is preferable, and a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant is more preferable.
In a case where a surfactant is blended into the solution, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the rinse solution.
The rinse treatment carried out using a rinse solution (washing treatment) can be performed according to a known rinse method. Examples of the method of performing the rinse treatment include a method of continuously ejecting a rinse solution onto a support rotating at a certain rate (rotary coating method), a method of immersing a support in a rinse solution for a certain time (dip method), and a method of spraying a rinse solution to the surface of a support (spray method).
According to the resist pattern forming method of the present embodiment described above, since the resist composition described above is used, a resist pattern with satisfactory CDU and resolution can be formed.
It is preferable that various materials that are used in the resist composition according to the above-described embodiment and the pattern forming method according to the above-described embodiment (for example, a resist solvent, a developing solution, a rinse solution, a composition for forming an antireflection film, and a composition for forming a top coat) do not contain impurities such as a metal, a metal salt containing halogen, an acid, an alkali, and a component having a sulfur atom or phosphorus atom. Here, examples of the impurities containing metal atoms include Na, K, Ca, Fe, Cu, Mn, Mg, Al, Cr, Ni, Zn, Ag, Sn, Pb, Li, and salts thereof. The amount of impurities contained in these materials is preferably 200 ppb or less, more preferably 1 ppb or less, still more preferably 100 parts per trillion (ppt) or less, particularly preferably 10 ppt or less, and most preferably substantially zero (less than or equal to the detection limit of the measuring device).
The compound according to the third aspect of the present invention is a compound represented by General Formula (b0).
[In the formula, Rpg represents an acid decomposable group. Rl0 represents a cyclic organic group which may have a substituent. L02 represents a divalent linking group. L01 represents a divalent linking group or a single bond. Rm1 represents a substituent other than an iodine atom. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, nb2 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. M™ represents an m-valent organic cation. m represents an integer of 1 or greater.]
The compound represented by General Formula (b0) is the same as the component (B0) in the resist composition according to the first aspect of the present invention described above.
[Method of Producing Compound Represented by General Formula (b0)]
The component (B0) can be produced by using a known method.
For example, the component (B0) can be obtained by performing a salt exchange reaction between a precursor Bpre represented by General Formula (Bpre) and a compound S0 represented by General Formula (S-0).
[In the formula, Rpg represents an acid decomposable group. R10 represents a cyclic organic group which may have a substituent. L02 represents a divalent linking group. L01 represents a divalent linking group or a single bond. Rm1 represents a substituent other than an iodine atom. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, nb2 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. (M1″m+)l/m represents an ammonium cation. Z+ represents a non-nucleophilic ion. Mm+ represents an m-valent organic cation. m represents an integer of 1 or greater.]
More specifically, the above-described salt exchange reaction is a step of obtaining the component (B0) by reacting the precursor Bpre with the compound S0 for salt exchange in a solvent such as water, dichloromethane, acetonitrile, or chloroform to exchange a cation of the precursor Bpre with a cation of the compound S0.
In the formulae, (M1″m+)l/m represents an ammonium cation, and the ammonium cation may be an ammonium cation derived from an aliphatic amine or an ammonium cation derived from an aromatic amine.
In the formulae, examples of Z− include ions that can be an acid having an acidity lower than that of the precursor Bpre, and specific examples thereof include a halogen ion such as a bromine ion or a chloride ion, BF4−, AsF6−, SbF6−, PF6−, and ClO4−.
The reaction temperature is, for example, in a range of 0° C. to 100° C.′, and the reaction time is, for example, 10 minutes or longer and 24 hours or shorter.
After the salt exchange reaction is completed, the compound in the reaction solution may be isolated and purified. A known method in the related art can be used for isolation and purification, and for example, concentration, solvent extraction, distillation, crystallization, recrystallization, or chromatography can be appropriately combined and used.
The structure of the compound obtained as described above can be identified by typical organic analysis methods such as 1H-nuclear magnetic resonance (NMR) spectroscopy, 13C-NMR spectroscopy, 19F-NMR spectroscopy, infrared (IR) absorption spectroscopy, mass spectrometry (MS), an elemental analysis method, and an X-ray crystal diffraction method.
Examples of a method of producing the precursor Bpre include a method 1 of producing the precursor Bpre and a method 2 of producing the precursor Bpre described below.
A method 1 of producing the precursor Bpre includes a step (step A) of reacting a compound represented by General Formula (CA-00) (hereinafter, referred to as “compound (CA00)”) with a compound represented by General Formula (X-00) (hereinafter, referred to as “compound (X00)”) to obtain a compound represented by General Formula (Y-00) (hereinafter, referred to as “compound (Y00)”) and a step (step B) of reacting a compound represented by General Formula (Y-00) with a compound represented by General Formula (A1-00) (hereinafter, referred to as “compound (A100)”) to obtain a precursor Bpre′ represented by General Formula (Bpre′).
The precursor Bpre′ is a compound used to obtain the compound (B0), and L01 and L02 in General Formula (b0) represent a compound limited to an ester bond.
[In the formula, Rpg represents an acid decomposable group. Rl0 represents a cyclic organic group which may have a substituent. Rm1 represents a substituent other than an iodine atom. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. (M1″m+)l/m represents an ammonium cation.]
The step A is, for example, a step of reacting the compound (CA00) with the compound (X00) in an organic solvent (THE, hexane, or the like) to obtain a compound (Y00).
In the reaction in the step A, a condensing agent, a basic catalyst, or the like may be used.
Specific examples of the condensing agent include N,N′-dicyclohexylcarbodiimide, N,N′-diisopropylcarbodiimide (DIC), 1-ethyl-3-(3-dimethylaminopropyl) carbodiimide hydrochloride, and carbonyldiimidazole (CDI).
Specific examples of the basic catalyst include tertiary amines such as trimethylamine, triethylamine, and tributylamine, aromatic amines such as pyridine, dimethylaminopyridine (DMAP), and pyrrolidinopyridine, diazabicyclononene (DBN), and diazabicycloundecene (DBU).
The reaction temperature is, for example, in a range of 0° C. to 80° C., and the reaction time is, for example, 10 minutes or longer and 24 hours or shorter.
The step B is, for example, a step of reacting the compound (Y00) with the compound (A100) in an organic solvent (dichloromethane or the like) to obtain a precursor Bpre′.
In the step B, a condensing agent, a basic catalyst, or the like may be used similarly to the step A.
The reaction temperature of the step B is, for example, in a range of 0° C. to 50° C., and the reaction time thereof is, for example, 10 minutes or longer and 24 hours or shorter.
A method 2 of producing the precursor Bpre includes a step (step A′) of reacting a compound represented by General Formula (CA-00′) (hereinafter, referred to as “compound (CA00′)”) with a compound represented by General Formula (X-00′) (hereinafter, referred to as “compound (X00′)”) to obtain a compound represented by General Formula (Y-00′) (hereinafter, referred to as “compound (Y00′)”) and a step (step B′) of reacting a compound represented by General Formula (Y-00′) with a compound represented by General Formula (A1-00′) (hereinafter, referred to as “compound (A100′)”) to obtain a precursor Bpre″ represented by General Formula (Bpre″).
The precursor Bpre” is a compound used to obtain the compound (B0) in which the acid decomposable group as Rpg in General Formula (b0) is limited to —(C═O)—O—Rpg00, L02 is limited to an ester bond, and the cyclic organic group as Rl0 is limited to a specific condensed cyclic group.
In the formulae, Rpg00 represents an acid dissociable group. Rm1 represents a substituent other than an iodine atom. L01 represents a divalent linking group or a single bond. Vb0 represents a single bond, an alkylene group, or a fluorinated alkylene group. R0 represents a hydrogen atom, a fluorinated alkyl group having 1 to 5 carbon atoms, or a fluorine atom. nb1 represents an integer of 1 to 4, and nb3 represents an integer of 0 to 3. (M1″m+)l/m represents an ammonium cation.]
The step A′ is, for example, a step of reacting the compound (CA00′) and the compound (X00′) in an organic solvent (THF, hexane, or the like) in the presence of a base to obtain a compound (Y00′).
Specific examples of the base include sodium hydride, K2CO3, Cs2CO3, lithium diisopropylamide (LDA), triethylamine, and 4-dimethylaminopyridine.
The reaction temperature is, for example, in a range of 0° C. to 50° C., and the reaction time is, for example, 10 minutes or longer and 24 hours or shorter.
The step B is, for example, a step of reacting the compound (Y00′) with the compound (A100′) in an organic solvent (dichloromethane or the like) to obtain a precursor Bpre″.
In the step B′, a condensing agent, a basic catalyst, or the like may be used similarly to the step B.
The reaction temperature of the step B is, for example, in a range of 0° C. to 50° C., and the reaction time thereof is, for example, 10 minutes or longer and 24 hours or shorter.
The compound according to the third aspect of the present invention described above is a compound useful as an acid generator in the resist composition according to the first aspect of the present invention described above.
(acid generator)
The acid generator according to the fourth aspect of the present invention contains the compound according to the third aspect described above.
Such an acid generator is useful as an acid generator component for a chemically amplified resist composition. In a case where such an acid generator component is used in a chemically amplified resist composition, the CDU and the resolution are further improved in the resist pattern formation. In a case where such an acid generator component is used, the CDU and the resolution are further improved, particularly in the resist pattern formation using an EB or EUV light source.
Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited to these examples.
A 300 mL three-necked flask was charged with 1,1′-carbonyldiimidazole (CDI) (4.60 g, 28.4 mmol) and acetonitrile (20 g), and a solution obtained by dissolving 3-hydroxy-4-iodobenzoic acid (CA1) (6.74 g, 25.5 mmol) in acetonitrile (20 g) was added dropwise thereto over 30 minutes, and the mixture was allowed to react for 1 hour. Thereafter, a compound (1-1) (9.5 g, 30.6 mmol) was added thereto, and the mixture was allowed to react at 65° C. for 3 hours. After the mixture was cooled, ultrapure water (250 g) was added thereto, the mixture was stirred for 30 minutes, and the precipitated solid was filtered. The filtrate was dissolved again in methanol (100 g) again, and the solution was added dropwise to MTBE (500 g), and the precipitated solid was filtered. The filtrate was dried under reduced pressure, thereby obtaining an intermediate P1.
Intermediates P2 to P5 were synthesized in the same manner as in the synthesis example of the intermediate P1 except that 3-hydroxy-4-iodobenzoic acid (CA 1) (6.74 g, 25.5 mmol) was changed to an equimolar amount of any of the following carboxylic acids CA2 to CAS.
An intermediate P6 was obtained in the same manner as in the production example of the intermediate P1 except that CA1 (6.74 g, 25.5 mmol) was changed to CA2 (10.0 g, 25.5 mmol) and a compound 1-1 (9.5 g, 30.6 mmol) was changed to a compound 1-2 (11.6 g, 30.6 mmol).
An intermediate P7 was obtained in the same manner as in the production example of the intermediate P1 except that CA1 (6.74 g, 25.5 mmol) was changed to CA2 (10.0 g, 25.5 mmol) and the compound 1-1 (9.5 g, 30.6 mmol) was changed to a compound 1-3 (11.0 g, 30.6 mmol).
An intermediate P8 was obtained in the same manner as in the production example of the intermediate P1 except that CA1 (6.74 g, 25.5 mmol) was changed to CA2 (10.0 g, 25.5 mmol) and the compound 1-1 (9.5 g, 30.6 mmol) was changed to a compound 1-4 (11.5 g, 30.6 mmol).
A 500 mL three-necked flask was charged with a THF/hexane solution (87 mL, 92.3 mmol) of 1.06 M lithium diisopropylamide (LDA) and cooled to 5° C., a solution obtained by dissolving t-butyl alcohol (8.0 g, 108.6 mmol) in THF (30 g) was added thereto, and the mixture was allowed to react at 5° C. or lower for 2 hours. Thereafter, a solution obtained by dissolving a compound M-1 (15.0 g, 54.3 mmol) in THF (225 g) was added thereto, and the mixture was allowed to react at 5° C. or lower for 2 hours. The reaction solution was added to ultrapure water (205 g) over 30 minutes, heptane (205 g) was added thereto, the mixture was stirred for 30 minutes, and the organic layer was removed. After the aqueous layer was washed with heptane (100 g) three times, MTBE (150 g) and a 10% citric acid aqueous solution (205 g, 106.1 mmol) were added thereto, the mixture was stirred for 30 minutes, and the aqueous layer was removed. The recovered organic layer was washed with ultrapure water (150 g) three times, and the organic layer was concentrated using a rotary evaporator. The concentrate was recrystallized with ethyl acetate, thereby obtaining an intermediate AA1.
An intermediate AA2 was obtained in the same manner as in the production example of the intermediate AA1 except that t-butyl alcohol (8.0 g, 108.6 mmol) was changed to 1-methylcyclopentanol (10.9 g, 108.6 mmol).
Intermediates BA1 to BA3 and NA1 to NA3 were obtained in the same manner as in the production example of the intermediate AA1 except that the compound M-1 was changed to equimolar amounts of compounds M-2 and M-3 and the compound was allowed to react with each of t-butyl alcohol, 1-methylcyclopentanol, and 1-methyladamantanol.
A 200 mL three-necked flask was charged with the intermediate BA1 (3.6, 16.1 mmol), the intermediate P1 (8.1 g, 14.5 mmol), and dichloromethane (180 g), and the mixture was stirred and dissolved at room temperature. Next, diisopropylcarbodiimide (DIC) (3.1 g, 24.2 mmol) and dimethylaminopyridine (0.2 g, 1.6 mmol) were added thereto, and the mixture was allowed to react at room temperature for 5 hours. The reaction solution was filtered, and the filtrate was concentrated using a rotary evaporator. The concentrate was dissolved in acetonitrile (30 g) and subsequently added dropwise into MTBE (180 g), and the precipitated solid was filtered. The filtrate was dissolved in acetonitrile (60 g), the solution was added dropwise to MTBE (400 g), and the precipitated solid was filtered. After this operation was repeated twice, the filtrate was dried under reduced pressure, thereby obtaining a precursor (Bpre-01).
Precursors (Bpre-02 to 10, 14 to 21, and 25 to 29) were synthesized in the same manner as in the production example of the precursor (Bpre-01) by using carboxylic acid groups (16.1 mmol) of the intermediates BAI to BA3, NAI to NA3, AA1, and AA2 and phenol type groups (14.5 mmol) of the intermediates P1 to P8.
The combinations of the carboxylic acid and the intermediate used to obtain each precursor are listed in Table 1.
The precursor (Bpre-01) (8.0 g, 10.5 mmol) and a compound A for salt exchange (3.8 g, 11.0 mmol) were dissolved in dichloromethane (120 g), ultrapure water (120 g) was added thereto, and the mixture was allowed to react at room temperature for 30 minutes. After completion of the reaction, the aqueous phase was removed, and then the organic phase was washed with ultrapure water (120 g) four times. The organic phase was concentrated, dried, and solidified using a rotary evaporator, thereby obtaining a compound (B0-1).
Compounds (B0-2) to (B0-30) were obtained in the same manner as in “Synthesis Example of compound (B0-1)” described above except that the combinations of the above-described precursors (Bpre-02 to 10, 14 to 21, and 25 to 29) and the following compounds A to D for salt exchange were changed.
NMR measurement was performed on each of the obtained compounds, and the structure thereof was identified from the following analysis results.
Compound (B0-1): combination of precursor (Bpre-01) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.67-7.90 (m, ArH+Ar−I, 17H), 7.53-7.63 (d, ArH, 4H), 6.94 (d, Ar−I, 1H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-2): combination of precursor (Bpre-02) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=7.99 (d, Ar−I, 1H), 7.74-7.90 (m, ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-3): combination of precursor (Bpre-03) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 7.53-7.63 (d, ArH, 4H), 6.94 (d, Ar−I, 1H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-4): combination of precursor (Bpre-04) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=9.48 (s, NH, 1H), 8.12 (d, Ar−I, 1H), 8.01 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-5): combination of precursor (Bpre-05) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-6): combination of precursor (Bpre-06) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=7.99 (d, Ar−I, 1H), 7.74-7.90 (m, ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Compound (B0-7): combination of precursor (Bpre-07) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 7.53-7.63 (d, ArH, 4H), 6.94 (d, Ar−I, 1H), 4.51-4.68 (m, CF2CH2, 2H), 1.50-2.00 (m, methyladamantyl, 17H)
Compound (B0-8): combination of precursor (Bpre-08) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=7.99 (d, Ar−I, 1H), 7.74-7.90 (m, ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 5.90 (m, CF3CH, 1H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Compound (B0-9): combination of precursor (Bpre-09) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=7.99 (d, Ar−I, 1H), 7.74-7.90 (m. ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 4.91-5.20 (m, CFCH, 1H), 3.95-4.20 (m, COOCH2CH2—, 2H), 2.30-2.45 (m, COOCH2CH2, 1H), 1.50-2.05 (m, cyclopentyl+COOCH2CH2, 9H), 1.40 (s, CH3, 3H)
Compound (B0-10): combination of precursor (Bpre-10) and compound A for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=7.99 (d, Ar−I, 1H), 7.74-7.90 (m, ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 4.05-4.25 (m, COOCH2CH2—, 2H), 2.63-2.73 (m, COOCH2CH2, 2H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Compound (B0-11): combination of precursor (Bpre-02) and compound B for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.70 to 8.22 (m, ArH+Ar−I, 16H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 3.30-3.45 (m, SO2CH, 1H), 1.09-1.90 (m, cyclohexyl+CH3, 19H)
Compound (B0-12): combination of precursor (Bpre-02) and compound C for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.77-7.99 (m, ArH+Ar−I, 13H), 7.53-7.63 (d, ArH, 4H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-13): combination of precursor (Bpre-02) and compound D for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.50 (d, ArH, 2H), 8.37 (d. ArH, 2H), 7.99 (d, Ar−I, 1H), 7.93 (t, ArH, 2H), 7.84 (d, Ar−I, 1H), 7.53-7.75 (d, ArH, 11H), 4.51-4.68 (m, CF2CH2, 2H), 1.54 (s, CH3, 9H)
Compound (B0-14): combination of precursor (Bpre-14) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.67-7.90 (m, ArH+Ar−I, 17H), 6.94 (d, Ar−I, 1H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-15): combination of precursor (Bpre-15) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-16): combination of precursor (Bpre-16) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 6.94 (d, Ar−I, 1H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-17): combination of precursor (Bpre-17) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-18): combination of precursor (Bpre-18) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 6.94 (d, Ar−I, 1H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-2.00 (m, methyladamantyl+CH2, 19H)
Compound (B0-19): combination of precursor (Bpre-19) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (d, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 6.94 (d, Ar−I, 1H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-2.05 (m, methylcyclopentyl+CH2, 13H)
Compound (B0-20): combination of precursor (Bpre-20) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 5.90 (m, CF3CH, 1H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-21): combination of precursor (Bpre-21) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.05-4.25 (m, COOCH2CH2—, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.63-2.73 (m, COOCH2CH2, 2H), 2.38 (m), CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-22): combination of precursor (Bpre-15) and compound B for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.70-8.22 (m, ArH+Ar−I, 16H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.30-3.45 (m, SO2CH, 1H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.09-1.90 (m, cyclohexyl+CH3+CH2, 21H)
Compound (B0-23): combination of precursor (Bpre-15) and compound C for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.77-7.99 (m, ArH+Ar−I, 13H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-24): combination of precursor (Bpre-15) and compound D for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.50 (d, ArH, 2H), 8.37 (d, ArH, 2H), 7.99 (d, Ar−I, 1H), 7.93 (t. ArH, 2H), 7.84 (d, Ar−I, 1H), 7.55-7.75 (m, ArH, 7H), 6.30 (d, CH, 1H), 6.10 (d, CH, 1H), 4.51-4.68 (m, CF2CH2, 2H), 3.15 (m, CH, 2H), 3.00 (m, CH, 1H), 2.38 (m, CH, 1H), 1.30-1.50 (m, CH3+CH2, 11H)
Compound (B0-25): combination of precursor (Bpre-25) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.67-7.90 (m, ArH+Ar−I, 17H), 7.01-7.47 (m, ArH, 8H), 6.94 (d, Ar−I, 1H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 4.51-4.68 (m, CF2CH2, 2H), 3.15-3.40 (m, CH, 2H), 1.54 (s, CH3, 9H)
Compound (B0-26): combination of precursor (Bpre-26) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 7.01-7.47 (m, ArH, 8H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 4.51-4.68 (m, CF2CH2, 2H), 3.15-3.40 (m, CH, 2H), 1.54 (s, CH3, 9H)
Compound (B0-27): combination of precursor (Bpre-27) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=8.12 (m, Ar−I, 1H), 7.74-7.90 (m, ArH, 15H), 7.01-7.47 (m, ArH, 8H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 4.51-4.68 (m, CF2CH2, 2H), 3.15-3.40 (m, CH, 2H), 1.54 (s, CH3, 9H)
Compound (B0-28): combination of precursor (Bpre-28) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 7.01-7.47 (m, ArH, 8H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 4.51-4.68 (m, CF2CH2, 2H), 3.15-3.40 (m, CH, 2H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Compound (B0-29): combination of precursor (Bpre-29) and compound A for salt exchange
1H-NMR (DMSO, 400 MHZ): δ (ppm)=7.74-7.99 (m, ArH+Ar−I, 17H), 7.01-7.47 (m, ArH, 8H), 5.90 (m, CF3CH, 1H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 3.15-3.40 (m, CH, 2H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Compound (B0-30): combination of precursor (Bpre-29) and compound D for salt exchange
1H-NMR (DMSO, 400 MHz): δ (ppm)=8.50 (d, ArH, 2H), 8.37 (d, ArH, 2H), 7.99 (m, Ar−I, 1H), 7.93 (t, ArH, 2H), 7.84 (d, Ar−I, 1H), 7.55-7.75 (m, ArH, 7H), 7.01-7.47 (m, ArH, 8H), 5.90 (m, CF3CH, 1H), 4.70-4.85 (m, —OCO—CH—CH—COO—, 2H), 3.15-3.40 (m, CH, 2H), 1.50-2.05 (m, cyclopentyl, 8H), 1.40 (s, CH3, 3H)
Each of the components shown in Tables 2 to 5 was mixed and dissolved to prepare a resist composition of each Example.
In Tables 2 to 5, each abbreviation has the following meaning. The numerical values in the brackets are blending amounts (parts by mass).
(A)-1: polymer compound represented by Chemical Formula (A-1) The weight-average molecular weight (Mw) of the polymer compound (A-1) in terms of standard polystyrene determined by GPC measurement was 7100, and the polydispersity (Mw/Mn) thereof was 1.69. The copolymer compositional ratio (the ratio (molar ratio) between constitutional units in the structural formula) determined by 13C-NMR was l/m=50/50.
(A)-2: polymer compound represented by Chemical Formula (A-2) The weight-average molecular weight (Mw) of the polymer compound (A-2) in terms of standard polystyrene determined by GPC measurement was 7000, and the polydispersity (Mw/Mn) thereof was 1.72. The copolymer compositional ratio (the ratio (molar ratio) between constitutional units in the structural formula) determined by 13C-NMR was l/m=50/50.
An 8-inch silicon substrate which had been subjected to a hexamethyldisilazane (HMDS) treatment was coated with each resist composition of each example using a spinner, and subjected to a pre-bake (PAB) treatment on a hot plate at a temperature of 110° C. for 60 seconds so that the resist composition was dried, thereby forming a resist film having a film thickness of 50 nm.
Next, the resist film was subjected to drawing (light exposure) to obtain a contact hole pattern (hereinafter, referred to as “CH pattern”) in which holes having a diameter of 32 nm were arranged at equal intervals (pitch: 64 nm) by using an electron beam lithography apparatus JEOL-JBX-9300FS (manufactured by JEOL Ltd.) at an acceleration voltage of 100 kV. Thereafter, a post exposure bake (PEB) treatment was carried out on the resist film at 110° C. for 60 seconds.
Subsequently, alkali development was performed at 23° C. for 60 seconds using a 2.38 mass % tetramethylammonium hydroxide (TMAH) aqueous solution “NMD-3” (trade name, manufactured by TOKYO OHKA KOGYO CO., LTD.).
Thereafter, water rinsing was carried out with pure water for 15 seconds.
As a result of the above, a CH pattern in which holes having a diameter of 32 nm were arranged at equal intervals (pitch: 64 nm) was formed.
The CH pattern formed according to <Resist pattern formation> described above was observed from the upper side of the CH pattern, and the hole diameter (nm) of each of the holes was measured with a scanning electron microscope (CD-SEM, accelerating voltage: 500 V, trade name: CG5000, manufactured by Hitachi High-Tech Corporation). Then, the triple value (36) of the standard deviation (o) calculated from the measurement result was determined. The results are listed in the columns of “CDU (nm)” in Tables 6 and 7.
The lower the value of 36 determined as described above is, the higher the critical dimension (CD) uniformity of the plurality of holes formed in the resist film is.
The limiting resolution at the optimum exposure amount (Eop) with which the above-described CH pattern was formed, specifically, the hole diameter (nm) of the pattern that was resolved when gradually reducing the exposure amount from the optimum exposure amount, was determined using a scanning electron microscope S-9380 (manufactured by Hitachi High-Tech Corporation). The results are listed in the columns of “limiting resolution (nm)” in Tables 6 and 7.
As listed in Tables 6 and 7, it was confirmed that all the resist compositions of the examples had satisfactory CDU and satisfactory limit resolution as compared with the resist compositions of the comparative examples.
All the compounds (B-1) to (B-3) contained in the resist compositions of Comparative Examples 1 to 5 were formed such that the phenylene group having an iodine atom and the acid decomposable group were directly bonded to each other. That is, the compounds (B-1) to (B-3) are compounds having no R10 (cyclic organic group which may have a substituent) in General Formula (b0).
It is assumed that, since the compound (B0) contained in the resist compositions of the examples had R1″ (cyclic organic group which may have a substituent) between the phenylene group having an iodine atom and the acid decomposable group, the acid diffusion length was controlled, the balance between the hydrophilicity and the hydrophobicity was improved, and the CDU and the resolution were satisfactory. While preferred embodiments of the present invention have been described and illustrated above, it should be understood that these are exemplary of the present invention and are not to be considered as limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the scope of the present invention. Accordingly, the present invention is not to be considered as being limited by the foregoing description and is only limited by the scope of the appended claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2022-040827 | Mar 2022 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2023/008296 | 3/6/2023 | WO |
