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Patents Grants
last 30 patents
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Patent Grant
Apparatus for and methods of combining multiple laser beams
Patent number
12,298,670
Issue date
May 13, 2025
Cymer, LLC
Rabin Paudel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling extreme ultraviolet light
Patent number
12,282,262
Issue date
Apr 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure system, laser control parameter production method, and ele...
Patent number
12,216,409
Issue date
Feb 4, 2025
Gigaphoton Inc.
Koichi Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure system and method for manufacturing electronic devices
Patent number
12,197,132
Issue date
Jan 14, 2025
Gigaphoton Inc.
Koichi Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light source generation apparatus, light source generating method,...
Patent number
12,191,621
Issue date
Jan 7, 2025
National Tsing Hua University
Andrew Hing Cheong Kung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration system for an extreme ultraviolet light source
Patent number
12,174,550
Issue date
Dec 24, 2024
ASML Netherlands B.V.
Daniel Jason Riggs
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
Patent number
12,166,329
Issue date
Dec 10, 2024
National University Corporation Nagaoka University of Technology
Weihua Jiang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Line narrowed gas laser apparatus, control method therefor, electro...
Patent number
12,140,869
Issue date
Nov 12, 2024
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation system for controlling bursts of pulses of radiation
Patent number
12,130,558
Issue date
Oct 29, 2024
Cymer, LLC
Yingbo Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure method, exposure system, and method for manufacturing elec...
Patent number
12,105,425
Issue date
Oct 1, 2024
Gigaphoton Inc.
Koichi Fujii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Line narrowed gas laser apparatus, control method therefor, electro...
Patent number
12,105,426
Issue date
Oct 1, 2024
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system for target metrology and alteration in an EUV light so...
Patent number
12,078,934
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Robert Jay Rafac
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pulse width expansion apparatus and electronic device manufacturing...
Patent number
12,038,567
Issue date
Jul 16, 2024
Gigaphoton Inc.
Hirotaka Miyamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Burst statistics data aggregation filter
Patent number
12,007,696
Issue date
Jun 11, 2024
Cymer, LLC
Matthew Minakais
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming multiple aerial images in a single lithography exposure pass
Patent number
12,001,144
Issue date
Jun 4, 2024
Cymer, LLC
Willard Earl Conley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photosensitive composition
Patent number
11,953,831
Issue date
Apr 9, 2024
FUJIFILM Corporation
Shoichi Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Energy correction module for an optical source apparatus
Patent number
11,947,268
Issue date
Apr 2, 2024
Cymer, LLC
Yingbo Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
Patent number
11,914,302
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
Patent number
11,768,438
Issue date
Sep 26, 2023
Cymer, LLC
Kevin Michael O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system and method for manufacturing electronic device
Patent number
11,764,541
Issue date
Sep 19, 2023
Gigaphoton Inc.
Taisuke Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed light generation device, pulsed light generation method, exp...
Patent number
11,757,247
Issue date
Sep 12, 2023
Nikon Corporation
Akira Tokuhisa
G01 - MEASURING TESTING
Information
Patent Grant
Reducing speckle in an excimer light source
Patent number
11,686,951
Issue date
Jun 27, 2023
Cymer, LLC
Wilhelmus Patrick Elisabeth Maria op 't Root
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser and drum control for continuous generation of broadband light
Patent number
11,617,256
Issue date
Mar 28, 2023
KLA Corporation
Jian Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser processing method and laser processing system
Patent number
11,604,416
Issue date
Mar 14, 2023
Gigaphoton Inc.
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulse stretcher and method
Patent number
11,569,628
Issue date
Jan 31, 2023
ASML Netherlands B.V.
Herman Philip Godfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Forming multiple aerial images in a single lithography exposure pass
Patent number
11,526,082
Issue date
Dec 13, 2022
Cymer, LLC
Willard Earl Conley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
Patent number
11,526,083
Issue date
Dec 13, 2022
Cymer, LLC
Kevin Michael O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus for generating extreme ultraviolet light
Patent number
11,477,877
Issue date
Oct 18, 2022
Gigaphoton Inc.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
Patent number
11,452,196
Issue date
Sep 20, 2022
Gigaphoton Inc.
Kouichiro Kouge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS
Publication number
20250237961
Publication date
Jul 24, 2025
CYMER, LLC
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS, COMPUTER PROGRAMS AND APPARATUSES FOR TREATING AN OPTICAL...
Publication number
20250237960
Publication date
Jul 24, 2025
Carl Zeiss SMS Ltd.
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20250233382
Publication date
Jul 17, 2025
Gigaphoton Inc.
Takamitsu KOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20250208516
Publication date
Jun 26, 2025
Gigaphoton Inc.
Yousuke FUJIMAKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD
Publication number
20250199416
Publication date
Jun 19, 2025
Gigaphoton Inc.
Akira SUWA
G02 - OPTICS
Information
Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20250183611
Publication date
Jun 5, 2025
Gigaphoton Inc.
Keita KOUZAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20250180933
Publication date
Jun 5, 2025
Gigaphoton Inc.
Seiji NOGIWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SYSTEM AND METHOD FOR PROVIDING A PULSED LASER BEAM INTENDED...
Publication number
20250174956
Publication date
May 29, 2025
TRUMPF LASER GMBH
Jonathan Brons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFAC...
Publication number
20250155819
Publication date
May 15, 2025
Gigaphoton Inc.
Yutaka IGARASHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS FOR AND METHOD OF CONDITIONING LASER ELECTRODES
Publication number
20250155821
Publication date
May 15, 2025
CYMER, LLC
Yuda Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY METHOD OF CALIBRATING AND MONITORING RADIATION IN EUV LIT...
Publication number
20250137844
Publication date
May 1, 2025
KLA Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20250085641
Publication date
Mar 13, 2025
ASML NETHERLANDS B.V.
Daniel Jason Riggs
G01 - MEASURING TESTING
Information
Patent Application
PHOTOSENSITIVE SUBSTRATE DEVELOPING METHOD, PHOTOMASK CREATING METH...
Publication number
20250060683
Publication date
Feb 20, 2025
Gigaphoton Inc.
Koichi FUJII
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
Publication number
20240429672
Publication date
Dec 26, 2024
Gigaphoton Inc.
Seiji NOGIWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SO...
Publication number
20240419083
Publication date
Dec 19, 2024
ASML NETHERLANDS B.V.
Robert Jay Rafac
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING ME...
Publication number
20240413600
Publication date
Dec 12, 2024
Gigaphoton Inc.
Shigeto KISHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHODS
Publication number
20240402623
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Pin CHENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR FORMING TOPOLOGICAL LATTICES OF PLASMONIC M...
Publication number
20240353758
Publication date
Oct 24, 2024
University of Pittsburgh of the Commonwealth System of Higher Education
Hrvoje Petek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PREDICTION APPARATUS AND METHOD FOR OPTICAL SOURCE
Publication number
20240319612
Publication date
Sep 26, 2024
CYMER, LLC
Russell Allen BURDT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGT...
Publication number
20240322521
Publication date
Sep 26, 2024
Gigaphoton Inc.
Koichi FUJII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS
Publication number
20240310736
Publication date
Sep 19, 2024
CYMER, LLC
Willard Earl Conley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR DEPOSITING LAYERS OF MATERIALS ON SUBSTRATES AND STRUCT...
Publication number
20240302748
Publication date
Sep 12, 2024
ASM IP HOLDING B.V.
João Antunes Afonso
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240295824
Publication date
Sep 5, 2024
Gigaphoton Inc.
Tomoyoshi TOIDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER SYSTEM, PULSE LASER LIGHT GENERATING METHOD, AND ELECTRONIC D...
Publication number
20240291220
Publication date
Aug 29, 2024
Gigaphoton Inc.
Seiji NOGIWA
G02 - OPTICS
Information
Patent Application
OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE MAN...
Publication number
20240291219
Publication date
Aug 29, 2024
Gigaphoton Inc.
Yuki TAMARU
G02 - OPTICS
Information
Patent Application
PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
Publication number
20240283210
Publication date
Aug 22, 2024
CYMER, LLC
Paul Christopher Melcher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSE STRETCHER AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240258757
Publication date
Aug 1, 2024
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...
Publication number
20240222927
Publication date
Jul 4, 2024
CYMER, LLC
Paul Christopher Melcher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20240184220
Publication date
Jun 6, 2024
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER SYSTEM
Publication number
20240170905
Publication date
May 23, 2024
ASML NETHERLANDS B.V.
Herman Philip GODFRIED
H01 - BASIC ELECTRIC ELEMENTS