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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70041
by pulsed sources
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Patents Grants
last 30 patents
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Patent Grant
Photosensitive composition
Patent number
11,953,831
Issue date
Apr 9, 2024
FUJIFILM Corporation
Shoichi Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Energy correction module for an optical source apparatus
Patent number
11,947,268
Issue date
Apr 2, 2024
Cymer, LLC
Yingbo Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
Patent number
11,914,302
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
Patent number
11,768,438
Issue date
Sep 26, 2023
Cymer, LLC
Kevin Michael O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system and method for manufacturing electronic device
Patent number
11,764,541
Issue date
Sep 19, 2023
Gigaphoton Inc.
Taisuke Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed light generation device, pulsed light generation method, exp...
Patent number
11,757,247
Issue date
Sep 12, 2023
Nikon Corporation
Akira Tokuhisa
G01 - MEASURING TESTING
Information
Patent Grant
Reducing speckle in an excimer light source
Patent number
11,686,951
Issue date
Jun 27, 2023
Cymer, LLC
Wilhelmus Patrick Elisabeth Maria op 't Root
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser and drum control for continuous generation of broadband light
Patent number
11,617,256
Issue date
Mar 28, 2023
KLA Corporation
Jian Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser processing method and laser processing system
Patent number
11,604,416
Issue date
Mar 14, 2023
Gigaphoton Inc.
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulse stretcher and method
Patent number
11,569,628
Issue date
Jan 31, 2023
ASML Netherlands B.V.
Herman Philip Godfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Forming multiple aerial images in a single lithography exposure pass
Patent number
11,526,082
Issue date
Dec 13, 2022
Cymer, LLC
Willard Earl Conley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
Patent number
11,526,083
Issue date
Dec 13, 2022
Cymer, LLC
Kevin Michael O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus for generating extreme ultraviolet light
Patent number
11,477,877
Issue date
Oct 18, 2022
Gigaphoton Inc.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
Patent number
11,452,196
Issue date
Sep 20, 2022
Gigaphoton Inc.
Kouichiro Kouge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pulsed light generation device, pulsed light generation method, exp...
Patent number
11,366,070
Issue date
Jun 21, 2022
Nikon Corporation
Akira Tokuhisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,366,394
Issue date
Jun 21, 2022
Gigaphoton Inc.
Koichiro Koge
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,337,293
Issue date
May 17, 2022
Gigaphoton Inc.
Takanari Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for controlling extreme ultraviolet light
Patent number
11,320,744
Issue date
May 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Pulsed light generation device, pulsed light generation method, exp...
Patent number
11,303,091
Issue date
Apr 12, 2022
Nikon Corporation
Akira Tokuhisa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control system and method
Patent number
11,287,743
Issue date
Mar 29, 2022
ASML Netherlands B.V.
Herman Philip Godfried
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
Patent number
11,237,483
Issue date
Feb 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavelength conversion system and processing method
Patent number
11,226,536
Issue date
Jan 18, 2022
Gigaphoton Inc.
Chen Qu
G02 - OPTICS
Information
Patent Grant
Laser processing method and laser processing system
Patent number
11,194,255
Issue date
Dec 7, 2021
Gigaphoton Inc.
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reducing speckle in an excimer light source
Patent number
11,054,665
Issue date
Jul 6, 2021
Cymer, LLC
Wilhelmus Patrick Elisabeth Maria op 't Root
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Online calibration for repetition rate dependent performance variables
Patent number
11,050,213
Issue date
Jun 29, 2021
Cymer, LLC
Joshua Jon Thornes
G01 - MEASURING TESTING
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,036,143
Issue date
Jun 15, 2021
Gigaphoton Inc.
Atsushi Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods of using solid state emitter arrays
Patent number
10,983,444
Issue date
Apr 20, 2021
Applied Materials, Inc.
Christopher Dennis Bencher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
10,955,751
Issue date
Mar 23, 2021
Gigaphoton Inc.
Yuta Takashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for micro-nano machining by femtosecond laser two...
Patent number
10,884,343
Issue date
Jan 5, 2021
South University of Science & Technology of China
Xing Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
Publication number
20240160106
Publication date
May 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi-Hung LIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATION SOURCE ARRANGEMENT AND METROLOGY DEVICE
Publication number
20240004308
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Ali ALSAQQA
G02 - OPTICS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
Publication number
20230375944
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shang-Chieh CHIEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR MICROLITHOGRAPHY, AND METHOD FOR...
Publication number
20230314959
Publication date
Oct 5, 2023
Carl Zeiss SMT GMBH
Conrad Wolke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
Publication number
20230223734
Publication date
Jul 13, 2023
CYMER, LLC
Kuo-Tai Teng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20230161262
Publication date
May 25, 2023
Gigaphoton Inc.
Gouta NIIMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS
Publication number
20230152707
Publication date
May 18, 2023
CYMER, LLC
Willard Earl Conley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD,...
Publication number
20230136618
Publication date
May 4, 2023
Andrew Hing Cheong KUNG
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230049820
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Hung CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...
Publication number
20230040812
Publication date
Feb 9, 2023
CYMER, LLC
Kevin Michael O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20230018949
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Daniel Jason Riggs
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ENERGY CORRECTION MODULE FOR AN OPTICAL SOURCE APPARATUS
Publication number
20230019832
Publication date
Jan 19, 2023
CYMER, LLC
Yingbo Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS
Publication number
20230004091
Publication date
Jan 5, 2023
CYMER, LLC
Rabin Paudel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A RADIATION SYSTEM FOR CONTROLLING BURSTS OF PULSES OF RADIATION
Publication number
20220390857
Publication date
Dec 8, 2022
CYMER, LLC
Yingbo Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE METHOD, EXPOSURE SYSTEM, AND METHOD FOR MANUFACTURING ELEC...
Publication number
20220390851
Publication date
Dec 8, 2022
Gigaphoton Inc.
Koichi FUJII
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BURST STATISTICS DATA AGGREGATION FILTER
Publication number
20220365445
Publication date
Nov 17, 2022
CYMER, LLC
Matthew Minakais
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER PULSE SELECTION USING MOTORIZED SHUTTER
Publication number
20220354575
Publication date
Nov 10, 2022
Alcon Inc.
David Jung
G02 - OPTICS
Information
Patent Application
PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20220350120
Publication date
Nov 3, 2022
Gigaphoton Inc.
Hirotaka MIYAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
Publication number
20220260927
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER AND DRUM CONTROL FOR CONTINUOUS GENERATION OF BROADBAND LIGHT
Publication number
20220210901
Publication date
Jun 30, 2022
KLA Corporation
Jian Xu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PULSED LIGHT GENERATION DEVICE, PULSED LIGHT GENERATION METHOD, EXP...
Publication number
20220190547
Publication date
Jun 16, 2022
Nikon Corporation
Akira Tokuhisa
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
Publication number
20220155690
Publication date
May 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi-Hung LIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220146943
Publication date
May 12, 2022
Gigaphoton Inc.
Koichiro KOGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220110205
Publication date
Apr 7, 2022
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEMS
Publication number
20220104336
Publication date
Mar 31, 2022
Samsung Electronics Co., Ltd.
SUNGHYUP KIM
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
Publication number
20220050382
Publication date
Feb 17, 2022
Gigaphoton Inc.
Koji KAKIZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
Publication number
20210389680
Publication date
Dec 16, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi-Hung LIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE PULSE GENERATION DEVICE, GAS LASER APPARATUS, AND ELEC...
Publication number
20210367393
Publication date
Nov 25, 2021
National University Corporation Nagaoka University of Technology
Weihua JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
Publication number
20210364931
Publication date
Nov 25, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pulse Stretcher and Method
Publication number
20210344157
Publication date
Nov 4, 2021
ASML NETHERLANDS B.V.
Herman Philip GODFRIED
G02 - OPTICS