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B81C1/00047

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00047Cavities

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with mechanical dicing process for producing MEMS components
- Patent number 12,060,266
- Issue date Aug 13, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and method for forming the same
- Patent number 12,017,908
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device including a precision proof m...
- Patent number 12,006,208
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
- Patent number 11,953,674
- Issue date Apr 9, 2024
- Texas Instruments Incorporated
- Jose A. Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing entries in a MEMS element
- Patent number 11,851,324
- Issue date Dec 26, 2023
- Robert Bosch GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon substrate having cavity and cavity SOI substrate including...
- Patent number 11,738,993
- Issue date Aug 29, 2023
- Murata Manufacturing Co., Ltd.
- Yutaka Kishimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure for microelectromechanical systems (MEMS) devices to cont...
- Patent number 11,697,588
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method for manufacturing same
- Patent number 11,673,797
- Issue date Jun 13, 2023
- SHANGHAI INDUSTRIAL UTECHNOLOGY RESEARCH INSTITUTE
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical electronics device
- Patent number 11,667,523
- Issue date Jun 6, 2023
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package comprising multi-depth trenches
- Patent number 11,667,522
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device including a precision proof m...
- Patent number 11,634,320
- Issue date Apr 25, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented pedestal for mounting device on chip
- Patent number 11,542,153
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked structure and method for manufacturing the same
- Patent number 11,332,363
- Issue date May 17, 2022
- Advanced Semiconductor Engineering, Inc.
- Chieh-An Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sample well fabrication techniques and structures for integrated se...
- Patent number 11,322,413
- Issue date May 3, 2022
- Quantum-Si Incorporated
- Gerard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for packaging a microelectromechanical systems device
- Patent number 11,286,157
- Issue date Mar 29, 2022
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of an uncoupling structure for assembling a component having a...
- Patent number 11,267,697
- Issue date Mar 8, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 11,259,105
- Issue date Feb 22, 2022
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced MEMS cavity gap
- Patent number 11,220,423
- Issue date Jan 11, 2022
- Invensense, Inc.
- Ian Flader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly having reflective layers on both sides
- Patent number 11,209,641
- Issue date Dec 28, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure for microelectromechanical systems (MEMS) devices to cont...
- Patent number 11,198,606
- Issue date Dec 14, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor assemblies with protective pressure feature of a pr...
- Patent number 11,193,842
- Issue date Dec 7, 2021
- TE CONNECTIVITY SOLUTIONS GmbH
- Martin Pfeiffer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented pedestal for mounting device on chip
- Patent number 11,084,715
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
- Patent number 11,078,072
- Issue date Aug 3, 2021
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanostraw devices and methods of fabricating and using the same
- Patent number 11,020,345
- Issue date Jun 1, 2021
- The Regents of the University of California The Board of Trustees of the Lela...
- Cade B. Fox
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,961,115
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical device having a...
- Patent number 10,961,117
- Issue date Mar 30, 2021
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240286889
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
- Publication number 20240230521
- Publication date Jul 11, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim BITTNER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
- Publication number 20240133802
- Publication date Apr 25, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim BITTNER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NEURAL LATTICE DEVICE FOR CHARACTERIZATION OF NEURON BEHAVIOR
- Publication number 20240101943
- Publication date Mar 28, 2024
- International Business Machines Corporation
- Sagarika Mukesh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A STRUCTURE COMPRISING A PLURALITY OF MEMB...
- Publication number 20240010491
- Publication date Jan 11, 2024
- SOITEC
- Bruno Ghyselen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...
- Publication number 20230294978
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...
- Publication number 20230249963
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing a Microfluidic Device
- Publication number 20230127645
- Publication date Apr 27, 2023
- IMEC vzw
- Simone Severi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20220340408
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...
- Publication number 20220267145
- Publication date Aug 25, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SAMPLE WELL FABRICATION TECHNIQUES AND STRUCTURES FOR INTEGRATED SE...
- Publication number 20220238389
- Publication date Jul 28, 2022
- Quantum-Si Incorporated
- Gerard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...
- Publication number 20220089434
- Publication date Mar 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT
- Publication number 20220002147
- Publication date Jan 6, 2022
- ROBERT BOSCH GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY SOI SUBSTRATE
- Publication number 20220002142
- Publication date Jan 6, 2022
- Murata Manufacturing Co., Ltd.
- Makoto Sawamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20210405347
- Publication date Dec 30, 2021
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20210331915
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON SUBSTRATE HAVING CAVITY AND CAVITY SOI SUBSTRATE INCLUDING...
- Publication number 20210284524
- Publication date Sep 16, 2021
- Murata Manufacturing Co., Ltd.
- Yutaka Kishimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20210284528
- Publication date Sep 16, 2021
- Shanghai Industrial ?Technology Research Institute
- SHINAN WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD WITH MECHANICAL DICING PROCESS FOR PRODUCING MEMS COMPONENTS
- Publication number 20210253421
- Publication date Aug 19, 2021
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for Producing a Base of an Analysis Cell for Analyzing a Bi...
- Publication number 20210238029
- Publication date Aug 5, 2021
- ROBERT BOSCH GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONICS DEVICE
- Publication number 20210139320
- Publication date May 13, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHICAL SYSTEM (MEMS) STRUCTURE AND METHOD OF FORMATION
- Publication number 20210141215
- Publication date May 13, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Jose A. MARTINEZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210130166
- Publication date May 6, 2021
- Advanced Semiconductor Engineering, Inc.
- Chieh-An YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...
- Publication number 20210087055
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE
- Publication number 20210078858
- Publication date Mar 18, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR PACKAGING A MICROELECTROMECHANICAL SYSTEMS DEVICE
- Publication number 20200391995
- Publication date Dec 17, 2020
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You QIAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR ASSEMBLIES WITH PROTECTIVE PRESSURE FEATURE
- Publication number 20200386641
- Publication date Dec 10, 2020
- TE Connectivity Solutions GmbH
- Martin Pfeiffer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20200369515
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE
- Publication number 20200346923
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process for producing a base of an analysis cell for analyzing a bi...

Method with mechanical dicing process for producing MEMS components

Semiconductor structure and method for forming the same

Micro-electromechanical system device including a precision proof m...

Microelectromechanical system (MEMS) structure and method of formation

Method for sealing entries in a MEMS element

Silicon substrate having cavity and cavity SOI substrate including...

Structure for microelectromechanical systems (MEMS) devices to cont...

Microstructure and method for manufacturing same

Optical electronics device

MEMS package comprising multi-depth trenches

Method for preparing micro-cavity array surface product with inclin...

Micro-electromechanical system device including a precision proof m...

Segmented pedestal for mounting device on chip

Stacked structure and method for manufacturing the same

Method for forming MEMS cavity structure

Sample well fabrication techniques and structures for integrated se...

Methods for packaging a microelectromechanical systems device

Use of an uncoupling structure for assembling a component having a...

MEMS microphone and method of manufacturing the same

Reduced MEMS cavity gap

Micromachined mirror assembly having reflective layers on both sides

Structure for microelectromechanical systems (MEMS) devices to cont...

Pressure sensor assemblies with protective pressure feature of a pr...

Micro-electro-mechanical system (MEMS) structures and design struct...

Segmented pedestal for mounting device on chip

Microelectromechanical device, method for manufacturing a microelec...

Nanostraw devices and methods of fabricating and using the same

Semiconductor structure and manufacturing method thereof

Process for manufacturing a microelectromechanical device having a...

Patents Applicationslast 30 patents

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS

METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS

NEURAL LATTICE DEVICE FOR CHARACTERIZATION OF NEURON BEHAVIOR

METHOD FOR MANUFACTURING A STRUCTURE COMPRISING A PLURALITY OF MEMB...

STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...

MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...

Method for Manufacturing a Microfluidic Device

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...

SAMPLE WELL FABRICATION TECHNIQUES AND STRUCTURES FOR INTEGRATED SE...

STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...

METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT

CAVITY SOI SUBSTRATE

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

SILICON SUBSTRATE HAVING CAVITY AND CAVITY SOI SUBSTRATE INCLUDING...

MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME

METHOD WITH MECHANICAL DICING PROCESS FOR PRODUCING MEMS COMPONENTS

Process for Producing a Base of an Analysis Cell for Analyzing a Bi...

OPTICAL ELECTRONICS DEVICE

MICROELECTROMECHICAL SYSTEM (MEMS) STRUCTURE AND METHOD OF FORMATION

STACKED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES TO CONT...

METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE

METHODS FOR PACKAGING A MICROELECTROMECHANICAL SYSTEMS DEVICE

PRESSURE SENSOR ASSEMBLIES WITH PROTECTIVE PRESSURE FEATURE

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

METHOD FOR FORMING MULTI-DEPTH MEMS PACKAGE