Changing physical properties of treated surfaces

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H01J2237/336

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/336Changing physical properties of treated surfaces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding method and substrate processing apparatus
- Patent number 12,243,728
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ion processing of substrates
- Patent number 12,237,150
- Issue date Feb 25, 2025
- LIFEHOUSE AUSTRALIA AS TRUSTEE FOR THE LIFEHOUSE AUSTRALIA TRUST
- David R. McKenzie
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method and apparatus for poling polymer thin films
- Patent number 11,910,715
- Issue date Feb 20, 2024
- CREESENSE MICROSYSTEMS INC.
- Albert Ting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 11,574,800
- Issue date Feb 7, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for sterilising an instrument channel of a surgical scopi...
- Patent number 11,541,140
- Issue date Jan 3, 2023
- Creo Medical Limited
- Christopher Paul Hancock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Fluorine ion implantation system with non-tungsten materials and me...
- Patent number 11,538,687
- Issue date Dec 27, 2022
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for precision formation of a lattice on a substrate
- Patent number 11,322,356
- Issue date May 3, 2022
- Denton Jarvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine ion implantation method and system
- Patent number 11,315,791
- Issue date Apr 26, 2022
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for poling polymer thin films
- Patent number 11,283,004
- Issue date Mar 22, 2022
- Areesys Technologies, Inc.
- Albert Ting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion angle detector
- Patent number 11,264,212
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Zhiying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extraction apparatus and system for high throughput ion beam proces...
- Patent number 11,127,556
- Issue date Sep 21, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system
- Patent number 10,957,561
- Issue date Mar 23, 2021
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 10,665,433
- Issue date May 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant system having grid assembly
- Patent number 10,636,935
- Issue date Apr 28, 2020
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for precision formation of a lattice on a substrate
- Patent number 10,497,568
- Issue date Dec 3, 2019
- Denton Jarvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma doping using a solid dopant source
- Patent number 10,460,941
- Issue date Oct 29, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Siamak Salimian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for sterilizing an instrument channel of a surgical scopi...
- Patent number 10,434,207
- Issue date Oct 8, 2019
- Creo Medical Limited
- Christopher Paul Hancock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ion generator and method of controlling ion generator
- Patent number 10,283,326
- Issue date May 7, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- B08 - CLEANING
Information Patent Grant
Apparatus for the plasma treatment of surfaces and a method for tre...
- Patent number 10,256,080
- Issue date Apr 9, 2019
- tesa SE
- Marcel Hähnel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Plasma treatment method, plasma treatment apparatus, and plasma-tre...
- Patent number 10,192,722
- Issue date Jan 29, 2019
- SUNLINE CO., LTD.
- Akitoshi Okino
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Plasma generation for ion implanter
- Patent number 10,163,609
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Min Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF ion source with dynamic volume control
- Patent number 10,134,568
- Issue date Nov 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device and method of manufacturing display device
- Patent number 10,135,014
- Issue date Nov 20, 2018
- Japan Display Inc.
- Takuma Nishinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment-target modification device, treatment-target modification...
- Patent number 10,105,966
- Issue date Oct 23, 2018
- Ricoh Company, Ltd.
- Tohru Ohshima
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Boron-containing dopant compositions, systems and methods of use th...
- Patent number 10,090,133
- Issue date Oct 2, 2018
- Praxair Technology, Inc.
- Ashwini K Sinha
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
RF ion source with dynamic volume control
- Patent number 9,899,193
- Issue date Feb 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step ion implantation
- Patent number 9,828,668
- Issue date Nov 28, 2017
- Apple Inc.
- Dale N. Memering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF detector with double balanced linear mixer and corresponding met...
- Patent number 9,805,919
- Issue date Oct 31, 2017
- Lam Research Corporation
- Ernest Beauel Hanks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for implementing low dose implant in a plasma system
- Patent number 9,783,884
- Issue date Oct 10, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Ilwoong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implant system having grid assembly
- Patent number 9,741,894
- Issue date Aug 22, 2017
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-TREATMENT METHOD AND SUBSTRATE-TREATMENT SYSTEM
- Publication number 20250239446
- Publication date Jul 24, 2025
- TOKYO ELECTRON LIMITED
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF BLOCKER FOR UNIFORMITY CONTROL
- Publication number 20250218742
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Vikram M. Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCRUBBER, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBST...
- Publication number 20250149314
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Mukyeong KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS
- Publication number 20250112043
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Vikram M. BHOSLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shield Ring Mounting Using Compliant Hardware
- Publication number 20250014870
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Jordan B. Tye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYER (SAM) REMOVAL
- Publication number 20240420996
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Jiajie Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...
- Publication number 20240371608
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Ryan Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSIVE FILMS FOR LARGE AREA GAPFILL
- Publication number 20240332028
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Supriya Ghosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DENSIFIED SEAM-FREE SILICON GAP FILL PROCESSES
- Publication number 20240331975
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Shuchi Sunil Ojha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGHER PRESSURE PURGE FOR IMPURITY REDUCTION IN RADICAL TREATMENT C...
- Publication number 20240290585
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Pradeep SAMPATH KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240258082
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke OKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED DRY DESMEAR EQUIPMENT WITH PROTECTIVE FILM PEELING CAPABIL...
- Publication number 20240222089
- Publication date Jul 4, 2024
- Intel Corporation
- Ala OMER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VHF Broadband Coaxial Adapter
- Publication number 20240170256
- Publication date May 23, 2024
- TOKYO ELECTRON LIMITED
- John Carroll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM
- Publication number 20240145217
- Publication date May 2, 2024
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
- Publication number 20240096601
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE
- Publication number 20240096596
- Publication date Mar 21, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS
- Publication number 20240079214
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Yuji Mimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD
- Publication number 20240079222
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Takashi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240071727
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Takuma SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240062998
- Publication date Feb 22, 2024
- PSK INC.
- Jin Woo PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE
- Publication number 20240027911
- Publication date Jan 25, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Jing LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEUTRAL BEAM ANNEALING APPARATUS AND METHOD OF MANUFACTURING DISPLA...
- Publication number 20240030043
- Publication date Jan 25, 2024
- SAMSUNG DISPLAY CO., LTD.
- Takayuki FUKASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PREPARATION
- Publication number 20240021402
- Publication date Jan 18, 2024
- University College Dublin, National University of Ireland
- Denis Dowling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS
- Publication number 20240006158
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Vikram M. Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
- Publication number 20230420232
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Tomohiko Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
- Publication number 20230369031
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Tomohiko Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...
- Publication number 20230365769
- Publication date Nov 16, 2023
- komiyama electron corp.
- Haruo HASHIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USI...
- Publication number 20230360888
- Publication date Nov 9, 2023
- INSTITUT SYSTÉMES INDUSTRIELS, HAUTE ECOLE DE SUISSE OCCIDENTALE, VALAIS-WALL...
- Fritz BIRCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEEP SMOOTH ETCHING TO REALIZE SCALABLE DEVICES HAVING PIEZOELECTRI...
- Publication number 20230329117
- Publication date Oct 12, 2023
- Tito Busani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Etching of Metal
- Publication number 20230108117
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Changing physical properties of treated surfaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate holding method and substrate processing apparatus

Plasma ion processing of substrates

Method and apparatus for poling polymer thin films

Extreme edge uniformity control

Apparatus for sterilising an instrument channel of a surgical scopi...

Fluorine ion implantation system with non-tungsten materials and me...

System and method for precision formation of a lattice on a substrate

Fluorine ion implantation method and system

Method and apparatus for poling polymer thin films

Ion angle detector

Extraction apparatus and system for high throughput ion beam proces...

Gas delivery system

Extreme edge uniformity control

Ion implant system having grid assembly

System and method for precision formation of a lattice on a substrate

Plasma doping using a solid dopant source

Apparatus for sterilizing an instrument channel of a surgical scopi...

Ion generator and method of controlling ion generator

Apparatus for the plasma treatment of surfaces and a method for tre...

Plasma treatment method, plasma treatment apparatus, and plasma-tre...

Plasma generation for ion implanter

RF ion source with dynamic volume control

Display device and method of manufacturing display device

Treatment-target modification device, treatment-target modification...

Boron-containing dopant compositions, systems and methods of use th...

RF ion source with dynamic volume control

Multi-step ion implantation

RF detector with double balanced linear mixer and corresponding met...

Method for implementing low dose implant in a plasma system

Ion implant system having grid assembly

Patents Applicationslast 30 patents

SUBSTRATE-TREATMENT METHOD AND SUBSTRATE-TREATMENT SYSTEM

RF BLOCKER FOR UNIFORMITY CONTROL

SCRUBBER, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBST...

LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS

Shield Ring Mounting Using Compliant Hardware

SELECTIVE SELF-ASSEMBLED MONOLAYER (SAM) REMOVAL

SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...

COMPRESSIVE FILMS FOR LARGE AREA GAPFILL

DENSIFIED SEAM-FREE SILICON GAP FILL PROCESSES

HIGHER PRESSURE PURGE FOR IMPURITY REDUCTION IN RADICAL TREATMENT C...

SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS

ENHANCED DRY DESMEAR EQUIPMENT WITH PROTECTIVE FILM PEELING CAPABIL...

VHF Broadband Coaxial Adapter

METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM

TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD

PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE

SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS

SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE

NEUTRAL BEAM ANNEALING APPARATUS AND METHOD OF MANUFACTURING DISPLA...

SURFACE PREPARATION

CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...

RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...

MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USI...

DEEP SMOOTH ETCHING TO REALIZE SCALABLE DEVICES HAVING PIEZOELECTRI...

Method for Etching of Metal