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Extreme edge uniformity control
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Patent number 11,574,800
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Issue date Feb 7, 2023
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Varian Semiconductor Equipment Associates, Inc.
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Alexandre Likhanskii
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H01 - BASIC ELECTRIC ELEMENTS
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Ion angle detector
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Patent number 11,264,212
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Issue date Mar 1, 2022
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Tokyo Electron Limited
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Zhiying Chen
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H01 - BASIC ELECTRIC ELEMENTS
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Gas delivery system
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Patent number 10,957,561
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Issue date Mar 23, 2021
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Lam Research Corporation
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John Drewery
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H01 - BASIC ELECTRIC ELEMENTS
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Extreme edge uniformity control
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Patent number 10,665,433
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Issue date May 26, 2020
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Varian Semiconductor Equipment Associates, Inc.
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Alexandre Likhanskii
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implant system having grid assembly
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Patent number 10,636,935
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Issue date Apr 28, 2020
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Intevac, Inc.
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Babak Adibi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-step ion implantation
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Patent number 9,828,668
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Issue date Nov 28, 2017
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Apple Inc.
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Dale N. Memering
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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