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MEMBRANE CLEANING APPARATUS
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Publication number 20240142871
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Publication date May 2, 2024
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ASML NETHERLANDS B.V.
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Andrey NIKIPELOV
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SYSTEM AND STRUCTURE INCLUDING A PELLICLE
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Publication number 20240103358
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Publication date Mar 28, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chue San YOO
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EUV TRANSMISSIVE MEMBRANE
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Publication number 20240094628
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Publication date Mar 21, 2024
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NGK Insulators, Ltd.
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Toshikatsu KASHIWAYA
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE AND PELLICLE ASSEMBLY
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Publication number 20240027893
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Publication date Jan 25, 2024
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ASML NETHERLANDS B.V.
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David Ferdinand VLES
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE
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Publication number 20230408907
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Publication date Dec 21, 2023
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Shin-Etsu Chemical Co., Ltd.
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Yu YANASE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE FRAME AND PELLICLE
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Publication number 20230408909
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Publication date Dec 21, 2023
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Shin-Etsu Chemical Co., Ltd.
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Yu YANASE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE
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Publication number 20230408910
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Publication date Dec 21, 2023
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Shin-Etsu Chemical Co., Ltd.
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Yu YANASE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE FRAME AND PELLICLE
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Publication number 20230408908
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Publication date Dec 21, 2023
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Shin-Etsu Chemical Co., Ltd.
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Yu YANASE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE FRAME AND PELLICLE
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Publication number 20230400760
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Publication date Dec 14, 2023
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Shin-Etsu Chemical Co., Ltd.
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Yu YANASE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE DESIGN FOR MASK APPLICATION
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Publication number 20230367205
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Yun-Yue LIN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Mask Defect Prevention
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Publication number 20230367197
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chi-Ta Lu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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