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B81B3/0089

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

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B81B3/0089Chemical or biological characteristics

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Graphene membrane microfluidic system
- Patent number 11,471,838
- Issue date Oct 18, 2022
- Triad National Security, LLC
- Enkeleda Dervishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adhesive silicon oxynitride film
- Patent number 11,427,731
- Issue date Aug 30, 2022
- Teledyne Micralyne, Inc.
- Glen Fitzpatrick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor, composite material and method of manufacturing the same
- Patent number 11,327,038
- Issue date May 10, 2022
- Winbond Electronics Corp.
- Ming-Chih Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 11,167,981
- Issue date Nov 9, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer system for pressure and acoustic sensing
- Patent number 10,981,777
- Issue date Apr 20, 2021
- Robert Bosch GmbH
- Andrew Doller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOx-based gas sensor and manufacturing method thereof
- Patent number 10,871,462
- Issue date Dec 22, 2020
- STMicroelectronics S.r.l.
- Alessandra Alberti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor, composite material and method of manufacturing the same
- Patent number 10,823,691
- Issue date Nov 3, 2020
- Winbond Electronics Corp.
- Ming-Chih Tsai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Pressure sensor
- Patent number 10,712,218
- Issue date Jul 14, 2020
- Invensense, Inc.
- Johannes Schumm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-wetting coating for Si-based MEMS fluidic device, and method o...
- Patent number 10,626,013
- Issue date Apr 21, 2020
- Canon Kabushiki Kaisha
- Matthew C. Traub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for depositing a measured amount of a species in a sealed c...
- Patent number 10,544,039
- Issue date Jan 28, 2020
- Texas Instruments Incorporated
- Benjamin Stassen Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor
- Patent number 10,254,185
- Issue date Apr 9, 2019
- Invensense, Inc.
- Johannes Schumm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound transducer with housing and MEMS structure
- Patent number 10,231,061
- Issue date Mar 12, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated particle and light filter for MEMS device
- Patent number 10,149,032
- Issue date Dec 4, 2018
- Apple Inc.
- Janhavi S. Agashe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane of amorphous carbon and MEMS including such a membrane
- Patent number 9,975,755
- Issue date May 22, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Anne Ghis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional multi-electrode array
- Patent number 9,867,979
- Issue date Jan 16, 2018
- Zyvex Labs, LLC
- Rahul Saini
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
TFT-based sensor with multiple sensing modalities
- Patent number 9,863,910
- Issue date Jan 9, 2018
- CBRITE Inc.
- Donald E. Ackley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with electrodes permeable to outgassing species
- Patent number 9,663,349
- Issue date May 30, 2017
- Invensense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfaces physically transformable by environmental changes
- Patent number 8,691,362
- Issue date Apr 8, 2014
- Alcatel Lucent
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfaces physically transformable by environmental changes
- Patent number 8,425,828
- Issue date Apr 23, 2013
- Alcatel Lucent
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfaces physically transformable by environmental changes
- Patent number 8,084,116
- Issue date Dec 27, 2011
- Alcatel Lucent
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant sensor and sensing system
- Patent number 7,178,378
- Issue date Feb 20, 2007
- BioScale, Inc.
- Ed Crawley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical piezoelectric device
- Patent number 6,953,977
- Issue date Oct 11, 2005
- Boston MicroSystems, Inc.
- Richard Mlcak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device with an epitaxial layer
- Patent number 6,627,965
- Issue date Sep 30, 2003
- Boston MicroSystems, Inc.
- Harry L. Tuller
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROFLUIDIC CHIP AND FABRICATION METHOD
- Publication number 20230211345
- Publication date Jul 6, 2023
- SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Wei LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CHIP
- Publication number 20220314217
- Publication date Oct 6, 2022
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Le GU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-FLUIDIC CHIP, LIQUID LOADING METHOD THEREOF AND MICRO-FLUIDIC...
- Publication number 20220126287
- Publication date Apr 28, 2022
- BOE TECHNOLOGY GROUP CO., LTD.
- Yue LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXPANSION MEDIATED ADHESIVE DEVICE
- Publication number 20210340412
- Publication date Nov 4, 2021
- BVW HOLDING AG
- Lukas Bluecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element, Method of Manufacturing...
- Publication number 20210331913
- Publication date Oct 28, 2021
- Saginomiya Seisakusho, Inc.
- Hisayuki Ashizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...
- Publication number 20210122627
- Publication date Apr 29, 2021
- San Diego State University Research Foundation
- Samuel Kassegne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR, COMPOSITE MATERIAL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210010964
- Publication date Jan 14, 2021
- WINBOND ELECTRONICS CORP.
- Ming-Chih Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20200270123
- Publication date Aug 27, 2020
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Transducer System for Pressure and Acoustic Sensing
- Publication number 20190389721
- Publication date Dec 26, 2019
- ROBERT BOSCH GmbH
- Andrew Doller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anti-Wetting Coating for Si-Based MEMS Fluidic Device, and Method o...
- Publication number 20190308875
- Publication date Oct 10, 2019
- Canon Kabushiki Kaisha
- Matthew C. Traub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADHESIVE SILICON OXYNITRIDE FILM
- Publication number 20190292410
- Publication date Sep 26, 2019
- Micralyne Inc.
- Glen FITZPATRICK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR
- Publication number 20190226932
- Publication date Jul 25, 2019
- InvenSense, Ref.
- Johannes SCHUMM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-electro-mechanical device with ion exchange polymer
- Publication number 20190225487
- Publication date Jul 25, 2019
- Bamdad Bahar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20190128830
- Publication date May 2, 2019
- STMicroelectronics S.r.l.
- Alessandra ALBERTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR DEPOSITING A MEASURED AMOUNT OF A SPECIES IN A SEALED C...
- Publication number 20190077656
- Publication date Mar 14, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Benjamin Stassen COOK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OXIDE BARRIER COATED SEMICONDUCTOR GAS SENSORS
- Publication number 20190033243
- Publication date Jan 31, 2019
- Apple Inc.
- Miaolei YAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOUND TRANSDUCER WITH HOUSING AND MEMS STRUCTURE
- Publication number 20180317021
- Publication date Nov 1, 2018
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PARTICLE AND LIGHT FILTER FOR MEMS DEVICE
- Publication number 20180220216
- Publication date Aug 2, 2018
- Apple Inc.
- Janhavi S. Agashe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR, COMPOSITE MATERIAL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180195992
- Publication date Jul 12, 2018
- WINBOND ELECTRONICS CORP.
- Ming-Chih Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE OF AMORPHOUS CARBON AND MEMS INCLUDING SUCH A MEMBRANE
- Publication number 20170260041
- Publication date Sep 14, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Anne GHIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ELECTRODES PERMEABLE TO OUTGASSING SPECIES
- Publication number 20160376143
- Publication date Dec 29, 2016
- InvenSense, Inc.
- Jongwoo SHIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL MULTI-ELECTRODE ARRAY
- Publication number 20160317802
- Publication date Nov 3, 2016
- ZYVEX LABS, LLC
- RAHUL SAINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20150076626
- Publication date Mar 19, 2015
- Kabushiki Kaisha Toshiba
- Naofumi NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACES PHYSICALLY TRANSFORMABLE BY ENVIRONMENTAL CHANGES
- Publication number 20130122257
- Publication date May 16, 2013
- Alcatel-Lucent USA Inc.
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACES PHYSICALLY TRANSFORMABLE BY ENVIRONMENTAL CHANGES
- Publication number 20120036846
- Publication date Feb 16, 2012
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION OF NANOWIRES AND OTHER NANOSCALE OBJECTS ON SURFACES
- Publication number 20110240344
- Publication date Oct 6, 2011
- Massachusetts Institute of Technology
- Michael S. Strano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nanofiber surfaces for use in enhanced surface area applications
- Publication number 20100285972
- Publication date Nov 11, 2010
- Nanosys, Inc.
- Roberto Dubrow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Procedural Functional Element of a Stack of Films
- Publication number 20080248253
- Publication date Oct 9, 2008
- SYNTICS GMBH
- Thomas Bieber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surfaces physically transformable by environmental changes
- Publication number 20070077396
- Publication date Apr 5, 2007
- Joanna Aizenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Chemical or biological characteristics

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfluidic chip and fabrication method

Modification to rough polysilicon using ion implantation and silicide

Graphene membrane microfluidic system

Adhesive silicon oxynitride film

Sensor, composite material and method of manufacturing the same

Modification to rough polysilicon using ion implantation and silicide

Semiconductor device and method of producing a semiconductor device

MEMS transducer system for pressure and acoustic sensing

MOx-based gas sensor and manufacturing method thereof

Sensor, composite material and method of manufacturing the same

Pressure sensor

Anti-wetting coating for Si-based MEMS fluidic device, and method o...

Methods for depositing a measured amount of a species in a sealed c...

Pressure sensor

Sound transducer with housing and MEMS structure

Integrated particle and light filter for MEMS device

Membrane of amorphous carbon and MEMS including such a membrane

Three-dimensional multi-electrode array

TFT-based sensor with multiple sensing modalities

MEMS device with electrodes permeable to outgassing species

Surfaces physically transformable by environmental changes

Surfaces physically transformable by environmental changes

Surfaces physically transformable by environmental changes

Resonant sensor and sensing system

Micromechanical piezoelectric device

Micromechanical device with an epitaxial layer

Patents Applicationslast 30 patents

MICROFLUIDIC CHIP AND FABRICATION METHOD

MICROFLUIDIC CHIP

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

MICRO-FLUIDIC CHIP, LIQUID LOADING METHOD THEREOF AND MICRO-FLUIDIC...

EXPANSION MEDIATED ADHESIVE DEVICE

Vibration-Driven Energy Harvesting Element, Method of Manufacturing...

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...

SENSOR, COMPOSITE MATERIAL AND METHOD OF MANUFACTURING THE SAME

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

MEMS Transducer System for Pressure and Acoustic Sensing

Anti-Wetting Coating for Si-Based MEMS Fluidic Device, and Method o...

ADHESIVE SILICON OXYNITRIDE FILM

PRESSURE SENSOR

Micro-electro-mechanical device with ion exchange polymer

MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF

METHODS FOR DEPOSITING A MEASURED AMOUNT OF A SPECIES IN A SEALED C...

OXIDE BARRIER COATED SEMICONDUCTOR GAS SENSORS

SOUND TRANSDUCER WITH HOUSING AND MEMS STRUCTURE

INTEGRATED PARTICLE AND LIGHT FILTER FOR MEMS DEVICE

SENSOR, COMPOSITE MATERIAL AND METHOD OF MANUFACTURING THE SAME

MEMBRANE OF AMORPHOUS CARBON AND MEMS INCLUDING SUCH A MEMBRANE

MEMS DEVICE WITH ELECTRODES PERMEABLE TO OUTGASSING SPECIES

THREE-DIMENSIONAL MULTI-ELECTRODE ARRAY

ELECTRONIC DEVICE

SURFACES PHYSICALLY TRANSFORMABLE BY ENVIRONMENTAL CHANGES

SURFACES PHYSICALLY TRANSFORMABLE BY ENVIRONMENTAL CHANGES

DEPOSITION OF NANOWIRES AND OTHER NANOSCALE OBJECTS ON SURFACES

Nanofiber surfaces for use in enhanced surface area applications

Procedural Functional Element of a Stack of Films

Surfaces physically transformable by environmental changes