Coating processes Apparatus therefor

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/16Coating processes Apparatus therefor

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning jig, coating apparatus, and cleaning method
- Patent number 12,257,611
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Satoshi Shimmura
- B08 - CLEANING
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,252,791
- Issue date Mar 18, 2025
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for real-time quality control of a film in a sp...
- Patent number 12,255,110
- Issue date Mar 18, 2025
- Samsung Electronics Co., Ltd.
- Gaurav Kumar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming photoresist pattern and projection exposure appar...
- Patent number 12,253,804
- Issue date Mar 18, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Kanyu Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution, solution storage body, actinic ray-sensitive or radiation...
- Patent number 12,253,801
- Issue date Mar 18, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Perpendicularly magnetized ferromagnetic layers having an oxide int...
- Patent number 12,249,450
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Luc Thomas
- B24 - GRINDING POLISHING
Information Patent Grant
Bubble defect reduction
- Patent number 12,248,252
- Issue date Mar 11, 2025
- Lam Research Corporation
- Akhil N. Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing monitoring apparatus based on imaging video da...
- Patent number 12,244,972
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Coating compositions for use with an overcoated photoresist
- Patent number 12,242,193
- Issue date Mar 4, 2025
- ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
- Eui-Hyun Ryu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Resist underlayer film-forming composition comprising epoxy adduct...
- Patent number 12,242,194
- Issue date Mar 4, 2025
- Nissan Chemical Industries, Ltd.
- Takafumi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor developer tool and methods of operation
- Patent number 12,235,582
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 12,235,581
- Issue date Feb 25, 2025
- Semes Co., Ltd.
- Min Jung Park
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Photoresist topcoat compositions and methods of processing photores...
- Patent number 12,234,369
- Issue date Feb 25, 2025
- DuPont Electronic Materials International, LLC
- Irvinder Kaur
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Pattern formation methods
- Patent number 12,228,859
- Issue date Feb 18, 2025
- Rohm and Haas Electronic Materials LLC
- Choong-Bong Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,228,861
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ki Sang Eum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solution, solution storage body, actinic ray-sensitive or radiation...
- Patent number 12,228,857
- Issue date Feb 18, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating composition for forming resist underlayer film for EUV lith...
- Patent number 12,228,858
- Issue date Feb 18, 2025
- DuPont Specialty Materials Korea Ltd.
- Jae Hwan Sim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming an enhanced unexposed photoresist layer
- Patent number 12,222,644
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Squeezing device, photoresist supply system and photoresist supply...
- Patent number 12,222,652
- Issue date Feb 11, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Shengjiao Li
- G01 - MEASURING TESTING
Information Patent Grant
Resist underlayer film forming composition having a disulfide struc...
- Patent number 12,222,651
- Issue date Feb 11, 2025
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,222,643
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoresist composition and method of forming photoresist pattern
- Patent number 12,222,647
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chih Ho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing system, method of manufacturing a semic...
- Patent number 12,217,962
- Issue date Feb 4, 2025
- Kioxia Corporation
- Shingo Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating apparatus
- Patent number 12,216,406
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Yusaku Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Display device and manufacturing method thereof
- Patent number 12,218,153
- Issue date Feb 4, 2025
- Au Optronics Corporation
- Wen-Ching Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for multi-spray RRC process with dynamic control
- Patent number 12,216,407
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsuan Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying wafer and method for drying wafer
- Patent number 12,216,408
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Material for forming organic film, method for forming organic film,...
- Patent number 12,215,221
- Issue date Feb 4, 2025
- Shin-Etsu Chemical Co., Ltd.
- Daisuke Kori
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Metal-compound-removing solvent and method in lithography
- Patent number 12,210,286
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV photoresist with low-activation-energy ligands or high-develope...
- Patent number 12,210,283
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PREPARING PIXEL DEFINING LAYER
- Publication number 20250093776
- Publication date Mar 20, 2025
- DUK SAN NEOLUX CO., LTD.
- Seo Jeong JEON
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR AREA SELECTIVE DEPOSITION ON EXTREME ULTRA-VIOLET (EUV)...
- Publication number 20250093778
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Lior Huli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250096007
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Jae Seung YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WATER SOLUBLE PROTECTIVE COATINGS FOR ENGINEERED OPTICAL DEVICES
- Publication number 20250093780
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Amit Kumar ROY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN
- Publication number 20250093775
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Po YANG
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
- Publication number 20250095989
- Publication date Mar 20, 2025
- Shin-Etsu Chemical Co., Ltd.
- Keisuke NIIDA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ORGANOTIN PHOTORESIST COMPOSITIONS HAVING FLUORIDE GENERATOR COMPOU...
- Publication number 20250085627
- Publication date Mar 13, 2025
- INPRIA CORPORATION
- Brian J. Cardineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
- Publication number 20250085636
- Publication date Mar 13, 2025
- Shin-Etsu Chemical Co., Ltd.
- Shohei Iwamori
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PLANARIZATION METHOD AND PHOTOCURABLE COMPOSITION
- Publication number 20250083182
- Publication date Mar 13, 2025
- Canon Kabushiki Kaisha
- Toshiki Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
UV NANOIMPRINTED LITHOGRAPHIC DEVICES MADE FROM POLYCYCLOOLEFINIC P...
- Publication number 20250085632
- Publication date Mar 13, 2025
- PROMERUS, LLC
- LARRY F. RHODES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...
- Publication number 20250087443
- Publication date Mar 13, 2025
- Saudi Arabian Oil Company
- Dong Kyu Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST TOPCOAT COMPOSITION, AND METHOD OF FORMING PATTERNS USING TH...
- Publication number 20250076765
- Publication date Mar 6, 2025
- Samsung SDI Co., Ltd.
- Daeseok SONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079215
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOTIN PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PATTERNING
- Publication number 20250076755
- Publication date Mar 6, 2025
- Feng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
- Publication number 20250076756
- Publication date Mar 6, 2025
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PATTERNED STRUCTURED TRANSFER TAPE
- Publication number 20250058543
- Publication date Feb 20, 2025
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING PIXEL DEFINE LAYER
- Publication number 20250063896
- Publication date Feb 20, 2025
- Hye Jung CHOI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250060671
- Publication date Feb 20, 2025
- ASM IP HOLDING B.V.
- Ivo Raaijmakers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMATION METHOD
- Publication number 20250051501
- Publication date Feb 13, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Minoru Adegawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPRINT LITHOGRAPHY DEFECT MITIGATION METHOD AND MASKED IMPRINT LIT...
- Publication number 20250053081
- Publication date Feb 13, 2025
- LEIA INC.
- Kevin Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPMENT OF HYBRID ORGANOTIN OXIDE PHOTORESISTS
- Publication number 20250053084
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Eric Calvin Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
- Publication number 20250051604
- Publication date Feb 13, 2025
- Samsung SDI Co., Ltd.
- Sunghwan KIM
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS
- Publication number 20250053086
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- MADHUR SACHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FORMATION METHOD OF PLATING PATTERN AND SEMICONDUCTOR PACKAGE INCLU...
- Publication number 20250054773
- Publication date Feb 13, 2025
- Samsung Electronics Co., Ltd.
- Yuseon HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL OXIDE RESIST LAYERS INCLUDING BISMUTH AND PHOSPHORUS AND RELA...
- Publication number 20250054759
- Publication date Feb 13, 2025
- Intel Corporation
- Charles Cameron Mokhtarzadeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
- Publication number 20250044685
- Publication date Feb 6, 2025
- Samsung SDI Co., Ltd.
- Changsoo WOO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for coating top anti-reflective coating
- Publication number 20250044693
- Publication date Feb 6, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Dian Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR USING COMPOSITION COMPRISING ORGANIC ACID COMPOUND, LITH...
- Publication number 20250044695
- Publication date Feb 6, 2025
- Merck Patent GmbH
- Tomotsugu YANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...
- Publication number 20250044696
- Publication date Feb 6, 2025
- Samsung SDI Co., Ltd.
- Taeho KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Coating processes Apparatus therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cleaning jig, coating apparatus, and cleaning method

Apparatus for manufacturing semiconductor device

Methods and systems for real-time quality control of a film in a sp...

Method of forming photoresist pattern and projection exposure appar...

Solution, solution storage body, actinic ray-sensitive or radiation...

Perpendicularly magnetized ferromagnetic layers having an oxide int...

Bubble defect reduction

Substrate processing monitoring apparatus based on imaging video da...

Coating compositions for use with an overcoated photoresist

Resist underlayer film-forming composition comprising epoxy adduct...

Semiconductor developer tool and methods of operation

Method and apparatus for treating substrate

Photoresist topcoat compositions and methods of processing photores...

Pattern formation methods

Apparatus for treating substrate

Solution, solution storage body, actinic ray-sensitive or radiation...

Coating composition for forming resist underlayer film for EUV lith...

Method of forming an enhanced unexposed photoresist layer

Squeezing device, photoresist supply system and photoresist supply...

Resist underlayer film forming composition having a disulfide struc...

Method of manufacturing a semiconductor device and pattern formatio...

Photoresist composition and method of forming photoresist pattern

Semiconductor manufacturing system, method of manufacturing a semic...

Coating method and coating apparatus

Display device and manufacturing method thereof

Method and apparatus for multi-spray RRC process with dynamic control

Apparatus for drying wafer and method for drying wafer

Material for forming organic film, method for forming organic film,...

Metal-compound-removing solvent and method in lithography

EUV photoresist with low-activation-energy ligands or high-develope...

Patents Applicationslast 30 patents

METHOD FOR PREPARING PIXEL DEFINING LAYER

METHOD FOR AREA SELECTIVE DEPOSITION ON EXTREME ULTRA-VIOLET (EUV)...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

WATER SOLUBLE PROTECTIVE COATINGS FOR ENGINEERED OPTICAL DEVICES

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

Composition For Forming Organic Film, Method For Forming Organic Fi...

ORGANOTIN PHOTORESIST COMPOSITIONS HAVING FLUORIDE GENERATOR COMPOU...

Compound For Forming Metal-Containing Film, Composition For Forming...

PLANARIZATION METHOD AND PHOTOCURABLE COMPOSITION

UV NANOIMPRINTED LITHOGRAPHIC DEVICES MADE FROM POLYCYCLOOLEFINIC P...

NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...

RESIST TOPCOAT COMPOSITION, AND METHOD OF FORMING PATTERNS USING TH...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ORGANOTIN PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PATTERNING

Compound For Forming Metal-Containing Film, Composition For Forming...

PATTERNED STRUCTURED TRANSFER TAPE

METHOD FOR PREPARING PIXEL DEFINE LAYER

SUBSTRATE PROCESSING APPARATUS AND METHOD

RESIST COMPOSITION AND RESIST PATTERN FORMATION METHOD

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

IMPRINT LITHOGRAPHY DEFECT MITIGATION METHOD AND MASKED IMPRINT LIT...

DEVELOPMENT OF HYBRID ORGANOTIN OXIDE PHOTORESISTS

HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS

POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS

FORMATION METHOD OF PLATING PATTERN AND SEMICONDUCTOR PACKAGE INCLU...

METAL OXIDE RESIST LAYERS INCLUDING BISMUTH AND PHOSPHORUS AND RELA...

SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...

Method for coating top anti-reflective coating

METHOD FOR USING COMPOSITION COMPRISING ORGANIC ACID COMPOUND, LITH...

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...