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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Coating processes Apparatus therefor
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last 30 patents
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Substrate treating apparatus and substrate treating method
Patent number
11,977,332
Issue date
May 7, 2024
Semes Co., Ltd.
Hae-Won Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-linked polymer for resist
Patent number
11,971,660
Issue date
Apr 30, 2024
Maruzen Petrochemical Co., LTD
Tomohiro Masukawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,971,661
Issue date
Apr 30, 2024
Tokyo Electron Limited
Yoji Sakata
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Photoresist composition and method of forming photoresist pattern
Patent number
11,971,659
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Chih Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photomask for imprinting and manufacturing method therefor
Patent number
11,966,163
Issue date
Apr 23, 2024
LG Chem, Ltd.
Yong Goo Son
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Photoresist composition, coated substrate including the photoresist...
Patent number
11,960,206
Issue date
Apr 16, 2024
Rohm and Hass Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
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Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Molecular resist composition and patterning process
Patent number
11,953,827
Issue date
Apr 9, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Actinic ray-sensitive or radiation-sensitive resin composition, res...
Patent number
11,953,829
Issue date
Apr 9, 2024
FUJIFILM Corporation
Kazunari Yagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method for coating chips
Patent number
11,955,585
Issue date
Apr 9, 2024
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Aurélien Suhm
H01 - BASIC ELECTRIC ELEMENTS
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Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Salt, acid generator, resist composition and method for producing r...
Patent number
11,947,257
Issue date
Apr 2, 2024
Sumitomo Chemical Company, Limited
Tatsuro Masuyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
11,948,797
Issue date
Apr 2, 2024
Mitsubishi Electric Corporation
Takahiro Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Sample support
Patent number
11,947,260
Issue date
Apr 2, 2024
Hamamatsu Photonics K.K.
Akira Tashiro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,940,732
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Sheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photoresist topcoat compositions and methods of processing photores...
Patent number
11,940,731
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Irvinder Kaur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Monomers, polymers and lithographic compositions comprising same
Patent number
11,932,713
Issue date
Mar 19, 2024
Rohm and Haas Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
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Patent Grant
Composition for forming silicon-containing resist underlayer film a...
Patent number
11,934,100
Issue date
Mar 19, 2024
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,935,747
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hsin Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Hardmask composition and method of forming patterns
Patent number
11,932,715
Issue date
Mar 19, 2024
Samsung SDI Co., Ltd.
Donghoon Won
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
Patent number
11,932,529
Issue date
Mar 19, 2024
Texas Instruments Incorporated
Patrick Ian Oden
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of manufacturing printed circuit board and resist laminate f...
Patent number
11,937,378
Issue date
Mar 19, 2024
SAMSUNG ELECTRO-MECHANICS CO., LTD.
Chan Jin Park
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Patent Grant
Substrate treating method
Patent number
11,927,886
Issue date
Mar 12, 2024
Semes Co., Ltd.
Doo Young Oh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Photoresist imaging and development for enhanced nozzle plate adhesion
Patent number
11,926,157
Issue date
Mar 12, 2024
Funai Electric Co., Ltd.
Sean T. Weaver
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
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Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate processing method, substrate processing apparatus, and re...
Patent number
11,921,426
Issue date
Mar 5, 2024
SCREEN Holdings Co., Ltd.
Katsuya Akiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,921,428
Issue date
Mar 5, 2024
Kioxia Corporation
Yoshihiro Uozumi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for treating substrate
Patent number
11,923,212
Issue date
Mar 5, 2024
Semes Co., Ltd.
Kyungsik Shin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR CHIP, AND KIT
Publication number
20240152055
Publication date
May 9, 2024
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN-FORMING METHOD
Publication number
20240152050
Publication date
May 9, 2024
JSR Corporation
Ken MARUYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240152052
Publication date
May 9, 2024
TOKYO ELECTRON LIMITED
Masataka TANAKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDU...
Publication number
20240153811
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Sang Duk HWANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240142171
Publication date
May 2, 2024
SEMES CO., LTD.
Seung Hoon OH
F26 - DRYING
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Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20240145272
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240141501
Publication date
May 2, 2024
TOKYO ELECTRON LIMITED
Tetsuro Shirasaka
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
HALOGEN-AND ALIPHATIC-CONTAINING ORGANOTIN PHOTORESISTS AND METHODS...
Publication number
20240134274
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV-INDUCED CONDENSATION OF POLYSILOXANE SOL-GEL THIN FILM
Publication number
20240134281
Publication date
Apr 25, 2024
Brewer Science, Inc.
Daniel Patrick Sweat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST UNDERLAYER COMPOSITION
Publication number
20240126172
Publication date
Apr 18, 2024
Rohm and Haas Electronic Materials L.L.C.
Anton CHAVEZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240118621
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Seulgi HAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS AND APPARATUS FOR FEEDING A FLEXOGRAPHIC PRINTING PLATE PRO...
Publication number
20240118623
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Thomas Klein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM FOR AUTOMATED SYNTHESIS OF BIOCHIPS
Publication number
20240118630
Publication date
Apr 11, 2024
Centrillion Technology Holdings Corporation
Bolan LI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Application
METHOD FORMING GRATING DEVICE
Publication number
20240111078
Publication date
Apr 4, 2024
VisEra Technologies Company Limited
Chun-Wei HUANG
G02 - OPTICS
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Patent Application
Composition For Forming Adhesive Film, Patterning Process, And Meth...
Publication number
20240103370
Publication date
Mar 28, 2024
Shin-Etsu Chemical Co., Ltd.
Seiichiro TACHIBANA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RESIST UNDERLAYER FILM FORMATION COMPOSITION
Publication number
20240103369
Publication date
Mar 28, 2024
NISSAN CHEMICAL CORPORATION
Masahisa ENDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
FILM MANUFACTURING EQUIPMENT AND METHOD OF MANUFACTURING FILM
Publication number
20240100557
Publication date
Mar 28, 2024
Beyond Manufacture Inc.
Chun-Hao LUO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Application
PHOTO TREATMENT DEVICE
Publication number
20240103371
Publication date
Mar 28, 2024
Ushio Denki Kabushiki Kaisha
Akihiro Shimamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
TREATMENT LIQUID FOR MANUFACTURING SEMICONDUCTOR, PATTERN FORMING M...
Publication number
20240103374
Publication date
Mar 28, 2024
FUJIFILM CORPORATION
Tetsuya SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
STABLE SOLUTIONS OF MONOALKYL TIN ALKOXIDES AND THEIR HYDROLYSIS AN...
Publication number
20240094632
Publication date
Mar 21, 2024
INPRIA CORPORATION
Kai Jiang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240096623
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
IMPRINT COMPOSITIONS WITH PASSIVATED NANOPARTICLES AND MATERIALS AN...
Publication number
20240094630
Publication date
Mar 21, 2024
Applied Materials, Inc.
Amita JOSHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POLYMERS USEFUL AS SURFACE LEVELING AGENTS
Publication number
20240093027
Publication date
Mar 21, 2024
Rohm and Haas Electronic Materials L.L.C.
Mingqi Li
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALL...
Publication number
20240085793
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
Publication number
20240085813
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kenta SHIBASAKI
B08 - CLEANING
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Patent Application
RESIDUAL LAYER THICKNESS MODULATION IN NANOIMPRINT LITHOGRAPHY
Publication number
20240085782
Publication date
Mar 14, 2024
Google LLC
Wei Jin
G02 - OPTICS
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Patent Application
COLORED PHOTOSENSITIVE RESIN COMPOSITION AND MUTILAYER CURED FILM P...
Publication number
20240085791
Publication date
Mar 14, 2024
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
Seung-Keun KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer Edge Protection Film Forming Method, Patterning Process, And...
Publication number
20240087905
Publication date
Mar 14, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240079256
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Tsuyoshi WATANABE
H01 - BASIC ELECTRIC ELEMENTS