Coatings or surface treatment on the inside of the reaction chamber or on parts thereof

Industry

CPC
C23C16/4404

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4404Coatings or surface treatment on the inside of the reaction chamber or on parts thereof

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming a protective coating on processing chamber surf...
- Patent number 11,976,357
- Issue date May 7, 2024
- Applied Materials, Inc.
- Geetika Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treatment of deposition reactor
- Patent number 11,967,488
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,959,172
- Issue date Apr 16, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a semiconductor manufacturing apparatus member
- Patent number 11,939,678
- Issue date Mar 26, 2024
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for conditioning a processing reactor
- Patent number 11,926,892
- Issue date Mar 12, 2024
- GlobalWafers Co., Ltd.
- Gang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,885,016
- Issue date Jan 30, 2024
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Reduced defect deposition processes
- Patent number 11,821,082
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Xiaoquan Min
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation resistant protective layer in chamber conditioning
- Patent number 11,761,079
- Issue date Sep 19, 2023
- Lam Research Corporation
- Fengyuan Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation against vapor deposition
- Patent number 11,739,422
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lattice coat surface enhancement for chamber components
- Patent number 11,739,411
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Lit Ping Lam
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Plasma purge method
- Patent number 11,725,276
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-coating method and film forming method
- Patent number 11,718,910
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Takeshi Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,713,504
- Issue date Aug 1, 2023
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber processes for reducing backside particles
- Patent number 11,702,738
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Yi Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch-type substrate processing apparatus and operation method thereof
- Patent number 11,702,737
- Issue date Jul 18, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Hee Seok Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component, method of manufacturing the component, and method of cle...
- Patent number 11,694,879
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Ian Widlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Erosion / corrosion resistant barrier coating
- Patent number 11,674,221
- Issue date Jun 13, 2023
- CONAX TECHNOLOGIES
- Matthew M. Hall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 11,674,222
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming process film
- Patent number 11,666,950
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lin Lee
- B08 - CLEANING
Information Patent Grant
Forming method of yttrium oxide fluoride coating film and yttrium o...
- Patent number 11,668,011
- Issue date Jun 6, 2023
- IONES CO., LTD.
- Jae Hyuk Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus and radical unit for forming thin film
- Patent number 11,661,656
- Issue date May 30, 2023
- EQ TECH PLUS CO., LTD.
- Dong Hwa Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,661,654
- Issue date May 30, 2023
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods of protecting nickel and nickel containing...
- Patent number 11,658,014
- Issue date May 23, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Halogen resistant coatings and methods of making and using thereof
- Patent number 11,639,547
- Issue date May 2, 2023
- Applied Materials, Inc.
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-resistant member
- Patent number 11,623,898
- Issue date Apr 11, 2023
- Toto Ltd.
- Junichi Iwasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean processes for boron carbon film deposition
- Patent number 11,613,808
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COLD THERMAL CHEMICAL VAPOR DEPOSITION
- Publication number 20240117495
- Publication date Apr 11, 2024
- SILCOTEK CORP.
- Geoffrey K. WHITE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- Publication number 20240117490
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- Publication number 20240117489
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING PARTS USING SOLID-STATE ADDITIVE MANUFACTURING
- Publication number 20240062997
- Publication date Feb 22, 2024
- Lam Research Corporaton
- Pankaj Jyoti Hazarika
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PART FOR PROCESS CHAMBER AND METHOD OF FORMING THIN FILM LAYE...
- Publication number 20240052516
- Publication date Feb 15, 2024
- POINT ENGINEERING CO., LTD.
- Bum Mo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
- Publication number 20240014012
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...
- Publication number 20240003005
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Yasunobu KOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER LINER FOR SEMICONDUCTOR PROCESSING
- Publication number 20240006203
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chien-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS
- Publication number 20230416913
- Publication date Dec 28, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...
- Publication number 20230399744
- Publication date Dec 14, 2023
- Agilent Technologies, Inc.
- Elizabeth CARR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20230402281
- Publication date Dec 14, 2023
- Kokusai Electric Corporation
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
- Publication number 20230392278
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING
- Publication number 20230383401
- Publication date Nov 30, 2023
- LAM RESEARCH CORPORATION
- Fengyuan LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20230323534
- Publication date Oct 12, 2023
- ASM IP HOLDING B.V.
- DooHyun La
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLEANING METHOD, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANU...
- Publication number 20230294145
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Takahiro KOBAYASHI
- B08 - CLEANING
Information Patent Application
DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR
- Publication number 20230287564
- Publication date Sep 14, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C01 - INORGANIC CHEMISTRY
Information Patent Application
HALOGEN RESISTANT COATINGS AND METHODS OF MAKING AND USING THEREOF
- Publication number 20230279541
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20230279548
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IN SITU CERAMIC COATING DEPOSITION
- Publication number 20230272525
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE
- Publication number 20230253193
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS REDUCING METHOD
- Publication number 20230227969
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
- Publication number 20230230813
- Publication date Jul 20, 2023
- ASM IP HOLDING B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-RESISTANT MEMBER
- Publication number 20230227375
- Publication date Jul 20, 2023
- TOTO LTD.
- Junichi IWASAWA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
AIR DATA PROBE CORROSION PROTECTION
- Publication number 20230227978
- Publication date Jul 20, 2023
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
- Publication number 20230167543
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Mats LARSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-COATING METHOD AND PROCESSING APPARATUS
- Publication number 20230167547
- Publication date Jun 1, 2023
- Tokyo Electron Limited
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE METAL OXY-FLUORIDE COATINGS
- Publication number 20230141782
- Publication date May 11, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PARTICLE ABATEMENT IN A SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20230127177
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Cornelis Thaddeus Herbschleb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE SUPPRESSION METHOD
- Publication number 20230124029
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kazuki DEMPOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD AND INSPECTION METHOD OF INTERIOR MEMBER OF PL...
- Publication number 20230101039
- Publication date Mar 30, 2023
- Hitachi High-Tech Corporation
- Kazuhiro Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Coatings or surface treatment on the inside of the reaction chamber or on parts thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for forming a protective coating on processing chamber surf...

Substrate supporting plate, thin film deposition apparatus includin...

Method for treatment of deposition reactor

Substrate processing systems including gas delivery system with red...

Method of making a semiconductor manufacturing apparatus member

Methods for conditioning a processing reactor

Minimizing radical recombination using ALD silicon oxide surface co...

Processes for depositing silicon-containing films using halidosilan...

Method of processing substrate, method of manufacturing semiconduct...

Substrate support cover for high-temperature corrosive environment

Reduced defect deposition processes

Oxidation resistant protective layer in chamber conditioning

Passivation against vapor deposition

Lattice coat surface enhancement for chamber components

Plasma purge method

Pre-coating method and film forming method

Chemical resistant multi-layer coatings applied by atomic layer dep...

Chamber processes for reducing backside particles

Batch-type substrate processing apparatus and operation method thereof

Component, method of manufacturing the component, and method of cle...

Erosion / corrosion resistant barrier coating

Method of in situ ceramic coating deposition

Method of forming process film

Forming method of yttrium oxide fluoride coating film and yttrium o...

Thin film forming apparatus and radical unit for forming thin film

Substrate processing systems including gas delivery system with red...

Apparatuses and methods of protecting nickel and nickel containing...

Halogen resistant coatings and methods of making and using thereof

Plasma-resistant member

Clean processes for boron carbon film deposition

Patents Applicationslast 30 patents

COLD THERMAL CHEMICAL VAPOR DEPOSITION

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

PROCESSING PARTS USING SOLID-STATE ADDITIVE MANUFACTURING

METAL PART FOR PROCESS CHAMBER AND METHOD OF FORMING THIN FILM LAYE...

METHOD FOR TREATMENT OF DEPOSITION REACTOR

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...

CHAMBER LINER FOR SEMICONDUCTOR PROCESSING

MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS

DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...

OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING

SUBSTRATE PROCESSING METHOD

GAS CLEANING METHOD, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANU...

DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR

HALOGEN RESISTANT COATINGS AND METHODS OF MAKING AND USING THEREOF

SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...

METHOD OF IN SITU CERAMIC COATING DEPOSITION

SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE

STRESS REDUCING METHOD

METHOD FOR TREATMENT OF DEPOSITION REACTOR

PLASMA-RESISTANT MEMBER

AIR DATA PROBE CORROSION PROTECTION

METHOD FOR FABRICATING CHAMBER PARTS

PRE-COATING METHOD AND PROCESSING APPARATUS

PROTECTIVE METAL OXY-FLUORIDE COATINGS

METHOD OF PARTICLE ABATEMENT IN A SEMICONDUCTOR PROCESSING APPARATUS

PARTICLE SUPPRESSION METHOD

MANUFACTURING METHOD AND INSPECTION METHOD OF INTERIOR MEMBER OF PL...