TREA

Compensation masks in orientation dependent etching

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  • CPC
  • B81C1/0042
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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/0042Compensation masks in orientation dependent etching
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Segmented pedestal for mounting device on chip
    • Patent number 11,542,153
    • Issue date Jan 3, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Lee-Chuan Tseng
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    High-volume millimeter scale manufacturing
    • Patent number 11,325,828
    • Issue date May 10, 2022
    • Vibrant Composites Inc.
    • Pratheev S. Sreetharan
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Superhydrophobic and superoleophobic nanosurfaces
    • Patent number 11,090,903
    • Issue date Aug 17, 2021
    • The Regents of the University of California
    • Sungho Jin
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Segmented pedestal for mounting device on chip
    • Patent number 11,084,715
    • Issue date Aug 10, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Lee-Chuan Tseng
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Actuator layer patterning with topography
    • Patent number 10,906,802
    • Issue date Feb 2, 2021
    • Invensense, Inc.
    • Daesung Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method for forming a cavity and a component having a cavity
    • Patent number 10,840,107
    • Issue date Nov 17, 2020
    • Robert Bosch GmbH
    • Simon Armbruster
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,703,897
    • Issue date Jul 7, 2020
    • LG Chem, Ltd.
    • Jeong Kyu Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,633,533
    • Issue date Apr 28, 2020
    • LG Chem, Ltd.
    • Mi Sook Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Superhydrophobic and superoleophobic nanosurfaces
    • Patent number 10,569,506
    • Issue date Feb 25, 2020
    • The Regents of the University of California
    • Sungho Jin
    • A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
  • Information Patent Grant

    Exposure activated chemically amplified directed self-assembly (DSA...
    • Patent number 10,459,338
    • Issue date Oct 29, 2019
    • Intel Corporation
    • Paul A. Nyhus
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Manufacturing method for semiconductor structure
    • Patent number 10,427,935
    • Issue date Oct 1, 2019
    • United Microelectronics Corp.
    • Te-Huang Chiu
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method for forming a cavity and a component having a cavity
    • Patent number 10,431,474
    • Issue date Oct 1, 2019
    • Robert Bosch GmbH
    • Simon Armbruster
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,377,894
    • Issue date Aug 13, 2019
    • LG Chem, Ltd.
    • Jeong Kyu Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method of manufacturing patterned substrate
    • Patent number 10,370,529
    • Issue date Aug 6, 2019
    • LG Chem, Ltd.
    • Se Jin Ku
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Substrate treatment method, computer storage medium and substrate t...
    • Patent number 10,329,144
    • Issue date Jun 25, 2019
    • Tokyo Electron Limited
    • Makoto Muramatsu
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,310,378
    • Issue date Jun 4, 2019
    • LG Chem, Ltd.
    • Eun Young Choi
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,295,908
    • Issue date May 21, 2019
    • LG Chem, Ltd.
    • No Jin Park
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,287,429
    • Issue date May 14, 2019
    • LG Chem, Ltd.
    • Mi Sook Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method of manufacturing patterned substrate
    • Patent number 10,287,430
    • Issue date May 14, 2019
    • LG Chem, Ltd.
    • Se Jin Ku
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,281,820
    • Issue date May 7, 2019
    • LG Chem, Ltd.
    • Jung Keun Kim
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,253,130
    • Issue date Apr 9, 2019
    • LG Chem, Ltd.
    • Jeong Kyu Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,239,980
    • Issue date Mar 26, 2019
    • LG Chem, Ltd.
    • Je Gwon Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,240,035
    • Issue date Mar 26, 2019
    • LG Chem, Ltd.
    • Je Gwon Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,227,438
    • Issue date Mar 12, 2019
    • LG Chem, Ltd.
    • Je Gwon Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,227,436
    • Issue date Mar 12, 2019
    • LG Chem, Ltd.
    • Mi Sook Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,227,437
    • Issue date Mar 12, 2019
    • LG Chem, Ltd.
    • Jung Keun Kim
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,202,480
    • Issue date Feb 12, 2019
    • LG Chem, Ltd.
    • Je Gwon Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,196,475
    • Issue date Feb 5, 2019
    • LG Chem, Ltd.
    • Jung Keun Kim
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Monomer and block copolymer
    • Patent number 10,160,822
    • Issue date Dec 25, 2018
    • LG Chem, Ltd.
    • Jung Keun Kim
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Block copolymer
    • Patent number 10,150,832
    • Issue date Dec 11, 2018
    • LG Chem, Ltd.
    • Mi Sook Lee
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents