Concurrent filling of a plurality of trenches having a different trench shape or dimension

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H01L21/76229

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/76229Concurrent filling of a plurality of trenches having a different trench shape or dimension

Industries

Patents Grantslast 30 patents

Information Patent Grant
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Semiconductor device including trench isolation layer and method of...
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Concurrent filling of a plurality of trenches having a different trench shape or dimension

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming a semiconductor device with a dual gate dielectri...

Integrated circuit with a fin and gate structure and method making...

Semiconductor device

Fin field effect transistor (FinFet) device structure and method fo...

Etch stop layer between substrate and isolation structure

Semiconductor device including semiconductor liner and method for f...

Method for forming semiconductor device having isolation structures...

Method for depositing silicon-free carbon-containing film as gap-fi...

Selective etches for reducing cone formation in shallow trench isol...

Semiconductor devices

Shallow trench isolation forming method and structures resulting th...

Semiconductor structure cutting process and structures formed thereby

Semiconductor device and method of fabricating the same

Method of forming semiconductor memory device having saddle portion

Semiconductor structure and manufacturing method thereof

Self-aligned gate endcap (SAGE) architectures without fin end gap

Semiconductor manufacturing method

Semiconductor device including trench isolation layer and method of...

Semiconductor device having isolation fins

Formation of hybrid isolation regions through recess and re-deposition

Method of manufacturing semiconductor structure

Method for forming semiconductor structure with high aspect ratio

Semiconductor trench capacitor structure and manufacturing method t...

Isolation structures and methods of forming the same in field-effec...

Multiple thickness semiconductor-on-insulator field effect transist...

Method for manufacturing a semiconductor device having a dummy section

Semiconductor device

Method for preparing semiconductor device structure with fine patte...

Semiconductor feature and method for manufacturing the same

Method for manufacturing semiconductor device

Patents Applicationslast 30 patents

MERGED TRENCHES SURROUNDED BY WIDER TRENCH FOR ISOLATING SEMICONDUC...

DOPING FREE CONNECTION STRUCTURES AND METHODS

Shallow Trench Isolation Forming Method and Structures Resulting Th...

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

FORMING METAL GATE CUTS USING MULTIPLE PASSES FOR DEPTH CONTROL

Semiconductor Structure Cutting Process and Structures Formed Thereby

SELECTIVE ETCHES FOR REDUCING CONE FORMATION IN SHALLOW TRENCH ISOL...

METHODS FOR SEAM REPAIR AND SEMICONDUCTOR STRUCTURE MANUFACTURED TH...

SELF-ALIGNED GATE ENDCAP (SAGE) ARCHITECTURES WITHOUT FIN END GAP

SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR PREPARING THE SAME

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE WITH HIGH ASPECT RATIO

DIE SIZE REDUCTION AND DEEP TRENCH DENSITY INCREASE USING DEEP TREN...

LOCOS OR SIBLK TO PROTECT DEEP TRENCH POLYSILICON IN DEEP TRENCH AF...

MEMORY STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTUR...

Formation of Hybrid Isolation Regions Through Recess and Re-Deposition

MICROFLUIDIC CHANNELS SEALED WITH DIRECTIONALLY-GROWN PLUGS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING ISOLATION ST...

ELECTRONIC DEVICE MANUFACTURING METHOD

MULTIPLE CRITICAL DIMENSION POWER RAIL

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME

SEMICONDUCTOR DEVICES

ISOLATION STRUCTURES AND METHODS OF FORMING THE SAME IN FIELD-EFFEC...

SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR PREPARING THE SAME

SEMICONDUCTOR FEATURE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR TRENCH CAPACITOR STRUCTURE AND MANUFACTURING METHOD T...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

THREE-DIMENSIONAL MEMORY DEVICES HAVING ISOLATION STRUCTURE FOR SOU...

ARRAY BOUNDARY STRUCTURE TO REDUCE DISHING