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containing a metal as principal radiation generating component
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ELECTRICITY
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Electric techniques
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X-RAY TECHNIQUE
H05G2/00
Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes
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H05G2/005
containing a metal as principal radiation generating component
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Patents Grants
last 30 patents
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Patent Grant
Contamination trap
Patent number
11,982,947
Issue date
May 14, 2024
ASML NETHERLAND B.V.
Sander Catharina Reinier Derks
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV light source and apparatus for lithography
Patent number
11,979,971
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Shuo Su
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV light source with a separation device
Patent number
11,968,767
Issue date
Apr 23, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Oliver Schlosser
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Modular laser-produced plasma x-ray system
Patent number
11,930,581
Issue date
Mar 12, 2024
Brown University
Daniel John DeCiccio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system and operation method thereof
Patent number
11,899,378
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
Patent number
11,852,984
Issue date
Dec 26, 2023
Samsung Electronics Co., Ltd.
Sunghyup Kim
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV light source and apparatus for lithography
Patent number
11,832,372
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Chieh Chien
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Foil trap and light source apparatus including the same
Patent number
11,822,258
Issue date
Nov 21, 2023
Ushio Denki Kabushiki Kaisha
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Mechanical alignment of x-ray sources
Patent number
11,800,625
Issue date
Oct 24, 2023
Excillum AB
Johan Kronstedt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
Patent number
11,800,626
Issue date
Oct 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Shuo Su
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,792,909
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chih Lai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV vessel perimeter flow auto adjustment
Patent number
11,747,735
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Residual gain monitoring and reduction for EUV drive laser
Patent number
11,737,200
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for detecting debris in a photolithography system
Patent number
11,693,324
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Yu Tu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
Patent number
11,680,958
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
En Hao Lai
G01 - MEASURING TESTING
Information
Patent Grant
Droplet generator and method of servicing extreme ultraviolet radia...
Patent number
11,644,759
Issue date
May 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hsun Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for mitigating contamination
Patent number
11,632,849
Issue date
Apr 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chieh Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography apparatus
Patent number
11,605,477
Issue date
Mar 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng Hung Tsai
G02 - OPTICS
Information
Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
Patent number
11,599,031
Issue date
Mar 7, 2023
Samsung Electronics Co., Ltd.
Sunghyup Kim
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,576,250
Issue date
Feb 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Hao Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contamination trap
Patent number
11,556,067
Issue date
Jan 17, 2023
ASML Netherlands B.V.
Sander Catharina Reinier Derks
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithography system and operation method thereof
Patent number
11,550,233
Issue date
Jan 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method for supplying target material in an EUV light source
Patent number
11,533,799
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Hsin-Feng Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
Patent number
11,531,278
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for generating droplets for EUV photolithography...
Patent number
11,528,797
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Kuang Sun
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Replacement method for droplet generator
Patent number
11,528,798
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Yu Tu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV radiation source apparatus for lithography
Patent number
11,513,441
Issue date
Nov 29, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Chih Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Thermal controlling method in lithography system
Patent number
11,506,986
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for operating a light system
Patent number
11,503,680
Issue date
Nov 15, 2022
The Boeing Company
Melanie L. Kimsey-Lin
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Anti-rotation coupling
Patent number
11,500,297
Issue date
Nov 15, 2022
ASML Netherlands B.V.
David Bessems
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
EUV LIGHT SOURCE WITH A SEPARATION DEVICE
Publication number
20240057243
Publication date
Feb 15, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Oliver Schlosser
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MECHANICAL ALIGNMENT OF X-RAY SOURCES
Publication number
20240015875
Publication date
Jan 11, 2024
Excillum AB
Johan KRONSTEDT
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE
Publication number
20240004317
Publication date
Jan 4, 2024
Ushio Denki Kabushiki Kaisha
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ROTATING TARGET FOR EXTREME ULTRAVIOLET SOURCE WITH LIQUID METAL
Publication number
20230403778
Publication date
Dec 14, 2023
KLA Corporation
Alexander Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
Publication number
20230389168
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Chieh CHIEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
Publication number
20230380044
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Shuo SU
G01 - MEASURING TESTING
Information
Patent Application
RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
Publication number
20230367224
Publication date
Nov 16, 2023
ASML NETHERLANDS B.V.
Hrishikesh PATEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20230363074
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chih LAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
Publication number
20230359125
Publication date
Nov 9, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
Che-Chang HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20230309211
Publication date
Sep 28, 2023
Gigaphoton Inc.
Yoshiyuki HONDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
Publication number
20230296992
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yu TU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
Publication number
20230296642
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
En Hao LAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIQUID TAMPED TARGETS FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20230280656
Publication date
Sep 7, 2023
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Yechiel R. FRANK
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEMS AND METHODS FOR LASER-TO-DROPLET ALIGNMENT
Publication number
20230269858
Publication date
Aug 24, 2023
ASML NETHERLANDS B.V.
Poorya Haghi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...
Publication number
20230185207
Publication date
Jun 15, 2023
Samsung Electronics Co., Ltd.
Sunghyup KIM
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...
Publication number
20230189422
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Kuang SUN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20230164899
Publication date
May 25, 2023
Ushio Denki Kabushiki Kaisha
Hideyuki URAKAMI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHOGRAPHY SYSTEM AND OPERATION METHOD THEREOF
Publication number
20230161273
Publication date
May 25, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi-Hung LIAO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONTAMINATION SHIELD FOR MECHANICALLY INSULATING DEVICE
Publication number
20230156898
Publication date
May 18, 2023
ASML NETHERLANDS B.V.
Armin Bernhard Ridinger
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Lithography Apparatus and Method
Publication number
20230132074
Publication date
Apr 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Chun Yen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE USING ELECTRON BEAMS
Publication number
20230122253
Publication date
Apr 20, 2023
University-Industry Cooperation Group of Kyung Hee University
Kyu Chang PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEMENT AND REFILL METHOD FOR DROPLET GENERATOR
Publication number
20230107078
Publication date
Apr 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yu TU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONTAMINATION TRAP
Publication number
20230091648
Publication date
Mar 23, 2023
ASML NETHERLANDS B.V.
Sander Catharina Reinier DERKS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
Publication number
20230064840
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh HSIEH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
Publication number
20230061242
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Che-Chang HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EUV LITHOGRAPHY APPARATUS
Publication number
20230062302
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng Hung TSAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230058753
Publication date
Feb 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Hao LAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VESSEL FOR A RADIATION SOURCE
Publication number
20230023631
Publication date
Jan 26, 2023
ASML NETHERLANDS B.V.
Sander KERSSEMAKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CIRCULATION MECHANISM AND OPERATION APPARATUS
Publication number
20230021544
Publication date
Jan 26, 2023
Ushio Denki Kabushiki Kaisha
Akihisa Nagano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR SUPPLYING TARGET MATERIAL IN AN EUV LIGHT SOURCE
Publication number
20230010810
Publication date
Jan 12, 2023
Taiwan Semiconductor Manufacturing company Ltd.
HSIN-FENG CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR