Control etch selectivity

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B81C1/00595

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00595Control etch selectivity

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS and NEMS structures
- Patent number 12,006,209
- Issue date Jun 11, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed force sensor with etch stop layer
- Patent number 11,965,787
- Issue date Apr 23, 2024
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
- Patent number 11,946,822
- Issue date Apr 2, 2024
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
- Patent number 11,945,712
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,878,906
- Issue date Jan 23, 2024
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,787,686
- Issue date Oct 17, 2023
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical electronics device
- Patent number 11,667,523
- Issue date Jun 6, 2023
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,492,251
- Issue date Nov 8, 2022
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed force sensor with etch stop layer
- Patent number 11,385,108
- Issue date Jul 12, 2022
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device having a membrane and method of manufacture
- Patent number 11,365,119
- Issue date Jun 21, 2022
- TDK Corporation
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,180,362
- Issue date Nov 23, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polarizer peeling apparatus and peeling method thereof
- Patent number 11,092,843
- Issue date Aug 17, 2021
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Guoxia Yi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device having a metal-semiconductor compound layer protected...
- Patent number 11,027,969
- Issue date Jun 8, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephanus Louwers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,027,970
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Naofumi Ohashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of anisotropically etching adjacent lines with multi-color s...
- Patent number 10,937,659
- Issue date Mar 2, 2021
- Tokyo Electron Limited
- Shihsheng Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with an etch stop layer buried within inter-dielectr...
- Patent number 10,927,000
- Issue date Feb 23, 2021
- United Microelectronics Corp.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical electronics device
- Patent number 10,894,712
- Issue date Jan 19, 2021
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 10,766,766
- Issue date Sep 8, 2020
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing optical components using functional elements
- Patent number 10,752,500
- Issue date Aug 25, 2020
- FRAUNHOFER-GESELLSCAFT ZUR FÖRDERUNG ANGEWANDTEN FORSCHUNG E.V.
- Hans Joachim Quenzer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective cyclic dry etching process of dielectric materials using...
- Patent number 10,720,334
- Issue date Jul 21, 2020
- ASM IP Holding B.V.
- Rene Henricus Jozef Vervuurt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etch patterning of an aluminum nitride film
- Patent number 10,662,058
- Issue date May 26, 2020
- Rosemount Aerospace Inc.
- Dosi Dosev
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Touch sensing panel and manufacturing method thereof
- Patent number 10,642,436
- Issue date May 5, 2020
- Cambrios Film Solutions Corporation
- Chung-Chin Hsiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectronic device having a black s...
- Patent number 10,364,145
- Issue date Jul 30, 2019
- STMicroelectronics S.r.l.
- Roberto Somaschini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vapour etch of silicon dioxide with improved selectivity
- Patent number 10,354,884
- Issue date Jul 16, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for dry hard mask removal on a microelectronic substrate
- Patent number 10,236,186
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Nihar Mohanty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,221,066
- Issue date Mar 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
- Patent number 10,196,262
- Issue date Feb 5, 2019
- STMicroelectronics S.r.l.
- Giuseppe Barillaro
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selectivity in a xenon difluoride etch process
- Patent number 10,173,894
- Issue date Jan 8, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure to reduce backside silicon damage
- Patent number 10,138,118
- Issue date Nov 27, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
- Publication number 20240247986
- Publication date Jul 25, 2024
- NextInput, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20240199408
- Publication date Jun 20, 2024
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240190694
- Publication date Jun 13, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20230036935
- Publication date Feb 2, 2023
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
- Publication number 20230016531
- Publication date Jan 19, 2023
- NextInput, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20210387854
- Publication date Dec 16, 2021
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20210363000
- Publication date Nov 25, 2021
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20210363002
- Publication date Nov 25, 2021
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Transducer Device with Multilayer Diaphragm and Metho...
- Publication number 20210356342
- Publication date Nov 18, 2021
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device Having a Membrane and Method of Manufacture
- Publication number 20210300753
- Publication date Sep 30, 2021
- TDK Corporation
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
- Publication number 20210172813
- Publication date Jun 10, 2021
- NextInput, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONICS DEVICE
- Publication number 20210139320
- Publication date May 13, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20200407219
- Publication date Dec 31, 2020
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20200277183
- Publication date Sep 3, 2020
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20200095120
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Naofumi OHASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOUCH SENSING PANEL AND MANUFACTURING METHOD THEREOF
- Publication number 20190384429
- Publication date Dec 19, 2019
- Cambrios Film Solutions Corporation
- Chung-Chin Hsiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING OPTICAL COMPONENTS USING FUNCTIONAL ELEMENTS
- Publication number 20190135619
- Publication date May 9, 2019
- FRAUNHOFFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Hans, Joachim QUENZER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...
- Publication number 20190092632
- Publication date Mar 28, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Stephanus LOUWERS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONICS DEVICE
- Publication number 20180257930
- Publication date Sep 13, 2018
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTRONIC DEVICE HAVING A BLACK S...
- Publication number 20180086633
- Publication date Mar 29, 2018
- STMicroelectronics S.r.l.
- Roberto Somaschini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS
- Publication number 20180029883
- Publication date Feb 1, 2018
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE TO REDUCE BACKSIDE SILICON DAMAGE
- Publication number 20170355598
- Publication date Dec 14, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING A MICRO-WELL OF A BIOSENSOR
- Publication number 20170158500
- Publication date Jun 8, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Che-Ming Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332872
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE TO REDUCE BACKSIDE SILICON DAMAGE
- Publication number 20160318757
- Publication date Nov 3, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP FOR BIOLOGICAL ANALYSES PROVIDED WITH WELLS HAVING AN IMPROVED...
- Publication number 20160244807
- Publication date Aug 25, 2016
- Distretto Tecnologico Sicilia Micro e Nano Sistemi S.c.a.r.l.
- Sabrina Conoci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20160031698
- Publication date Feb 4, 2016
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONIC DEVICE AND METHOD OF FABRICATION
- Publication number 20160016791
- Publication date Jan 21, 2016
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT
- Publication number 20150232331
- Publication date Aug 20, 2015
- ROBERT BOSCH GmbH
- Axel GROSSE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Chip and Manufacturing Method Thereof
- Publication number 20150210541
- Publication date Jul 30, 2015
- Richtek Technology Corporation
- Yu-Fu Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Control etch selectivity

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS and NEMS structures

Sealed force sensor with etch stop layer

Semiconductor transducer device with multilayer diaphragm and metho...

Process for manufacturing a micro-electro-mechanical device, and ME...

Method for manufacturing an integrated MEMS transducer device and i...

Method for processing a layer structure and microelectromechanical...

Optical electronics device

Method for manufacturing an integrated MEMS transducer device and i...

Sealed force sensor with etch stop layer

Device having a membrane and method of manufacture

Method for processing a layer structure and microelectromechanical...

Polarizer peeling apparatus and peeling method thereof

Micro-device having a metal-semiconductor compound layer protected...

Method of manufacturing semiconductor device

Method of anisotropically etching adjacent lines with multi-color s...

MEMS structure with an etch stop layer buried within inter-dielectr...

Optical electronics device

Method for processing a layer structure and microelectromechanical...

Method for producing optical components using functional elements

Spectrally and temporally engineered processing using photoelectroc...

Selective cyclic dry etching process of dielectric materials using...

Wet etch patterning of an aluminum nitride film

Touch sensing panel and manufacturing method thereof

Process for manufacturing a microelectronic device having a black s...

Vapour etch of silicon dioxide with improved selectivity

Methods for dry hard mask removal on a microelectronic substrate

Process for manufacturing a microelectromechanical interaction syst...

Process for manufacturing a microelectromechanical interaction syst...

Selectivity in a xenon difluoride etch process

Structure to reduce backside silicon damage

Patents Applicationslast 30 patents

SEALED FORCE SENSOR WITH ETCH STOP LAYER

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

Method for Manufacturing an Integrated MEMS Transducer Device and I...

SEALED FORCE SENSOR WITH ETCH STOP LAYER

Method for Manufacturing an Integrated MEMS Transducer Device and I...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

Method for Processing a Layer Structure and Microelectromechanical...

Semiconductor Transducer Device with Multilayer Diaphragm and Metho...

Device Having a Membrane and Method of Manufacture

SEALED FORCE SENSOR WITH ETCH STOP LAYER

OPTICAL ELECTRONICS DEVICE

MEMS AND NEMS STRUCTURES

Method for Processing a Layer Structure and Microelectromechanical...

Method of Manufacturing Semiconductor Device

TOUCH SENSING PANEL AND MANUFACTURING METHOD THEREOF

METHOD FOR PRODUCING OPTICAL COMPONENTS USING FUNCTIONAL ELEMENTS

MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...

OPTICAL ELECTRONICS DEVICE

PROCESS FOR MANUFACTURING A MICROELECTRONIC DEVICE HAVING A BLACK S...

SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS

STRUCTURE TO REDUCE BACKSIDE SILICON DAMAGE

METHOD FOR FABRICATING A MICRO-WELL OF A BIOSENSOR

MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE

STRUCTURE TO REDUCE BACKSIDE SILICON DAMAGE

CHIP FOR BIOLOGICAL ANALYSES PROVIDED WITH WELLS HAVING AN IMPROVED...

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

OPTICAL ELECTRONIC DEVICE AND METHOD OF FABRICATION

LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT

MEMS Chip and Manufacturing Method Thereof