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CPC
B24B37/04
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PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
Current Industry
B24B37/04
designed for working plane surfaces
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing composition and method for producing same
Patent number
11,976,220
Issue date
May 7, 2024
FUJIMI INCORPORATED
Kohsuke Tsuchiya
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Wafer manufacturing method and wafer
Patent number
11,969,856
Issue date
Apr 30, 2024
Sumco Corporation
Kantarou Torii
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
11,964,358
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Yu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grinding apparatus
Patent number
11,967,506
Issue date
Apr 23, 2024
Disco Corporation
Mato Hattori
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, elastic membrane, polishing apparatus,...
Patent number
11,958,163
Issue date
Apr 16, 2024
Ebara Corporation
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer edge asymmetry correction using groove in polishing pad
Patent number
11,951,589
Issue date
Apr 9, 2024
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Consumable part monitoring in chemical mechanical polisher
Patent number
11,931,860
Issue date
Mar 19, 2024
Applied Materials, Inc.
Thomas H. Osterheld
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Planarization methods for packaging substrates
Patent number
11,931,855
Issue date
Mar 19, 2024
Applied Materials, Inc.
Han-Wen Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Deformable substrate chuck
Patent number
11,931,857
Issue date
Mar 19, 2024
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing and method of polishing
Patent number
11,926,018
Issue date
Mar 12, 2024
Ebara Corporation
Masayoshi Ito
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head, substrate processing apparatus including the same a...
Patent number
11,919,122
Issue date
Mar 5, 2024
Samsung Display Co., Ltd.
Seung Bae Kang
B24 - GRINDING POLISHING
Information
Patent Grant
Monolithic platen
Patent number
11,919,126
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Lung Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Method of manufacturing composite article
Patent number
11,911,871
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Hua-Chou Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,911,872
Issue date
Feb 27, 2024
Ebara Corporation
Nobuyuki Takada
B24 - GRINDING POLISHING
Information
Patent Grant
Method of reducing semiconductor substrate surface unevenness
Patent number
11,901,186
Issue date
Feb 13, 2024
Massachusetts Institute of Technology
Li Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-temperature metal CMP for minimizing dishing and corrosion, and...
Patent number
11,897,079
Issue date
Feb 13, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing silicon substrate and polishing composition set
Patent number
11,897,081
Issue date
Feb 13, 2024
FUJIMI INCORPORATED
Shinichiro Takami
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing unit, substrate processing apparatus, and polishing method
Patent number
11,890,716
Issue date
Feb 6, 2024
Ebara Corporation
Akihiro Yazawa
B24 - GRINDING POLISHING
Information
Patent Grant
Removable tray assembly for CMP systems
Patent number
11,890,718
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Feng Han
B24 - GRINDING POLISHING
Information
Patent Grant
Method of polishing silicon wafer
Patent number
11,890,719
Issue date
Feb 6, 2024
Sumco Corporation
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Grant
As-sliced wafer processing method
Patent number
11,878,387
Issue date
Jan 23, 2024
Disco Corporation
Satoshi Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electropolishing method
Patent number
11,873,572
Issue date
Jan 16, 2024
3DM BIOMEDICAL PTY LTD
Dean Klower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Polishing apparatus
Patent number
11,865,665
Issue date
Jan 9, 2024
Ebara Corporation
Kenichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
CMP polishing head design for improving removal rate uniformity
Patent number
11,865,666
Issue date
Jan 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien Hou
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature-based in-situ edge assymetry correction during CMP
Patent number
11,865,671
Issue date
Jan 9, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for polishing dielectric layer in forming semiconductor device
Patent number
11,862,472
Issue date
Jan 2, 2024
Yangtze Memory Technologies Co., Ltd.
Xiaohong Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silica particle and production method therefor, silica sol, polishi...
Patent number
11,862,470
Issue date
Jan 2, 2024
Mitsubishi Chemical Corporation
Tomohiro Kyotani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-throughput, precise semiconductor slurry blending tool
Patent number
11,858,086
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Wei Chiu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Magnetic slurry for highly efficiency CMP
Patent number
11,854,827
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Ting Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Sequential application of cleaning fluids for improved maintenance...
Patent number
11,850,700
Issue date
Dec 26, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
ACOUSTIC CARRIER HEAD MONITORING
Publication number
20240139900
Publication date
May 2, 2024
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
REMOVABLE TRAY ASSEMBLY FOR CMP SYSTEMS
Publication number
20240139901
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Feng Han
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN
Publication number
20240139905
Publication date
May 2, 2024
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240139909
Publication date
May 2, 2024
EBARA CORPORATION
MATSUTARO MIYAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING DEVICE AND POLISHING METHOD
Publication number
20240131655
Publication date
Apr 25, 2024
Powerchip Semiconductor Manufacturing Corporation
Ming-Hsiang Chen
B24 - GRINDING POLISHING
Information
Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20240131652
Publication date
Apr 25, 2024
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
DOUBLE-SIDED POLISHING METHOD FOR OPTICAL LENS
Publication number
20240123567
Publication date
Apr 18, 2024
DALIAN UNIVERSITY OF TECHNOLOGY
Jiang GUO
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME
Publication number
20240124744
Publication date
Apr 18, 2024
Hooi-Sung KIM
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
MAGNET-DRIVEN CHEMICAL-MECHANICAL POLISHING
Publication number
20240123561
Publication date
Apr 18, 2024
Intel Corporation
Yosef KORNBLUTH
B24 - GRINDING POLISHING
Information
Patent Application
COMPENSATION FOR SLURRY COMPOSITION IN IN-SITU ELECTROMAGNETIC INDU...
Publication number
20240123565
Publication date
Apr 18, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION
Publication number
20240117219
Publication date
Apr 11, 2024
Fujimi Incorporated
Yasuaki ITO
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20240091899
Publication date
Mar 21, 2024
EBARA CORPORATION
Kenichi KOBAYASHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240091900
Publication date
Mar 21, 2024
Disco Corporation
Shun NAKAGAWA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
Publication number
20240087963
Publication date
Mar 14, 2024
EBARA CORPORATION
Akira FUKUNAGA
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY ARM AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING TH...
Publication number
20240075581
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
DONGHOON KWON
B24 - GRINDING POLISHING
Information
Patent Application
WAFER EDGE ASYMMETRY CORRECTION USING GROOVE IN POLISHING PAD
Publication number
20240075583
Publication date
Mar 7, 2024
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING LIQUID FOR POLISHING COMPOUND SEMICONDUCTOR SUBSTRATE
Publication number
20240076521
Publication date
Mar 7, 2024
Disco Corporation
Ayumu SAKAI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD SYSTEM AND POLISHING METHOD
Publication number
20240066658
Publication date
Feb 29, 2024
EBARA CORPORATION
Osamu NABEYA
B24 - GRINDING POLISHING
Information
Patent Application
WORKPIECE PROCESSING METHOD
Publication number
20240058922
Publication date
Feb 22, 2024
Disco Corporation
Minoru MATSUZAWA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION AND METHOD OF POLISHING SILICON WAFER
Publication number
20240052202
Publication date
Feb 15, 2024
NITTA DuPont Incorporated
Noriaki SUGITA
B24 - GRINDING POLISHING
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240050995
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240051080
Publication date
Feb 15, 2024
EBARA CORPORATION
Kohei OTA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING CARRIER PLATE, CARRIER PLATE, AND METHOD OF POL...
Publication number
20240055262
Publication date
Feb 15, 2024
SUMCO CORPORATION
Shunsuke MIKURIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPRAY SYSTEM FOR SLURRY REDUCTION DURING CHEMICAL MECHANICAL POLISH...
Publication number
20240042571
Publication date
Feb 8, 2024
Applied Materials, Inc.
Chih Chung CHOU
B24 - GRINDING POLISHING
Information
Patent Application
Ruthenium CMP Chemistry Based On Halogenation
Publication number
20240043721
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Paul Abel
B24 - GRINDING POLISHING
Information
Patent Application
MINIMIZING SUBSTRATE BOW DURING POLISHING
Publication number
20240033878
Publication date
Feb 1, 2024
Applied Materials, Inc.
Eric L. Lau
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHODS FOR SUSCEPTOR DEPOSITION MATERIAL REMOVAL
Publication number
20240033877
Publication date
Feb 1, 2024
Applied Materials, Inc.
Vijayabhaskara Venkatagiriyappa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20240025007
Publication date
Jan 25, 2024
EBARA CORPORATION
Osamu NABEYA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PADS HAVING SELECTIVELY ARRANGED POROSITY
Publication number
20240025009
Publication date
Jan 25, 2024
Applied Materials, Inc.
Aniruddh Jagdish KHANNA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING SILICON WAFER AND METHOD OF PRODUCING SILICON W...
Publication number
20240025008
Publication date
Jan 25, 2024
SUMCO CORPORATION
Masahiro MURAKAMI
B24 - GRINDING POLISHING