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Details of optical elements
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Patents Grants
last 30 patents
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Patent Grant
Projection exposure method and projection lens with setting of the...
Patent number
11,906,904
Issue date
Feb 20, 2024
Carl Zeiss SMT GmbH
Toralf Gruner
G02 - OPTICS
Information
Patent Grant
Optical element and lithography system
Patent number
11,874,525
Issue date
Jan 16, 2024
Carl Zeiss SMT GmbH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrodeposition compatible anti-reflection coatings for laser int...
Patent number
11,815,822
Issue date
Nov 14, 2023
Toyota Motor Engineering & Manufacturing North America, Inc.
Shailesh N. Joshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
Patent number
11,809,085
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Hans Michael Stiepan
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Diffractive waveguide providing structured illumination for object...
Patent number
11,747,719
Issue date
Sep 5, 2023
DigiLens. Inc.
Milan Momcilo Popovich
G01 - MEASURING TESTING
Information
Patent Grant
Frequency broadening apparatus and method
Patent number
11,733,617
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Patrick Sebastian Uebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Graded interface in Bragg reflector
Patent number
11,720,013
Issue date
Aug 8, 2023
Applied Materials, Inc.
Wen Xiao
G02 - OPTICS
Information
Patent Grant
Gamma ray generator and method of generating gamma ray
Patent number
11,669,014
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
You-Hua Chou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hyperspectral camera based on continuously variable film filter and...
Patent number
11,622,084
Issue date
Apr 4, 2023
Jiangsu Dualix Spectral Imaging Technology Co., Ltd
Xinghai Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method of reducing roughness and/or defects on an optical surface a...
Patent number
11,605,478
Issue date
Mar 14, 2023
Zygo Corporation
John Matthew Kincade
G02 - OPTICS
Information
Patent Grant
Gamma ray generator and gamma ray lithography system
Patent number
11,460,779
Issue date
Oct 4, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
You-Hua Chou
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Lithography system and methods
Patent number
11,448,970
Issue date
Sep 20, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Eng Hock Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for producing a reflecting optical element of a projection e...
Patent number
11,415,892
Issue date
Aug 16, 2022
Carl Zeiss SMT GmbH
Matthias Kaes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light concentrating mirror and electronic devic...
Patent number
11,410,785
Issue date
Aug 9, 2022
Gigaphoton Inc.
Yoshiyuki Honda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Optical arrangement for EUV lithography
Patent number
11,372,335
Issue date
Jun 28, 2022
Carl Zeiss SMT GmbH
Anastasia Gonchar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support of an optical element
Patent number
11,366,393
Issue date
Jun 21, 2022
Carl Zeiss SMT GmbH
Eugen Anselm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure s...
Patent number
11,366,395
Issue date
Jun 21, 2022
Carl Zeiss SMT GmbH
Kerstin Hild
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure s...
Patent number
11,360,393
Issue date
Jun 14, 2022
Carl Zeiss SMT GmbH
Ben Wylie-Van Eerd
G02 - OPTICS
Information
Patent Grant
Optical device, and method for preventing contamination of optical...
Patent number
11,353,802
Issue date
Jun 7, 2022
Lasertec Corporation
Haruhiko Kusunose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Graded interface in bragg reflector
Patent number
11,327,394
Issue date
May 10, 2022
Applied Materials Inc.
Wen Xiao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source and device for feeding back emitted radiation to a...
Patent number
11,303,092
Issue date
Apr 12, 2022
Carl Zeiss SMT GmbH
Udo Dinger
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Illumination system with curved 1d-patterned mask for use in EUV-ex...
Patent number
11,300,884
Issue date
Apr 12, 2022
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
Systems and methods using mask pattern measurements performed with...
Patent number
11,281,093
Issue date
Mar 22, 2022
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Frequency broadening apparatus and method
Patent number
11,262,665
Issue date
Mar 1, 2022
ASML Netherlands B.V.
Patrick Sebastian Uebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image sensor, position sensor device, lithography system, and metho...
Patent number
11,262,660
Issue date
Mar 1, 2022
Carl Zeiss SMT GmbH
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Diffractive waveguide providing a retinal image
Patent number
11,204,540
Issue date
Dec 21, 2021
DigiLens. Inc.
Milan Momcilo Popovich
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mirror for a microlithographic projection exposure apparatus, and m...
Patent number
11,187,990
Issue date
Nov 30, 2021
Carl Zeiss SMT GmbH
Johannes Lippert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Projection exposure method and projection lens with setting of the...
Patent number
11,143,967
Issue date
Oct 12, 2021
Carl Zeiss SMT GmbH
Toralf Gruner
G02 - OPTICS
Information
Patent Grant
Beam splitting prism systems
Patent number
11,126,007
Issue date
Sep 21, 2021
ASML Holding N.V.
Douglas C. Cappelli
G01 - MEASURING TESTING
Information
Patent Grant
Extreme ultraviolet light condensation mirror, extreme ultraviolet...
Patent number
11,119,421
Issue date
Sep 14, 2021
Gigaphoton Inc.
Tomoyoshi Toida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
BYPASS APPARATUS, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTUR...
Publication number
20240128702
Publication date
Apr 18, 2024
Gigaphoton Inc.
Shinichi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
Publication number
20240027730
Publication date
Jan 25, 2024
Carl Zeiss SMT GMBH
Christoph Zaczek
G02 - OPTICS
Information
Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
Publication number
20240019613
Publication date
Jan 18, 2024
Carl Zeiss SMT GMBH
Christoph Zaczek
G02 - OPTICS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20240012334
Publication date
Jan 11, 2024
Carl Zeiss SMT GMBH
Markus Raab
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIGHT SOURCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACT...
Publication number
20240004306
Publication date
Jan 4, 2024
Canon Kabushiki Kaisha
MAHIRO SAITO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL COMPONENT AND OPTICAL SYSTEM, IN PARTICULAR FOR MICROLITHOG...
Publication number
20230384687
Publication date
Nov 30, 2023
Carl Zeiss SMT GMBH
Jeffrey Erxmeyer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY
Publication number
20230350307
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Stefan Xalter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230324648
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Andre Dirauf
G02 - OPTICS
Information
Patent Application
ELECTRODEPOSITION COMPATIBLE ANTI-REFLECTION COATINGS FOR LASER INT...
Publication number
20230314965
Publication date
Oct 5, 2023
Toyota Motor Engineering & Manufacturing North America, Inc.
Shailesh N. Joshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
Publication number
20230257866
Publication date
Aug 17, 2023
Carl Zeiss SMT GMBH
Anastasia GONCHAR
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
OPTICAL ELEMENT FOR THE VUV WAVELENGTH RANGE, OPTICAL ARRANGEMENT,...
Publication number
20230147463
Publication date
May 11, 2023
Carl Zeiss SMT GMBH
Felix LANGE
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR...
Publication number
20230138850
Publication date
May 4, 2023
Carl Zeiss SMT GMBH
Johannes Kimling
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HOLDING BOARD, MANUFACTURING METHOD OF DEVICE, AND EXPOSU...
Publication number
20230125632
Publication date
Apr 27, 2023
Canon Kabushiki Kaisha
Shinji Fukui
B32 - LAYERED PRODUCTS
Information
Patent Application
MIRROR, IN PARTICULAR FOR MICROLITHOGRAPHY
Publication number
20230088791
Publication date
Mar 23, 2023
Carl Zeiss SMT GMBH
Jan HORN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
OPTICAL ELEMENT, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR FORMING NAN...
Publication number
20230076667
Publication date
Mar 9, 2023
Carl Zeiss SMT GMBH
Anastasia GONCHAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHODS
Publication number
20220382167
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Eng Hock LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY APPARATUS, PATTERNING SYSTEM, AND METHOD OF PATTERNING...
Publication number
20220373897
Publication date
Nov 24, 2022
Applied Materials, Inc.
Christopher Dennis BENCHER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAMMA RAY GENERATOR AND METHOD OF GENERATING GAMMA RAY
Publication number
20220357663
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
You-Hua Chou
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20220350120
Publication date
Nov 3, 2022
Gigaphoton Inc.
Hirotaka MIYAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING ANTI-REFLECTIVE LAYER ON QUARTZ SURFACE BY U...
Publication number
20220317338
Publication date
Oct 6, 2022
Institute of Microelectronics, Chinese Academy of Sciences
Lina SHI
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT AND LITHOGRAPHY SYSTEM
Publication number
20220299731
Publication date
Sep 22, 2022
Carl Zeiss SMT GMBH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEMS AND METHODS FOR COMBINATORIAL ARRAYS USING DYNAMIC INTERFER...
Publication number
20220283510
Publication date
Sep 8, 2022
Rutgers, The State University of New Jersey
Ki-Bum Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS
Publication number
20220260756
Publication date
Aug 18, 2022
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION EXPOSURE TOOL
Publication number
20220236646
Publication date
Jul 28, 2022
Taiwan Semiconductor Manufacturing Company Limited
Yung-Yao LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EUV COLLECTOR MIRROR
Publication number
20220236461
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Marcus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM
Publication number
20220236652
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Rolf Freimann
G02 - OPTICS
Information
Patent Application
Graded Interface In Bragg Reflector
Publication number
20220221786
Publication date
Jul 14, 2022
Applied Materials, Inc.
Wen Xiao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Diffractive Waveguide Providing Structured Illumination for Object...
Publication number
20220187692
Publication date
Jun 16, 2022
DIGILENS INC.
Milan Momcilo Popovich
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FREQUENCY BROADENING APPARATUS AND METHOD
Publication number
20220128912
Publication date
Apr 28, 2022
ASML NETHERLANDS B.V.
Patrick Sebastian UEBEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE A...
Publication number
20220113634
Publication date
Apr 14, 2022
Carl Zeiss SMT GMBH
Hans Michael STIEPAN
C03 - GLASS MINERAL OR SLAG WOOL