Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094

Industry

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B81B3/0097

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0097Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,926,524
- Issue date Mar 12, 2024
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deployable KiriForm flexures
- Patent number 11,697,585
- Issue date Jul 11, 2023
- President and Fellows of Harvard College
- Saurabh Avinash Mhatre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating silicon MEMS gyroscopes with upper and lowe...
- Patent number 11,530,917
- Issue date Dec 20, 2022
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,329,624
- Issue date May 10, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 11,261,082
- Issue date Mar 1, 2022
- Robert Bosch GmbH
- Eckhard Graf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,066,296
- Issue date Jul 20, 2021
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 11,046,577
- Issue date Jun 29, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device having a metal-semiconductor compound layer protected...
- Patent number 11,027,969
- Issue date Jun 8, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephanus Louwers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electronics for wearable healthcare sensors
- Patent number 11,015,913
- Issue date May 25, 2021
- International Business Machines Corporation
- Huan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device formed by at least two bonded structural layers and man...
- Patent number 10,954,121
- Issue date Mar 23, 2021
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of fabricating such a device
- Patent number 10,947,107
- Issue date Mar 16, 2021
- The University of Manchester
- Aravind Vijayaraghavan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for micromechanical displacement-based logic ci...
- Patent number 10,855,259
- Issue date Dec 1, 2020
- Lawrence Livermore National Security, LLC
- Robert Matthew Panas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Suspended microelectromechanical system (MEMS) devices
- Patent number 10,843,920
- Issue date Nov 24, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with dual pendulous proof masses
- Patent number 10,759,656
- Issue date Sep 1, 2020
- Apple Inc.
- Christopher C. Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Release hole plus contact via for fine pitch ultrasound transducer...
- Patent number 10,722,918
- Issue date Jul 28, 2020
- QUALCOMM Incorporated
- Donald William Kidwell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 10,611,630
- Issue date Apr 7, 2020
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device formed by at least two bonded structural layers and man...
- Patent number 10,570,009
- Issue date Feb 25, 2020
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch and electronic device
- Patent number 10,508,025
- Issue date Dec 17, 2019
- TDK Corporation
- Jotaro Akiyama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for obtaining multilayer graphene
- Patent number 10,490,315
- Issue date Nov 26, 2019
- GRAPHENEA S.A.
- Amaia Zurutuza Elorza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electronics for wearable healthcare sensors
- Patent number 10,359,269
- Issue date Jul 23, 2019
- International Business Machines Corporation
- Huan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electronics for wearable healthcare sensors
- Patent number 10,280,077
- Issue date May 7, 2019
- International Business Machines Corporation
- Paul S. Andry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device formed by at least two bonded structural layers and man...
- Patent number 10,227,233
- Issue date Mar 12, 2019
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Merged legs and semi-flexible anchoring having cantilevers for MEMS...
- Patent number 10,224,164
- Issue date Mar 5, 2019
- Cavendish Kinetics, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor and method for producing the pressure sensor
- Patent number 10,180,370
- Issue date Jan 15, 2019
- Robert Bosch GmbH
- Walter Daves
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical stress-decoupling in semiconductor device
- Patent number 9,991,340
- Issue date Jun 5, 2018
- Infineon Technologies AG
- Steffen Bieselt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic fabrication of three-dimensional structures
- Patent number 9,833,978
- Issue date Dec 5, 2017
- President and Fellows of Harvard College
- Pratheev Sabaratnam Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electronics for wearable healthcare sensors
- Patent number 9,822,002
- Issue date Nov 21, 2017
- International Business Machines Corporation
- Paul S. Andry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electric equipment having movable portion, and its manufacture
- Patent number 9,767,966
- Issue date Sep 19, 2017
- Fujitsu Limited
- Hiroaki Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for precision transport, positioning, and assembl...
- Patent number 9,718,683
- Issue date Aug 1, 2017
- The Johns Hopkins University
- Chia-Ling Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CANTILEVER STRUCTURE WITH INTERMEDIATE SUBSTRATE CONNECTION
- Publication number 20240199410
- Publication date Jun 20, 2024
- xMEMS Labs, Inc.
- Jye Ren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
- Publication number 20230076161
- Publication date Mar 9, 2023
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-FOLDING 3D FILM ASSEMBLIES
- Publication number 20220063991
- Publication date Mar 3, 2022
- 3M Innovative Properties Company
- Jia Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARTIFICIAL RETINAL NERVE FLEXIBLE MICROELECTRODE DEVICE AND FABRICA...
- Publication number 20210290947
- Publication date Sep 23, 2021
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Chengzhi LUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES
- Publication number 20200283291
- Publication date Sep 10, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Deployable KiriForm Flexures
- Publication number 20200231430
- Publication date Jul 23, 2020
- President and Fellows of Harvard College
- Saurabh Avinash Mhatre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...
- Publication number 20200198963
- Publication date Jun 25, 2020
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...
- Publication number 20200198966
- Publication date Jun 25, 2020
- ROBERT BOSCH GmbH
- Eckhard Graf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...
- Publication number 20200123004
- Publication date Apr 23, 2020
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
- Publication number 20200096336
- Publication date Mar 26, 2020
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
- Publication number 20190242690
- Publication date Aug 8, 2019
- International Business Machines Corporation
- HUAN HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...
- Publication number 20190185318
- Publication date Jun 20, 2019
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20190109578
- Publication date Apr 11, 2019
- Murata Manufacturing Co., Ltd.
- Yuichi GOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH DUAL PENDULOUS PROOF MASSES
- Publication number 20190100426
- Publication date Apr 4, 2019
- Apple Inc.
- Christopher C. Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...
- Publication number 20190092632
- Publication date Mar 28, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Stephanus LOUWERS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH AND ELECTRONIC DEVICE
- Publication number 20190077655
- Publication date Mar 14, 2019
- TDK Corporation
- Jotaro AKIYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VARIABLE FOCUS MIRROR AND OPTICAL SCANNING DEVICE
- Publication number 20190064509
- Publication date Feb 28, 2019
- Denso Corporation
- Koichi OYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
- Publication number 20180257926
- Publication date Sep 13, 2018
- International Business Machines Corporation
- Paul S. ANDRY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLOW PASSAGE MODULE AND CELL CULTURE APPARATUS USING SAME
- Publication number 20180258377
- Publication date Sep 13, 2018
- Hitachi High-Technologies Corporation
- Akihiro SHIMASE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXIBLE DISPLAY DEVICE
- Publication number 20180153054
- Publication date May 31, 2018
- SAMSUNG DISPLAY CO., LTD.
- Jinkyu Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...
- Publication number 20180086630
- Publication date Mar 29, 2018
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...
- Publication number 20170369309
- Publication date Dec 28, 2017
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20170297902
- Publication date Oct 19, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- HUNG-HUA LIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL STRESS-DECOUPLING IN SEMICONDUCTOR DEVICE
- Publication number 20170229537
- Publication date Aug 10, 2017
- INFINEON TECHNOLOGIES AG
- Steffen Bieselt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RELEASE HOLE PLUS CONTACT VIA FOR FINE PITCH ULTRASOUND TRANSDUCER...
- Publication number 20170066014
- Publication date Mar 9, 2017
- QUALCOMM Incorporated
- Donald William Kidwell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same
- Publication number 20160355398
- Publication date Dec 8, 2016
- UNITED MICROELECTRONICS CORPORATION
- YAN-DA CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBL...
- Publication number 20150353354
- Publication date Dec 10, 2015
- The Johns Hopkins University
- Chia-Ling Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT
- Publication number 20150097632
- Publication date Apr 9, 2015
- SEIKO EPSON CORPORATION
- Akinori YAMADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Monolithic Fabrication of Three-Dimensional Structures
- Publication number 20150044418
- Publication date Feb 12, 2015
- President and Fellows of Harvard College
- Pratheev Sabaratnam Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Publication number 20140367806
- Publication date Dec 18, 2014
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Silicon MEMS gyroscopes with upper and lower sense plates

Methods, apparatus, and systems for fabricating solution-based cond...

Deployable KiriForm flexures

Methods for fabricating silicon MEMS gyroscopes with upper and lowe...

Resonator and resonance device

Micromechanical device and method for manufacturing a micromechanic...

Methods, apparatus, and systems for fabricating solution-based cond...

Method for processing a monocrystalline substrate and micromechanic...

Micro-device having a metal-semiconductor compound layer protected...

Flexible electronics for wearable healthcare sensors

MEMS device formed by at least two bonded structural layers and man...

Device and method of fabricating such a device

Systems and methods for micromechanical displacement-based logic ci...

Suspended microelectromechanical system (MEMS) devices

MEMS sensor with dual pendulous proof masses

Release hole plus contact via for fine pitch ultrasound transducer...

Method for processing a monocrystalline substrate and micromechanic...

MEMS device formed by at least two bonded structural layers and man...

MEMS switch and electronic device

Method for obtaining multilayer graphene

Flexible electronics for wearable healthcare sensors

Flexible electronics for wearable healthcare sensors

MEMS device formed by at least two bonded structural layers and man...

Merged legs and semi-flexible anchoring having cantilevers for MEMS...

Pressure sensor and method for producing the pressure sensor

Mechanical stress-decoupling in semiconductor device

Monolithic fabrication of three-dimensional structures

Flexible electronics for wearable healthcare sensors

Electric equipment having movable portion, and its manufacture

System and method for precision transport, positioning, and assembl...

Patents Applicationslast 30 patents

CANTILEVER STRUCTURE WITH INTERMEDIATE SUBSTRATE CONNECTION

METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...

SELF-FOLDING 3D FILM ASSEMBLIES

ARTIFICIAL RETINAL NERVE FLEXIBLE MICROELECTRODE DEVICE AND FABRICA...

SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES

Deployable KiriForm Flexures

METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...

MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...

MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...

METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...

FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS

MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...

RESONATOR AND RESONANCE DEVICE

MEMS SENSOR WITH DUAL PENDULOUS PROOF MASSES

MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...

MEMS SWITCH AND ELECTRONIC DEVICE

VARIABLE FOCUS MIRROR AND OPTICAL SCANNING DEVICE

FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS

FLOW PASSAGE MODULE AND CELL CULTURE APPARATUS USING SAME

FLEXIBLE DISPLAY DEVICE

METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...

MEMS DEVICE FORMED BY AT LEAST TWO BONDED STRUCTURAL LAYERS AND MAN...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

MECHANICAL STRESS-DECOUPLING IN SEMICONDUCTOR DEVICE

RELEASE HOLE PLUS CONTACT VIA FOR FINE PITCH ULTRASOUND TRANSDUCER...

Semiconductor Device and Method for Manufacturing the Same

SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBL...

VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT

Monolithic Fabrication of Three-Dimensional Structures

FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOVING OBJECT