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B81C1/00158
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00158
Diaphragms, membranes
Industries
Overview
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS resonator
Patent number
11,975,965
Issue date
May 7, 2024
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having uniform contacts
Patent number
11,964,866
Issue date
Apr 23, 2024
Qorvo US, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device
Patent number
11,952,264
Issue date
Apr 9, 2024
Merry Electronics (Shenzhen) Co., Ltd.
Jia Yin Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a device comprising a membrane extending o...
Patent number
11,939,214
Issue date
Mar 26, 2024
Soitec
Bruno Ghyselen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sound producing cell and manufacturing method thereof
Patent number
11,943,595
Issue date
Mar 26, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component for a pressure sensor device
Patent number
11,932,532
Issue date
Mar 19, 2024
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Signal processing circuit for triple-membrane MEMS device
Patent number
11,932,533
Issue date
Mar 19, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for manufacturing a micromecha...
Patent number
11,912,563
Issue date
Feb 27, 2024
Robert Bosch GmbH
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for a micromechanical component
Patent number
11,905,166
Issue date
Feb 20, 2024
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual membrane transducer
Patent number
11,905,167
Issue date
Feb 20, 2024
Infineon Technologies AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic transducer, manufacturing method thereof, and ultrasonic...
Patent number
11,904,356
Issue date
Feb 20, 2024
Hitachi, Ltd.
Taiichi Takezaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method of manufacturing semiconductor device
Patent number
11,897,761
Issue date
Feb 13, 2024
Amkor Technology Singapore Holding Pte Ltd.
Ki Yeul Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,833,542
Issue date
Dec 5, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
11,807,521
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,806,747
Issue date
Nov 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical detection structure of a MEMS multi-axis gyroscope,...
Patent number
11,808,574
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming MEMS diaphragms including corrugations
Patent number
11,787,688
Issue date
Oct 17, 2023
Knowles Electronics, LLC
Sung Bok Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical capacitive pressure sensor having a valve po...
Patent number
11,767,218
Issue date
Sep 26, 2023
Teknologian tutkimuskeskus VTT Oy
Tapio Pernu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,759,823
Issue date
Sep 19, 2023
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with enhanced membrane structure and method of forming...
Patent number
11,750,980
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stable landing above RF conductor in MEMS device
Patent number
11,746,002
Issue date
Sep 5, 2023
Qorvo US, Inc.
Robertus Petrus Van Kampen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
Patent number
11,746,001
Issue date
Sep 5, 2023
TDK ELECTRONICS AG
Pirmin Hermann Otto Rombach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS resonator
Patent number
11,724,934
Issue date
Aug 15, 2023
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated micro-electromechanical device of semiconductor material...
Patent number
11,724,932
Issue date
Aug 15, 2023
STMicroelectronics S.r.l.
Alberto Pagani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a membrane component and a membrane component
Patent number
11,708,265
Issue date
Jul 25, 2023
X-FAB Global Services GmbH
Steffen Leopold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fused quartz dual shell resonator and method of fabrication
Patent number
11,703,330
Issue date
Jul 18, 2023
The Regents of the University of California
Andrei M. Shkel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Robust MEMS microphone
Patent number
11,696,078
Issue date
Jul 4, 2023
QUALCOMM Incorporated
Craig Core
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,684,949
Issue date
Jun 27, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure and method of forming a support structure
Patent number
11,679,461
Issue date
Jun 20, 2023
Infineon Technologies AG
Alfons Dehe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
Publication number
20240109770
Publication date
Apr 4, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SOUND PRODUCING CELL
Publication number
20240031740
Publication date
Jan 25, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
Publication number
20240022859
Publication date
Jan 18, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
Publication number
20240017988
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LASER SEALING AND SURFACE ASPERITY CONTROLLING METHOD WITH DISCONTI...
Publication number
20240017353
Publication date
Jan 18, 2024
ROBERT BOSCH GmbH
Bo CHENG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MEMS RESONATOR
Publication number
20230416081
Publication date
Dec 28, 2023
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
Publication number
20230406692
Publication date
Dec 21, 2023
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMBRANE TRANSFER METHOD
Publication number
20230406696
Publication date
Dec 21, 2023
SOITEC
François-Xavier Darras
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
Publication number
20230382715
Publication date
Nov 30, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230382714
Publication date
Nov 30, 2023
DB HITEK CO., LTD.
Min Hyun JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
Publication number
20230373781
Publication date
Nov 23, 2023
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Jan Rockstroh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
Publication number
20230365396
Publication date
Nov 16, 2023
TDK Corporation
Toyotaka KOBAYASHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
Publication number
20230370783
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHUN-WEN CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
Publication number
20230356998
Publication date
Nov 9, 2023
TDK Corporation
Pirmin Hermann Otto Rombach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
Publication number
20230357001
Publication date
Nov 9, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
Publication number
20230348258
Publication date
Nov 2, 2023
STMicroelectronics S.r.l.
Mikel AZPEITIA URQUIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE
Publication number
20230303387
Publication date
Sep 28, 2023
Skyworks Solutions, Inc.
Siarhei Dmitrievich Barsukou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
Publication number
20230249959
Publication date
Aug 10, 2023
Qorvo US, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE WITH AN ANCHOR
Publication number
20230234837
Publication date
Jul 27, 2023
SKYWORKS GLOBAL PTE. LTD.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
Publication number
20230232159
Publication date
Jul 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...
Publication number
20230224657
Publication date
Jul 13, 2023
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...
Publication number
20230219804
Publication date
Jul 13, 2023
KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
Xuecui ZOU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE
Publication number
20230192476
Publication date
Jun 22, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHEN HSIUNG YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONATOR
Publication number
20230183060
Publication date
Jun 15, 2023
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF LIQUID-MEDIATED PATTERN TRANSFER AND DEVICE STRUCTURE FOR...
Publication number
20230166965
Publication date
Jun 1, 2023
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Seok KIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20230149977
Publication date
May 18, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE FOR TRANSDUCING HIGH-FREQUENCY ACOU...
Publication number
20230129720
Publication date
Apr 27, 2023
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY